-2	28	32	5251	hiroshima	dummy	0	2012/6/28/14:12:31(130.34.72.195)	0	2012/7/1/18:50:20(130.34.72.195)
-2	20	24	5810	kim	dummy	0	2012/6/28/22:38:21(130.34.95.49)	0	2012/7/2/9:25:27(130.34.95.49)
-4	26	36	4771	He	dummy	0	2012/6/29/9:22:13(130.34.95.21)	0	2012/7/3/17:54:43(130.34.95.49)
-2	32	36	5251	hiroshima	dummy	0	2012/7/1/18:51:19(130.34.72.195)	0	2012/7/2/14:51:49(130.34.72.195)
2	20	21	5810	kim	dummy	0	2012/6/28/22:38:21(130.34.95.49)	0
-4	37	41	5251	hiroshima	dummy	0	2012/7/2/14:53:37(130.34.72.195)	0	2012/7/3/17:54:47(130.34.95.49)
-4	20	24	4119	konno	dummy	0	2012/7/3/7:51:12(130.34.95.44)	0	2012/7/3/16:3:18(130.34.95.44)
-4	19	20	5810	tanaka	dummy	1	2012/7/3/13:20:36(130.34.95.49)	故障中 not available	2012/7/3/17:50:51(130.34.95.49)
4	18	48	5810	kawai	dummy	1	2012/7/3/17:55:58(130.34.95.49)	Maintenance pump trouble
5	0	18	5810	kawai	dummy	1	2012/7/3/17:56:41(130.34.95.49)	maintenance pump trouble
13	30	36	5810	tanaka	dummy	0	2012/7/13/10:40:41(130.34.95.49)	0
6	23	25	5810	Yokoyama	dummy	1	2012/7/13/10:43:22(130.34.95.44)	0
13	23	25	5810	Yokoyama	dummy	1	2012/7/13/10:43:47(130.34.95.44)	0
25	30	44	6937	Kochhar	dummy	0	2012/7/13/22:13:34(130.34.94.141)	2 samples
14	4	10	6965	endo ,sasaki	dummy	0	2012/7/13/23:44:54(130.34.95.31)	0
14	10	14	6965	endo	dummy	0	2012/7/14/3:13:51(130.34.95.44)	金森先生承認
-15	30	34	6937	N.WANG	dummy	0	2012/7/14/10:32:27(130.34.94.143)	吉田先生承認済み	2012/7/15/13:10:46(130.34.95.43)
-14	29	34	4771	Minh	dummy	0	2012/7/14/10:51:33(130.34.95.44)	with He san, Prof. Kuwano's permission	2012/7/14/12:5:31(130.34.95.21)
16	19	25	4771	Wang	dummy	0	2012/7/14/13:20:15(130.34.95.21)	0
-16	25	32	5810	Ka	dummy	0	2012/7/14/14:11:44(130.34.95.49)	0	2012/7/16/10:55:21(130.34.95.43)
14	35	38	6937	hirayanagi	dummy	0	2012/7/14/16:7:40(130.34.95.43)	塚本先生承認
-14	41	44	4771	Minh	dummy	0	2012/7/14/19:31:17(130.34.95.44)	with Phan, Prof. Kuwano's permission	2012/7/14/19:54:35(130.34.95.44)
14	41	42	4771	Minh	dummy	0	2012/7/14/19:31:17(130.34.95.44)	with Phan, Prof. Kuwano's permission
19	32	36	6937	hatakeyama	dummy	0	2012/7/14/20:3:10(130.34.95.43)	0
-15	34	38	5810	HE Liang	dummy	0	2012/7/15/9:1:12(130.34.95.49)	HE and Xie	2012/7/15/9:1:23(130.34.95.49)
-15	34	38	5810	HE Liang	dummy	0	2012/7/15/9:2:5(130.34.95.49)	川合先生確認　HE and Xie	2012/7/15/14:2:12(130.34.95.44)
-17	26	32	6965	ota	dummy	0	2012/7/15/9:33:0(130.34.95.43)	0	2012/7/15/11:7:28(130.34.95.31)
-17	28	34	6965	ota	dummy	0	2012/7/15/11:7:35(130.34.95.31)	0	2012/7/15/16:53:42(130.34.95.44)
18	27	33	5810	tanaka	dummy	0	2012/7/15/13:58:19(130.34.95.44)	0
