3	27	28	6937	H.Matsuo	dummy	0	2008/9/3/13:32:54(172.16.44.146)	Au@RT
-5	28	32	6937	Andrew	dummy	0	2008/9/4/18:5:52(130.34.95.43)	Cr/Au @ 170	2008/9/5/14:1:1(130.34.95.43)
5	28	31	6937	Andrew	dummy	0	2008/9/4/18:5:52(130.34.95.43)	Cr/Au @ 170
5	34	36	6937	Andrew	dummy	0	2008/9/5/14:1:31(130.34.95.43)	Cr/Au 170 C
6	20	22	6937	Andrew	dummy	0	2008/9/6/8:59:40(130.34.95.43)	Cr/Au @ 170
8	39	45	6925	maegami	dummy	0	2008/9/8/18:1:44(130.34.95.35)	Target change 3Mo>Pt, 5Cr>Ti
9	22	28	6925	maegami	dummy	0	2008/9/8/22:8:7(172.16.44.146)	Ti/Pt @RT
-9	30	36	6937	kumagae	dummy	0	2008/9/9/9:22:56(130.34.95.43)	Ti	2008/9/9/15:55:31(172.16.44.146)
10	32	36	6898	sun	dummy	0	2008/9/9/12:8:23(130.34.95.28)	TiN@70C
9	30	34	6937	kumagae	dummy	0	2008/9/9/9:22:56(130.34.95.43)	Ti
9	36	42	6937	H.Matsuo	dummy	0	2008/9/9/17:26:8(130.34.95.43)	Ti / Pt @320℃
11	21	23	6937	kumagae	dummy	0	2008/9/11/9:54:51(130.34.95.43)	Ti
12	20	24	6898	sun	dummy	0	2008/9/12/9:44:44(130.34.95.28)	TiN@70C
13	24	28	6898	sun	dummy	0	2008/9/12/17:42:58(130.34.95.28)	TiN@70C
15	40	48	6937	Andrew	dummy	0	2008/9/15/19:14:11(172.16.44.146)	Target Change Pt -> Cr
16	22	24	6937	Andrew	dummy	0	2008/9/15/19:14:48(172.16.44.146)	Cr/Au @170
16	26	29	6898	sun	dummy	0	2008/9/16/9:42:35(130.34.95.28)	TiN@70C
16	29	31	6937	Andrew	dummy	0	2008/9/16/14:0:57(130.34.95.43)	0
16	39	43	6937	H.Matsuo	dummy	1	2008/9/16/19:18:44(130.34.95.43)	1.Au->Pt  320℃ベーク
17	21	23	6937	H.Matsuo	dummy	0	2008/9/16/20:15:46(172.16.44.146)	Pt@R.T
20	36	48	6937	Andrew	dummy	0	2008/9/20/18:5:29(172.16.44.129)	Target Change Cr/Au
22	34	40	6937	k.hirano	dummy	0	2008/9/22/11:28:9(130.34.95.43)	target change 3.Ti->Mo @350℃
22	46	48	6937	Andrew	dummy	0	2008/9/22/18:45:14(130.34.95.43)	Cr/Au
23	22	36	6937	k.hirano	dummy	0	2008/9/23/10:16:37(130.34.95.43)	3.Mo @300℃
-30	44	48	6937	Yoshida	dummy	1	2008/9/30/15:38:35(172.16.44.135)	Target change 3. Mo -> Pt	2008/9/30/18:4:58(172.16.44.135)