4	26	36	6937	Konno	dummy	0	2012/12/4/11:4:13(130.34.95.43)	Cl2,BCl3
4	36	40	6937	konno	dummy	0	2012/12/4/16:58:24(130.34.95.44)	0
6	26	32	6937	Asano	dummy	0	2012/12/4/17:42:38(130.34.95.43)	Ar
4	40	42	6937	konno	dummy	0	2012/12/4/18:6:19(130.34.95.44)	0
12	28	40	6937	Konno	dummy	0	2012/12/12/10:10:44(130.34.95.43)	Cl2,BCl3
-14	22	28	6937	Asano	dummy	0	2012/12/13/19:7:0(130.34.95.43)	Ar	2012/12/13/22:2:13(130.34.95.43)
12	40	44	6937	konno	dummy	0	2012/12/13/19:43:18(130.34.95.44)	0
14	23	29	6937	Asano	dummy	0	2012/12/13/22:2:28(130.34.95.43)	Ar
14	32	36	6937	Asano	dummy	0	2012/12/14/15:42:43(130.34.95.43)	vacuum etch chamber
-14	36	39	6937	Asano	dummy	0	2012/12/14/17:38:27(130.34.95.43)	0	2012/12/14/17:38:50(130.34.95.43)
14	36	38	6937	Asano	dummy	0	2012/12/14/17:38:27(130.34.95.43)	0