3 36 42 6936 kawai dummy 0 2006/9/30/17:4:51(130.34.95.43) PZT@315C -3 42 48 6937 Kurahashi dummy 0 2006/10/2/9:11:29(130.34.95.43) target change -> W 2006/10/3/15:42:41(130.34.95.43) -4 26 30 6937 Kurahashi dummy 0 2006/10/2/9:12:24(130.34.95.43) W sputter 2006/10/4/12:40:16(130.34.95.43) 2 40 48 6936 Kurahashi dummy 0 2006/10/2/17:18:49(130.34.95.43) target change 1.PZT 2.W 3.SiO2 3 0 20 6936 Kurahashi dummy 0 2006/10/2/17:20:5(130.34.95.43) target change 1.PZT 2.W 3.SiO2 3 20 24 6937 Yoshida dummy 0 2006/10/2/17:29:48(130.34.95.43) SiO2 sputter 3 30 36 6937 Yoshida dummy 0 2006/10/2/17:30:46(130.34.95.43) SiO2 sputter 3 24 26 6937 Yoshida dummy 0 2006/10/2/17:31:16(130.34.95.43) SiO2 sputter 3 26 28 6937 Yoshida dummy 0 2006/10/3/10:45:15(130.34.95.43) 0 4 30 44 6936 kawai dummy 0 2006/10/3/19:47:39(130.34.95.43) PZT @ 315 degree 4 23 26 6937 Kurahashi dummy 0 2006/10/4/11:30:28(130.34.95.43) W sputter -4 44 48 6936 randles dummy 0 2006/10/4/12:22:48(130.34.95.43) tAR 2006/10/4/12:23:4(130.34.95.43) 4 44 48 6936 randles dummy 0 2006/10/4/12:23:31(130.34.95.43) Target change Cr/Au 5 22 26 6936 Randles dummy 0 2006/10/4/12:24:37(130.34.95.43) Cr/Au at 170 C 4 26 28 6937 Kurahashi dummy 0 2006/10/2/9:12:24(130.34.95.43) W sputter 5 28 34 6937 hashimoto dummy 0 2006/10/4/13:22:39(130.34.95.43) Cr/Au at170 -5 38 46 4404 Lee dummy 0 2006/10/4/13:42:52(130.34.248.193) Cr/W @ R.T. 2006/10/5/19:49:37(130.34.248.193) 6 18 26 6898 sakomizu dummy 0 2006/10/5/10:30:32(130.34.95.28) Cr/Au @R.T 5 26 28 6936 randles dummy 0 2006/10/5/10:32:8(130.34.95.43) Cr/Au at 170 C 5 38 42 4404 Lee dummy 0 2006/10/4/13:42:52(130.34.248.193) Cr/W @ R.T. 6 28 38 4404 Lee dummy 0 2006/10/5/19:50:29(130.34.248.193) Cr/W @R.T. 6 26 28 6898 sakomizu dummy 0 2006/10/6/11:49:15(130.34.95.28) Cr/Au @R.T 10 26 32 6937 Kurahashi dummy 0 2006/10/6/22:7:45(130.34.95.43) W sputter 9 20 26 6936 randles dummy 0 2006/10/6/23:20:1(130.34.95.43) Cr/Au at 170 C 9 26 32 6936 Randles dummy 0 2006/10/9/11:44:35(130.34.95.43) Cr/Au at 170C 10 32 38 6937 Yoshida dummy 0 2006/10/9/20:53:32(130.34.95.43) SiO2 9 42 48 6936 kawai dummy 0 2006/10/9/20:56:4(130.34.95.43) target change 1.Au -> 1.PZT, 5. Cr ->5. SiO2 10 0 26 6936 kawai dummy 0 2006/10/9/20:56:40(130.34.95.43) PZT @320degree 10 38 42 6936 kawai dummy 0 2006/10/10/9:35:46(130.34.95.43) pzt@320degree 10 42 46 6937 Yoshida dummy 0 2006/10/10/18:4:12(130.34.95.43) SiO2 sputter 11 42 46 6936 kawai dummy 0 2006/10/10/20:39:38(130.34.95.43) PZT@320degree 11 10 18 4771 K.shibata dummy 0 2006/10/11/4:48:2(130.34.89.180) PZT at 320℃ 16 41 47 4771 K.shibata dummy 0 2006/10/16/20:23:39(130.34.89.180) PZT at 320℃ 17 25 32 4771 田中克洋 dummy 0 2006/10/16/23:28:3(130.34.89.180) PZT 320℃ -17 32 48 4771 田中克太平洋 dummy 1 2006/10/17/13:21:42(172.16.44.142) 0 2006/10/17/13:21:48(172.16.44.142) 17 32 48 4771 K.Tanaka dummy 1 2006/10/17/13:23:39(172.16.44.142) チャンバに落としたサンプル回収のため、大気開放の後、再度真空引きします 18 0 3 4771 田中克洋 dummy 0 2006/10/18/0:5:59(172.16.44.142) PZT　３２０度 -18 44 48 6898 settsu dummy 0 2006/10/18/10:12:26(130.34.95.28) Target change 3.W→Ti 2006/10/18/16:2:57(130.34.95.28) -19 0 10 6898 settsu dummy 0 2006/10/18/10:13:19(130.34.95.28) Target change 3.W→Ti 2006/10/18/16:3:3(130.34.95.28) 19 22 28 6898 settsu dummy 0 2006/10/18/10:16:41(130.34.95.28) Ti sputter -19 28 32 6898 k.kato dummy 0 2006/10/18/11:27:2(130.34.95.28) 0 2006/10/18/15:38:51(130.34.95.28) -19 28 32 6898 k.kato dummy 0 2006/10/18/15:39:17(130.34.95.28) Ti@70℃ 2006/10/19/13:51:44(130.34.95.28) 18 44 48 6898 settsu dummy 0 2006/10/18/16:4:8(130.34.95.28) Target change 5.SiO2→Ti 19 0 10 6898 settsu dummy 0 2006/10/18/16:4:30(130.34.95.28) Target change 5.SiO2→Ti 18 41 44 6898 settsu dummy 0 2006/10/18/20:17:54(130.34.95.28) Target change 5.SiO2→Ti 19 40 48 6898 settsu dummy 0 2006/10/19/12:32:11(130.34.95.28) Target change 1.pzt→Ti 5.Ti→pzt (5番でのTiは調子が悪いので1番と5番を入れ替えます) 19 28 30 6898 k.kato dummy 0 2006/10/18/15:39:17(130.34.95.28) Ti@70℃ 20 20 23 6898 settsu dummy 0 2006/10/20/2:20:22(130.34.95.28) 1.Ti sputter @R.T 20 23 26 6898 settsu dummy 0 2006/10/20/11:43:40(172.16.44.140) Ti Sputter@R.T -25 22 30 6937 Kurahashi dummy 0 2006/10/24/19:51:13(130.34.95.43) 0 2006/10/24/19:51:19(130.34.95.43) 25 22 30 6937 Kurahashi dummy 0 2006/10/24/19:51:36(130.34.95.43) W sputter 29 37 40 4771 田中克洋 dummy 0 2006/10/29/18:28:45(130.34.89.180) PZT 320℃ 29 40 44 4771 田中克洋 dummy 0 2006/10/29/19:38:36(130.34.89.180) PZT 320℃ 29 44 47 4771 田中克洋 dummy 0 2006/10/29/22:46:8(172.16.44.142) PZT　３２０度