9	20	30	6937	Weichih Lin	dummy	0	2012/5/7/14:30:42(130.34.95.43)	Training
17	22	32	6937	Weichih Lin	dummy	0	2012/5/17/9:56:28(130.34.95.43)	Cr/Pt/Ti etching
17	32	42	6937	Weichih Lin	dummy	0	2012/5/17/16:38:49(130.34.95.44)	Cr/Zn/Pt/Ti
23	22	34	6936	samoto	dummy	0	2012/5/22/9:32:53(130.34.95.43)	Cl2
22	39	48	6937	Weichih Lin	dummy	0	2012/5/22/18:35:48(130.34.95.43)	1 test sample
23	41	46	5810	mitsui	dummy	0	2012/5/23/19:18:49(130.34.95.49)	N2
24	20	28	6937	Weichih Lin	dummy	0	2012/5/24/8:38:22(130.34.95.43)	Cr/Si3N4/Pt/Ti etching
24	28	32	6937	Weichih Lin	dummy	0	2012/5/24/12:37:9(130.34.95.44)	0
28	20	32	6937	Weichih Lin	dummy	0	2012/5/27/18:56:36(130.34.95.43)	Cr/Ti/Pt
-28	38	48	6937	Weichih Lin	dummy	0	2012/5/28/18:5:56(130.34.95.44)	Ti/Pt/Cr/Zn/Cr/Si3N4	2012/5/28/19:0:12(130.34.95.43)
28	38	40	6937	Weichih Lin	dummy	0	2012/5/28/18:5:56(130.34.95.44)	Ti/Pt/Cr/Zn/Cr/Si3N4
30	20	24	5810	mitsui	dummy	1	2012/5/30/9:15:32(130.34.95.49)	0