1 18 24 6925 Shimizu dummy 0 2007/9/27/13:12:58(130.34.95.35) Au@R.T 1 32 48 4771 shibata dummy 1 2007/9/27/18:17:43(130.34.89.180) target change 1.Pt 3.Ti 5.PZT 350℃ベーク 2 18 36 4771 shibata dummy 0 2007/9/27/18:18:19(130.34.89.180) PZT/Pt/Ti@350℃ -1 24 32 3586 morimoto dummy 0 2007/9/27/19:55:50(130.34.95.17) Cr@R.T 2007/9/30/13:4:53(130.34.95.17) 1 24 32 3586 morimoto dummy 0 2007/9/30/13:5:15(130.34.95.17) Cr@R.T 2 44 48 6898 settsu dummy 1 2007/10/1/12:50:54(130.34.95.28) Target change 3. Ti →Cr 3 20 24 6898 settsu dummy 0 2007/10/1/12:51:40(130.34.95.28) Cr @350℃ 2 38 42 6937 H.Matsuo dummy 0 2007/10/1/20:28:13(130.34.95.43) Ti & Pt @320℃ -3 26 34 3586 morimoto dummy 0 2007/10/2/12:30:51(130.34.95.17) Cr@R.T 2007/10/2/21:42:56(130.34.95.43) -3 36 48 4771 shibata dummy 0 2007/10/2/16:55:29(172.16.44.137) 0 2007/10/2/16:55:39(172.16.44.137) -3 36 48 4771 shibata dummy 0 2007/10/2/16:56:16(172.16.44.137) PZT@350℃ 2007/10/3/18:10:42(130.34.89.180) -3 24 30 3586 morimoto dummy 0 2007/10/2/21:44:17(130.34.95.43) Cr@R.T,Ti@R.T 2007/10/2/21:44:31(130.34.95.43) 3 24 30 3586 morimoto dummy 0 2007/10/2/21:45:1(130.34.95.43) Cr@R.T -4 20 24 6898 setsu dummy 0 2007/10/3/11:3:10(130.34.95.28) Cr @350℃ 2007/10/3/11:3:23(130.34.95.28) -4 20 24 6898 settsu dummy 0 2007/10/3/11:3:40(130.34.95.28) Cr @350℃ 2007/10/3/16:49:9(130.34.95.28) 3 30 32 3586 morimoto dummy 0 2007/10/3/12:6:18(130.34.95.17) 延長 3 33 34 6937 H.Matsuo dummy 0 2007/10/3/16:26:54(172.16.44.137) Pt@RT 3 36 39 4771 shibata dummy 0 2007/10/2/16:56:16(172.16.44.137) PZT@350℃ 3 39 48 4771 Miyashita dummy 1 2007/10/3/18:11:34(130.34.89.180) TargetChange 1.Pt->Al 4 12 16 4771 Miyashita dummy 0 2007/10/3/18:13:23(130.34.89.180) Al 4 16 30 4771 shibata dummy 0 2007/10/3/18:15:4(130.34.89.180) PZT@350℃ -4 36 42 3586 morimoto dummy 0 2007/10/4/10:16:28(130.34.95.43) Cr@R.T 2007/10/4/16:21:57(130.34.95.43) 4 42 46 6898 settsu dummy 0 2007/10/4/11:41:52(130.34.95.28) Cr @350℃ -5 26 32 4771 Tachihara dummy 0 2007/10/4/14:23:22(130.34.89.180) Al@R.T 2007/10/5/12:33:30(130.34.89.180) -4 34 40 3586 morimoto dummy 0 2007/10/4/16:22:28(130.34.95.43) Cr@R.T 2007/10/4/17:37:29(130.34.95.17) 4 34 38 3586 morimoto dummy 0 2007/10/4/16:22:28(130.34.95.43) Cr@R.T -5 21 25 3586 morimoto dummy 0 2007/10/4/17:39:33(130.34.95.17) Cr@R.T 2007/10/4/18:27:44(172.16.44.137) -5 18 24 3586 morimoto dummy 0 2007/10/4/18:28:41(172.16.44.137) Cr@R.T 2007/10/4/19:3:38(130.34.95.17) 