10	16	24	4119	endo	dummy	0	2019/1/8/15:45:2(130.34.74.220)	6inch, h-line
-15	26	34	4119	yanagimura	dummy	0	2019/1/8/15:46:25(130.34.74.220)	6inch, h-line	2019/1/9/10:48:15(130.34.63.131)
-22	24	34	4119	yanagimura	dummy	0	2019/1/8/15:47:18(130.34.74.220)	6inch, i-line	2019/1/9/10:45:47(130.34.63.131)
-18	16	26	4119	endo	dummy	0	2019/1/9/10:45:36(130.34.63.131)	Bump	2019/1/18/10:9:22(130.34.63.131)
11	24	34	4119	yanagimura	dummy	0	2019/1/9/10:48:0(130.34.63.131)	SiO2開口リソ
16	24	34	4119	yanagimura	dummy	0	2019/1/9/10:49:5(130.34.63.131)	UBMwet用リソ
-10	24	33	4119	mori	dummy	0	2019/1/9/11:10:53(130.34.74.220)	0	2019/1/9/11:21:58(130.34.74.220)
-10	24	32	4119	mori	dummy	0	2019/1/9/11:22:27(130.34.74.220)	HP１台+コーターのみ使用	2019/1/10/9:17:20(130.34.95.37)
17	14	24	4119	fushimi	dummy	0	2019/1/9/13:36:2(130.34.63.131)	0
23	16	26	4119	endo	dummy	0	2019/1/9/13:41:22(130.34.63.131)	0
10	24	28	4119	endo	dummy	0	2019/1/10/10:8:54(130.34.63.131)	0
11	16	24	4119	fushimi	dummy	0	2019/1/10/10:16:0(130.34.63.131)	コーター周辺
15	16	24	4119	fushimi	dummy	0	2019/1/10/12:8:23(130.34.63.131)	0
14	22	26	6909	liang	dummy	0	2019/1/10/12:48:19(130.34.32.80)	0
10	28	32	4119	fushimi	dummy	0	2019/1/10/13:5:20(130.34.63.131)	0
11	9	16	4119	endo	dummy	0	2019/1/11/4:36:29(130.34.63.131)	0
-15	24	30	4119	konno	dummy	0	2019/1/15/10:0:23(130.34.74.220)	0	2019/1/15/10:0:29(130.34.74.220)
16	16	24	4119	konno	dummy	0	2019/1/15/10:1:0(130.34.74.220)	2in,h-line
17	24	32	4119	konno	dummy	0	2019/1/15/10:1:28(130.34.74.220)	2in,h-line
15	31	35	6909	liang	dummy	0	2019/1/15/11:32:51(130.34.32.80)	0
18	26	32	4119	konno	dummy	0	2019/1/16/15:9:27(130.34.74.220)	0
-17	32	36	6909	s-lee	dummy	0	2019/1/16/22:51:31(130.34.32.80)	0	2019/1/16/23:8:43(130.34.32.80)
-21	18	29	4119	konno	dummy	0	2019/1/17/12:30:15(130.34.63.131)	0	2019/1/18/11:47:30(130.34.63.131)
17	32	36	6909	s-lee	dummy	0	2019/1/17/14:11:22(130.34.63.131)	0
25	26	32	4119	aizawa	dummy	1	2019/1/18/9:10:7(130.34.74.220)	有機排気ダクト工事のため、スピンコーター＆スプレーコーターの吸気がストップします。
18	16	23	4119	endo	dummy	0	2019/1/9/10:45:36(130.34.63.131)	Bump
-21	22	32	4119	konno	dummy	0	2019/1/18/11:47:42(130.34.63.131)	0	2019/1/21/14:11:47(130.34.74.220)
22	22	32	4119	konno	dummy	0	2019/1/18/15:9:54(130.34.63.131)	0
18	36	38	6909	s-lee	dummy	0	2019/1/18/15:34:26(130.34.63.131)	0
21	32	36	6909	s-lee	dummy	0	2019/1/21/9:39:22(130.34.32.80)	0
23	26	36	4119	aizawa	dummy	0	2019/1/21/10:0:6(130.34.74.60)	スピンコーター＆ホットプレート使用。合間に使って頂いて構いません。
21	22	31	4119	konno	dummy	0	2019/1/18/11:47:42(130.34.63.131)	0
-24	17	29	4119	konno	dummy	0	2019/1/21/14:12:20(130.34.74.220)	0	2019/1/23/15:39:48(130.34.74.220)
-24	29	32	4119	konno	dummy	0	2019/1/22/14:24:11(130.34.63.131)	0	2019/1/23/15:39:54(130.34.74.220)
25	16	26	4119	endo	dummy	0	2019/1/23/9:16:36(130.34.63.131)	0
28	16	24	4119	endo	dummy	0	2019/1/23/10:3:21(130.34.63.131)	0
24	20	32	4119	konno	dummy	0	2019/1/23/15:40:14(130.34.74.220)	0
-28	24	32	4119	konno	dummy	0	2019/1/24/8:17:38(130.34.74.220)	0	2019/1/28/7:46:37(130.34.74.220)
-29	18	28	4119	konno	dummy	0	2019/1/24/15:36:31(130.34.74.220)	0	2019/1/28/7:46:40(130.34.74.220)
29	17	31	4119	konno	dummy	0	2019/1/28/7:46:53(130.34.74.220)	0
28	26	32	4119	konno	dummy	0	2019/1/28/11:2:24(130.34.74.220)	0
-30	17	26	4119	konno	dummy	0	2019/1/28/15:24:52(130.34.74.220)	0	2019/1/29/14:51:55(130.34.63.131)
29	31	34	6909	s-lee	dummy	0	2019/1/29/11:38:49(130.34.32.80)	0
30	24	28	4119	konno	dummy	0	2019/1/29/14:52:15(130.34.63.131)	0
29	34	36	6909	s-lee	dummy	0	2019/1/29/16:59:0(130.34.63.131)	0