-1	24	32	4119	konno	dummy	0	2018/2/26/13:23:56(130.34.74.220)	0	2018/2/27/14:10:53(130.34.63.131)
-2	18	24	4119	konno	dummy	0	2018/2/26/13:24:8(130.34.74.220)	0	2018/3/1/13:17:28(130.34.63.131)
2	14	18	4119	endo	dummy	0	2018/2/28/6:37:9(130.34.74.220)	0
1	14	18	4119	endo	dummy	0	2018/2/28/6:37:20(130.34.74.220)	0
-1	24	36	6909	sugawara	dummy	0	2018/2/28/19:55:9(130.34.95.37)	0	2018/2/28/22:44:18(130.34.95.37)
1	20	24	6909	sugawara	dummy	0	2018/2/28/22:44:15(130.34.95.37)	0
1	24	30	6909	sugawara	dummy	0	2018/2/28/22:44:26(130.34.95.37)	0
1	18	20	4119	konno	dummy	0	2018/3/1/16:16:14(130.34.74.220)	0
2	18	24	4119	endo	dummy	0	2018/3/2/6:52:13(130.34.63.131)	0
-6	17	23	4119	konno	dummy	0	2018/3/2/13:45:7(130.34.95.37)	0	2018/3/5/12:3:49(130.34.63.131)
5	28	36	4119	aizawa	dummy	0	2018/3/5/11:44:24(130.34.74.220)	i線　２インチ
-6	24	32	4119	konno	dummy	0	2018/3/5/12:4:9(130.34.63.131)	0	2018/3/6/12:41:32(130.34.63.131)
-6	32	44	6909	sugawara	dummy	0	2018/3/5/14:58:13(130.34.32.80)	0	2018/3/5/15:23:16(130.34.32.80)
7	18	24	4119	yanagimura	dummy	0	2018/3/5/15:20:32(130.34.74.220)	0
8	30	36	4119	yanagimura	dummy	0	2018/3/5/15:21:0(130.34.74.220)	0
5	36	44	6909	sugawara	dummy	0	2018/3/5/15:23:26(130.34.32.80)	0
-6	32	36	4119	aizawa	dummy	0	2018/3/5/17:11:20(130.34.63.131)	0	2018/3/5/17:11:25(130.34.63.131)
6	32	36	4119	aizawa	dummy	0	2018/3/5/17:11:40(130.34.63.131)	i線
-7	26	36	4119	aizawa	dummy	0	2018/3/5/17:40:0(130.34.63.131)	8インチ予定。アライメントあり	2018/3/7/15:8:58(130.34.63.131)
6	24	28	4119	konno	dummy	0	2018/3/5/12:4:9(130.34.63.131)	0
6	28	30	4119	konno	dummy	0	2018/3/6/12:50:12(130.34.63.131)	0
6	30	32	4119	aizawa	dummy	0	2018/3/6/14:18:15(130.34.63.131)	0
8	24	30	4119	yonekura	dummy	0	2018/3/6/18:22:57(130.34.63.131)	0
-8	20	24	4119	konno	dummy	0	2018/3/7/7:51:42(130.34.74.220)	0	2018/3/7/14:59:8(130.34.63.131)
7	26	33	4119	aizawa	dummy	0	2018/3/5/17:40:0(130.34.63.131)	8インチ予定。アライメントあり
-13	14	22	4119	endo	dummy	0	2018/3/8/6:35:25(130.34.74.220)	0	2018/3/13/7:14:14(130.34.63.131)
12	14	22	4119	endo	dummy	0	2018/3/8/6:55:23(130.34.74.220)	0
15	30	36	4119	aizawa	dummy	0	2018/3/9/18:52:5(130.34.74.220)	８インチ　ガラスウェハー２枚　アライメントなし
13	14	17	4119	endo	dummy	0	2018/3/8/6:35:25(130.34.74.220)	0
-16	26	34	4119	yonekura	dummy	0	2018/3/13/8:6:26(130.34.63.131)	0	2018/3/13/9:28:50(130.34.74.220)
13	21	27	4119	konno	dummy	0	2018/3/13/9:12:37(130.34.74.220)	0
-15	26	30	4119	yonekura	dummy	0	2018/3/13/9:28:44(130.34.74.220)	0	2018/3/13/9:32:7(130.34.74.220)
-19	24	30	4119	yonekura	dummy	0	2018/3/13/9:29:23(130.34.74.220)	0	2018/3/19/10:13:12(130.34.63.131)