4 38 42 3586 morimoto dummy 0 2007/10/4/19:3:34(130.34.95.17) Cr@R.T 4 46 48 6898 settsu dummy 0 2007/10/4/21:51:53(172.16.44.137) Al@350℃ 5 26 28 4771 Tachihara dummy 0 2007/10/4/14:23:22(130.34.89.180) Al@R.T -6 22 28 4771 tachihara dummy 0 2007/10/5/12:34:24(130.34.89.180) Al@R.T 2007/10/5/17:30:35(130.34.89.180) -6 36 48 6936 Kasuga dummy 1 2007/10/5/15:58:5(130.34.95.43) 1.Al->Au, 5.PZT->Pt 2007/10/6/16:4:29(130.34.95.43) -7 0 18 6936 Kasuga dummy 1 2007/10/5/15:58:50(130.34.95.43) 真空引き 2007/10/6/16:4:38(130.34.95.43) -7 18 22 6936 Kasuga dummy 0 2007/10/5/16:0:36(130.34.95.43) Cr/Pt/Au R.T. スパッタ後にメインチャンバー大気開放 2007/10/6/16:4:45(130.34.95.43) -7 22 38 6936 Kasuga dummy 0 2007/10/5/16:1:22(130.34.95.43) チャンバー開放、真空引き 2007/10/5/16:2:44(130.34.95.43) -7 38 42 6936 Kasuga dummy 0 2007/10/5/16:1:55(130.34.95.43) Cr/Pt/Au R.T. 2007/10/6/16:4:57(130.34.95.43) -7 22 38 6936 Kasuga dummy 1 2007/10/5/16:3:18(130.34.95.43) チャンバー開放、真空引き 2007/10/6/16:4:51(130.34.95.43) 9 19 23 6925 maegami dummy 0 2007/10/5/16:26:2(130.34.95.35) Cr/Au 5 35 38 5251 Matsunaga dummy 0 2007/10/5/16:36:22(130.34.95.8) Cr@RT 6 23 29 4771 tachihara dummy 0 2007/10/5/17:35:39(130.34.89.180) Al@R.T 6 14 17 4771 shibata dummy 0 2007/10/6/7:13:0(172.16.44.137) PZT@350℃ 6 30 31 6937 H.Matsuo dummy 0 2007/10/6/14:23:39(172.16.44.137) Al@RT 8 20 21 3586 kishi dummy 0 2007/10/8/9:1:26(130.34.95.17) Cr@R.T -8 40 48 6937 yoshida dummy 1 2007/10/8/19:38:3(130.34.95.43) PZT->SiO2 2007/10/8/20:0:41(172.16.44.137) -9 30 34 6937 Yoshida dummy 0 2007/10/8/19:38:41(130.34.95.43) SiO2 2007/10/8/20:0:2(172.16.44.137) 9 26 30 6937 Yoshida dummy 0 2007/10/8/20:0:33(172.16.44.137) Ti-SiO2 8 40 42 6937 yoshida dummy 1 2007/10/8/19:38:3(130.34.95.43) PZT->SiO2 8 42 48 6937 Yoshida dummy 1 2007/10/8/20:1:23(172.16.44.137) 3. Cr->Ti 5. PZT->SiO2 9 40 48 6937 Andrew dummy 0 2007/10/9/10:25:39(130.34.95.43) Target Change Cr/Au -9 32 38 6925 Shimizu dummy 0 2007/10/9/10:28:46(130.34.95.35) 1 Al>Au 5 SiO2>Cr 2007/10/9/10:29:22(130.34.95.35) -10 26 34 6937 Andrew dummy 0 2007/10/9/11:38:41(130.34.95.43) Cr/Au at 170C 2007/10/10/12:47:6(130.34.95.43) -10 36 40 3586 morimoto dummy 0 2007/10/9/12:26:9(130.34.95.43) Cr/Au@R.T 2007/10/10/10:15:43(130.34.95.17) 10 18 21 3586 kishi dummy 0 2007/10/9/12:59:40(130.34.95.17) Cr/Au@R.T 10 21 25 6925 Shimizu dummy 0 2007/10/9/13:27:28(130.34.95.35) Cr/Au@RT -10 40 46 6937 k.hirano dummy 0 