1	22	38	5810	asai	dummy	0	2010/11/25/13:45:5(130.34.95.44)	tempax@RT port3
2	18	22	5810	asai	dummy	0	2010/11/25/13:45:38(130.34.95.44)	tempax@RT port3
2	32	38	4771	cao	dummy	0	2010/11/30/19:12:51(130.34.95.21)	SiO2>Pt
-3	22	34	4771	cao	dummy	0	2010/11/30/19:13:26(130.34.95.21)	Pt/Ti	2010/12/2/22:17:47(130.34.95.21)
-4	28	38	5810	chin	dummy	0	2010/12/1/13:48:1(130.34.95.49)	Ti/Pt/Tempax@RT.宮下先生承認	2010/12/1/13:49:18(130.34.95.49)
4	28	38	5810	chin,he	dummy	0	2010/12/1/13:50:53(130.34.95.49)	Ti/Pt/Tempax@RT.宮下先生承認
-6	18	24	6898	zanma	dummy	0	2010/12/1/18:24:18(130.34.95.28)	target change[ 5 SiO2 -> Ag	2010/12/1/18:25:36(130.34.95.28)
-6	18	24	6898	zanma	dummy	0	2010/12/1/18:25:53(130.34.95.28)	target change [ 5:Pt -> Ag ]	2010/12/3/16:40:28(130.34.95.28)
2	27	31	5810	asai	dummy	0	2010/12/2/9:47:23(130.34.95.44)	Tempax@RT port3
2	31	32	6898	fujita	dummy	0	2010/12/2/12:51:4(130.34.95.28)	5:SiO2@RT
-7	26	30	6898	hino	dummy	0	2010/12/2/17:23:38(130.34.95.28)	Ag@RT port5	2010/12/6/22:6:34(130.34.95.28)
3	26	38	4771	cao	dummy	0	2010/12/2/22:18:33(130.34.95.21)	Pt/Ti
-4	22	26	4771	cao	dummy	0	2010/12/3/14:28:18(130.34.95.21)	Pt/Ti, R.T.	2010/12/3/22:55:40(130.34.95.21)
3	38	44	4771	zhang	dummy	0	2010/12/3/14:28:36(130.34.95.21)	Pt/Ti
-6	19	42	6898	ishikawa	dummy	1	2010/12/3/16:45:23(130.34.95.28)	maintenance : port 1~3, RF power supply and mutching BOX	2010/12/3/16:45:37(130.34.95.28)
6	19	42	6898	ishikawa	dummy	1	2010/12/3/16:46:47(130.34.95.28)	maintenance : port 1~3, RF power supply and matching BOX
4	21	28	4771	cao	dummy	0	2010/12/3/22:56:16(130.34.95.21)	Pt/Ti, R.T.
-5	20	36	5810	HE, Chin	dummy	0	2010/12/4/11:47:58(130.34.95.49)	0	2010/12/4/11:48:52(130.34.95.49)
-5	20	36	5810	HE, Chin	dummy	0	2010/12/4/11:49:17(130.34.95.49)	Pt/Ti/Tempax	2010/12/4/11:57:38(130.34.95.49)
5	22	36	5810	chin,he	dummy	0	2010/12/4/11:58:38(130.34.95.49)	Ti/Pt/Tempax,RT
-6	42	44	6898	zanma	dummy	0	2010/12/6/16:44:24(130.34.95.28)	targetchange[5:Pt->Ag]	2010/12/6/17:15:18(130.34.95.28)
-6	42	44	6898	zanma	dummy	0	2010/12/6/17:15:35(130.34.95.28)	Target Change[]	2010/12/6/17:15:38(130.34.95.28)
6	42	44	6898	zanma	dummy	0	2010/12/6/17:16:35(130.34.95.28)	targetchange[3:Tempax>Ag, 5:Pt>SiO2]
-7	34	38	6898	fujita	dummy	0	2010/12/6/22:5:53(130.34.95.28)	SiO2 @ RT	2010/12/7/12:32:13(130.34.95.28)
7	25	30	6898	hino	dummy	0	2010/12/6/22:6:59(130.34.95.28)	Ag @ RT
-9	22	38	5810	H.Miyashita	dummy	0	2010/12/7/0:42:10(130.34.95.49)	Ag	2010/12/7/0:44:2(130.34.95.49)
-8	30	36	5810	H.Miyashita	dummy	0	2010/12/7/0:45:9(130.34.95.49)	Ag	2010/12/7/0:45:45(130.34.95.49)
9	30	38	5810	H.Miyashita	dummy	0	2010/12/7/0:46:12(130.34.95.49)	Ag@RT
-8	22	30	4771	cao	dummy	0	2010/12/7/10:39:35(130.34.95.21)	SiO2, R.T.	2010/12/7/16:31:0(130.34.95.21)
8	32	42	4771	cao	dummy	0	2010/12/7/16:46:27(130.34.95.21)	SiO2, R.T.
