1	17	22	4119	takanohashi	dummy	0	2014/11/20/9:1:41(130.34.63.131)	2inch i-line
-1	28	33	6909	Goto	dummy	0	2014/11/20/20:33:8(130.34.32.80)	0	2014/11/20/20:33:26(130.34.32.80)
1	26	31	6909	Goto	dummy	0	2014/11/20/20:35:6(130.34.32.80)	0
2	18	24	6909	Goto	dummy	0	2014/11/20/20:37:31(130.34.32.80)	0
-1	31	36	4119	nakamura	dummy	0	2014/11/25/18:2:45(130.34.63.131)	8inch, h-line	2014/11/26/13:56:23(130.34.63.131)
-3	26	32	4119	nakamura	dummy	0	2014/11/25/18:3:23(130.34.63.131)	8inch, h-line	2014/11/27/9:58:16(130.34.63.131)
-5	22	32	4119	nakamura	dummy	0	2014/11/25/18:5:38(130.34.63.131)	8inch, h-line	2014/11/26/10:18:52(130.34.63.131)
-4	28	36	4119	nakamura	dummy	0	2014/11/26/10:19:12(130.34.63.131)	8inch, h-line	2014/11/26/13:55:42(130.34.63.131)
-4	28	36	4119	nakamura	dummy	0	2014/11/26/13:56:6(130.34.63.131)	8/inch, i-line	2014/11/26/13:59:28(130.34.63.131)
-1	31	36	4119	nakamura	dummy	0	2014/11/26/13:56:38(130.34.63.131)	8inch, i-line	2014/12/1/13:22:2(130.34.63.131)
-4	28	36	4119	nakamura	dummy	0	2014/11/26/14:0:1(130.34.63.131)	8inch, i-line	2014/11/27/9:58:3(130.34.63.131)
-2	24	30	4119	nagai	dummy	0	2014/11/26/20:19:8(130.34.95.37)	8inch, h-line	2014/11/27/9:41:28(130.34.95.44)
2	32	36	4119	nagai	dummy	0	2014/11/27/9:41:41(130.34.95.44)	8inch, h-line
-2	24	32	4119	konno	dummy	0	2014/11/27/11:35:3(130.34.95.37)	2in	2014/12/1/10:13:12(130.34.95.44)
-5	17	24	4119	takanohashi	dummy	0	2014/11/27/15:34:48(130.34.74.220)	8inch	2014/11/27/15:35:5(130.34.74.220)
-8	17	24	4119	takanohashi	dummy	0	2014/11/27/15:35:46(130.34.74.220)	8inch	2014/12/3/8:1:49(130.34.63.131)
9	16	21	4119	takanohashi	dummy	0	2014/11/27/15:36:22(130.34.74.220)	8inch
-12	16	21	4119	takanohashi	dummy	0	2014/11/27/15:37:10(130.34.74.220)	8inch	2014/12/1/7:56:31(130.34.63.131)
3	26	34	4119	yanagimura	dummy	0	2014/11/28/7:16:18(130.34.63.131)	2inch i-line
4	26	36	4119	yanagimura	dummy	0	2014/11/28/7:16:45(130.34.63.131)	2inch i-line
1	22	26	4119	yanagimura	dummy	0	2014/11/28/7:16:56(130.34.63.131)	2inch i-line
-3	16	22	4119	konno	dummy	0	2014/11/28/9:31:33(130.34.95.37)	0	2014/12/1/14:21:51(130.34.95.37)
1	36	42	6908	sugawara	dummy	0	2014/12/1/0:0:19(130.34.95.37)	0
-11	17	24	4119	fushimi	dummy	0	2014/12/1/7:56:15(130.34.63.131)	8inch h-line	2014/12/10/13:36:30(130.34.63.131)
10	16	21	4119	fushimi	dummy	0	2014/12/1/7:57:48(130.34.63.131)	8inch h-line
4	18	26	4119	nagai	dummy	0	2014/12/1/9:56:18(130.34.63.131)	8inch, i-line
-3	22	26	4119	konno	dummy	0	2014/12/1/10:0:5(130.34.95.44)	0	2014/12/1/14:21:48(130.34.95.37)
1	31	36	4119	nakamura	dummy	0	2014/12/1/13:37:17(130.34.63.131)	8inch
-2	26	30	4119	nakamura	dummy	0	2014/12/1/13:44:6(130.34.63.131)	8inch, i-line	2014/12/1/14:43:56(130.34.63.131)
2	28	32	4119	nakamura	dummy	0	2014/12/1/14:44:9(130.34.63.131)	8inch, i-line