2007/10/10/10:8:55(130.34.95.43) target change 3.Ti ->Mo 350℃ 2007/10/10/10:9:7(130.34.95.43) 10 40 44 6937 k.hirano dummy 1 2007/10/10/10:9:29(130.34.95.43) target change 3.Ti ->Mo 350℃ -11 16 20 6937 k.hirano dummy 0 2007/10/10/10:10:5(130.34.95.43) 3.Mo @300℃ 2007/10/10/17:4:51(130.34.95.43) 10 34 40 3586 morimoto dummy 0 2007/10/10/10:16:4(130.34.95.17) Cr/Au@R.T 10 26 28 6937 Andrew dummy 0 2007/10/9/11:38:41(130.34.95.43) Cr/Au at 170C 10 28 34 6937 Andrew dummy 0 2007/10/10/12:48:35(130.34.95.43) Cr/Au at 170C 10 25 26 6937 H.Matsuo dummy 1 2007/10/10/12:55:6(130.34.95.43) shutdown -11 26 30 6937 k.hirano dummy 0 2007/10/10/17:5:52(130.34.95.43) 3.Mo @300℃ 2007/10/10/22:34:39(130.34.95.43) 11 38 48 6898 settsu dummy 1 2007/10/10/20:35:40(130.34.95.28) Target change 1.Cr→Ag 3.Au→Ti -12 20 24 6898 settsu dummy 0 2007/10/10/20:38:27(130.34.95.28) Ag/Ti@R.T. 2007/10/11/11:41:22(130.34.95.28) 11 30 36 6937 k.hirano dummy 0 2007/10/10/22:35:3(130.34.95.43) 3.Mo @300℃ -13 26 32 6898 yasuda dummy 0 2007/10/11/11:43:4(130.34.95.28) Ag/Ti@R.T. 2007/10/11/11:43:18(130.34.95.28) 12 26 32 6898 yasuda dummy 0 2007/10/11/11:43:56(130.34.95.28) Ag/Ti@R.T. -12 38 42 6937 H.Matsuo dummy 1 2007/10/12/12:26:7(130.34.95.43) Target Change 1,Ag->Pt 170℃bake 2007/10/12/12:27:26(130.34.95.43) 13 34 38 6937 H.Matsuo dummy 0 2007/10/12/12:26:59(130.34.95.43) Pt@R.T 12 38 42 6937 H.Matsuo dummy 1 2007/10/12/12:28:10(130.34.95.43) Target Change 1,Ag->Pt 170℃bake 12 32 34 6898 yasuda dummy 0 2007/10/12/15:49:37(172.16.44.141) Ag@R.T. -15 26 29 6898 setsu dummy 0 2007/10/13/21:22:35(130.34.95.28) Pt@R.T. 2007/10/13/21:22:59(130.34.95.28) 15 26 29 6898 settsu dummy 0 2007/10/13/21:23:19(130.34.95.28) Pt@R.T. 15 44 48 6898 settsu dummy 1 2007/10/13/21:25:9(130.34.95.28) Target change3.Ti→Ta 15 30 34 6937 関 dummy 0 2007/10/14/12:15:58(130.34.95.43) TiN 16 26 29 6898 settsu dummy 0 2007/10/14/20:33:31(130.34.95.28) Ta sputter@R.T. -16 40 46 4771 Miyashita dummy 0 2007/10/15/14:14:22(130.34.89.180) Target Change 1.Pt -> Al 2007/10/15/18:37:45(130.34.89.180) -17 30 38 4771 Miyashtia dummy 0 2007/10/15/14:16:6(130.34.89.180) Cr 2007/10/15/18:37:48(130.34.89.180) 15 34 36 6937 関 dummy 0 2007/10/15/17:9:7(130.34.95.43) TiN 15 42 44 6898 settsu dummy 0 2007/10/15/20:3:23(130.34.95.28) Ti sputter@R.T. -16 38 42 6937 H.Matsuo dummy 1 2007/10/16/18:22:48(172.16.44.137) No1 反射大　調査 2007/10/16/18:36:36(172.16.44.137) 16 38 40 6937 