-1 20 32 4830 M. Otani dummy 0 2007/11/28/13:56:24(130.34.95.30) Ta/Cu @300C 2007/11/29/11:26:28(130.34.95.30) 1 40 48 6909 T.Konno dummy 0 2007/11/28/18:0:45(130.34.95.37) Target change 1.Cr→Al@170℃ 2 30 36 6909 T.Konno dummy 0 2007/11/28/18:1:15(130.34.95.37) 1.Al@R.T. -1 33 37 4830 M. Otani dummy 0 2007/11/29/11:26:11(130.34.95.30) Ta/Cu @ 200C 2007/11/30/16:2:4(130.34.95.30) -1 20 28 4830 M. Otani dummy 0 2007/11/29/11:26:42(130.34.95.30) Ta/Cu @300C 2007/11/30/16:1:15(130.34.95.30) 1 20 28 4830 M. Otani dummy 0 2007/11/30/16:1:45(130.34.95.30) Ta/Cu @ 100C -1 32 38 4830 M. Otani dummy 0 2007/11/30/16:2:36(130.34.95.30) Ta/Cu @ 100C 2007/11/30/16:20:18(130.34.95.30) -1 31 35 4830 M. Otani dummy 0 2007/11/30/16:20:48(130.34.95.30) Ta/Cu @ 100C 2007/12/1/13:15:17(130.34.95.30) 2 40 46 6898 yasuda dummy 1 2007/11/30/16:49:51(130.34.95.28) Target Change 5.Cr→SiO2@R.T. 3 26 34 6898 yasuda dummy 0 2007/11/30/16:50:54(130.34.95.28) 5.SiO2@R.T. -2 18 24 6909 T.Konno dummy 0 2007/11/30/18:38:27(130.34.95.37) 0 2007/11/30/21:4:14(130.34.95.37) 3 18 24 6909 T.Konno dummy 0 2007/11/30/21:4:33(130.34.95.37) 1.Al@R.T. -3 42 48 4830. M. Otani dummy 0 2007/12/1/13:16:28(130.34.95.30) target change 1 Cu 3 Ta @ 170C 2007/12/3/20:22:51(130.34.95.30) -4 20 26 4830 M. Otani dummy 0 2007/12/1/13:20:21(130.34.95.30) Ta/Cu @ 100C 2007/12/3/20:22:9(130.34.95.30) -4 44 48 6898 settsu dummy 0 2007/12/1/15:52:8(130.34.95.28) Baking@350℃ 2007/12/3/16:0:58(130.34.95.28) -5 0 6 6898 settsu dummy 0 2007/12/1/15:53:5(130.34.95.28) Baking@350℃ 2007/12/4/13:47:47(130.34.95.28) -5 6 18 6898 settsu dummy 0 2007/12/1/15:56:10(130.34.95.28) cooling to R.T. 2007/12/3/16:1:28(130.34.95.28) -4 26 38 6937 Kurahashi dummy 1 2007/12/2/7:26:27(130.34.95.43) Target change 3.Ta -> Ti 2007/12/3/21:44:42(130.34.95.43) -4 38 42 6937 Kurahashi dummy 0 2007/12/2/7:26:59(130.34.95.43) TiN@70℃ 2007/12/3/16:5:25(130.34.95.43) -3 24 26 6909 T.Konno dummy 0 2007/12/3/0:57:37(172.16.44.137) 0 2007/12/3/1:0:18(172.16.44.137) -3 34 42 6909 T.Konno dummy 0 2007/12/3/0:58:56(172.16.44.137) 0 2007/12/3/1:0:54(172.16.44.137) 3 24 26 6909 T.Konno dummy 0 2007/12/3/1:0:43(172.16.44.137) 1.Al@RT 3 34 42 6909 T.Konno dummy 0 2007/12/3/1:1:8(172.16.44.137) 1.Al@RT -5 36 42 6925 shimizu dummy 0 2007/12/3/14:45:16(130.34.95.35) Target change 1.Al→ Pt 2007/12/3/16:41:52(130.34.95.35) 6 18 24 6925 shimziu dummy 0 2007/12/3/14:46:33(130.34.95.35) Ti/Pt@R.T -5 10 16 6898 settsu dummy 0 2007/12/3/16:2:2(130.34.95.28) cooling to R.T. 2007/12/4/13:48:8(130.34.95.28) -5 6 10 6898 settsu dummy 0 2007/12/3/16:2:27(130.34.95.28) Baking@350℃ 