-2	24	28	6908	hashiguchi	dummy	0	2014/12/2/0:55:58(130.34.32.80)	0	2014/12/2/0:56:1(130.34.32.80)
2	24	28	6908	hashiguchi	dummy	0	2014/12/2/0:56:23(130.34.32.80)	2inch h-line
-3	22	26	6908	hashiguchi	dummy	0	2014/12/2/1:6:4(130.34.32.80)	0	2014/12/2/1:6:8(130.34.32.80)
3	22	26	6908	hashiguchi	dummy	0	2014/12/2/1:8:15(130.34.32.80)	2inch h-line
-9	24	32	4119	nakamura	dummy	0	2014/12/2/10:19:47(130.34.74.220)	8inch, h-line	2014/12/8/14:2:46(130.34.63.131)
-11	24	32	4119	nakamura	dummy	0	2014/12/2/10:24:57(130.34.74.220)	8inch, h-line	2014/12/2/10:25:18(130.34.74.220)
-11	24	32	4119	nakamura	dummy	0	2014/12/2/10:25:31(130.34.74.220)	8inch, i-line	2014/12/8/17:12:51(130.34.74.220)
2	36	38	4119	nagai	dummy	0	2014/12/2/15:8:8(130.34.95.44)	8inch, h-line
-8	16	21	4119	takanohashi	dummy	0	2014/12/3/8:2:23(130.34.63.131)	8inch h-line 空いている時はお使いください	2014/12/6/9:52:0(130.34.74.220)
-10	21	32	4119	konno	dummy	0	2014/12/3/9:7:0(130.34.95.37)	0	2014/12/8/10:51:58(130.34.95.37)
3	34	38	6909	Goto	dummy	0	2014/12/3/16:18:21(130.34.32.80)	2inch,i-line
3	38	42	4119	yanagimura	dummy	0	2014/12/3/18:12:48(130.34.63.131)	0
-5	18	24	4119	nagai	dummy	0	2014/12/4/13:26:6(130.34.63.131)	8inch,i-line	2014/12/4/14:48:3(130.34.63.131)
5	18	26	4119	nagai	dummy	0	2014/12/4/14:48:21(130.34.63.131)	8inch, i-line
5	26	32	6909	Goto	dummy	0	2014/12/4/16:55:33(130.34.95.44)	2inch,i-line
-8	22	32	4119	konno	dummy	0	2014/12/5/7:37:59(130.34.63.131)	0	2014/12/8/10:51:54(130.34.95.37)
8	36	40	6909	Goto	dummy	0	2014/12/5/17:32:19(130.34.32.80)	2inch,h-line
9	21	24	4119	fushimi	dummy	0	2014/12/6/8:34:32(130.34.74.220)	0
8	16	22	4119	takanohashi	dummy	0	2014/12/6/9:52:28(130.34.74.220)	8inch
-9	32	36	4119	yan	dummy	0	2014/12/8/10:28:43(130.34.74.220)	2-inch wafer; h-line	2014/12/9/15:39:49(130.34.63.131)
8	22	24	4119	konno	dummy	0	2014/12/5/7:37:59(130.34.63.131)	0
15	20	28	4119	nakamura	dummy	0	2014/12/8/10:59:58(130.34.74.220)	8inch, i-line
9	24	28	4119	nakamura	dummy	0	2014/12/8/14:3:1(130.34.63.131)	8inch, i-line
-8	40	44	6908	sugawara	dummy	0	2014/12/8/14:56:28(130.34.32.80)	0	2014/12/8/19:34:10(130.34.32.80)
9	28	32	6909	Goto	dummy	0	2014/12/8/16:55:24(130.34.32.80)	2inch,h-line
-11	24	32	4119	nakamura	dummy	0	2014/12/8/17:13:5(130.34.74.220)	8inch, h-line	2014/12/10/13:37:27(130.34.63.131)
8	40	42	6908	sugawara	dummy	0	2014/12/8/14:56:28(130.34.32.80)	0
-10	36	42	6908	hashiguchi	dummy	0	2014/12/8/23:43:24(130.34.32.80)	h-line, 2inch	2014/12/10/14:41:22(130.34.95.44)
10	21	24	4119	takanohashi	dummy	0	2014/12/9/10:10:1(130.34.63.131)	8inch
10	30	34	4119	nakamura	dummy	0	2014/12/9/14:6:20(130.34.63.131)	2inch, h-line
9	32	34	4119	yan	dummy	0	2014/12/8/10:28:43(130.34.74.220)	2-inch wafer; h-line
10	24	28	4119	fushimi	dummy	0	2014/12/10/9:42:19(130.34.63.131)	8inch
