-2 26 40 6909 Sakaguchi dummy 0 2006/11/1/19:32:11(172.16.44.140) 0 2006/11/2/16:59:44(130.34.95.37) 2 26 36 6909 Sakaguchi dummy 0 2006/11/1/19:32:11(172.16.44.140) 0 3 22 40 6909 Sakaguchi dummy 0 2006/11/2/17:1:41(130.34.95.37) 0 6 20 34 6908 konno dummy 0 2006/11/6/8:3:48(130.34.95.37) 0 6 34 40 6909 Sakaguchi dummy 0 2006/11/6/15:58:59(172.16.44.142) 0 7 22 46 6908 Ali dummy 0 2006/11/6/21:7:5(130.34.95.37) 0 8 22 38 6908 Ali dummy 0 2006/11/7/16:10:46(172.16.44.142) 0 8 40 48 6909 Sakaguchi dummy 0 2006/11/8/12:26:19(172.16.44.142) 0 9 26 38 6909 Sakaguchi dummy 0 2006/11/8/12:26:43(172.16.44.142) p-SiN CVD 9 18 26 6908 konno dummy 0 2006/11/8/15:36:51(172.16.44.140) 0 10 30 46 6909 Sakaguchi dummy 0 2006/11/9/21:8:56(172.16.44.140) 0 11 24 34 6909 Sakaguchi dummy 0 2006/11/10/14:30:32(172.16.44.142) 0 16 30 38 6908 Kikuchi dummy 0 2006/11/15/18:21:57(130.34.95.37) ユーテックCVD使用 18 22 46 6909 Sakaguchi dummy 0 2006/11/15/18:59:45(172.16.44.142) 0 -16 40 48 5318 yonemoto dummy 0 2006/11/15/21:12:44(130.34.231.209) 0 2006/11/16/17:45:14(130.34.231.209) 16 44 48 5318 yonemoto dummy 0 2006/11/16/17:48:12(130.34.231.209) 0 17 0 4 5318 yonemoto dummy 0 2006/11/16/22:54:47(172.16.44.140) 0 20 22 30 5318 yonemoto dummy 0 2006/11/17/0:21:28(172.16.44.142) 0 19 20 44 6909 Sakaguchi dummy 0 2006/11/17/17:32:43(172.16.44.142) p-TEOS CVD使用 21 22 44 6908 Ali dummy 0 2006/11/20/11:47:51(130.34.95.37) 0 -21 44 48 6909 Sakaguchi dummy 0 2006/11/20/14:44:4(172.16.44.142) 0 2006/11/21/18:26:23(172.16.44.140) 22 18 48 6909 Sakaguchi dummy 0 2006/11/20/14:44:42(172.16.44.142) 途中p-TEOS CVDも使用 -23 16 32 5318 wada dummy 0 2006/11/20/16:36:53(130.34.231.209) 0 2006/11/23/12:55:46(172.16.44.140) 23 34 48 6909 Sakaguchi dummy 0 2006/11/22/23:4:27(172.16.44.142) p-TEOS CVD 23 16 28 5318 wada dummy 0 2006/11/20/16:36:53(130.34.231.209) 0 25 26 48 6909 Sakaguchi dummy 0 2006/11/24/18:58:41(130.34.95.37) 0 27 34 48 6909 Sakaguchi dummy 0 2006/11/27/12:12:10(130.34.95.37) 0 28 26 32 6908 Kikuchi dummy 0 2006/11/28/10:7:51(130.34.95.37) ユーテックCVD使用 28 32 45 6908 Ali dummy 0 2006/11/28/12:18:49(130.34.95.37) 0 29 30 43 6909 Sakaguchi dummy 0 2006/11/28/16:51:41(130.34.95.37) 0