1	23	31	5318	A.Ueno	dummy	0	2006/11/30/22:52:55(130.34.231.209)	Al@LT
4	22	26	6937	H.Matsuo	dummy	0	2006/12/4/10:6:46(172.16.44.140)	Ti/Pt@320℃
5	32	48	6965	zhao	dummy	0	2006/12/4/18:5:36(130.34.95.31)	0
6	20	40	6965	zhao	dummy	0	2006/12/4/18:6:19(130.34.95.31)	0
5	28	32	6937	hashimoto	dummy	0	2006/12/5/13:56:20(172.16.44.140)	Ti/Pt@R.T
6	0	12	6898	sasaki(hirosaki.Univ)	dummy	0	2006/12/5/17:24:23(130.34.95.28)	Ti@70℃
-10	38	48	4771	田中克洋	dummy	0	2006/12/5/23:33:29(130.34.95.21)	target change 1Pt 3Ti 5PZT	2006/12/5/23:33:37(130.34.95.21)
10	38	48	4771	田中克洋	dummy	1	2006/12/5/23:34:12(130.34.95.21)	target change 1Pt 3Ti 5PZT 350℃ベーク
-10	0	4	4771	田中克洋	dummy	1	2006/12/5/23:34:43(130.34.95.21)	target change 1Pt 3Ti 5PZT 350℃ベーク	2006/12/5/23:34:49(130.34.95.21)
11	0	4	4771	田中克洋	dummy	0	2006/12/5/23:35:3(130.34.95.21)	target change 1Pt 3Ti 5PZT 350℃ベーク
11	26	34	4771	田中克洋	dummy	0	2006/12/5/23:35:58(130.34.95.21)	PZT 320℃
6	40	48	6898	sakomizu	dummy	0	2006/12/6/13:48:58(130.34.95.28)	Target change 1:Au, 3:Ti 5:Cr 350℃ベーク
7	0	12	6898	sakomizu	dummy	0	2006/12/6/13:52:21(130.34.95.28)	Target change 1:Au, 3:Ti, 5:Cr 
7	18	26	6898	sakomizu	dummy	0	2006/12/6/14:9:31(130.34.95.28)	Cr/Au @R.T
7	26	32	6898	Kato	dummy	0	2006/12/6/14:10:52(130.34.95.28)	Ti@70℃
-7	32	38	6937	Kurahashi	dummy	0	2006/12/6/16:0:32(130.34.95.43)	TiN	2006/12/6/16:22:52(130.34.95.43)
-7	32	38	6937	Kurahashi	dummy	0	2006/12/6/16:23:18(130.34.95.43)	Ti@70℃	2006/12/6/16:24:19(130.34.95.43)
-7	42	48	6937	Kurahashi	dummy	0	2006/12/6/16:24:37(130.34.95.43)	Ti@70℃	2006/12/7/20:31:2(130.34.95.43)
-7	32	40	6898	Sasaki(Hirosaki.Univ)	dummy	0	2006/12/6/19:36:14(130.34.95.28)	Ti`	2006/12/6/19:36:29(130.34.95.28)
7	32	38	6898	Sasaki(Hirosaki.Univ)	dummy	0	2006/12/6/19:37:32(130.34.95.28)	Ti@70℃
-12	24	32	4771	田中克洋	dummy	0	2006/12/7/3:39:34(130.34.95.21)	PZT 320℃	2006/12/12/9:13:25(172.16.44.142)
-8	20	24	6898	sakomizu	dummy	0	2006/12/7/13:37:16(172.16.44.140)	Cr/Au @R.T	2006/12/7/21:39:57(130.34.95.28)
7	42	44	6937	Kurahashi	dummy	0	2006/12/6/16:24:37(130.34.95.43)	Ti@70℃
8	43	46	6898	Sasaki(Hirosaki.Univ)	dummy	0	2006/12/8/20:35:31(130.34.95.28)	Ti@70℃
8	46	48	6898	Sasaki(Hirosaki.Univ)	dummy	0	2006/12/8/22:40:1(130.34.95.28)	真空引き
9	0	18	6898	Sasaki(Hirosaki.Univ)	dummy	0	2006/12/8/22:41:20(130.34.95.28)	真空引き
9	18	22	6898	Sasaki(Hirosaki.Univ)	dummy	0	2006/12/8/22:42:6(130.34.95.28)	Ti@70℃
9	22	24	6898	sasaki	dummy	0	2006/12/9/11:0:10(172.16.44.140)	Ti sputter@70℃
9	32	36	6937	hashimoto	dummy	0	2006/12/9/15:52:50(130.34.95.43)	Cr/Au@170℃
