-1	18	28	4119	konno	dummy	0	2020/6/23/8:39:56(130.34.95.37)	0	2020/6/25/8:50:41(130.34.63.131)
-2	18	28	4119	konno	dummy	0	2020/6/23/8:40:5(130.34.95.37)	0	2020/7/1/13:21:8(130.34.63.131)
-3	18	28	4119	konno	dummy	0	2020/6/23/8:40:13(130.34.95.37)	0	2020/7/1/13:21:11(130.34.63.131)
6	18	28	4119	konno	dummy	0	2020/6/25/8:50:48(130.34.63.131)	0
-1	26	34	6909	miwa	dummy	0	2020/6/25/19:13:58(130.34.93.133)	+hp+coater	2020/7/1/9:34:21(130.34.93.133)
1	18	26	4119	konno	dummy	0	2020/6/26/7:49:23(130.34.74.220)	0
-7	18	28	4119	konno	dummy	0	2020/6/26/7:49:32(130.34.74.220)	0	2020/7/7/8:50:20(130.34.63.131)
8	18	28	4119	konno	dummy	0	2020/6/26/7:49:41(130.34.74.220)	0
9	20	26	4119	ichitsubo	dummy	0	2020/6/30/16:9:28(130.34.74.220)	0
1	26	34	6909	miwa	dummy	0	2020/7/1/9:34:51(130.34.93.133)	permisiion by prof. tanaka, +hp+coater
2	28	36	4119	yanagimura	dummy	0	2020/7/1/10:49:11(130.34.74.220)	0
-3	18	30	4119	konno	dummy	0	2020/7/1/13:21:19(130.34.63.131)	0	2020/7/3/8:16:5(130.34.95.37)
2	18	28	4119	konno	dummy	0	2020/7/1/15:4:9(130.34.74.220)	0
-6	28	36	4119	mori	dummy	0	2020/7/2/8:18:56(130.34.74.220)	0	2020/7/6/8:7:29(130.34.74.220)
-7	28	36	4119	mori	dummy	0	2020/7/2/8:19:4(130.34.74.220)	0	2020/7/6/8:7:34(130.34.74.220)
-8	28	36	4119	mori	dummy	0	2020/7/2/8:19:12(130.34.74.220)	0	2020/7/7/8:48:24(130.34.95.37)
-9	26	36	4119	mori	dummy	0	2020/7/2/8:19:22(130.34.74.220)	0	2020/7/8/12:51:47(130.34.95.37)
-10	20	32	4119	mori	dummy	0	2020/7/2/8:19:35(130.34.74.220)	0	2020/7/8/12:56:40(130.34.95.37)
13	18	32	4119	konno	dummy	0	2020/7/2/11:35:27(130.34.63.131)	0
-14	18	32	4119	konno	dummy	0	2020/7/2/11:36:26(130.34.63.131)	0	2020/7/14/11:59:17(130.34.63.131)
-15	18	32	4119	konno	dummy	0	2020/7/2/11:36:34(130.34.63.131)	0	2020/7/15/11:3:11(130.34.63.131)
6	14	18	4119	fushimi	dummy	0	2020/7/3/6:52:46(130.34.63.131)	0
3	18	19	4119	konno	dummy	0	2020/7/1/13:21:19(130.34.63.131)	0
9	16	20	4119	konno	dummy	0	2020/7/3/8:16:57(130.34.95.37)	0
-3	26	32	4119	konno	dummy	0	2020/7/3/9:42:5(130.34.95.37)	0	2020/7/3/13:45:44(130.34.74.220)
-7	14	18	4119	fushimi	dummy	0	2020/7/3/11:4:27(130.34.63.131)	0	2020/7/7/6:41:47(130.34.95.37)
3	32	36	4119	mori	dummy	0	2020/7/3/13:0:46(130.34.95.37)	HP+コーターのみ使用
3	26	30	4119	konno	dummy	0	2020/7/3/9:42:5(130.34.95.37)	0
3	30	32	4119	mori	dummy	0	2020/7/3/14:29:20(130.34.63.131)	0
16	18	30	4119	konno	dummy	0	2020/7/6/6:49:35(130.34.74.220)	0
-10	16	20	4119	konno	dummy	0	2020/7/6/6:57:31(130.34.74.220)	0	2020/7/8/13:32:24(130.34.63.131)
7	28	32	4119	konno	dummy	0	2020/7/6/8:46:3(130.34.63.131)	0
-6	28	32	4119	konno	dummy	0	2020/7/6/8:46:11(130.34.63.131)	0	2020/7/6/13:58:39(130.34.63.131)