2007/12/4/13:47:59(130.34.95.28) -4 38 44 6937 Kurahashi dummy 0 2007/12/3/16:5:43(130.34.95.43) TiN@70℃ 2007/12/3/21:44:59(130.34.95.43) 5 34 42 6925 Shimizu dummy 0 2007/12/3/16:43:9(130.34.95.35) Target change 1.Al→ Pt -4 20 26 4830 M. Otani dummy 0 2007/12/3/20:22:31(130.34.95.30) Cu @ 170C 2007/12/3/22:43:10(172.16.44.137) 3 42 43 4830. M. Otani dummy 0 2007/12/1/13:16:28(130.34.95.30) target change 1 Cu 3 Ta @ 170C 3 43 48 4830 M. Otani dummy 0 2007/12/3/20:23:19(130.34.95.30) 1 Cu 3 Ti @170C 4 30 36 6937 Kurahashi dummy 0 2007/12/3/21:45:23(130.34.95.43) TiN@70℃ 4 0 6 6909 T.Konno dummy 1 2007/12/3/22:42:36(172.16.44.137) Target change 1.Cu→Al 4 40 48 6909 T.Konno dummy 0 2007/12/3/22:43:42(172.16.44.137) 1.Al@RT 4 36 40 6909 T.Konno dummy 0 2007/12/3/23:8:6(130.34.95.37) 1.Al@RT -8 0 6 4830 M. Otani dummy 0 2007/12/4/0:16:57(130.34.95.30) Target change 1 Cu 3 Ta 2007/12/4/0:17:52(130.34.95.30) 8 32 48 4830 M. Otani dummy 0 2007/12/4/0:17:40(130.34.95.30) Ta/ Cu @ 100C -8 0 6 4830 M. Otani dummy 0 2007/12/4/0:18:15(130.34.95.30) Target change 1 Cu 3 Ta @ 170C 2007/12/4/0:20:56(130.34.95.30) -9 18 44 4830 M. Otani dummy 0 2007/12/4/0:19:42(130.34.95.30) Ta/Cu @100C 2007/12/4/0:22:44(130.34.95.30) -7 42 48 4830 M. Otani dummy 0 2007/12/4/0:21:14(130.34.95.30) Target change 1 Cu 3 Ta @ 230C 2007/12/4/0:25:20(130.34.95.30) -8 18 24 4830 M. Otani dummy 0 2007/12/4/0:21:48(130.34.95.30) Ta/Cu @ 200C 2007/12/4/0:24:25(130.34.95.30) -9 0 40 4830 M. Otani dummy 0 2007/12/4/0:24:9(130.34.95.30) Ta/Cu @ 100C 2007/12/9/4:58:41(172.16.44.137) 7 44 48 4830 M. Otani dummy 0 2007/12/4/0:25:43(130.34.95.30) Target change 1 Cu 3 Ta @ 170C -6 34 48 6909 T.Konno dummy 0 2007/12/4/1:19:38(172.16.44.137) 1.Al@RT 2007/12/4/1:20:24(172.16.44.137) -6 30 42 6909 T.Konno dummy 1 2007/12/4/1:21:31(172.16.44.137) Target Change 1.Pt→Al@170℃ 2007/12/6/15:18:25(130.34.95.37) -7 26 38 6909 T.Konno dummy 0 2007/12/4/1:21:58(172.16.44.137) 1.Al@RT 2007/12/6/15:19:39(130.34.95.37) 6 28 30 6909 T.Konno dummy 1 2007/12/4/13:48:34(130.34.95.37) 0 -9 40 48 6898 settsu dummy 0 2007/12/4/13:49:55(130.34.95.28) Baking@350℃ 2007/12/9/15:21:58(130.34.95.28) -10 0 12 6898 settsu dummy 0 2007/12/4/13:50:31(130.34.95.28) cooling to R.T. 2007/12/9/15:21:46(130.34.95.28) -6 42 48 6937 T. Matsumura dummy 0 2007/12/4/13:51:40(130.34.95.43) Al, Mo @300C 2007/12/6/13:41:33(130.34.95.43) -7 0 8 6937 T. Matsumura dummy 0 2007/12/4/13:52:38(130.34.95.43) Cooling 2007/12/6/13:42:47(130.34.95.43) 5 18 24 6937 Kurahashi dummy 0 2007/12/4/16:39:25(130.34.95.43) TiN@70℃ 10 36 48 4771 