2	40	48	6937	kasuga	dummy	1	2007/6/30/17:8:37(130.34.95.43)	target change 3->Cr 5->Au
3	0	18	6937	kasuga	dummy	1	2007/6/30/17:9:53(130.34.95.43)	target change 3->Cr 5->Au
-3	18	22	6937	kasuga	dummy	0	2007/6/30/17:10:11(130.34.95.43)	0	2007/7/2/19:51:15(130.34.95.43)
2	30	34	6937	H.Matsuo	dummy	0	2007/7/2/9:37:36(130.34.95.43)	Ti/Pt @320℃
3	42	44	6936	kasuga	dummy	0	2007/7/2/19:52:58(130.34.95.43)	Cr/Pt/Au R.T. 一晩真空引きしてからスパッタします。
4	18	22	6936	kasuga	dummy	0	2007/7/2/19:54:7(130.34.95.43)	Cr/Pt/Au R.T. 前日の夜から真空引きしてからスパッタします。
4	0	18	6936	kasuga	dummy	1	2007/7/2/19:54:38(130.34.95.43)	真空引き
3	44	48	6936	kasuga	dummy	1	2007/7/2/19:55:10(130.34.95.43)	真空引き
-13	12	38	4771	Ishikawa	dummy	1	2007/7/2/21:7:42(130.34.89.180)	Target change 1.->Pt 2.-> Ti 3.-> PZT@350℃	2007/7/2/21:8:34(130.34.89.180)
-13	38	44	4771	Ishikawa	dummy	0	2007/7/2/21:8:15(130.34.89.180)	PZT/Pt/Ti@350℃	2007/7/2/21:8:37(130.34.89.180)
-9	40	48	4771	Ishikawa	dummy	1	2007/7/2/21:13:40(130.34.89.180)	Target change 1->Pt  2->Ti  3->PZT@350℃	2007/7/9/12:30:30(130.34.89.180)
-10	0	18	4771	Ishikawa	dummy	1	2007/7/2/21:14:28(130.34.89.180)	Target change 1->Pt  2->Ti  3->PZT@350℃	2007/7/9/12:30:37(130.34.89.180)
-10	18	24	4771	Ishikawa	dummy	0	2007/7/2/21:14:56(130.34.89.180)	PZT/Pt/Ti@350℃	2007/7/9/12:30:41(130.34.89.180)
-10	28	30	4771	Miyashita	dummy	0	2007/7/3/9:17:24(130.34.89.180)	Pt	2007/7/4/9:51:35(130.34.89.180)
3	39	40	6937	H.Matsuo	dummy	0	2007/7/3/19:18:47(172.16.44.138)	Pt @R.T
4	28	34	6937	Takahashi Tomokazu	dummy	0	2007/7/3/20:31:5(130.34.95.43)	0
4	42	48	6937	Kurahashi	dummy	1	2007/7/4/3:26:56(130.34.95.43)	target change 3.Cr->Ti
5	28	32	6937	Kurahashi	dummy	0	2007/7/4/3:28:33(130.34.95.43)	TiN@70℃
4	35	40	6965	wakui	dummy	0	2007/7/4/12:9:42(130.34.95.31)	Au@R.T.
-5	34	48	3586	kato	dummy	0	2007/7/4/12:47:14(130.34.95.43)	target change 3 ti	2007/7/4/12:47:26(130.34.95.43)
5	34	48	3586	kato	dummy	1	2007/7/4/12:48:1(130.34.95.43)	target change3 Ti>Cr
5	32	34	6937	Kurahashi	dummy	0	2007/7/4/18:42:50(130.34.95.43)	0
5	18	22	6937	Takahashi Tomokazu	dummy	0	2007/7/4/19:8:16(130.34.95.43)	Pt 200℃
5	23	27	6965	wakui	dummy	0	2007/7/5/0:8:8(130.34.95.31)	Au@R.T.