15	31	33	5810	HE and Xue	dummy	0	2012/7/15/14:2:45(130.34.95.44)	0
15	33	36	6937	Nan WANG	dummy	0	2012/7/15/14:15:40(130.34.95.43)	吉田先生承認済み
17	17	26	5810	iizuka	dummy	0	2012/7/16/0:32:29(130.34.95.49)	0
-17	30	38	6909	S.Kanno	dummy	0	2012/7/16/13:3:7(130.34.95.37)	0	2012/7/17/11:54:39(130.34.95.37)
-17	40	45	6937	Hajika	dummy	0	2012/7/16/17:31:25(130.34.95.43)	0	2012/7/16/18:8:58(130.34.95.43)
18	22	27	6937	Hajika	dummy	0	2012/7/16/18:9:41(130.34.95.43)	0
16	45	48	6965	endo	dummy	0	2012/7/16/20:16:40(130.34.95.31)	0
17	0	4	6965	endo	dummy	0	2012/7/16/20:16:53(130.34.95.31)	0
-19	36	41	5251	hiroshima	dummy	0	2012/7/17/11:33:47(130.34.72.195)	0	2012/7/17/11:35:41(130.34.72.195)
-18	34	39	5251	hiroshima	dummy	0	2012/7/17/11:35:37(130.34.72.195)	0	2012/7/18/12:47:7(130.34.72.195)
-26	30	44	6937	Kochhar	dummy	0	2012/7/17/11:41:56(130.34.95.43)	0	2012/7/17/11:41:58(130.34.95.43)
-26	30	44	6937	Kochhar	dummy	0	2012/7/17/11:42:43(130.34.95.43)	two 4" wafers	2012/7/25/21:16:9(130.34.94.148)
-18	19	22	4771	Wang	dummy	0	2012/7/17/11:49:51(130.34.95.21)	0	2012/7/17/12:45:31(130.34.95.21)
-20	18	26	4119	fushimi	dummy	0	2012/7/17/12:20:2(130.34.63.131)	0	2012/7/17/12:23:2(130.34.63.131)
19	18	26	4119	fushimi	dummy	0	2012/7/17/12:23:43(130.34.63.131)	0
-17	40	48	4771	Minh	dummy	0	2012/7/17/12:44:6(130.34.95.21)	with Phan, Prof, Kuwano's permission	2012/7/17/16:48:19(130.34.95.21)
17	30	33	4771	Wang	dummy	0	2012/7/17/12:45:26(130.34.95.21)	0
18	39	43	5810	kim	dummy	0	2012/7/17/13:33:26(130.34.95.49)	0
19	38	46	5810	kim	dummy	0	2012/7/17/13:33:41(130.34.95.49)	0
-20	18	26	4119	nagai	dummy	0	2012/7/17/15:27:0(130.34.95.37)	0	2012/7/20/11:19:6(130.34.95.44)
17	36	38	4771	Wang	dummy	0	2012/7/17/16:48:3(130.34.95.21)	0
-17	44	48	4771	Minh	dummy	0	2012/7/17/16:48:40(130.34.95.21)	with Phan, Prof, Kuwano's permission	2012/7/17/17:59:0(130.34.95.21)
17	38	40	4771	Wang	dummy	0	2012/7/17/18:1:22(130.34.95.44)	0
19	26	29	6965	wu	dummy	0	2012/7/17/20:30:28(130.34.95.31)	0
-18	43	48	5810	SEO	dummy	0	2012/7/17/21:16:1(130.34.95.49)	0	2012/7/18/13:56:47(130.34.95.49)
-20	32	41	5810	iizuka	dummy	0	2012/7/17/21:45:14(130.34.95.49)	0	2012/7/17/21:46:11(130.34.95.49)
20	34	43	5810	iizuka	dummy	0	2012/7/17/21:46:45(130.34.95.49)	0
19	29	32	6937	Tsai	dummy	0	2012/7/18/9:6:29(130.34.95.44)	0
20	26	34	6909	S.Kanno	dummy	0	2012/7/18/9:52:39(130.34.95.37)	0
-23	20	30	6909	S.Kanno	dummy	0	2012/7/18/9:56:36(130.34.95.37)	0	2012/7/23/12:14:7(130.34.95.44)
19	36	38	5810	inomata	dummy	0	2012/7/18/10:54:36(130.34.95.49)	0