shibata dummy 1 2007/12/4/19:19:22(130.34.89.180) target change 1.Pt 3.Ti 5.PZT 350℃ベーク -11 20 40 4771 shibata dummy 0 2007/12/4/19:25:16(130.34.89.180) PZT/Pt/Ti@350℃ 2007/12/11/12:31:2(130.34.89.180) 5 12 16 6937 Kurahashi dummy 0 2007/12/5/5:21:27(130.34.95.43) TiN@70℃ -6 24 28 6937 Kurahashi dummy 0 2007/12/5/16:0:2(130.34.95.43) 0 2007/12/5/16:0:6(130.34.95.43) -7 38 44 6937 Kurahashi dummy 0 2007/12/5/22:48:24(130.34.95.43) TiN@70℃ 2007/12/7/16:52:44(130.34.95.5) 6 24 27 6925 shimizu dummy 0 2007/12/6/12:7:42(172.16.44.136) 延長 6 27 28 6937 H.Matsuo dummy 0 2007/12/6/12:9:23(172.16.44.137) Pt@RT -6 42 48 6937 T. Matsumura dummy 0 2007/12/6/13:42:30(130.34.95.43) Al, Mo @300C (Target Change 1: Pt->Al, 3:Ti->Mo) 2007/12/6/15:10:27(130.34.95.43) -7 0 20 6937 T. Matsumura dummy 0 2007/12/6/13:43:15(130.34.95.43) Cooling 2007/12/6/15:10:35(130.34.95.43) -11 40 44 6937 H.Matsuo dummy 0 2007/12/6/14:15:35(172.16.44.137) Ti/Pt @320℃ 2007/12/6/20:55:10(130.34.95.43) 6 30 33 6909 T.Konno dummy 1 2007/12/4/1:21:31(172.16.44.137) Target Change 1.Pt→Al@170℃ 6 42 48 6909 T.Konno dummy 1 2007/12/6/15:19:2(130.34.95.37) Target change 1.Pt→Al@170℃ 7 30 38 6909 T.Konno dummy 0 2007/12/6/15:19:59(130.34.95.37) 1.Al@R.T. 12 36 42 6937 Matsumura dummy 1 2007/12/6/15:29:29(130.34.95.43) 1.Pt->Al, 3.Ti->Mo 320℃ベーク 13 18 22 6937 T. Matsumura dummy 0 2007/12/6/15:31:47(130.34.95.43) Mo/Al @300C 13 22 32 6937 T. Matsumura dummy 0 2007/12/6/15:32:16(130.34.95.43) Cooling Down 6 34 38 6937 H.Matsuo dummy 0 2007/12/6/15:54:58(130.34.95.43) Ti / Pt @320℃ -11 40 48 4771 shibata dummy 0 2007/12/7/13:11:51(130.34.95.43) PZT/Pt/Ti@350℃ 2007/12/11/9:32:28(172.16.44.137) 9 0 12 4830 M. Otani dummy 0 2007/12/4/0:24:9(130.34.95.30) Ta/Cu @ 100C -9 12 22 4830 M. Otani dummy 0 2007/12/9/4:59:36(172.16.44.137) Ta/Cu @ 100C 2007/12/9/7:28:48(172.16.44.137) 9 12 17 4830 M. Otani dummy 0 2007/12/9/4:59:36(172.16.44.137) Ta/Cu @ 100C 9 31 40 6898 settsu dummy 0 2007/12/9/15:20:48(130.34.95.28) Baking@350℃ 9 40 48 6898 settsu dummy 0 2007/12/9/15:22:17(130.34.95.28) cooling to R.T. 10 30 36 6937 Kurahashi dummy 0 2007/12/10/2:8:41(130.34.95.43) TiN@70℃ -10 6 18 6937 Kurahashi dummy 0 2007/12/10/2:9:12(130.34.95.43) target change 3.Ta->Ti 2007/12/10/2:9:18(130.34.95.43) 10 6 7 6937 Kurahashi dummy 0 2007/12/10/2:9:12(130.34.95.43) target change 3.Ta->Ti 10 7 16 6937 Kurahashi dummy 1 2007/12/10/2:9:41(130.34.95.43) target change 3.Ta->Ti -15 44 48 4830 M. Otani dummy 0 2007/12/10/15:21:22(130.34.95.30) Target change 1 Cu 3 Ta @ 170C 2007/12/10/15:22:32(130.34.95.30) -16 12 42 4830 M. Otani