#rooms_begin 繝｡繧､繝ｳ繧ｯ繝ｪ繝ｼ繝ｳ繝ｫ繝ｼ繝� mainclean_room 繧､繧ｨ繝ｭ繝ｼ繝ｫ繝ｼ繝� yellow_room 驥大ｱ櫁頂逹螳､ metal_deposition_room TEM螳､ tem_room 繝ｬ繝ｼ繧ｶ蜉�蟾･螳､ laser_room 蛻�梵螳､ analysis_room 蜈牙ｭｦ貂ｬ螳壼ｮ､ optic_measurament_room 邨�ｫ玖ｩ穂ｾ｡螳､ assembly_test_room 繧ｳ繝ｳ繝斐Η繝ｼ繧ｿ螳､ computer_room 髮ｻ豌怜ｮ滄ｨ灘ｮ､ electric_experiment_room �馴嚴螳滄ｨ灘ｮ､ experiment_room 繝翫ヮ繝槭す繝九Φ繧ｰ譽� nanomachining_room 螳滄ｨ捺｣蘗 jikkentou_A 螳滄ｨ捺｣櫂 jikkentou_D #rooms_end #begin=0 pilo_upper 繝代う繝ｭ驟ｸ蛹也ｉ(荳頑ｮｵ) pilo_middle 繝代う繝ｭ驟ｸ蛹也ｉ(荳ｭ谿ｵ) pilo_lower 繝代う繝ｭ驟ｸ蛹也ｉ(荳区ｮｵ) h2_aneal 豌ｴ邏�繧｢繝九�繝ｫ轤峨�POCL轤� wafer_aligner 繧ｦ繧ｧ繝上�繧｢繝ｩ繧､繝翫� al_etcher Al繧ｨ繝�メ繝｣繝ｼ(繧｢繝阪Ν繝�) sts1 STS ICP RIE #1 sts2 STS ICP RIE #2 metal_rie ANELVA RIE #1 metal_rie2 ANELVA RIE #2 fab FAB ion_injector 繧､繧ｪ繝ｳ豕ｨ蜈･陬�ｽｮ pteos_cvd P-TEOS CVD evg_bonder EVG繝懊Φ繝 ulvac_ecr ECR RIE(ULVAC) dainichi_ecr ECR RIE(螟ｧ譌･逵溽ｩｺ) youtec_cvd YOUTEC繝励Λ繧ｺ繝曚VD anelva_cvd ANELVA 繝励Λ繧ｺ繝朶iN-CVD tel_lpcvd TEL LPCVD ulvac_cvd ULVAC WCVD anelva_etcher DFR CONTACT ETCHER(ANELVA) cl2 Cl2繝懊Φ繝� bcl3 BCL3繝懊Φ繝� elipso 繧ｨ繝ｪ繝励た繝｡繝ｼ繧ｿ(CR) #end #begin=1 hl800 髮ｻ蟄舌ン繝ｼ繝� 髴ｲ蜈芽｣�ｽｮ (Hitachi HL800) iline_stepper I邱壹せ繝�ャ繝代� evg_aligner EVG繧｢繝ｩ繧､繝� evg_washer EVG謗･蜷育畑蝓ｺ譚ｿ豢玲ｵ� (EVG301) evg_plasma EVG繝励Λ繧ｺ繝櫁｡ｨ髱｢豢ｻ諤ｧ蛹冶｣�ｽｮ evg_spray EVG繧ｹ繝励Ξ繝ｼ繧ｳ繝ｼ繧ｿ繝ｼ #end #begin=2 anelva_sputter ANELVA繧ｹ繝代ャ繧ｿ jeol_sputter JEOL繧ｹ繝代ャ繧ｿ eiko_sputter EIKO繧ｹ繝代ャ繧ｿ dc_sputter DC蟇ｾ蜷代ち繝ｼ繧ｲ繝�ヨ繧ｹ繝代ャ繧ｿ rftaiko_sputter RF蟇ｾ蜷代ち繝ｼ繝�ャ繝医せ繝代ャ繧ｿ(螟ｧ髦ｪ逵溽ｩｺ) eb_evaporator EB闥ｸ逹 rf_sputter RF繧ｹ繝代ャ繧ｿ(Al繧ｹ繝代ャ繧ｿ) herikon_sputter 繝倥Μ繧ｳ繝ｳ繧ｹ繝代ャ繧ｿ rfdc_sputter RF/DC騾�ｻ倥せ繝代ャ繧ｿ shibaura_sputter SHIBAURA繧ｹ繝代ャ繧ｿ#1 shibaura_sputter2 SHIBAURA繧ｹ繝代ャ繧ｿ#2 ecr_sputter ECR繧ｹ繝代ャ繧ｿ #end #begin=3 jeol_eb JEOL EB #end #begin=4 krf_leaser KrF繧ｨ繧ｭ繧ｷ繝槭Ξ繝ｼ繧ｶ繝ｼ newyag_laser YAG繝ｬ繝ｼ繧ｶ繝ｼ(譁ｰ) oldyag_laser YAG繝ｬ繝ｼ繧ｶ繝ｼ(譌ｧ) pulse_yag 繝代Ν繧ｹYAG(Solar) film_value 阮��隧穂ｾ｡