18	33	34	5810	inomata	dummy	0	2012/7/18/10:55:11(130.34.95.49)	0
-23	30	38	4771	suzuki	dummy	0	2012/7/18/11:1:35(130.34.95.21)	0	2012/7/20/13:15:6(130.34.95.21)
18	36	39	5810	Ka	dummy	0	2012/7/18/12:58:22(130.34.95.49)	0
18	34	36	5810	seo	dummy	0	2012/7/18/13:28:24(130.34.95.43)	0
-23	38	46	6937	Tsai	dummy	0	2012/7/18/14:34:7(130.34.95.44)	0	2012/7/18/14:34:32(130.34.95.44)
24	20	30	6937	Tsai	dummy	0	2012/7/18/14:35:13(130.34.95.44)	0
25	20	30	6937	Tsai	dummy	0	2012/7/18/14:48:41(130.34.95.44)	0
22	28	38	6937	Tsai	dummy	0	2012/7/18/14:52:25(130.34.95.44)	Lin先生 承認
21	29	39	4771	He	dummy	0	2012/7/18/15:44:35(130.34.95.21)	0
18	43	47	5810	Ka	dummy	0	2012/7/18/16:52:59(130.34.95.49)	0
-20	43	48	6937	Hajika, Suzuki	dummy	0	2012/7/18/17:19:31(130.34.95.43)	吉田先生承認	2012/7/20/17:7:38(130.34.95.43)
-21	17	28	4771	Wang	dummy	0	2012/7/18/21:47:2(130.34.95.21)	0	2012/7/20/19:15:40(130.34.95.21)
19	5	6	5810	Toan	dummy	0	2012/7/19/1:29:27(130.34.95.43)	With Ka, Miyashita sensei`s permission
19	6	7	5810	TOAN	dummy	0	2012/7/19/1:56:56(130.34.95.44)	0
-21	39	42	5810	HE Liang	dummy	0	2012/7/19/7:2:50(130.34.95.49)	川合先生確認	2012/7/20/14:15:33(130.34.95.49)
19	46	48	6965	wu,sasaki	dummy	0	2012/7/19/12:21:52(130.34.95.31)	0
20	0	8	5810	Toan	dummy	0	2012/7/19/15:44:23(130.34.95.49)	With Ka san, Miyashita sensei`s permission
-20	14	18	5810	kim	dummy	0	2012/7/19/19:35:31(130.34.95.44)	0	2012/7/19/19:48:26(130.34.95.44)
-23	38	46	5810	kim	dummy	0	2012/7/19/19:40:52(130.34.95.44)	0	2012/7/20/12:14:35(130.34.95.49)
-23	14	18	5810	kim	dummy	0	2012/7/19/21:37:3(130.34.95.49)	0	2012/7/20/12:6:3(130.34.95.49)
-20	8	18	6937	Nishino	dummy	0	2012/7/20/0:38:52(130.34.95.43)	0	2012/7/20/4:8:29(130.34.95.43)
20	8	11	6937	Nishino	dummy	0	2012/7/20/0:38:52(130.34.95.43)	0
-21	0	10	6937	nishino	dummy	0	2012/7/20/4:15:38(130.34.95.43)	田中先生承認	2012/7/20/12:9:41(130.34.95.43)
20	18	25	4119	nagai	dummy	0	2012/7/17/15:27:0(130.34.95.37)	0
21	0	10	6937	nishino	dummy	0	2012/7/20/12:9:57(130.34.95.43)	SiCetching and Si 300um以上エッチング
24	16	20	5810	kim	dummy	0	2012/7/20/12:14:45(130.34.95.49)	0
-25	12	20	5810	kim	dummy	0	2012/7/20/12:15:4(130.34.95.49)	0	2012/7/24/23:39:20(130.34.95.49)
22	0	6	6965	endo,sasaki	dummy	0	2012/7/20/14:48:6(130.34.95.31)	金森先生承認
26	20	28	4771	suzuki	dummy	0	2012/7/20/16:44:16(130.34.95.21)	0
23	30	36	6937	Hajika	dummy	0	2012/7/20/17:7:27(130.34.95.43)	0
23	36	41	6937	hirayanagi	dummy	0	2012/7/20/18:4:42(130.34.95.43)	0
-23	41	45	5810	inomata	dummy	0	2012/7/20/19:20:42(130.34.95.49)	0	2012/7/23/9:23:51(130.34.95.49)