17	18	30	4119	konno	dummy	0	2020/7/6/9:6:4(130.34.63.131)	0
6	28	30	4119	konno	dummy	0	2020/7/6/8:46:11(130.34.63.131)	0
7	14	16	4119	fushimi	dummy	0	2020/7/3/11:4:27(130.34.63.131)	0
-14	32	38	4119	aizawa	dummy	0	2020/7/7/8:26:11(130.34.74.60)	Cu&Tiウェットエッチング2枚予定	2020/7/7/8:27:26(130.34.74.60)
-15	32	38	4119	aizawa	dummy	0	2020/7/7/8:26:29(130.34.74.60)	Cu&Tiウェットエッチング2枚予定　予備	2020/7/7/8:27:28(130.34.74.60)
-16	30	38	4119	aizawa	dummy	0	2020/7/7/8:26:48(130.34.74.60)	Cu&Tiウェットエッチング2枚予定　予備	2020/7/7/8:27:33(130.34.74.60)
-14	32	38	4119	aizawa	dummy	0	2020/7/7/8:27:52(130.34.74.60)	4インチ2枚予定	2020/7/7/8:41:15(130.34.74.60)
-15	32	38	4119	aizawa	dummy	0	2020/7/7/8:28:7(130.34.74.60)	4インチ2枚予定　予備	2020/7/7/8:41:20(130.34.74.60)
16	30	38	4119	aizawa	dummy	0	2020/7/7/8:37:48(130.34.74.60)	4インチ2枚　予備
15	32	38	4119	aizawa	dummy	0	2020/7/7/8:41:37(130.34.74.60)	4インチ2枚予定
7	18	20	4119	konno	dummy	0	2020/6/26/7:49:32(130.34.74.220)	0
-9	26	32	4119	konno	dummy	0	2020/7/8/13:32:16(130.34.63.131)	0	2020/7/9/6:48:48(130.34.74.220)
8	28	30	4119	konno	dummy	0	2020/7/8/13:43:46(130.34.63.131)	0
10	20	28	4119	konno	dummy	0	2020/7/9/6:49:10(130.34.74.220)	HP & coater
10	14	20	4119	fushimi	dummy	0	2020/7/9/6:52:44(130.34.63.131)	0
9	14	16	4119	fushimi	dummy	0	2020/7/9/6:52:55(130.34.63.131)	0
11	14	24	4119	endo	dummy	0	2020/7/9/7:1:24(130.34.63.131)	0
-12	14	24	4119	endo	dummy	0	2020/7/9/7:1:32(130.34.63.131)	0	2020/7/10/9:39:15(130.34.63.131)
-10	28	32	4119	konno	dummy	0	2020/7/9/12:50:4(130.34.95.37)	0	2020/7/10/10:57:54(130.34.63.131)
-9	28	32	4119	ichitsubo	dummy	0	2020/7/9/12:51:54(130.34.63.131)	0	2020/7/9/13:6:26(130.34.63.131)
9	28	29	4119	ichitsubo	dummy	0	2020/7/9/12:51:54(130.34.63.131)	0
9	26	28	4119	ichitsubo	dummy	0	2020/7/9/13:6:45(130.34.63.131)	0
-21	22	30	4119	konno	dummy	0	2020/7/10/8:50:38(130.34.95.37)	0	2020/7/16/14:43:32(130.34.95.37)
-21	16	22	4119	konno	dummy	0	2020/7/13/11:37:35(130.34.63.131)	0	2020/7/16/14:43:35(130.34.95.37)
14	18	26	4119	konno	dummy	0	2020/7/2/11:36:26(130.34.63.131)	0
14	27	31	4119	tamate	dummy	0	2020/7/14/12:43:4(130.34.63.131)	hp & coater
14	33	37	4119	tamate	dummy	0	2020/7/14/16:36:1(130.34.63.131)	hp & coater
15	18	25	4119	konno	dummy	0	2020/7/2/11:36:34(130.34.63.131)	0
15	29	32	4119	tamate	dummy	0	2020/7/15/12:49:37(130.34.95.37)	hp & coater
-20	24	34	6909	Kumahara	dummy	0	2020/7/15/20:53:53(130.34.95.37)	0	2020/7/15/20:54:13(130.34.95.37)
-20	24	36	6909	Kumahara	dummy	0	2020/7/15/20:54:19(130.34.95.37)	0	2020/7/16/13:54:46(130.34.95.37)
16	14	18	4119	fushimi	dummy	0	2020/7/16/7:2:39(130.34.63.131)	コータ周り使用
