-5 44 48 6937 hino dummy 0 2008/8/4/12:52:43(130.34.95.43) Target change : PZT→Mo 2008/8/4/13:2:16(130.34.95.43) -6 20 26 6937 hino dummy 0 2008/8/4/12:53:2(130.34.95.43) 0 2008/8/4/12:53:30(130.34.95.43) -6 20 26 6937 hino dummy 0 2008/8/4/12:53:46(130.34.95.43) Mo 2008/8/5/10:36:5(130.34.95.43) -5 18 34 6937 M. Toda dummy 0 2008/8/4/13:12:38(130.34.95.43) Start-up & Target change (PZT -> Mo) 2008/8/5/10:25:1(130.34.95.43) 5 18 23 6937 M. Toda dummy 0 2008/8/4/13:12:38(130.34.95.43) Start-up & Target change (PZT -> Mo) 5 23 26 6937 Moriyama dummy 0 2008/8/5/10:32:39(130.34.95.43) Pt@R.T -5 30 38 6937 hino dummy 0 2008/8/5/10:34:46(130.34.95.43) 3.Ti->Mo 5.PZT->Cr @350℃ 2008/8/5/13:25:25(130.34.95.43) 6 20 26 6937 hino dummy 0 2008/8/5/10:36:50(130.34.95.43) Mo@300℃ 7 18 24 6937 kumagae dummy 0 2008/8/5/10:38:43(130.34.95.43) Cr@RT -5 32 38 6937 hino dummy 0 2008/8/5/13:26:18(130.34.95.43) Target change:Ti->Mo PZT->Cr@350 2008/8/5/13:31:11(130.34.95.43) 5 32 48 6937 hino dummy 0 2008/8/5/13:31:52(130.34.95.43) Target change:Ti->Mo, PZT->Cr@350 -6 16 20 6937 hino dummy 0 2008/8/5/13:32:25(130.34.95.43) Target change:Ti->Mo, PZT->Cr@350 2008/8/5/13:32:52(130.34.95.43) 6 0 20 6937 hino dummy 0 2008/8/5/13:33:30(130.34.95.43) Target change:Ti->Mo, PZT->Cr@350 -7 32 36 6937 kumagae dummy 0 2008/8/7/9:16:3(130.34.95.43) Cr@RT 2008/8/7/9:38:46(130.34.95.43) -7 24 27 6937 kumagae dummy 0 2008/8/7/9:39:2(130.34.95.43) 0 2008/8/7/9:55:16(172.16.44.146) -7 31 36 6937 kumagae dummy 0 2008/8/7/9:55:36(172.16.44.146) Cr@RT 2008/8/7/12:17:0(172.16.44.146) 7 24 25 6937 kumagae dummy 0 2008/8/7/11:18:46(172.16.44.146) 0 7 25 27 6937 kumagae dummy 0 2008/8/7/12:16:53(172.16.44.146) 0 -7 34 38 6937 kumagae dummy 0 2008/8/7/12:17:15(172.16.44.146) Cr@RT 2008/8/7/12:24:53(172.16.44.146) -7 36 40 6937 kumagae dummy 0 2008/8/7/12:25:8(172.16.44.146) Cr@RT 2008/8/7/16:6:46(130.34.95.43) 7 33 38 6937 kumagae dummy 0 2008/8/7/16:7:4(130.34.95.43) Cr@RT 7 38 40 6937 kumagae dummy 0 2008/8/7/17:39:52(172.16.44.146) 0 -10 38 43 6898 yasuda dummy 1 2008/8/8/19:21:6(130.34.95.28) Target Change 5.Cr --> SiO2@170deg 2008/8/10/13:47:56(172.16.44.146) 11 44 48 6937 Andrew dummy 0 2008/8/9/15:5:45(172.16.44.140) Target Change Cr/Au -12 26 29 6937 Andrew dummy 0 2008/8/9/15:6:52(172.16.44.140) Cr/Au @ 170 C 2008/8/11/14:35:33(172.16.44.140) 11 24 28 6898 yasuda dummy 0 2008/8/10/13:40:26(172.16.44.146) 5.SiO2@R.T. 10 30 36 6898 yasuda dummy 1 2008/8/10/13:47:50(172.16.44.146) Target Change 5.Cr-->SiO2@170deg 11 34 38 4771 Ishikawa dummy 0 2008/8/11/13:8:44(130.34.95.21) SiO2@R.T. 12 28 31 6937 Andrew dummy 0 2008/8/11/14:36:20(172.16.44.140) Cr/Au @ 170 C 12 32 36 4771 Ishikawa dummy 0 2008/8/11/19:35:13(130.34.95.21) Cr/Au@R.T. 13 44 48 6937 Andrew dummy 0 2008/8/13/18:47:56(130.34.95.43) 0 15 27 31 6925 Iguchi dummy 0 2008/8/15/13:16:21(130.34.95.35) 0 15 31 34 6925 iguchi dummy 0 2008/8/15/15:1:42(172.16.44.146) 0 22 38 42 6925 watanabe dummy 0 2008/8/22/18:57:36(130.34.95.35) 0 -25 28 34 6937 kumagae dummy 0 2008/8/25/9:33:2(130.34.95.43) Cr 2008/8/25/14:26:15(172.16.44.146) 25 42 48 6937 k.hirano dummy 0 2008/8/25/10:9:29(130.34.95.43) target change 3.Cr->Mo @350℃ -26 14 30 6937 k.hirano dummy 0 2008/8/25/10:10:37(130.34.95.43) 3.Mo @300℃ 2008/8/25/20:53:28(130.34.95.43) 25 28 31 6937 kumagae dummy 0 2008/8/25/9:33:2(130.34.95.43) Cr 25 31 32 6937 kumagae dummy 0 2008/8/25/14:26:36(172.16.44.146) 0 -26 20 36 6937 k.hirano dummy 0 2008/8/25/20:54:2(130.34.95.43) 3.Mo @300℃ 2008/8/26/0:38:58(172.16.44.146) -26 26 42 6937 k.hirano dummy 0 2008/8/26/0:39:39(172.16.44.146) 3. Mo@300℃ 2008/8/26/13:23:41(130.34.95.43) 26 26 29 6937 k.hirano dummy 0 2008/8/26/0:39:39(172.16.44.146) 3. Mo@300℃ 26 42 48 6937 k.hirano dummy 0 2008/8/26/13:24:28(130.34.95.43) 3.Mo@300℃ 27 0 10 6937 k.hirano dummy 0 2008/8/26/13:25:18(130.34.95.43) 3.Mo@300℃ 26 38 42 6937 Andrew dummy 0 2008/8/26/17:34:55(130.34.95.43) Cr/Au @ 170 C 27 26 42 6937 k.hirano dummy 0 2008/8/27/12:20:2(130.34.95.43) 3.Mo @300℃