H.Matsuo dummy 1 2007/10/16/18:22:48(172.16.44.137) No1 反射大　調査 -16 40 41 6937 H.Matsuo dummy 0 2007/10/16/18:37:24(172.16.44.137) Pt@RT 2007/10/16/18:57:6(130.34.95.43) 17 20 24 6937 kumagae dummy 0 2007/10/16/20:40:19(130.34.95.43) Pt@RT -17 27 33 3586 morimoto dummy 1 2007/10/17/11:24:20(130.34.95.17) target change 1.Pt>Au, 3.Ta>Cr 2007/10/17/11:25:51(130.34.95.17) 17 24 30 3586 morimoto dummy 1 2007/10/17/11:26:29(130.34.95.17) target change 1.Pt>Au, 3.Ta>Cr -17 42 46 3586 morimoto dummy 0 2007/10/17/11:26:57(130.34.95.17) Cr@R.T 2007/10/17/13:16:11(172.16.44.137) 18 20 24 3586 morimoto dummy 0 2007/10/17/11:27:20(130.34.95.17) Cr/Au@R.T 17 40 46 3586 morimoto dummy 0 2007/10/17/13:16:43(172.16.44.137) Cr@R.T 18 17 20 3586 kishi dummy 0 2007/10/17/13:46:34(130.34.95.43) Cr/Au@R.T 18 26 28 3586 kishi dummy 0 2007/10/17/15:4:44(130.34.95.17) Cr/Au@R.T 18 36 40 6937 k.hirano dummy 1 2007/10/17/17:40:9(130.34.95.43) target change 3.Cr->Mo @350℃ -19 18 24 6937 k.hirano dummy 0 2007/10/17/17:40:53(130.34.95.43) 3.m 2007/10/17/17:41:17(130.34.95.43) 19 18 24 6937 k.hirano dummy 0 2007/10/17/17:41:57(130.34.95.43) 3.Mo @300℃ 18 28 32 6937 Yoshida dummy 0 2007/10/18/12:14:30(130.34.95.43) SiO2 -18 32 36 6937 Yoshida dummy 0 2007/10/18/12:15:42(130.34.95.43) Au 2007/10/18/14:43:24(172.16.44.137) -22 40 44 6898 settsu dummy 0 2007/10/19/14:28:6(130.34.95.28) Target change 3. Mo→Cr 2007/10/19/14:28:17(130.34.95.28) -22 40 44 6898 settsu dummy 1 2007/10/19/14:28:59(130.34.95.28) Target change 3. Mo→Cr 2007/10/19/14:29:22(130.34.95.28) 22 44 48 6898 settsu dummy 1 2007/10/19/14:29:43(130.34.95.28) Target change 3. Mo→Cr -23 28 34 6898 settsu dummy 0 2007/10/19/14:30:23(130.34.95.28) Cr@R.T. 2007/10/22/22:11:55(172.16.44.137) 19 33 34 6937 H.Matsuo dummy 0 2007/10/19/15:58:8(172.16.44.137) Au@RT 20 38 39 6937 H.Matsuo dummy 0 2007/10/20/19:6:37(172.16.44.137) Au@RT -23 20 28 3586 morimoto dummy 0 2007/10/22/9:52:52(130.34.95.17) Cr/Au@R.T,Cr@R.T 2007/10/22/14:20:37(172.16.44.137) -24 22 26 3586 morimoto dummy 0 2007/10/22/11:15:53(130.34.95.17) Cr/Au@R.T 2007/10/22/16:39:52(130.34.95.17) -23 22 28 3586 morimoto dummy 0 2007/10/22/14:21:19(172.16.44.137) Cr/Au@R.T 2007/10/23/9:12:7(130.34.95.17) 24 28 32 3586 morimoto dummy 0 2007/10/22/16:40:24(130.34.95.17) Cr/Au@R.T -23 34 46 6937 Kurahashi dummy 1 2007/10/22/18:37:49(130.34.95.43) target change 5.SiO2->Ti 2007/10/22/18:38:7(130.34.95.43) 24 32 44 