6	2	6	6937	Takahashi Tomokazu	dummy	0	2007/7/5/14:25:1(130.34.95.43)	Pt 200℃
-9	32	38	6937	yoshida	dummy	0	2007/7/5/14:44:59(130.34.95.43)	0	2007/7/5/14:45:11(130.34.95.43)
-7	40	48	6937	Yoshida	dummy	1	2007/7/5/23:17:11(130.34.95.43)	Cr>Pt	2007/7/5/23:17:18(130.34.95.43)
-7	40	48	6937	Yoshida	dummy	1	2007/7/5/23:18:12(130.34.95.43)	Cr>Ti	2007/7/6/15:23:5(130.34.95.43)
-8	0	20	6937	Yoshida	dummy	1	2007/7/5/23:18:40(130.34.95.43)	Cr>Ti	2007/7/6/15:23:8(130.34.95.43)
-8	20	26	6937	Yoshida	dummy	0	2007/7/5/23:21:22(130.34.95.43)	Ti-Pt-Au	2007/7/6/15:23:11(130.34.95.43)
-7	34	40	6937	Yoshida	dummy	0	2007/7/5/23:27:10(130.34.95.43)	Cr>Ti	2007/7/5/23:27:14(130.34.95.43)
-7	34	40	6937	Yoshida	dummy	1	2007/7/5/23:27:39(130.34.95.43)	Cr>Ti	2007/7/6/15:23:2(130.34.95.43)
6	10	14	6937	Takahashi Tomokazu	dummy	0	2007/7/6/3:51:27(130.34.95.43)	Pt
6	14	20	3586	kato	dummy	0	2007/7/6/4:47:57(172.16.44.138)	Au/Cr@R.T.
6	20	26	3586	kato	dummy	0	2007/7/6/10:17:0(172.16.44.138)	Au/Cr@R.T.
6	30	36	4771	Miyashita	dummy	0	2007/7/6/12:19:27(130.34.89.180)	Cr @ R.T.
6	40	48	6937	Yoshida	dummy	1	2007/7/6/15:23:37(130.34.95.43)	Cr>Ti
7	0	18	6937	Yoshida	dummy	1	2007/7/6/15:24:12(130.34.95.43)	Cr>Ti
-7	32	38	6937	Yoshia	dummy	0	2007/7/6/15:24:31(130.34.95.43)	0	2007/7/6/15:24:36(130.34.95.43)
-7	32	38	6937	Yoshida	dummy	0	2007/7/6/15:24:53(130.34.95.43)	Ti-Pt-Au	2007/7/7/14:53:55(130.34.95.43)
-8	20	26	6937	Yoshida	dummy	0	2007/7/6/22:50:29(172.16.44.138)	Ti-Pt-Au	2007/7/7/21:39:54(130.34.95.43)
7	35	37	6937	H.Matsuo	dummy	0	2007/7/7/17:11:25(130.34.95.43)	Pt@R.T
7	38	42	4771	shibata	dummy	0	2007/7/7/18:19:35(130.34.89.180)	Pt/Ti @350℃
7	42	44	4771	shibata	dummy	0	2007/7/7/19:56:32(130.34.89.180)	0
8	20	48	6937	Yoshida	dummy	1	2007/7/7/22:2:56(130.34.95.43)	0
-9	20	26	6937	Yoshida	dummy	0	2007/7/8/16:16:25(130.34.95.43)	Ti-Pt-Au	2007/7/8/16:21:42(130.34.95.43)
9	20	27	6937	Yoshida	dummy	0	2007/7/8/16:22:30(130.34.95.43)	Ti-Pt-Au
-9	30	36	4771	shibata	dummy	0	2007/7/8/16:49:33(130.34.89.180)	Pt/Ti @350℃	2007/7/9/12:27:19(130.34.89.180)
9	27	30	6937	Kurahashi	dummy	0	2007/7/8/21:22:30(130.34.95.43)	TiN@70℃
9	30	44	6937	H.Matsuo	dummy	1	2007/7/9/14:38:20(130.34.95.43)	1,3 target problem check 
9	45	48	6937	Yoshida	dummy	0	2007/7/9/21:41:32(130.34.95.43)	Ti-Pt-Au
10	0	2	6937	Yoshida	dummy	0	2007/7/9/22:7:54(130.34.95.43)	Ti-Pt-Au
10	2	4	6937	Yoshida	dummy	0	2007/7/9/22:57:12(130.34.95.43)	Ti-Pt-Au
10	34	36	6937	Kurahashi	dummy	0	2007/7/10/16:52:10(172.16.44.138)	Ti
10	44	48	3586	kato	dummy	1	2007/7/10/21:57:46(130.34.95.17)	target change 3.Ti>Cr
11	20	26	3586	kato	dummy	0	2007/7/10/23:16:8(172.16.44.138)	Cr/Au@R.T.
