2 46 48 6909 T.Konno dummy 0 2008/1/2/22:58:13(172.16.44.137) 1.Target change Cu→Al Bake@170℃ 3 0 4 6909 T.Konno dummy 0 2008/1/2/22:58:30(172.16.44.137) 0 3 42 48 6909 T.Konno dummy 0 2008/1/2/22:58:52(172.16.44.137) 1.Al@RT 4 36 40 6909 T.Konno dummy 0 2008/1/4/0:30:39(172.16.44.137) 1.Al@RT -7 24 30 3586 morimoto dummy 0 2008/1/6/16:5:22(130.34.95.17) Cr@R.T 2008/1/6/16:6:7(130.34.95.17) 7 26 32 3586 morimoto dummy 0 2008/1/6/16:6:29(130.34.95.17) Cr@R.T 7 21 22 6937 H.Matsuo dummy 1 2008/1/7/10:24:45(172.16.44.137) １番　放電ﾁｪｯｸ 8 22 26 6937 H.Matsuo dummy 0 2008/1/8/10:40:30(172.16.44.137) Al@RT 9 26 34 3586 morimoto dummy 0 2008/1/8/11:50:28(130.34.95.43) Cr@R.T 9 22 26 3586 hori dummy 0 2008/1/8/18:28:42(130.34.95.43) Au/Cr@R.T. 8 42 48 3586 kato dummy 1 2008/1/8/18:29:33(130.34.95.43) target1 Al>Au -10 18 22 3586 kishi dummy 0 2008/1/9/13:39:8(130.34.95.17) Cr/Au@R.T 2008/1/9/13:40:46(130.34.95.17) 10 20 24 3586 kishi dummy 0 2008/1/9/13:41:22(130.34.95.17) Cr/Au@R.T 9 34 36 3586 morimoto dummy 0 2008/1/9/15:57:19(172.16.44.137) Cr/Au@RT 12 40 48 4771 Ishikawa dummy 1 2008/1/9/18:4:15(130.34.89.180) Target change 1->Pt 3->Ti 5->PZT@350℃ 13 0 18 4771 Ishikawa dummy 1 2008/1/9/18:4:58(130.34.89.180) Target change 1->Pt 3->Ti 5->PZT@350℃ -13 18 24 4771 Ishikawa dummy 0 2008/1/9/18:5:26(130.34.89.180) PZT/Pt/Ti@350℃ 2008/1/11/20:46:39(130.34.89.180) -10 30 36 3586 morimoto dummy 0 2008/1/10/13:9:54(130.34.95.43) Cr@R.T 2008/1/10/16:1:49(130.34.95.17) 11 14 16 3586 kishi dummy 0 2008/1/10/13:54:30(130.34.95.17) Cr/Au@R.T -11 28 31 3586 kishi dummy 0 2008/1/10/13:55:8(130.34.95.17) Cr/Au@R.T 2008/1/11/13:8:7(130.34.95.17) 10 30 35 3586 morimoto dummy 0 2008/1/10/13:9:54(130.34.95.43) Cr@R.T 11 24 27 3586 morimoto dummy 0 2008/1/10/16:2:55(130.34.95.17) Cr@R.T 11 28 29 3586 kishi dummy 0 2008/1/10/13:55:8(130.34.95.17) Cr/Au@R.T 11 29 32 3586 kishi dummy 0 2008/1/11/13:9:11(130.34.95.17) Cr/Au@R.T 13 18 24 4771 Ishikawa dummy 0 2008/1/11/20:47:11(130.34.89.180) Ti/Pt/Ti@350℃ 12 36 40 4771 Ishikawa dummy 1 2008/1/12/16:41:30(130.34.89.180) Target ｃhange 1->Pt 3->Ti 5->PZT@350℃ 15 20 22 6937 H.Matsuo dummy 0 2008/1/15/9:52:22(172.16.44.137) Pt@RT -16 26 36 4771 shibata dummy 0 2008/1/16/7:2:21(172.16.44.137) PZT/Pt/Ti@350℃ 2008/1/16/11:28:51(130.34.89.180) -17 24 28 6937 Cho, Wonje dummy 0 2008/1/16/18:49:7(130.34.95.43) Pt>Cr, Ti>Au 2008/1/16/18:51:37(130.34.95.43) 16 38 48 6937 Cho, Wonje dummy 1 2008/1/16/18:51:3(130.34.95.43) Pt>Cr, Ti>Au 17 0 24 6937 Cho, Wonje dummy 0 2008/1/16/18:51:28(130.34.95.43) Pt>Cr, Ti>Au 17 24 28 6937 Cho, Wonje dummy 0 2008/1/16/18:51:50(130.34.95.43) Cr/Au 17 38 48 4771 shibata dummy 1 2008/1/17/2:55:43(130.34.89.180) target change 1.Pt 3.Ti 5.PZT 350℃ベーク -18 16 24 4771 shibata dummy 0 2008/1/17/2:56:25(130.34.89.180) PZT/Pt/Ti@350℃ 2008/1/18/5:59:34(172.16.44.137) 18 24 30 4771 Ishikawa dummy 0 2008/1/17/14:35:43(130.34.89.180) PZT/Pt/Ti@350℃ 17 33 34 6937 H.Matsuo dummy 0 