-24	30	37	5810	intama	dummy	0	2012/7/20/19:21:14(130.34.95.49)	0	2012/7/20/19:21:27(130.34.95.49)
-24	30	37	5810	inotama	dummy	0	2012/7/20/19:21:40(130.34.95.49)	0	2012/7/22/14:34:11(130.34.95.43)
27	24	30	6937	Tsai	dummy	0	2012/7/21/11:28:54(130.34.95.44)	0
22	6	14	6965	endo	dummy	0	2012/7/22/2:24:24(130.34.95.44)	2wafer
22	38	42	5810	inomata	dummy	0	2012/7/22/13:20:19(130.34.95.49)	田中，川合先生承認
-25	0	9	6937	Hajika	dummy	0	2012/7/22/13:48:36(130.34.95.43)	2 wafers	2012/7/23/13:55:29(130.34.95.43)
-24	37	44	6965	endo	dummy	0	2012/7/22/14:20:39(130.34.95.31)	0	2012/7/22/14:36:12(130.34.95.31)
24	30	37	6965	endo	dummy	0	2012/7/22/14:36:31(130.34.95.31)	0
-24	38	45	4771	Wang	dummy	0	2012/7/23/7:50:29(130.34.95.21)	0	2012/7/24/9:33:27(130.34.95.21)
-27	30	38	6909	S.Kanno	dummy	0	2012/7/23/9:19:45(130.34.95.37)	0	2012/7/25/14:52:51(130.34.95.37)
23	20	27	6909	S.Kanno	dummy	0	2012/7/18/9:56:36(130.34.95.37)	0
25	3	12	6937	Hajika	dummy	0	2012/7/23/13:55:58(130.34.95.43)	2 wafers
26	10	20	6937	Hajika	dummy	0	2012/7/23/13:56:50(130.34.95.43)	2 wafers
24	45	48	5810	Ka	dummy	0	2012/7/23/19:12:37(130.34.95.49)	Toda sensi's permission
-27	16	23	6965	T.Sasaki	dummy	0	2012/7/23/20:29:54(130.34.95.31)	0	2012/7/23/20:30:34(130.34.95.31)
-27	38	44	6965	T.Sasaki	dummy	0	2012/7/23/20:30:55(130.34.95.31)	0	2012/7/25/21:26:13(130.34.95.31)
-24	6	12	6937	Hajika, Suzuki	dummy	0	2012/7/24/1:41:45(130.34.95.43)	吉田先生承認	2012/7/24/2:41:7(130.34.95.44)
24	6	8	6937	Hajika, Suzuki	dummy	0	2012/7/24/1:41:45(130.34.95.43)	吉田先生承認
-24	12	16	6937	Hajika, Suzuki	dummy	0	2012/7/24/2:41:46(130.34.95.44)	吉田先生承認	2012/7/24/4:17:37(130.34.95.43)
24	38	45	4771	Phan	dummy	0	2012/7/24/9:53:16(130.34.95.21)	0
24	37	38	6965	endo	dummy	0	2012/7/24/14:36:54(130.34.95.44)	0
-26	28	30	6937	N.WANG	dummy	0	2012/7/24/14:56:41(130.34.95.43)	0	2012/7/25/20:30:28(130.34.95.43)
-25	44	46	5810	HE Liang	dummy	0	2012/7/24/15:37:1(130.34.95.49)	川合先生確認	2012/7/25/15:10:45(130.34.95.43)
-25	1	3	5810	Ka	dummy	0	2012/7/24/23:33:26(130.34.95.49)	0	2012/7/24/23:33:41(130.34.95.49)
-25	0	3	5810	Ka	dummy	0	2012/7/24/23:34:13(130.34.95.49)	with Toan san	2012/7/24/23:34:26(130.34.95.49)
25	0	3	5810	Ka	dummy	0	2012/7/24/23:34:46(130.34.95.49)	with Toan
25	12	20	5810	kim	dummy	0	2012/7/24/23:39:37(130.34.95.49)	kawai sensei's permission
-27	44	48	6937	Hajika, Suzuki	dummy	0	2012/7/25/2:38:20(130.34.95.43)	吉田先生承認	2012/7/27/17:51:27(130.34.95.43)
-28	0	6	6937	Hajika, Suzuki	dummy	0	2012/7/25/2:38:47(130.34.95.43)	吉田先生承認	2012/7/25/2:40:59(130.34.95.43)