9	38	44	6925	maegami	dummy	0	2010/12/8/12:51:2(130.34.95.35)	Target Change: 3 Ag -> Pt
10	18	28	6925	maegami	dummy	0	2010/12/8/12:52:59(130.34.95.35)	Ti/Pt@R.T.
10	30	34	6898	fujita	dummy	0	2010/12/8/16:54:56(130.34.95.28)	SiO2 @ RT
-11	22	34	4771	cao	dummy	0	2010/12/8/20:54:17(130.34.95.44)	SiO2/Ti/Pt	2010/12/8/20:57:21(130.34.95.44)
11	22	38	4771	cao	dummy	0	2010/12/8/20:57:48(130.34.95.44)	SiO2/Ti/Pt
-15	22	36	4771	張	dummy	0	2010/12/9/11:57:30(130.34.95.21)	0	2010/12/9/11:58:16(130.34.95.21)
13	22	27	6898	hino	dummy	0	2010/12/13/9:58:38(130.34.95.28)	TiN@70deg
13	28	32	6898	hino	dummy	0	2010/12/13/13:32:59(130.34.95.28)	TiN@RT
13	34	38	6898	hino	dummy	0	2010/12/13/15:48:2(130.34.95.28)	TiN@70deg
-16	28	38	5810	asai	dummy	0	2010/12/15/13:23:17(130.34.95.49)	Ti/Pt/Tempax @ RT	2010/12/15/16:13:43(130.34.95.49)
-15	30	37	5810	asai	dummy	0	2010/12/15/13:25:9(130.34.95.49)	Pt→Tempax @ port3、　SiO2→Pt @ port5	2010/12/15/16:12:33(130.34.95.49)
15	30	35	5810	asai	dummy	0	2010/12/15/13:25:9(130.34.95.49)	Pt→Tempax @ port3、　SiO2→Pt @ port5
15	35	36	5810	asai	dummy	0	2010/12/15/16:13:21(130.34.95.49)	ターゲット交換中止
-20	30	36	5810	asai	dummy	0	2010/12/17/9:6:29(130.34.95.49)	Pt→Tempax @port3,  SiO2→Pt @port5	2010/12/20/12:48:1(130.34.95.49)
21	16	24	5810	asai	dummy	0	2010/12/17/9:7:9(130.34.95.49)	Ti/Pt/Tempax
-20	17	22	6925	k.kubota	dummy	0	2010/12/18/11:42:3(130.34.95.35)	SiO2@RT	2010/12/18/16:48:36(130.34.95.35)
20	17	24	6925	kubota	dummy	0	2010/12/18/16:49:17(130.34.95.35)	SiO2,Pt@RT
-20	34	40	5810	asai	dummy	0	2010/12/20/12:48:23(130.34.95.49)	Pt→Tempax @port3, SiO2→Pt @port5	2010/12/20/18:10:52(130.34.95.49)
-21	34	40	6898	hino	dummy	0	2010/12/20/14:42:32(130.34.95.28)	TargetChange@port3 Tempax -> Ag	2010/12/21/12:54:30(130.34.95.28)
-22	22	26	6898	hino	dummy	0	2010/12/20/14:44:49(130.34.95.28)	port3:Ag@RT	2010/12/21/12:54:33(130.34.95.28)
20	34	39	5810	asai	dummy	0	2010/12/20/12:48:23(130.34.95.49)	Pt→Tempax @port3, SiO2→Pt @port5
20	39	40	5810	asai	dummy	0	2010/12/20/19:3:16(130.34.95.43)	ターゲット交換中止
21	24	28	5810	asai	dummy	0	2010/12/21/9:36:37(130.34.95.49)	Ti/Pt
21	43	46	5810	asai	dummy	0	2010/12/21/21:43:1(130.34.95.44)	Pt→Tempax　@port3
22	38	42	5810	asai	dummy	0	2010/12/21/21:44:10(130.34.95.44)	Tempax @RT port3