-15	36	38	4119	yonekura	dummy	0	2018/3/13/9:29:53(130.34.74.220)	0	2018/3/13/9:30:12(130.34.74.220)
14	16	22	4119	yonekura	dummy	0	2018/3/13/9:30:34(130.34.74.220)	0
14	28	32	4119	yonekura	dummy	0	2018/3/13/9:30:50(130.34.74.220)	0
15	24	30	4119	yonekura	dummy	0	2018/3/13/9:32:18(130.34.74.220)	0
13	20	21	4119	yonekura	dummy	0	2018/3/13/9:56:0(130.34.63.131)	0
14	24	28	4119	yonekura	dummy	0	2018/3/14/11:2:23(130.34.63.131)	0
14	32	36	4119	yonekura	dummy	0	2018/3/14/11:2:41(130.34.63.131)	0
15	18	22	4119	yonekura	dummy	0	2018/3/14/11:3:3(130.34.63.131)	0
16	18	22	4119	yonekura	dummy	0	2018/3/15/16:27:19(130.34.63.131)	スピンコーター、HP
19	18	24	4119	yonekura	dummy	0	2018/3/16/14:9:0(130.34.63.131)	0
20	15	22	4119	endo	dummy	0	2018/3/19/7:25:30(130.34.74.220)	0
19	31	32	4119	yonekura	dummy	0	2018/3/19/11:34:18(130.34.63.131)	0
19	32	33	4119	yonekura	dummy	0	2018/3/19/11:35:35(130.34.63.131)	0
20	26	30	4119	konno	dummy	0	2018/3/20/10:52:52(130.34.63.131)	0
-23	19	25	4119	konno	dummy	0	2018/3/20/15:4:17(130.34.63.131)	0	2018/3/22/7:29:36(130.34.74.220)
22	15	21	4119	fushimi	dummy	0	2018/3/22/6:40:27(130.34.63.131)	0
22	21	26	4119	yanagimura	dummy	0	2018/3/22/9:45:38(130.34.63.131)	0
22	26	29	4119	yonekura	dummy	0	2018/3/22/10:42:3(130.34.63.131)	スピンコータとHP
23	18	26	4119	yanagimura	dummy	0	2018/3/22/11:46:36(130.34.63.131)	0
22	29	38	6909	sugawara	dummy	0	2018/3/22/13:24:18(130.34.32.80)	0
23	26	38	6909	sugawara	dummy	0	2018/3/22/14:47:24(130.34.63.131)	0
24	24	42	6909	sugawara	dummy	0	2018/3/22/14:48:10(130.34.63.131)	0
26	16	32	4119	yonekura	dummy	0	2018/3/22/15:57:2(130.34.63.131)	0
26	13	16	4119	endo	dummy	0	2018/3/23/6:43:2(130.34.74.220)	0
-28	28	40	6909	s-lee	dummy	0	2018/3/26/12:42:22(130.34.95.37)	0	2018/3/27/21:53:49(130.34.32.80)
-27	18	22	4119	konno	dummy	0	2018/3/26/15:44:50(130.34.74.220)	0	2018/3/27/6:58:30(130.34.74.220)
-27	26	30	4119	yonekura	dummy	0	2018/3/26/18:8:4(130.34.63.131)	0	2018/3/27/7:31:29(130.34.63.131)
-28	17	21	4119	konno	dummy	0	2018/3/27/6:58:46(130.34.74.220)	0	2018/3/27/11:28:32(130.34.95.37)
27	16	22	4119	yonekura	dummy	0	2018/3/27/7:31:24(130.34.63.131)	0
27	26	30	4119	konno	dummy	0	2018/3/27/11:28:53(130.34.95.37)	0
-28	17	21	4119	konno	dummy	0	2018/3/27/13:53:52(130.34.63.131)	0	2018/3/27/15:59:13(130.34.74.220)
28	18	24	4119	fushimi	dummy	0	2018/3/28/8:20:8(130.34.63.131)	0
30	17	22	4119	yonekura	dummy	0	2018/3/28/15:8:39(130.34.63.131)	0
30	28	30	4119	yonekura	dummy	0	2018/3/28/15:9:24(130.34.63.131)	0