-28	0	7	6937	Hajika, Suzuki	dummy	0	2012/7/25/2:41:23(130.34.95.43)	吉田先生承認	2012/7/27/17:52:38(130.34.95.43)
-25	46	48	6937	nishino	dummy	0	2012/7/25/7:28:27(130.34.95.43)	0	2012/7/25/19:22:35(130.34.95.43)
-26	0	3	5810	kim	dummy	0	2012/7/25/9:7:36(130.34.95.44)	kawai sensei`s permission	2012/7/25/20:25:9(130.34.95.49)
27	16	24	4771	Phan	dummy	0	2012/7/25/12:47:46(130.34.95.21)	0
25	44	46	5810	kim	dummy	0	2012/7/25/15:12:0(130.34.95.43)	kawai sensei`s permission
-27	30	38	5810	HE Liang	dummy	0	2012/7/25/19:24:53(130.34.95.49)	0	2012/7/25/19:25:6(130.34.95.49)
-26	44	48	5810	HE Liang	dummy	0	2012/7/25/19:25:35(130.34.95.49)	川合先生確認	2012/7/26/8:9:45(130.34.95.49)
-28	24	30	6965	endo	dummy	0	2012/7/25/20:3:43(130.34.95.31)	kanamori sensei's permission	2012/7/26/16:17:0(130.34.95.44)
25	46	48	5810	kim	dummy	0	2012/7/25/20:24:33(130.34.95.49)	extension
-28	30	32	6937	N.WANG	dummy	0	2012/7/25/20:32:7(130.34.95.43)	0	2012/7/28/10:52:7(130.34.95.43)
26	28	34	6965	T.Sasaki	dummy	0	2012/7/25/21:26:7(130.34.95.31)	0
26	34	40	6965	endo	dummy	0	2012/7/25/22:11:27(130.34.95.31)	0
26	4	10	6937	nishino	dummy	0	2012/7/25/22:52:42(130.34.95.43)	0
27	0	7	6937	nishino	dummy	0	2012/7/26/7:8:48(130.34.95.43)	0
26	40	44	5810	HE Liang	dummy	0	2012/7/26/8:11:46(130.34.95.49)	0
27	30	38	4771	he	dummy	0	2012/7/26/8:27:38(130.34.95.21)	0
-29	28	34	6937	N.WANG	dummy	0	2012/7/26/14:8:25(130.34.95.43)	0	2012/7/29/9:52:56(130.34.95.43)
-28	22	28	4119	konno	dummy	0	2012/7/27/8:35:10(130.34.95.44)	0	2012/7/27/14:31:8(130.34.95.37)
-28	32	38	5810	inomata	dummy	0	2012/7/27/16:37:28(130.34.95.49)	田中，川合先生承認	2012/7/28/12:13:49(130.34.95.49)
27	46	48	6937	Hajika, Suzuki	dummy	0	2012/7/27/17:51:52(130.34.95.43)	吉田先生承認
28	0	8	6937	Hajika, Suzuki	dummy	0	2012/7/27/17:53:5(130.34.95.43)	吉田先生承認
28	8	9	6937	Hajika, Suzuki	dummy	0	2012/7/28/0:15:42(130.34.95.44)	延長
28	29	35	5810	inomata	dummy	0	2012/7/28/12:14:16(130.34.95.49)	田中
29	0	7	6937	nishino	dummy	0	2012/7/28/21:29:25(130.34.95.43)	0
-29	36	38	6937	N.WANG	dummy	0	2012/7/29/13:8:55(130.34.95.43)	吉田先生承認済み	2012/7/29/16:7:10(130.34.95.43)
-30	32	38	6937	N.WANG	dummy	0	2012/7/29/13:10:13(130.34.95.43)	0	2012/7/29/13:11:59(130.34.95.43)
-30	30	36	6937	N.WANG	dummy	0	2012/7/29/13:12:23(130.34.95.43)	吉田先生承認済み	2012/7/29/16:7:35(130.34.95.43)
30	24	26	6937	wang	dummy	0	2012/7/29/16:40:58(130.34.95.43)	0
-30	36	42	6937	wang	dummy	0	2012/7/29/16:41:56(130.34.95.43)	0	2012/7/30/14:42:46(130.34.95.43)
30	2	4	6937	nishino	dummy	0	2012/7/29/23:8:47(130.34.95.43)	0
31	28	30	5810	Yokoyama	dummy	1	2012/7/31/12:29:56(130.34.95.49)	装置立ち下げ