9	38	42	6937	nozawa	dummy	0	2006/12/9/17:41:49(130.34.95.43)	0
13	42	48	6898	settsu	dummy	0	2006/12/10/13:50:51(130.34.95.28)	Target change 3.Ti→Ta
-10	30	34	6898	sakomizu	dummy	0	2006/12/10/14:11:44(130.34.95.28)	Cr/Au @R.T	2006/12/10/14:59:3(130.34.95.28)
10	30	32	6898	sakomizu	dummy	0	2006/12/10/14:11:44(130.34.95.28)	Cr/Au @R.T
10	36	38	6898	sakomizu	dummy	0	2006/12/10/15:25:42(130.34.95.28)	Cr/Au  @R.T
-11	42	46	6937	Kurahashi	dummy	0	2006/12/11/11:43:22(130.34.95.43)	Ti@70℃	2006/12/11/19:25:20(130.34.95.43)
-12	32	48	6965	zhao	dummy	0	2006/12/11/12:29:27(130.34.95.31)	0	2006/12/11/13:14:52(130.34.95.31)
13	18	40	6965	zhao	dummy	0	2006/12/11/12:29:55(130.34.95.31)	0
12	32	48	6965	zhao	dummy	0	2006/12/11/13:16:15(130.34.95.31)	target change Ti→Au PZT→Al
-11	34	38	4771	田中克洋	dummy	0	2006/12/11/14:23:53(172.16.44.142)	ＰＺＴ	2006/12/11/15:35:57(172.16.44.142)
11	34	38	4771	田中克洋	dummy	0	2006/12/11/15:36:29(172.16.44.142)	ＰＺＴ　５００度
11	45	48	6937	Kurahashi	dummy	0	2006/12/11/22:18:0(130.34.95.43)	TiN
12	17	20	4771	田中克洋	dummy	0	2006/12/12/8:36:22(130.34.95.21)	PZT 50℃
14	20	24	6898	settsu	dummy	0	2006/12/12/17:45:32(130.34.95.28)	Ta sputter@R.T
13	2	10	4771	T.sano	dummy	0	2006/12/12/17:59:45(130.34.95.21)	Al@R.T.
14	26	30	6937	hashimoto	dummy	0	2006/12/13/19:49:34(130.34.95.43)	Ti/Pt@R.T
14	30	36	6898	Sasaki(Hirosaki.Univ)	dummy	0	2006/12/13/23:23:59(130.34.95.28)	Ti@70℃
-15	2	8	4771	Sano Kouji	dummy	0	2006/12/14/16:16:49(130.34.95.21)	0	2006/12/14/16:18:44(130.34.95.21)
-15	2	10	4771	Sano Kouji	dummy	0	2006/12/14/16:19:13(130.34.95.21)	Al@RT	2006/12/14/16:20:26(130.34.95.21)
19	26	32	6937	hashimoto	dummy	0	2006/12/16/17:25:22(130.34.95.43)	Ti/Pt@R.T
18	26	32	6937	hashimoto	dummy	0	2006/12/16/19:54:12(172.16.44.140)	Ti/Pt@R.T
18	32	34	6937	hashimoto	dummy	0	2006/12/18/12:50:13(130.34.95.43)	Ti/Pt@R.T
19	32	48	6965	zhao	dummy	0	2006/12/18/14:32:36(130.34.95.31)	target change 3Ta→Au　5Ti→Al
20	18	36	6965	zhao	dummy	0	2006/12/18/14:33:14(130.34.95.31)	0
20	4	12	4771	Kouji Sano	dummy	0	2006/12/18/15:53:6(130.34.95.21)	Al@RT
18	38	42	6937	H.Matsuo	dummy	0	2006/12/18/17:33:26(130.34.95.43)	Ti/Pt @ 315℃
21	34	48	4771	田中克洋	dummy	1	2006/12/21/11:9:38(130.34.95.21)	1Pt 3Ti 5PZT
22	22	32	4771	田中克洋	dummy	0	2006/12/21/11:12:9(130.34.95.21)	PZT/Pt/Ti 300℃
22	38	48	4771	K.shibata	dummy	0	2006/12/22/16:28:16(130.34.95.21)	0
23	21	25	4771	田中克洋	dummy	0	2006/12/23/10:14:5(130.34.95.21)	ＰＺＴ
26	30	36	6937	hashimoto	dummy	0	2006/12/25/19:50:6(130.34.95.43)	Ti/Pt@R.T
29	32	36	6937	Kurahashi	dummy	0	2006/12/29/15:32:27(130.34.95.43)	TiN@70℃