-6	29	33	5810	KIM	dummy	0	2009/8/5/14:19:14(130.34.95.49)	W→Ti	2009/8/5/16:28:7(130.34.95.49)
6	19	26	5810	KIM	dummy	0	2009/8/5/16:30:23(130.34.95.49)	TiN体積
6	26	32	5810	KIM	dummy	0	2009/8/6/13:17:44(130.34.95.44)	TiN
-7	20	28	6898	lu	dummy	0	2009/8/6/15:43:10(130.34.95.28)	Ti	2009/8/6/20:17:54(130.34.95.28)
7	28	36	6898	lu	dummy	0	2009/8/6/20:18:23(130.34.95.28)	Ti
18	38	44	6898	yasuda	dummy	1	2009/8/10/16:40:4(130.34.95.28)	Target change 1. Pt-->W, 5.SiO2-->Ag@170deg
19	22	29	6898	yasuda	dummy	0	2009/8/10/16:41:10(130.34.95.28)	1.W, 3.Ti, 5.Ag@R.T.
-17	36	42	6937	kumagae	dummy	0	2009/8/11/9:0:34(130.34.95.43)	3 Cr	2009/8/11/9:1:28(130.34.95.43)
-19	36	42	6937	kumagae	dummy	1	2009/8/11/9:1:24(130.34.95.43)	3 Cr	2009/8/18/9:21:37(130.34.95.43)
-20	20	36	6937	kumagae	dummy	0	2009/8/11/9:1:48(130.34.95.43)	Cr @RT	2009/8/20/15:0:51(130.34.95.43)
17	27	35	6898	lu	dummy	0	2009/8/17/10:5:39(130.34.95.28)	TiN
-19	32	36	6937	kumagae	dummy	1	2009/8/18/9:21:22(130.34.95.43)	0	2009/8/18/9:21:41(130.34.95.43)
19	32	38	6937	kumagae	dummy	1	2009/8/18/9:22:6(130.34.95.43)	3 Cr@170℃
20	20	32	6937	kumagae	dummy	0	2009/8/11/9:1:48(130.34.95.43)	Cr @RT
24	36	44	6898	yasuda	dummy	1	2009/8/20/16:45:50(130.34.95.28)	Target change 1. ->Ti, 3. ->Ag, 5. ->SiO2@170deg
-25	24	34	6898	yasuda	dummy	0	2009/8/20/16:46:48(130.34.95.28)	1.Ti, 3.Ag, 5.SiO2@R.T.	2009/8/25/14:14:58(130.34.95.44)
-27	20	32	6937	kumagae	dummy	0	2009/8/24/11:39:10(130.34.95.43)	Cr	2009/8/24/14:44:59(130.34.95.43)
-26	32	38	6937	kumagae	dummy	1	2009/8/24/14:44:53(130.34.95.43)	3 Cr	2009/8/26/14:11:0(130.34.95.44)
-27	20	32	6937	kumagae	dummy	0	2009/8/24/14:45:18(130.34.95.43)	Cr  Ti @RT	2009/8/24/14:47:28(130.34.95.43)
-27	20	34	6937	kumagae	dummy	0	2009/8/24/14:47:46(130.34.95.43)	Cr   Ti @RT	2009/8/26/16:12:1(130.34.95.43)
25	24	31	6898	yasuda	dummy	0	2009/8/20/16:46:48(130.34.95.28)	1.Ti, 3.Ag, 5.SiO2@R.T.
25	31	40	6898	yasuda	dummy	1	2009/8/25/14:15:32(130.34.95.44)	Ti target check & Baking@170deg
26	22	30	6898	yasuda	dummy	0	2009/8/25/15:40:50(130.34.95.28)	1.Ti, 3.Ag, 5.SiO2@R.T.
26	34	40	6937	kumagae	dummy	1	2009/8/26/14:11:32(130.34.95.44)	3 Cr
-27	20	32	6937	kumagae	dummy	0	2009/8/26/16:12:16(130.34.95.43)	Cr	2009/8/27/14:16:4(130.34.95.43)
27	20	31	6937	kumagae	dummy	0	2009/8/26/16:12:16(130.34.95.43)	Cr