5	20	34	6908	konno	dummy	0	2006/8/30/10:50:47(130.34.95.37)	SiN depo
1	28	46	6908	Ali	dummy	0	2006/8/30/19:21:49(172.16.44.142)	0
2	20	38	6909	Sakaguchi	dummy	0	2006/8/31/17:22:57(172.16.44.142)	0
-6	20	34	6908	konno	dummy	0	2006/9/4/8:14:46(130.34.95.37)	SiN depo	2006/9/5/11:36:11(172.16.44.142)
4	26	32	6909	beajicheol	dummy	0	2006/9/4/11:40:32(172.16.44.142)	0
6	26	32	6908	konno	dummy	0	2006/9/6/11:28:44(172.16.44.142)	チャンバクリーニング
11	20	34	6908	konno	dummy	0	2006/9/8/7:36:17(172.16.44.142)	SiN depo
5	39	44	6909	Sakaguchi	dummy	0	2006/9/8/19:4:10(172.16.44.142)	p-TEOS
8	39	44	6909	Sakaguchi	dummy	0	2006/9/8/19:4:35(172.16.44.142)	p-TEOS
10	28	40	6909	Sakaguchi	dummy	0	2006/9/8/23:31:56(130.34.95.37)	0
14	26	46	6908	Ali	dummy	0	2006/9/14/11:22:47(130.34.95.37)	0
15	32	42	6909	beajicheol	dummy	0	2006/9/15/11:4:47(172.16.44.142)	0
22	20	36	6908	konno	dummy	0	2006/9/15/12:27:59(172.16.44.142)	0
20	27	31	6909	Sakaguchi & Sun	dummy	0	2006/9/20/13:31:10(130.34.95.37)	0
27	26	34	6909	Sakaguchi	dummy	0	2006/9/26/16:53:33(172.16.44.142)	0
27	21	26	6908	Kikuchi	dummy	0	2006/9/27/9:8:36(130.34.95.37)	ユーテックＣＶＤ使用
28	37	40	6908	Kikuchi	dummy	0	2006/9/28/9:10:11(130.34.95.37)	ユーテックＣＶＤ使用
30	20	34	6908	konno	dummy	0	2006/9/28/11:5:23(172.16.44.142)	P-SiN