#rooms_begin
2蜿ｷ鬢ｨCR	m2_cr
隘ｿ貔､繧ｻ繝ｳ繧ｿ繝ｼ	nishizawa_center
#rooms_end

#begin=0
deep_rie	Deep RIE
nano_bio	繝翫ヮ繝舌う繧ｪ閾ｪ蜍墓�閹懆｣�ｽｮ
evg_bonder	EVG繝懊Φ繝€繝ｼ
dicer	繝€繧､繧ｵ繝ｼ
lazer_dansakei	繝ｬ繝ｼ繧ｶ繝ｼ谿ｵ蟾ｮ險�
cu_mekki	Cu繧√▲縺崎｣�ｽｮ
sn_mekki	Sn繧√▲縺崎｣�ｽｮ
logitec_kemma	繝ｭ繧ｸ繝�ャ繧ｯ遐皮｣ｨ陬�ｽｮ
nanofactor_kemma	繝翫ヮ繝輔ぃ繧ｯ繧ｿ繝ｼ遐皮｣ｨ陬�ｽｮ
jushi_houmai_kemma	讓ｹ閼ょ桁蝓玖ｩｦ譁咏�皮｣ｨ陬�ｽｮ
#end

#begin=1
suss_aligner	SUSS繧｢繝ｩ繧､繝翫�
spray	繧ｹ繝励Ξ繝ｼ繧ｳ繝ｼ繧ｿ繝ｼ
spin	繧ｹ繝斐Φ繧ｳ繝ｼ繧ｿ繝ｼ(SUSS)
evaporator	闥ｸ逹€陬�ｽｮ
flip_chip_bonder	繝輔Μ繝��繝√ャ繝励�繝ｳ繝€繝ｼ
excima	繧ｨ繧ｭ繧ｷ繝樒�蟆�｣�ｽｮ
raman	繝ｩ繝槭Φ蛻��陬�ｽｮ
#end