7	38	44	6898	yasuda	dummy	1	2009/5/7/13:21:16(130.34.95.28)	Target change 5.SiO2-->Ag@170deg
-8	24	32	6898	yasuda	dummy	0	2009/5/7/13:22:9(130.34.95.28)	3.Ti, 5.Ag@R.T.	2009/5/8/13:20:51(172.16.44.146)
-8	32	40	5810	金 丙烈	dummy	0	2009/5/7/14:12:9(130.34.95.49)	Ti	2009/5/8/11:47:45(130.34.95.49)
7	35	36	6937	H.Matsuo	dummy	0	2009/5/7/16:47:14(130.34.95.43)	Pt@R.T
-8	42	48	6898	yasuda	dummy	1	2009/5/7/20:32:20(130.34.95.28)	Target change 3.Ti-->W@170deg	2009/5/8/13:21:8(172.16.44.146)
-9	28	32	6898	yasuda	dummy	0	2009/5/7/20:33:9(130.34.95.28)	3.W@R.T.	2009/5/8/13:20:59(172.16.44.146)
-8	40	42	6898	lu	dummy	0	2009/5/7/20:44:10(130.34.95.28)	TiN	2009/5/7/20:45:28(130.34.95.28)
8	19	24	6898	lu	dummy	0	2009/5/7/20:45:22(130.34.95.28)	TiN
8	17	19	6898	lu	dummy	0	2009/5/7/20:48:4(130.34.95.28)	TiN
9	21	28	5810	kim	dummy	0	2009/5/8/11:47:31(130.34.95.49)	TiN
8	24	29	6898	yasuda	dummy	0	2009/5/7/13:22:9(130.34.95.28)	3.Ti, 5.Ag@R.T.
8	40	44	6898	yasuda	dummy	1	2009/5/8/13:26:34(130.34.95.28)	Ag target check
-9	30	36	6898	yasuda	dummy	0	2009/5/8/14:21:2(130.34.95.28)	3.Ti, 5.Ag@R.T.	2009/5/9/15:21:52(130.34.95.28)
-9	36	42	6898	yasuda	dummy	1	2009/5/8/14:21:28(130.34.95.28)	Target change 3.Ti-->W@170deg	2009/5/9/15:22:0(130.34.95.28)
-10	28	33	6898	yasuda	dummy	0	2009/5/8/15:49:34(130.34.95.28)	3.W@R.T.	2009/5/9/15:22:7(130.34.95.28)
8	39	40	6937	H.Matsuo	dummy	0	2009/5/8/19:10:5(130.34.95.43)	Pt@R.T
9	30	33	6898	yasuda	dummy	0	2009/5/8/14:21:2(130.34.95.28)	3.Ti, 5.Ag@R.T.
11	28	36	6898	yasuda	dummy	0	2009/5/9/17:10:2(130.34.95.28)	3.Ti, 5.Ag@R.T.
11	40	46	6898	yasuda	dummy	1	2009/5/9/17:10:33(130.34.95.28)	Target change 3.Ti-->W@170deg
-12	26	30	6898	yasuda	dummy	0	2009/5/9/17:11:15(130.34.95.28)	3.W@R.T.	2009/5/11/12:12:14(130.34.95.28)
12	30	35	6898	yasuda	dummy	0	2009/5/11/12:12:31(130.34.95.28)	3.W@R.T.
13	34	37	6898	yasuda	dummy	0	2009/5/13/16:16:3(130.34.95.28)	3.W, 5.Ag@R.T.
21	34	48	6937	hino	dummy	1	2009/5/21/13:4:41(130.34.95.43)	Target change:3. W->Mo
22	0	26	6937	hino	dummy	1	2009/5/21/13:5:10(130.34.95.43)	Target change:3. W->Mo
22	26	34	6937	hino	dummy	0	2009/5/21/13:5:26(130.34.95.43)	3.Mo
-22	38	44	6925	Shimizu	dummy	0	2009/5/21/16:56:8(130.34.95.35)	0	2009/5/21/18:25:35(130.34.95.35)
-22	38	44	6925	Shimizu	dummy	0	2009/5/21/18:26:7(130.34.95.35)	1.Pt/ 5.Ti@RT	2009/5/22/12:23:52(172.16.44.171)
-23	28	38	4771	桑　cao	dummy	0	2009/5/21/18:51:51(130.34.89.162)	1Pt/5Ti	2009/5/21/18:59:22(130.34.89.162)
-23	30	39	4771	cao	dummy	0	2009/5/21/19:0:18(130.34.89.162)	0	2009/5/21/19:0:30(130.34.89.162)
-23	28	40	4771	cao	dummy	0	2009/5/21/19:1:2(130.34.89.162)	1Pt/5Ti	2009/5/22/13:11:26(130.34.89.162)
24	28	32	6898	yasuda	dummy	0	2009/5/21/19:34:12(130.34.95.28)	3. Mo@R.T.
