-22	20	32	6909	harashima	dummy	0	2013/1/21/14:6:17(130.34.95.37)	1μmseimaku	2013/1/21/14:6:24(130.34.95.37)
-22	20	32	6909	harashima	dummy	0	2013/1/21/14:7:20(130.34.95.37)	1μm 成膜予定	2013/1/22/9:58:48(130.34.95.37)
22	20	22	6909	harashima	dummy	0	2013/1/21/14:7:20(130.34.95.37)	1μm 成膜予定
23	28	42	6909	harashima	dummy	0	2013/1/23/12:37:22(130.34.95.37)	0
30	18	32	6908	kojima/isoda	dummy	0	2013/1/28/16:23:44(130.34.95.37)	0