2008/1/17/15:46:48(172.16.44.137) Au@RT -18 12 20 4771 shibata dummy 0 2008/1/18/6:0:8(172.16.44.137) PZT/Pt/Ti@350℃ 2008/1/18/7:47:53(130.34.89.180) 18 12 18 4771 shibata dummy 0 2008/1/18/6:0:8(172.16.44.137) PZT/Pt/Ti@350℃ 18 30 32 4771 Ishikawa dummy 0 2008/1/18/11:40:18(130.34.89.180) for cooling 21 38 48 6937 Randles dummy 0 2008/1/21/13:1:7(130.34.95.43) Cr/Au 22 22 26 6937 Randles dummy 0 2008/1/21/13:2:36(130.34.95.43) Cr/Au at 170C 21 31 32 6937 H.Matsuo dummy 0 2008/1/21/15:16:28(172.16.44.137) Pt@RT 21 36 38 6937 H.Matsuo dummy 1 2008/1/21/16:6:10(130.34.95.43) Take broken screw out 22 38 48 6937 nakamura dummy 1 2008/1/21/18:1:55(130.34.95.43) Target change 5.SiO2 23 0 10 6937 nakamura dummy 1 2008/1/21/18:2:24(130.34.95.43) 0 -23 22 30 6937 nakamura dummy 0 2008/1/21/18:13:55(130.34.95.43) 0 2008/1/23/7:33:13(130.34.95.43) 22 26 30 6937 Randles dummy 0 2008/1/22/11:59:21(130.34.95.43) Cr/Au @170 22 36 38 6937 H.Matsuo dummy 0 2008/1/22/18:3:4(172.16.44.137) Cr@RT 23 26 34 6937 nakamura dummy 0 2008/1/23/7:33:28(130.34.95.43) 0 23 22 25 6898 yasuda dummy 0 2008/1/23/10:49:2(130.34.95.28) SiO2@R.T. 23 34 36 6937 nakamura dummy 0 2008/1/23/14:25:2(130.34.95.43) 0 23 36 38 6937 nakamura dummy 0 2008/1/23/16:59:46(172.16.44.137) 現在、1.Au,3.Cr,5.SiO2です。SiO2@RT 24 38 48 4771 Ishikawa dummy 1 2008/1/24/13:9:6(130.34.89.180) Target ｃhange 1->Pt 3->Ti 5->PZT@350℃ 25 20 30 4771 shibata dummy 0 2008/1/24/13:10:13(130.34.89.180) PZT/Pt/Ti@350℃ -25 30 34 4771 Ishikawa dummy 0 2008/1/24/13:29:23(130.34.89.180) PZT/Pt/Ti@350℃ 2008/1/24/23:28:55(130.34.89.180) 24 32 37 3586 kishi dummy 0 2008/1/24/14:23:4(130.34.95.17) Cr/Au@RT 24 30 31 6937 H.Matsuo dummy 0 2008/1/24/14:44:30(172.16.44.137) Au@RT 28 32 38 6937 菊地(PENTAX) dummy 0 2008/1/24/16:57:2(130.34.95.43) TiN 25 16 20 4771 Ishikawa dummy 0 2008/1/24/23:28:47(130.34.89.180) PZT/Pt/Ti@350℃ 29 40 46 4771 Ishikawa dummy 0 2008/1/29/17:33:23(130.34.89.180) PZT/Pt/Ti@350℃ 29 38 40 6909 yamada dummy 0 2008/1/29/18:47:10(172.16.44.136) 逆スパッタチェック 30 0 6 6909 yamada dummy 0 2008/1/29/18:48:15(172.16.44.136) ターゲット交換(Al/W) -30 34 48 6909 yamada dummy 0 2008/1/29/18:48:58(172.16.44.136) Al/W 2008/1/30/11:16:10(172.16.44.137) 29 46 48 6909 yamada dummy 0 2008/1/29/22:22:0(172.16.44.186) ターゲット交換 30 6 16 6909 yamada dummy 0 2008/1/30/2:53:12(172.16.44.137) 0 -31 38 43 6925 shimizu dummy 0 2008/1/30/12:45:15(130.34.95.35) Pt/Ti@R.T 2008/1/31/18:7:49(172.16.44.137) 31 43 48 6937 cho,wonje dummy 0 2008/1/30/17:58:27(130.34.95.43) Ti/Pt->Cr/Au -31 24 28 3586 morimoto dummy 0 2008/1/30/20:55:59(130.34.95.17) Pt@R.T 2008/1/31/5:53:43(130.34.95.17) -31 24 29 6937 H.Matsuo dummy 0 2008/1/31/10:48:54(130.34.95.43) Ti / Pt @320℃ 2008/1/31/12:22:33(172.16.44.137) 31 24 27 6937 H.Matsuo dummy 0 2008/1/31/10:48:54(130.34.95.43) Ti / Pt @320℃ 31 28 32 3586 morimoto dummy 0 2008/1/31/12:30:4(130.34.95.17) Pt@R.T 31 38 39 6925 shimizu dummy 0 2008/1/30/12:45:15(130.34.95.35) Pt/Ti@R.T