1 44 48 6898 yasuda dummy 1 2009/3/31/17:42:39(130.34.95.28) Target change 5. PZT-->Ag@170deg -2 26 32 6898 yasuda dummy 0 2009/3/31/17:43:30(130.34.95.28) 3.Ti, 5.Ag@R.T. 2009/4/2/0:1:50(172.16.44.146) -1 32 38 6898 lu dummy 0 2009/4/1/12:24:3(130.34.95.28) 0 2009/4/1/16:8:51(130.34.95.28) 1 32 35 6898 lu dummy 0 2009/4/1/12:24:3(130.34.95.28) 0 2 28 36 6898 yasuda dummy 0 2009/4/2/0:2:19(172.16.44.146) 3.Ti, 5.Ag@R.T. 2 39 44 6898 yasuda dummy 1 2009/4/2/14:54:47(172.16.44.146) Target change 3.Ti-->Cu, 5.Ag-->SiO2@170deg -3 34 40 6898 yasuda dummy 0 2009/4/2/14:55:59(172.16.44.146) 3.Cu, 5.SiO2@R.T. 2009/4/3/16:32:1(130.34.95.28) 7 36 42 6937 kumagae dummy 0 2009/4/2/17:25:4(130.34.95.43) 3 →Cr -8 28 38 6937 kumagae dummy 0 2009/4/2/17:25:28(130.34.95.43) Cr 2009/4/7/15:9:2(130.34.95.43) 3 34 36 6898 yasuda dummy 0 2009/4/2/14:55:59(172.16.44.146) 3.Cu, 5.SiO2@R.T. 6 24 30 6898 yasuda dummy 0 2009/4/3/16:32:44(130.34.95.28) 3.Cu, 5.SiO2@R.T. 6 36 41 6898 yasuda dummy 0 2009/4/6/16:31:4(130.34.95.28) 1.Pt, 3.Cu, 5.SiO2@R.T. 8 20 24 6937 kumagae dummy 0 2009/4/7/15:8:56(130.34.95.43) Cr -8 28 36 6937 kumagae dummy 0 2009/4/7/15:9:20(130.34.95.43) Cr @ RT 2009/4/8/11:9:30(172.16.44.146) 8 24 34 6937 kumagae dummy 0 2009/4/8/11:9:56(172.16.44.146) Cr@30deg 8 34 36 6937 kumagae dummy 0 2009/4/8/13:6:13(130.34.95.43) 0 -9 20 23 6937 kumagae dummy 0 2009/4/8/17:9:21(172.16.44.146) Cr @RT 2009/4/8/17:34:1(172.16.44.146) 9 22 26 6937 kumagae dummy 0 2009/4/8/17:34:19(172.16.44.146) Cr@RT -11 40 44 6937 Shinya Yoshida dummy 1 2009/4/9/12:11:34(130.34.95.43) Target change 3. Cr ->Ti 2009/4/11/8:49:38(130.34.95.43) -12 20 24 6937 Shinya Yoshida dummy 0 2009/4/9/13:28:35(130.34.95.43) Ti, SiO2 2009/4/11/8:49:41(130.34.95.43) -13 30 36 6898 lu dummy 0 2009/4/10/10:23:57(130.34.95.28) Ti 2009/4/13/10:51:56(130.34.95.28) 20 21 27 6937 H.Matsuo dummy 0 2009/4/20/10:10:0(172.16.44.146) Pt@320℃ 21 38 44 6925 watanabe,nagao dummy 1 2009/4/21/13:30:5(130.34.95.35) target change Cr>Ti 22 26 30 6925 watanabe,nagao dummy 0 2009/4/21/13:32:11(130.34.95.35) Ti@R.T. 25 22 26 6898 nobe dummy 0 2009/4/23/11:47:27(130.34.95.28) TiN@70deg 24 26 34 4771 murakawa dummy 0 2009/4/23/18:20:37(130.34.89.162) Ti/Pt@350 -25 30 34 6898 野辺 dummy 0 2009/4/25/14:28:14(130.34.95.28) TiN@70deg 2009/4/25/14:28:19(130.34.95.28) 25 30 31 6898 野辺 dummy 0 2009/4/25/14:28:14(130.34.95.28) TiN@70deg 25 31 34 6898 nobe dummy 0 2009/4/25/14:28:57(130.34.95.28) TiN@70deg 28 20 26 6898 nobe dummy 0 2009/4/27/18:48:59(130.34.95.28) TiN@70deg 28 28 30 6937 H.Matsuo dummy 0 2009/4/28/13:35:35(130.34.95.43) Pt@R.T