-20	16	24	4119	konno	dummy	0	2020/7/16/7:58:16(130.34.63.131)	0	2020/7/16/14:43:41(130.34.95.37)
-21	30	36	4119	yanagimura	dummy	0	2020/7/16/9:16:29(130.34.74.220)	0	2020/7/20/14:31:20(130.34.63.131)
-20	24	30	4119	konno	dummy	0	2020/7/16/14:43:27(130.34.95.37)	0	2020/7/16/14:43:44(130.34.95.37)
-20	22	30	4119	konno	dummy	0	2020/7/16/14:43:52(130.34.95.37)	0	2020/7/20/13:11:24(130.34.63.131)
-20	16	22	4119	fushimi	dummy	0	2020/7/17/9:16:40(130.34.63.131)	コータ周り	2020/7/20/8:18:2(130.34.63.131)
21	18	28	4119	konno	dummy	0	2020/7/17/10:33:48(130.34.63.131)	0
20	16	19	4119	fushimi	dummy	0	2020/7/17/9:16:40(130.34.63.131)	コータ周り
20	19	22	4119	konno	dummy	0	2020/7/20/8:48:27(130.34.63.131)	0
20	22	29	4119	konno	dummy	0	2020/7/16/14:43:52(130.34.95.37)	0
21	28	36	4119	yanagimura	dummy	0	2020/7/20/14:31:32(130.34.63.131)	0
-22	17	21	4119	konno	dummy	0	2020/7/21/9:18:12(130.34.63.131)	HP1台＋コーターのみ	2020/7/21/15:38:3(130.34.74.220)
22	24	30	4119	konno	dummy	0	2020/7/22/11:3:24(130.34.95.37)	hp & coater
23	24	32	4119	mori	dummy	0	2020/7/22/17:58:0(130.34.74.220)	0
24	24	32	4119	mori	dummy	0	2020/7/22/17:58:7(130.34.74.220)	0
-27	20	28	6909	Kumahara	dummy	0	2020/7/26/12:38:9(130.34.95.37)	0	2020/7/27/1:25:16(130.34.93.133)
-27	34	42	6909	Kumahara	dummy	0	2020/7/26/12:38:16(130.34.95.37)	0	2020/7/27/1:26:4(130.34.93.133)
-27	20	30	6909	Kumahara	dummy	0	2020/7/27/1:25:34(130.34.93.133)	,	2020/7/27/1:25:38(130.34.93.133)
27	20	30	6909	Kumahara	dummy	0	2020/7/27/1:26:1(130.34.93.133)	田中(徹)教授承認済、共同実験者：浦山
27	34	42	6909	Kumahara	dummy	0	2020/7/27/1:26:13(130.34.93.133)	田中(徹)教授承認済、共同実験者：浦山
27	16	20	4119	konno	dummy	0	2020/7/27/6:48:19(130.34.74.220)	0
-30	18	26	4119	konno	dummy	0	2020/7/27/6:48:38(130.34.74.220)	0	2020/7/27/8:32:21(130.34.63.131)
-31	17	23	4119	konno	dummy	0	2020/7/27/6:48:49(130.34.74.220)	0	2020/7/27/8:34:29(130.34.63.131)
30	26	32	4119	konno	dummy	0	2020/7/27/8:32:32(130.34.63.131)	0
-31	18	32	4119	konno	dummy	0	2020/7/27/8:34:37(130.34.63.131)	0	2020/7/31/8:33:21(130.34.63.131)
-29	21	32	4119	ichitsubo	dummy	0	2020/7/27/11:46:20(130.34.74.220)	0	2020/7/27/11:47:3(130.34.74.220)
29	20	32	4119	ichitsubo	dummy	0	2020/7/27/11:47:17(130.34.74.220)	0
28	14	18	4119	endo	dummy	0	2020/7/27/13:11:26(130.34.63.131)	コーターのみ
29	16	20	4119	konno	dummy	0	2020/7/28/6:46:56(130.34.74.220)	0
29	14	16	4119	fushimi	dummy	0	2020/7/28/14:16:35(130.34.63.131)	0
-31	32	38	4119	mori	dummy	0	2020/7/30/10:9:15(130.34.95.37)	0	2020/7/31/8:19:39(130.34.74.220)
31	18	20	4119	konno	dummy	0	2020/7/27/8:34:37(130.34.63.131)	0
31	22	25	4119	fushimi	dummy	0	2020/7/31/11:3:49(130.34.63.131)	コータ周辺