-11	44	48	6937	Kurahashi	dummy	1	2007/7/11/3:35:55(130.34.95.43)	Target change 3.Cr -> Ti	2007/7/11/3:37:40(130.34.95.43)
-11	26	40	6937	Kurahashi	dummy	1	2007/7/11/3:37:28(130.34.95.43)	Target change 3.Cr -> Ti	2007/7/11/7:47:58(130.34.95.43)
-11	40	42	6937	Kurahashi	dummy	0	2007/7/11/3:38:44(130.34.95.43)	TiN@70℃	2007/7/11/14:29:2(172.16.44.138)
11	26	40	6937	Kurahashi	dummy	1	2007/7/11/7:48:43(130.34.95.43)	Target change 3.Cr → Ti
-11	42	44	6937	Kurahashi	dummy	0	2007/7/11/14:28:50(172.16.44.138)	Ti	2007/7/11/14:29:5(172.16.44.138)
-11	42	46	6937	Kurahashi	dummy	0	2007/7/11/14:29:46(172.16.44.138)	Ti	2007/7/11/14:35:32(172.16.44.138)
11	44	48	6937	Kurahashi	dummy	0	2007/7/11/14:35:55(172.16.44.138)	Ti
12	2	6	4771	shibata	dummy	0	2007/7/11/22:12:31(130.34.89.180)	Pt/Ti @350℃
12	0	2	6937	Kurahashi	dummy	0	2007/7/11/23:23:41(130.34.95.43)	TiN@70℃
12	6	10	4771	shibata	dummy	0	2007/7/12/2:8:34(130.34.89.180)	Pt/Ti @350℃
12	12	29	3586	kato	dummy	1	2007/7/12/5:58:10(130.34.95.17)	target change3.Ti>Cr
12	32	38	3586	kato	dummy	0	2007/7/12/6:10:43(172.16.44.138)	Cr/Au@R.T.
12	44	46	4771	Miyashita	dummy	0	2007/7/12/19:14:15(130.34.89.180)	Cr/Au
14	2	8	6937	Takahashi Tomokazu	dummy	0	2007/7/12/22:27:18(130.34.95.43)	Pt 400℃
13	0	18	4771	shibata	dummy	1	2007/7/12/23:4:6(130.34.89.180)	target change 1.Pt  3.Ti  5.PZT 350℃ベーク
-13	24	32	4771	shibata	dummy	0	2007/7/12/23:22:31(130.34.89.180)	PZT@350℃	2007/7/13/8:46:11(130.34.89.180)
13	18	24	4771	shibata	dummy	0	2007/7/13/8:8:4(130.34.95.43)	PZT@350℃
13	36	40	3586	kato	dummy	0	2007/7/13/16:42:0(130.34.95.17)	Ti@R.T.
14	36	42	4771	Ishikawa	dummy	0	2007/7/13/17:55:11(130.34.89.180)	PZT@350℃
14	12	16	3586	kato	dummy	1	2007/7/14/5:44:1(172.16.44.138)	target change1 Pt>Au 3 Ti>Cr 
14	32	36	3586	kato	dummy	0	2007/7/14/7:34:4(172.16.44.138)	Cr/Au@R.T.
-17	44	48	4771	Ish	dummy	0	2007/7/14/19:36:58(130.34.89.180)	0	2007/7/14/19:37:3(130.34.89.180)
17	44	48	4771	Ishikawa	dummy	1	2007/7/14/19:40:47(130.34.89.180)	Target change 1.->Pt 2.-> Ti 3.-> PZT@350℃
18	0	14	4771	Ishikawa	dummy	1	2007/7/14/19:43:4(130.34.89.180)	Target change 1->Pt  2->Ti  3->PZT@350℃
18	14	20	4771	Ishikawa	dummy	0	2007/7/14/19:43:36(130.34.89.180)	PZT/Pt/Ti@350℃
15	10	14	3586	kato	dummy	0	2007/7/14/22:42:8(130.34.95.17)	Cr@R.T.
15	19	26	3586	kato	dummy	0	2007/7/15/0:58:30(130.34.95.43)	Cr/Au@R.T.