6937 Kurahashi dummy 1 2007/10/22/18:38:35(130.34.95.43) target change 3.Cr->Ti 24 44 48 6937 Kurahashi dummy 0 2007/10/22/18:39:5(130.34.95.43) TiN@70℃ 22 42 44 6898 settsu dummy 1 2007/10/22/20:33:23(130.34.95.28) Target change 3. Mo→Cr 23 28 34 6898 settsu dummy 0 2007/10/22/22:12:30(172.16.44.137) Cr@350℃ 23 20 24 3586 morimoto dummy 0 2007/10/23/9:13:28(130.34.95.17) Cr/Au@R.T -25 38 42 6937 k.hirano dummy 0 2007/10/23/13:28:35(130.34.95.43) target change 3.Ti->Mo @350℃ 2007/10/23/13:28:42(130.34.95.43) 25 38 42 6937 k.hirano dummy 1 2007/10/23/13:29:15(130.34.95.43) target change 3.Ti ->Mo 350℃ 23 34 36 6898 settsu dummy 0 2007/10/23/15:20:47(172.16.44.137) Cr@350℃ 26 40 48 4771 shibata dummy 1 2007/10/23/19:14:42(130.34.89.180) target change 1.Pt 3.Ti 5.PZT 350℃ベーク -27 24 40 4771 shibata dummy 0 2007/10/23/19:16:43(130.34.89.180) PZT@350℃ 2007/10/27/7:51:15(172.16.44.137) 29 40 48 6937 Nakamura dummy 1 2007/10/23/21:23:6(130.34.95.43) target change 1.Pt 2.Ge 3.PZT 30 0 4 6937 Nakamura dummy 1 2007/10/23/21:23:44(130.34.95.43) target change 1.Pt 2.Ge 3.PZT -30 18 26 6937 Nakamura dummy 0 2007/10/23/21:26:10(130.34.95.43) Ge 2007/10/29/21:41:27(130.34.95.43) -25 18 24 6937 k.hirano dummy 0 2007/10/24/10:52:52(130.34.95.43) 3.Mo @300℃ 2007/10/24/10:54:45(130.34.95.43) 26 18 24 6937 k.hirano dummy 0 2007/10/24/10:55:12(130.34.95.43) 3.Mo @300℃ -27 40 44 6937 k.hirano dummy 1 2007/10/24/11:0:1(130.34.95.43) target change 3.Ti ->Mo 350℃ 2007/10/27/20:17:21(130.34.95.43) -28 18 22 6937 k.hirano dummy 0 2007/10/24/11:59:44(130.34.95.43) 3.Mo @300℃ 2007/10/27/22:27:6(130.34.95.43) 25 20 24 3586 morimoto dummy 0 2007/10/24/13:46:32(130.34.95.17) Ti/Au@R.T 25 28 33 6898 yasuda dummy 0 2007/10/24/13:55:51(130.34.95.28) SiO2@R.T. 25 0 2 6937 Kurahashi dummy 0 2007/10/24/23:17:33(130.34.95.43) TiN@70℃ 25 2 8 6937 Yoshida dummy 0 2007/10/24/23:55:47(130.34.95.43) SiO2 26 24 28 6937 k.hirano dummy 0 2007/10/25/9:47:8(130.34.95.43) 3.Mo @300℃ 25 33 38 6937 Yoshida dummy 0 2007/10/25/11:51:48(130.34.95.43) Ti 26 28 34 6937 k.hirano dummy 0 2007/10/26/9:39:18(130.34.95.43) 3.Mo@300℃ 29 24 26 3586 morimoto dummy 0 2007/10/26/10:38:12(130.34.95.43) Pt@R.T -30 40 48 4771 Ishikawa dummy 1 2007/10/26/12:29:20(130.34.89.180) Target change 3.Ge -> Ti@350℃ 2007/10/29/12:23:47(130.34.89.180) -31 0 16 4771 Ishikawa dummy 1 2007/10/26/12:30:40(130.34.89.180) Target change 3.Ge -> Ti@350℃ 2007/10/29/12:39:35(130.34.89.180) -31 