11	22	30	4119	nakamura	dummy	0	2014/12/10/13:37:48(130.34.63.131)	8inch, h-line
-11	18	22	6908	hashiguchi	dummy	0	2014/12/10/14:41:46(130.34.95.44)	h-line, 2inch	2014/12/11/8:57:40(130.34.32.80)
11	30	37	6908	tanikawa	dummy	0	2014/12/10/14:57:27(130.34.32.80)	0
-15	17	20	4119	konno	dummy	0	2014/12/11/7:54:1(130.34.95.37)	2inch	2014/12/15/8:16:9(130.34.95.37)
-17	17	25	4119	konno	dummy	0	2014/12/11/7:54:27(130.34.95.37)	0	2014/12/15/11:16:27(130.34.95.37)
-18	17	25	4119	konno	dummy	0	2014/12/11/7:54:44(130.34.95.37)	0	2014/12/15/11:16:30(130.34.95.37)
11	18	20	6908	hashiguchi	dummy	0	2014/12/10/14:41:46(130.34.95.44)	h-line, 2inch
12	22	30	4119	nakamura	dummy	0	2014/12/11/15:28:44(130.34.63.131)	8inch, i-line
-12	16	22	4119	fushimi	dummy	0	2014/12/11/16:7:32(130.34.74.220)	8inch	2014/12/12/8:38:13(130.34.63.131)
11	40	48	6908	sugawara＆hashiguchi	dummy	0	2014/12/11/19:26:0(130.34.95.37)	0
-12	34	42	6908	hashiguchi	dummy	0	2014/12/12/2:10:22(130.34.32.80)	h-line. 2iinch	2014/12/12/11:59:0(130.34.32.80)
12	16	20	4119	fushimi	dummy	0	2014/12/11/16:7:32(130.34.74.220)	8inch
-17	25	32	4119	nakamura	dummy	0	2014/12/12/11:39:34(130.34.63.131)	8inch, i-line	2014/12/15/11:36:34(130.34.63.131)
-18	28	36	4119	nakamura	dummy	0	2014/12/12/11:42:47(130.34.63.131)	8inch, h-line	2014/12/12/12:4:22(130.34.63.131)
12	30	38	6908	hashiguchi	dummy	0	2014/12/12/11:59:32(130.34.32.80)	h-line, 2inch
-18	30	38	4119	nakamura	dummy	0	2014/12/12/12:4:39(130.34.63.131)	8inch, h-line	2014/12/12/12:53:28(130.34.63.131)
-18	32	38	4119	nakamura	dummy	0	2014/12/12/12:53:45(130.34.63.131)	8inch, h-line	2014/12/17/17:15:35(130.34.63.131)
24	20	30	4119	nakamura	dummy	0	2014/12/12/12:56:45(130.34.63.131)	8inch, i-line
12	38	42	6908	hashiguchi	dummy	0	2014/12/12/17:51:6(130.34.63.131)	0
12	42	44	6908	hashiguch	dummy	0	2014/12/12/19:53:21(130.34.63.131)	0
-16	20	26	6909	Goto	dummy	0	2014/12/12/22:9:2(130.34.32.80)	2inch,h-line	2014/12/12/22:12:46(130.34.32.80)
-16	22	28	6909	Goto	dummy	0	2014/12/12/22:12:58(130.34.32.80)	0	2014/12/12/22:13:3(130.34.32.80)
16	22	28	6909	Goto	dummy	0	2014/12/12/22:13:12(130.34.32.80)	2inch,h-line
15	17	19	4119	konno	dummy	0	2014/12/11/7:54:1(130.34.95.37)	2inch
17	17	24	4119	takanohashi	dummy	0	2014/12/15/11:24:16(130.34.74.220)	8-inch
-18	17	24	4119	takanohashi	dummy	0	2014/12/15/11:24:39(130.34.74.220)	8-inch	2014/12/17/11:25:10(130.34.63.131)
15	28	31	4119	nakamura	dummy	0	2014/12/15/11:36:8(130.34.63.131)	0
17	24	32	4119	nakamura	dummy	0	2014/12/15/11:36:51(130.34.63.131)	8inch, i-line
15	31	33	4119	nakamura	dummy	0	2014/12/15/12:57:56(130.34.63.131)	0
-18	24	32	4119	yanagimura	dummy	0	2014/12/15/16:46:58(130.34.74.220)	2inch i-line	2014/12/17/11:25:12(130.34.63.131)
15	33	36	4119	nakamura	dummy	0	2014/12/15/16:59:24(130.34.63.131)	0
