-2 26 32 6953 後藤 goto dummy 0 2010/10/28/18:37:44(130.34.95.39) Au@RT with T. Sugeno 2010/10/28/18:40:54(130.34.95.39) 2 26 32 6953 goto dummy 0 2010/10/28/18:41:38(130.34.95.39) Au@RT with T. Sugeno 1 34 48 6898 ishikawa dummy 0 2010/11/1/13:58:59(130.34.95.28) Target change 3:Tempax -> Au -5 24 26 6898 fujita dummy 0 2010/11/5/11:19:40(130.34.95.28) SiO2 @RT 2010/11/5/11:19:58(130.34.95.28) 5 24 25 6898 fujita dummy 0 2010/11/5/11:19:40(130.34.95.28) SiO2 @RT 9 30 34 6898 zanma dummy 0 2010/11/9/14:10:10(130.34.95.28) TiN@70deg -11 28 44 5810 asai dummy 0 2010/11/11/9:53:48(130.34.95.49) Au→Tempax@3 2010/11/11/16:29:41(130.34.95.43) -12 21 27 5810 asai dummy 0 2010/11/11/9:56:47(130.34.95.49) tempax@3 2010/11/11/16:29:47(130.34.95.43) 11 28 35 5810 asai dummy 0 2010/11/11/9:53:48(130.34.95.49) Au→Tempax@3 11 35 36 5810 asai dummy 0 2010/11/11/16:31:4(130.34.95.43) Au→tempaxを中止 12 30 36 6898 fujita dummy 0 2010/11/12/13:56:12(130.34.95.28) Target change 3:Au -> Ag -15 20 32 6898 fujita dummy 0 2010/11/12/14:58:31(130.34.95.28) Ag/Ti@RT 2010/11/15/14:14:59(130.34.95.28) 12 36 48 6898 fujita dummy 0 2010/11/12/17:46:23(130.34.95.28) Target change 3:Au -> Ag 15 20 31 6898 fujita dummy 0 2010/11/12/14:58:31(130.34.95.28) Ag/Ti@RT 16 36 44 5810 M. Toda dummy 0 2010/11/15/20:30:8(130.34.95.49) 1:Ti -> Cr, 3: Ag -> Au 17 18 26 5810 M. Toda dummy 0 2010/11/15/20:31:27(130.34.95.49) Cr-Ar, R.T. -17 38 48 6898 zanma dummy 0 2010/11/16/9:9:37(130.34.95.28) Target change : 1: Cr -> Ti , 3: Au -> Al 2010/11/16/20:4:58(130.34.95.28) -18 16 20 6898 zanma dummy 0 2010/11/16/9:11:59(130.34.95.28) 3.Al@RT 2010/11/16/20:5:1(130.34.95.28) -18 20 34 5810 asai dummy 0 2010/11/16/12:9:33(130.34.95.49) tempax@RT Port.3 2010/11/16/12:10:39(130.34.95.49) -18 20 34 5810 asai dummy 0 2010/11/16/12:12:13(130.34.95.49) TargetChange：3 Al→Tempax @RT 2010/11/16/16:44:11(130.34.95.49) -18 20 36 5810 asai dummy 0 2010/11/16/16:44:38(130.34.95.49) TargetChange：3 Al→Tempax @RT 2010/11/16/20:13:1(130.34.95.49) 17 28 46 5810 asai dummy 0 2010/11/16/20:14:21(130.34.95.49) TargetChange：3 Al→Tempax @RT -18 18 24 5810 asai dummy 0 2010/11/17/11:58:49(130.34.95.49) tempax@RT port3 2010/11/17/23:49:26(130.34.95.49) 18 26 32 5810 asai dummy 0 2010/11/17/23:50:2(130.34.95.49) Tempax@RT port3 -24 28 32 5810 chin dummy 0 2010/11/22/13:53:26(130.34.95.49) TargetChange:1 Cr→Ti 2010/11/22/14:3:33(130.34.95.49) -25 28 38 5810 chin dummy 0 2010/11/22/14:2:58(130.34.95.49) Ti@RT port1 2010/11/24/17:46:45(130.34.95.49) 24 28 44 5810 chin dummy 0 2010/11/22/14:4:27(130.34.95.49) TargetChange:1 Cr→Ti -25 18 24 5810 asai dummy 0 2010/11/22/16:0:51(130.34.95.49) tempax@RT port3 2010/11/24/17:45:17(130.34.95.49) 25 26 32 5810 asai dummy 0 2010/11/24/17:47:19(130.34.95.49) tempax@RT port3 25 32 40 5810 chin dummy 0 2010/11/24/17:47:56(130.34.95.49) Ti@RT port1 26 34 48 6898 fujita dummy 0 2010/11/25/11:54:35(130.34.95.28) target change : 3 tempax -> Al -29 20 32 6898 fujita dummy 0 2010/11/25/11:55:16(130.34.95.28) Al/Ti @ RT 2010/11/26/19:53:15(130.34.95.28) -25 40 43 5810 chin dummy 0 2010/11/25/16:41:36(130.34.95.49) 0 2010/11/25/16:41:52(130.34.95.49) 25 40 43 5810 chin dummy 0 2010/11/25/16:42:40(130.34.95.49) Ti@RT port1 29 36 44 6898 zanma dummy 0 2010/11/25/18:2:18(130.34.95.28) Ti@70degrees/Al@RT 26 32 34 6898 fujita dummy 0 2010/11/26/13:27:59(130.34.95.28) targetchange 3 tenpax -> Al -27 24 32 6925 maegami dummy 0 2010/11/26/19:23:58(130.34.95.35) Ti/Pt@R.T. 2010/11/26/20:33:3(130.34.95.35) 27 32 44 6925 maegami dummy 0 2010/11/26/19:26:18(130.34.95.35) Target Change: 5 Pt->SiO2 29 20 33 6898 fujita dummy 0 2010/11/26/19:53:54(130.34.95.28) Ti/AL/SiO2 @RT 27 24 32 6925 maegami, kubota dummy 0 2010/11/26/20:33:52(130.34.95.35) Ti/Pt@R.T., 湯上先生承認 -30 30 34 6898 fujita dummy 0 2010/11/30/12:19:15(130.34.95.28) SiO2 @ RT 2010/11/30/14:21:51(130.34.95.28) 30 30 31 6898 fujita dummy 0 2010/11/30/12:19:15(130.34.95.28) SiO2 @ RT