16 26 4771 Ishikawa dummy 0 2007/10/26/12:32:20(130.34.89.180) PZT/Pt/Ti@350℃ 2007/10/26/12:32:36(130.34.89.180) -31 16 24 4771 Ishikawa dummy 0 2007/10/26/12:33:0(130.34.89.180) PZT/Pt/Ti@350℃ 2007/10/29/15:27:26(130.34.89.180) 27 0 2 4771 shibata dummy 1 2007/10/27/0:20:10(172.16.44.137) target change 5. PZT 27 16 26 4771 shibata dummy 0 2007/10/27/7:51:48(172.16.44.137) PZT@350℃ 27 40 43 6937 k.hirano dummy 1 2007/10/24/11:0:1(130.34.95.43) target change 3.Ti ->Mo 350℃ 27 46 48 6937 k.hirano dummy 0 2007/10/27/22:28:3(130.34.95.43) 3.Mo @300℃ 28 0 16 6937 k.hirano dummy 0 2007/10/27/22:29:5(130.34.95.43) 3.Mo @300℃ -30 40 48 4771 Ishikawa dummy 1 2007/10/29/12:24:12(130.34.89.180) Target change 1->Pt 2->Ti 3->PZT@350℃ 2007/10/29/15:24:35(130.34.89.180) -31 0 16 4771 Ishikawa dummy 1 2007/10/29/12:40:5(130.34.89.180) Target change 1->Pt 2->Ti 3->PZT@350℃ 2007/10/29/15:26:12(130.34.89.180) -31 24 36 4771 tachihara dummy 0 2007/10/29/15:24:30(130.34.89.180) Al@R.T 2007/10/31/15:40:59(130.34.89.180) -30 40 48 4771 Ishikawa dummy 1 2007/10/29/15:25:15(130.34.89.180) Target change 1->Pt 3->Ti 3->Al@350℃ 2007/10/29/15:25:22(130.34.89.180) 30 40 48 4771 Ishikawa dummy 1 2007/10/29/15:25:58(130.34.89.180) Target change 1->Pt 3->Ti 5->Al@350℃ 31 0 16 4771 Ishikawa dummy 1 2007/10/29/15:26:33(130.34.89.180) Target change 1->Pt 3->Ti 5->Al@350℃ 31 16 24 4771 Ishikawa dummy 0 2007/10/29/15:28:11(130.34.89.180) Pt/Ti@350℃ 31 46 48 4771 T.Sano dummy 0 2007/10/29/15:35:51(130.34.89.180) Al@R.T. 31 38 44 4771 Miyashita dummy 0 2007/10/29/15:37:47(130.34.89.180) Al -31 36 38 6937 Kurahashi dummy 0 2007/10/29/16:0:53(130.34.95.43) TiN@70℃ 2007/10/29/17:23:29(130.34.95.43) -30 26 38 6937 Kurahashi dummy 0 2007/10/29/17:22:37(130.34.95.43) target change 3.Ge->Ti 2007/10/29/17:22:42(130.34.95.43) -30 26 38 6937 Kurahashi dummy 1 2007/10/29/17:23:4(130.34.95.43) target change 3.Ge->Ti 2007/10/29/21:42:56(130.34.95.43) 30 38 40 6937 Kurahashi dummy 0 2007/10/29/17:23:25(130.34.95.43) TiN@70℃ -30 6 18 6937 Nakamura dummy 0 2007/10/29/21:42:14(130.34.95.43) 0 2007/10/29/21:43:43(130.34.95.43) 30 24 38 6937 Kurahashi dummy 1 2007/10/29/21:43:18(130.34.95.43) target change 3.Ge->Ti 30 6 18 6937 Nakamura dummy 0 2007/10/29/21:44:10(130.34.95.43) 3.Ge 31 36 38 6937 Kurahashi dummy 0 2007/10/31/3:13:53(130.34.95.43) TiN@70℃ 31 24 34 4771 tachihara dummy 0 2007/10/29/15:24:30(130.34.89.180) Al@R.T