-24	30	32	4119	nakamura	dummy	0	2014/12/15/18:11:24(130.34.63.131)	0	2014/12/18/18:33:55(130.34.74.220)
16	28	36	6908	tanikawa	dummy	0	2014/12/15/20:25:41(130.34.32.80)	0
-18	38	45	6908	tanikawa	dummy	0	2014/12/16/19:19:3(130.34.32.80)	0	2014/12/16/19:19:8(130.34.32.80)
-17	38	44	6908	tanikawa	dummy	0	2014/12/16/19:19:24(130.34.32.80)	0	2014/12/17/16:3:26(130.34.95.44)
-19	18	30	4119	konno	dummy	0	2014/12/17/8:51:48(130.34.63.131)	0	2014/12/19/7:9:48(130.34.95.37)
18	18	26	4119	yanagimura	dummy	0	2014/12/17/11:25:30(130.34.63.131)	2inch
-17	40	46	6908	tanikawa	dummy	0	2014/12/17/16:3:37(130.34.95.44)	0	2014/12/17/17:37:23(130.34.95.37)
17	35	38	6909	Goto	dummy	0	2014/12/17/16:40:52(130.34.95.44)	2inch, h-line
18	30	36	4119	nakamura	dummy	0	2014/12/17/17:15:49(130.34.63.131)	8inch, h-line
-18	26	30	6908	tanikawa	dummy	0	2014/12/17/17:38:24(130.34.95.37)	0	2014/12/18/11:23:52(130.34.95.37)
22	26	32	4119	nagai	dummy	0	2014/12/18/10:49:38(130.34.74.220)	8inch, i-line
18	26	30	6908	tanikawa	dummy	0	2014/12/18/11:24:24(130.34.95.37)	0
19	14	18	4119	fushimi	dummy	0	2014/12/19/6:35:27(130.34.63.131)	8inch
22	16	22	4119	fushimi	dummy	0	2014/12/19/14:3:53(130.34.63.131)	8inch
21	26	30	6909	harashima & sugawara	dummy	0	2014/12/19/16:59:17(130.34.32.80)	木野先生承認
19	37	41	6908	sugawara	dummy	0	2014/12/19/17:31:35(130.34.32.80)	0
21	36	44	6909	Goto , Sugawara	dummy	0	2014/12/20/17:24:54(130.34.32.80)	2inch,h-line,田中先生承認
22	13	16	4119	yanagimura	dummy	0	2014/12/22/6:15:2(130.34.63.131)	2inch i-line
-26	17	26	4119	konno	dummy	0	2014/12/22/8:0:5(130.34.95.37)	0	2014/12/22/10:36:47(130.34.95.37)
25	16	28	4119	konno	dummy	0	2014/12/22/10:36:44(130.34.95.37)	2inch
-26	16	24	4119	konno	dummy	0	2014/12/22/10:37:2(130.34.95.37)	2inch	2014/12/25/15:13:31(130.34.63.131)
-24	30	34	4119	nakamura	dummy	0	2014/12/22/10:57:28(130.34.74.220)	0	2014/12/24/14:42:35(130.34.63.131)
24	14	20	4119	fushimi	dummy	0	2014/12/22/12:50:45(130.34.63.131)	8inch
25	28	32	4119	konno	dummy	0	2014/12/22/14:51:25(130.34.63.131)	2inch
25	32	36	4119	nakamura	dummy	0	2014/12/22/17:4:1(130.34.63.131)	8inch, i-line
24	34	40	6909	Goto	dummy	0	2014/12/22/23:18:50(130.34.32.80)	2inch,i-line
23	28	34	6908	hashiguchi, sugawara	dummy	0	2014/12/23/0:32:12(130.34.32.80)	0
25	36	44	6908	hashiguchi	dummy	0	2014/12/23/0:41:23(130.34.32.80)	2inch
26	24	30	6908	hashiguchi	dummy	0	2014/12/23/0:43:21(130.34.32.80)	2inch h-line
24	40	44	6908	hashiguchi	dummy	0	2014/12/24/9:38:29(130.34.32.80)	2inch h-line
24	30	32	4119	nakamura	dummy	0	2014/12/22/10:57:28(130.34.74.220)	0
25	44	48	6908	sugawara	dummy	0	2014/12/24/22:0:35(130.34.95.37)	0
-26	30	34	6909	harashima	dummy	0	2014/12/25/22:25:5(130.34.32.80)	0	2014/12/26/14:28:19(130.34.32.80)
26	30	31	6909	harashima	dummy	0	2014/12/25/22:25:5(130.34.32.80)	0