dummy 0 2007/12/10/15:22:23(130.34.95.30) Cu/Ta @ 100C 2007/12/11/20:0:1(130.34.95.30) -15 38 48 4830 M. Otani dummy 0 2007/12/10/15:22:49(130.34.95.30) Target change 1 Cu 3 Ta @ 170C 2007/12/11/19:58:19(130.34.95.30) 11 8 20 4771 shibata dummy 0 2007/12/11/3:16:20(130.34.89.180) PZT/Pt/Ti@350℃ -13 32 38 4771 Miyashita dummy 0 2007/12/11/5:21:1(130.34.89.180) Al 2007/12/11/5:22:15(130.34.89.180) 13 36 42 4771 Miyashita dummy 0 2007/12/11/5:22:26(130.34.89.180) Al 11 20 28 4771 shibata dummy 0 2007/12/4/19:25:16(130.34.89.180) PZT/Pt/Ti@350℃ 15 38 48 4830 Otani dummy 0 2007/12/11/19:58:48(130.34.95.30) Target change 1 Cu 3 Ta 5 SiO2 @ 170C -16 12 42 4830 Otani dummy 0 2007/12/11/20:0:37(130.34.95.30) SiO2/Ta/Cu @ 170C 2007/12/15/20:32:38(172.16.44.137) -14 26 32 6925 Kawano dummy 0 2007/12/12/15:43:0(130.34.95.35) Al@R.T. 2007/12/14/12:54:34(130.34.95.35) 14 40 46 6909 T.Konno dummy 0 2007/12/12/19:20:29(130.34.95.37) Al@RT 13 32 36 6937 T. Matsumura dummy 0 2007/12/13/10:55:13(130.34.95.43) Cooling 13 44 48 4771 Miyashita dummy 0 2007/12/13/20:27:40(130.34.95.43) Al 14 0 2 4771 Miyashita dummy 0 2007/12/13/20:28:10(130.34.95.43) 0 14 26 28 6925 Kawano dummy 0 2007/12/12/15:43:0(130.34.95.35) Al@R.T. 15 22 28 6909 T.Konno dummy 0 2007/12/14/18:57:6(130.34.95.37) Al@RT 16 42 48 4830 Otani dummy 0 2007/12/15/18:19:11(130.34.95.30) Ta/Cu@100C 15 37 38 4830 Otani dummy 0 2007/12/15/18:41:41(172.16.44.137) 0 16 20 38 4830 Otani dummy 0 2007/12/15/20:33:18(172.16.44.137) SiO2/Ta/Cu@100C -17 18 26 4830 Otani dummy 0 2007/12/16/5:40:7(130.34.95.30) Ta/Cu@100C 2007/12/16/23:30:1(172.16.44.137) -17 0 18 4830 Otani dummy 0 2007/12/16/20:52:59(172.16.44.137) Ta/Cu @ 100C 2007/12/17/1:50:28(172.16.44.137) -17 34 38 4830 Otani dummy 0 2007/12/16/23:30:30(172.16.44.137) Ta/Cu @ 100C 2007/12/17/1:50:15(172.16.44.137) 17 0 6 4830 Otani dummy 0 2007/12/16/20:52:59(172.16.44.137) Ta/Cu @ 100C -17 36 42 4830 Otani dummy 0 2007/12/17/6:25:25(172.16.44.141) Ta/Cu@100C 2007/12/17/10:11:26(172.16.44.137) 17 22 30 4830 Otani dummy 0 2007/12/17/10:11:50(172.16.44.137) Ta/Cu @ 100C 17 21 22 4830 Otani dummy 0 2007/12/17/10:27:35(172.16.44.137) 0 17 36 40 6937 k.hirano dummy 1 2007/12/17/10:43:39(130.34.95.43) target change 3.Ta->Mo @350℃ 18 16 32 6937 k.hirano dummy 0 2007/12/17/10:44:23(130.34.95.43) 3.Mo @300℃ 17 30 34 4830 Otani dummy 0 2007/12/17/11:39:15(172.16.44.137) 0 -18 32 36 6937 T. Matsumura dummy 0 2007/12/17/14:2:35(130.34.95.43) Mo @ 300C 2007/12/17/14:29:30(130.34.95.43) -18 36 44 6937 T. Matsumura dummy 0 2007/12/17/14:3:22(130.34.95.43) Cooling Down 