陬�ｽｮ parylene_evaporator 繝代Μ繝ｬ繝ｳ闥ｸ逹 mbe MBE holeeq1 繝帙�繝ｫ蜉ｹ譫懈ｸｬ螳夊｣�ｽｮ plmeas1 PL貂ｬ螳夊｣�ｽｮ #end #begin=5 fe_sem FE-SEM hitachi_sem 辭ｱ髮ｻ蟄心EM fib FIB sims SIMS fluoro_film 陋榊�X邱夊�蜴夊ｨ� #end #begin=6 uv_ellipsometer 邏ｫ螟門�蜈峨お繝ｪ繝励た繝｡繝ｼ繧ｿ繝ｼ ellipsometer 繧ｨ繝ｪ繝励た繝｡繝ｼ繧ｿ繝ｼ xef2_etcher XeF2繧ｨ繝�メ繝｣繝ｼ para_oscillator 蜈峨ヱ繝ｩ繝｡繝医Μ繝�け逋ｺ謖ｯ蝎ｨ multi_spectroscope 繝槭Ν繝√メ繝｣繝ｳ繝阪Ν蛻��蝎ｨ tiring_laser 繝√ち繝ｳ繧ｵ繝輔ぃ繧､繧｢ 繝ｪ繝ｳ繧ｰ繝ｬ繝ｼ繧ｶ infrared_camera 襍､螟也ｷ壹き繝｡繝ｩ femtosec_laser 繝輔ぉ繝�繝育ｧ偵Ξ繝ｼ繧ｶ plasma_cvd 繝励Λ繧ｺ繝� CVD light_molding 蜈蛾�蝙� molecular_etching 蛻�ｭ千ｷ壹お繝�メ繝ｳ繧ｰ陬�ｽｮ time_spectroscopy 譎る俣蛻�ｧ｣蛻��陬�ｽｮ spectro_etching 蛻��逕ｨ繧ｨ繝�メ繝ｳ繧ｰ陬�ｽｮ lcd_injector 豸ｲ譎ｶ豕ｨ蜈･陬�ｽｮ infrared_zygosis 襍､螟匁磁蜷郁ｩ穂ｾ｡陬�ｽｮ #end #begin=7 plating_set 繝｡繝�く繧ｻ繝�ヨ spectro_analyzer 蜈峨せ繝壹け繝医Λ繝�繧｢繝翫Λ繧､繧ｶ hipos 繝上う繝昴せ(HIPOS) excima_lamp 繧ｨ繧ｭ繧ｷ繝槭Λ繝ｳ繝励�菴守悄遨ｺ繝吶�繧ｯ轤� laser_doppler1 繝ｬ繝ｼ繧ｶ繝ｼ繝峨ャ繝励Λ繝ｼ謖ｯ蜍戊ｨ� uv_exposure 邏ｫ螟也ｷ夐愆蜈芽｣�ｽｮ hifreq_probe 8.5GHz 繝阪ャ繝医Ρ繝ｼ繧ｯ繧｢繝翫Λ繧､繧ｶ vacaccel_test 逵溽ｩｺ蜉�騾溷ｺｦ隧ｦ鬨灘勣 refraction 螻域釜邇�ｸｬ螳夊｣�ｽｮ LSI_tester LSI繝�せ繧ｿ #end #begin=8 #end #begin=9 prober 繝励Ο繝ｼ繝� subst_machining 蝓ｺ譚ｿ蜉�蟾･陬�ｽｮ impedance_analyzer 繧､繝ｳ繝斐�繝繝ｳ繧ｹ繧｢繝翫Λ繧､繧ｶ #end #begin=10 polishing_machine 遐皮｣ｨ陬�ｽｮ polytec 繝昴Μ繝�ャ繧ｯ ft-ir 蜈ｨ逵溽ｩｺ鬘募ｾｮFTIR #end #begin=11 pg 繝代ち繝ｼ繝ｳ繧ｸ繧ｧ繝阪Ξ繝ｼ繧ｿ繝ｼ jeol_eb5000 JEOL EB 5000LSS shrinking_camera 邵ｮ蟆上き繝｡繝ｩ繝ｻ迴ｾ蜒� esca_analyzer ESCA蛻�梵陬�ｽｮ hivac_stm 雜�ｫ倡悄遨ｺSTM shimazu_spm Shimazu SPM olympus_spm Olympus SPM phto_counter 繝輔か繝医Φ繧ｫ繧ｦ繝ｳ繝�ぅ繝ｳ繧ｰ繧ｫ繝｡繝ｩ繝ｻ陋榊�鬘募ｾｮ髀｡ hotfilum_cvd 繝帙ャ繝医ヵ繧｣繝ｩ繝｡繝ｳ繝�CVD throw_exposure 謚募ｽｱ髴ｲ蜈芽｣�ｽｮ pe_cvd PE-CVD(CNTs) fluoro_microscope 陋榊�鬘募ｾｮ髀｡ laser_doppler2 繝ｬ繝ｼ繧ｶ繝ｼ繝峨ャ繝励Λ繝ｼ謖ｯ蜍戊ｨ�2 maskless_exposuer 繝槭せ繧ｯ繝ｬ繧ｹ髴ｲ蜈芽｣�ｽｮ laser_beamequ1 繝ｬ繝ｼ繧ｶ繝ｼ謠冗判陬�ｽｮ #end #begin=12 dicer 繝繧､繧ｵ繝ｼ #end #begin=13 sand_blast 繧ｵ繝ｳ繝峨ヶ繝ｩ繧ｹ繝� #end