25	20	26	6898	lu	dummy	0	2009/5/21/19:54:7(130.34.95.28)	TiN
22	34	38	6937	hino	dummy	0	2009/5/22/0:49:15(130.34.94.148)	0
-25	16	20	6925	Shimizu	dummy	0	2009/5/22/12:25:55(172.16.44.171)	Pt/Ti@R.T.	2009/5/24/17:10:24(130.34.95.35)
-25	28	40	4771	cao	dummy	0	2009/5/22/13:11:17(130.34.89.162)	1Pt/5Ti	2009/5/25/18:3:1(172.16.44.146)
22	38	44	6937	H.Matsuo	dummy	1	2009/5/22/17:36:35(172.16.44.146)	5,Ti target check (No Plasma)
23	31	35	6937	H.Matsuo	dummy	1	2009/5/23/15:23:37(172.16.44.146)	0
-27	30	35	6925	Shimizu	dummy	0	2009/5/24/17:11:17(130.34.95.35)	Pt/Ti@R.T	2009/5/25/20:44:57(172.16.44.171)
-25	40	42	6898	yasuda	dummy	0	2009/5/25/14:45:9(130.34.95.28)	3. Mo@R.T.	2009/5/25/16:43:51(130.34.95.28)
25	28	39	4771	cao	dummy	0	2009/5/22/13:11:17(130.34.89.162)	1Pt/5Ti
-25	39	44	6937	H.matsuo	dummy	1	2009/5/25/18:4:37(172.16.44.146)	Target 5. check & 再真空引きbake@170℃	2009/5/25/18:5:14(172.16.44.146)
25	39	46	6937	H.matsuo	dummy	1	2009/5/25/18:7:2(172.16.44.146)	No.5 check & target change 3.Mo->Ti 5.Ti->MgO bake @170℃
26	20	34	４７７１	cao	dummy	0	2009/5/25/18:10:23(172.16.44.146)	1Pt,3Ti,5MgO
27	20	26	6925	Shimizu	dummy	0	2009/5/25/20:44:41(172.16.44.171)	Pt/Ti@R.T.
-27	40	48	6937	Yoshida	dummy	1	2009/5/26/11:54:29(130.34.95.43)	Target change 1. Pt->Au	2009/5/27/14:48:44(130.34.95.43)
-28	26	30	6937	Yoshida	dummy	0	2009/5/26/11:55:29(130.34.95.43)	Au deposition	2009/5/27/14:49:57(130.34.95.43)
-27	26	34	6937	H.Matsuo	dummy	1	2009/5/26/19:42:42(130.34.95.43)	0	2009/5/26/19:44:25(130.34.95.43)
-27	26	34	6937	H.Matsuo	dummy	0	2009/5/26/19:45:36(130.34.95.43)	No5 cathode  Repair	2009/5/26/19:45:45(130.34.95.43)
27	26	30	6937	H.Matsuo	dummy	1	2009/5/26/19:46:23(130.34.95.43)	No5 cathode  Repair
27	40	46	6937	Shinya Yoshida	dummy	1	2009/5/27/14:49:44(130.34.95.43)	Target change 1->Au, 5->Pt
-28	20	24	6937	Shinya Yoshida	dummy	0	2009/5/27/14:50:24(130.34.95.43)	Ti, Pt, Au	2009/5/27/20:26:11(130.34.95.43)
28	26	30	6937	Shinya Yoshida	dummy	0	2009/5/27/20:26:27(130.34.95.43)	Ti, Pt, Au
29	27	31	6937	H.Matsuo	dummy	0	2009/5/29/12:45:54(130.34.95.43)	Pt @ 320℃
31	24	30	6898	nobe	dummy	0	2009/5/29/20:8:1(130.34.95.28)	TiN