19	26	36	3977	imaizumi	dummy	0	2007/7/17/12:40:40(130.34.75.68)	Pt,Ti,23oC
18	20	24	4771	Ishikawa	dummy	0	2007/7/18/1:20:21(130.34.89.180)	PZT/Pt/Ti@350℃
-18	24	36	4771	shibata	dummy	0	2007/7/18/2:39:6(130.34.89.180)	PZT/Pt/Ti@350℃	2007/7/18/11:31:50(130.34.89.180)
18	24	26	4771	shibata	dummy	0	2007/7/18/2:39:6(130.34.89.180)	PZT/Pt/Ti@350℃
18	28	34	6936	kawai	dummy	0	2007/7/18/11:50:11(172.16.44.139)	PZT@350
18	36	42	4771	Ishikawa	dummy	0	2007/7/18/12:38:13(130.34.89.180)	Pt/Ti@350℃
-19	36	48	6936	kasuga	dummy	1	2007/7/18/12:46:11(130.34.95.43)	pressure sensor install and target change2.->Cr 3.->Au	2007/7/19/10:25:4(130.34.95.43)
20	0	18	6936	Kasuga	dummy	1	2007/7/18/12:47:19(130.34.95.43)	target change
20	18	24	6936	Kasuga	dummy	0	2007/7/18/12:48:45(130.34.95.43)	Cr/Pt/Au R.T. スパッタ後にメインチャンバー大気開放
-20	24	32	6936	Kasuga	dummy	1	2007/7/18/12:49:18(130.34.95.43)	真空引き	2007/7/20/9:32:40(130.34.89.180)
18	42	48	4771	Ishikawa	dummy	1	2007/7/18/18:17:24(172.16.44.138)	3番ターゲットが導通しているため修正
19	0	18	4771	Ishikawa	dummy	1	2007/7/18/18:18:14(172.16.44.138)	3番ターゲットが導通しているため修正
19	36	48	6936	Kasuga	dummy	1	2007/7/19/10:25:39(130.34.95.43)	pressure sensor install and target change 3.->Cr 5.->Au
20	24	42	4771	shibata	dummy	1	2007/7/20/9:33:14(130.34.89.180)	target change 1.Pt  3.Ti  5.PZT 350℃ベーク
-21	18	34	4771	shibata	dummy	0	2007/7/20/9:40:29(130.34.89.180)	PZT/Pt/Ti@350℃	2007/7/21/14:10:35(172.16.44.138)
21	38	42	6937	Takahashi Tomokazu	dummy	0	2007/7/21/0:47:32(130.34.95.43)	Pt R.T.
21	18	31	4771	shibata	dummy	0	2007/7/20/9:40:29(130.34.89.180)	PZT/Pt/Ti@350℃
-22	0	10	4771	shibata	dummy	0	2007/7/21/14:33:22(130.34.89.180)	PZT@350℃	2007/7/21/22:7:50(130.34.89.180)
23	18	26	4771	shibata	dummy	0	2007/7/23/7:50:6(130.34.89.180)	PZT@350℃
23	38	42	6937	H.Matsuo	dummy	0	2007/7/23/11:41:8(130.34.95.43)	Ti & Pt @320℃
23	29	38	6937	kawai	dummy	0	2007/7/23/14:29:17(130.34.95.43)	0
25	40	48	6898	settsu	dummy	1	2007/7/25/16:43:47(130.34.95.28)	Target change 3. Ti→W
26	20	24	6898	settsu	dummy	0	2007/7/25/16:44:38(130.34.95.28)	W sputter@R.T
25	37	39	6937	H.Matsuo	dummy	0	2007/7/25/18:8:31(130.34.95.43)	Pt@R.T
26	31	48	6925	maegami	dummy	1	2007/7/26/15:12:33(130.34.95.35)	target change W→Ti
27	37	39	6937	H.Matsuo	dummy	0	2007/7/27/18:39:35(172.16.44.138)	Pt @ RT
27	42	45	6898	settsu	dummy	0	2007/7/27/19:11:23(130.34.95.28)	W sputter@R.T
30	34	48	4771	shibata	dummy	1	2007/7/30/16:46:57(130.34.89.180)	target change 3.W -> Ti 350℃ベーク
-31	44	48	4771	shibata	dummy	1	2007/7/30/16:48:44(130.34.89.180)	target change 3.Ti -> W 170℃ベーク	2007/7/31/20:16:36(130.34.89.180)
-31	4	24	4771	shibata	dummy	0	2007/7/30/16:52:2(130.34.89.180)	PZT/Pt/Ti@350℃	2007/7/30/16:59:5(130.34.89.180)
-31	4	12	4771	shibata	dummy	0	2007/7/30/16:59:44(130.34.89.180)	PZT/Pt/Ti@350℃	2007/7/31/1:37:54(130.34.89.180)
31	20	32	4771	shibata	dummy	0	2007/7/30/17:0:48(130.34.89.180)	PZT@350℃
31	4	6	4771	shibata	dummy	0	2007/7/30/16:59:44(130.34.89.180)	PZT/Pt/Ti@350℃
31	39	41	6937	H.Matsuo	dummy	0	2007/7/31/16:4:29(130.34.95.43)	Pt@R.T
31	41	42	6937	H.Matsuo	dummy	0	2007/7/31/19:24:13(130.34.95.43)	Pt@R.T
-31	43	48	4771	shibata	dummy	0	2007/7/31/20:18:32(130.34.89.180)	PZT/Pt/Ti@350℃	2007/7/31/20:21:56(130.34.89.180)
31	42	48	4771	shibata	dummy	0	2007/7/31/20:22:15(130.34.89.180)	PZT/Pt/Ti@350℃