2007/12/17/14:29:19(130.34.95.43) -19 22 26 6937 T. Matsumura dummy 0 2007/12/17/14:30:32(130.34.95.43) Mo @ 300C 2007/12/18/23:54:4(130.34.95.43) -19 26 36 6937 T. Matsumura dummy 0 2007/12/17/14:30:53(130.34.95.43) Cooling Down 2007/12/18/23:53:58(130.34.95.43) 17 34 36 4830 Otani dummy 0 2007/12/17/16:2:8(172.16.44.137) 0 -19 36 42 4771 Miyashita dummy 0 2007/12/17/17:21:7(130.34.89.180) SiO2 2007/12/19/17:32:45(130.34.89.180) 21 36 40 6937 Matsuoka dummy 1 2007/12/17/20:26:25(130.34.95.43) 3.Mo→Ge　@170℃ 22 34 40 6937 Matsuoka dummy 0 2007/12/17/20:27:18(130.34.95.43) 3.Ge　R.T 18 32 34 6937 k.hirano dummy 0 2007/12/18/15:52:10(172.16.44.137) 3.Mo@300℃ -18 44 48 6937 T. Matsumura dummy 0 2007/12/18/20:7:40(130.34.95.43) Mo @ 300C 2007/12/18/20:15:2(172.16.44.137) 19 0 22 6937 T. Matsumura dummy 0 2007/12/18/20:8:20(130.34.95.43) Cooling Down 17 42 48 6937 T. Matsumura dummy 0 2007/12/18/20:15:22(172.16.44.137) Mo @300C 18 42 48 6937 T. Matsumura dummy 0 2007/12/18/20:15:53(172.16.44.137) Mo @300C 19 22 24 6937 T. Matsumura dummy 0 2007/12/18/23:54:27(130.34.95.43) Cooling Down 19 36 38 4771 Miyashita dummy 0 2007/12/17/17:21:7(130.34.89.180) SiO2 -20 8 12 4771 Miyashita dummy 0 2007/12/19/17:38:16(130.34.89.180) SiO2 2007/12/19/21:49:26(130.34.89.180) 20 4 8 4771 Miyashita dummy 0 2007/12/19/21:49:43(130.34.89.180) SiO2 -20 40 44 6898 settsu dummy 1 2007/12/20/12:16:31(130.34.95.28) Target change 3.Mo→Cr 2007/12/20/15:21:10(130.34.95.28) -21 18 21 6898 settsu dummy 0 2007/12/20/12:17:39(130.34.95.28) Cr@R.T. 2007/12/20/15:21:18(130.34.95.28) 22 40 44 6937 k.hirano dummy 1 2007/12/21/14:52:11(130.34.95.43) target change 3.Ge->Mo @350℃ -23 35 37 4830 Otani dummy 0 2007/12/23/0:15:24(172.16.44.137) Cu@100C 2007/12/23/6:3:31(130.34.95.30) 23 42 48 6937 k.hirano dummy 0 2007/12/23/16:42:24(130.34.95.43) 3.Mo @300℃ -24 0 18 6937 k.hirano dummy 0 2007/12/23/16:42:48(130.34.95.43) 0 2007/12/23/16:42:59(130.34.95.43) 24 0 18 6937 k.hirano dummy 0 2007/12/23/16:43:30(130.34.95.43) 3.Mo @300℃ 25 42 48 6937 T. Matsumura dummy 0 2007/12/25/9:55:33(130.34.95.43) Mo @300C -26 0 18 6937 T. Matsumura dummy 0 2007/12/25/9:56:31(130.34.95.43) Cooling Down 2007/12/25/18:28:14(130.34.95.43) 26 40 44 6898 settsu dummy 1 2007/12/25/13:41:20(130.34.95.28) Target change 3. Mo → Cr 27 20 23 6898 settsu dummy 0 2007/12/25/13:42:27(130.34.95.28) Cr@R.T. 25 38 42 6937 T. Matsumura dummy 0 2007/12/25/18:27:49(130.34.95.43) Mo @ 300C 26 0 20 6937 T. Matsumura dummy 0 2007/12/25/18:28:40(130.34.95.43) Cooling Down 27 23 25 6898 settsu dummy 0 2007/12/27/10:27:37(130.34.95.28) Cr@RT