-24	18	48	4119	nakamura	dummy	0	2017/6/22/11:43:1(130.34.74.220)	chip to wafer接合のためステージ交換	2017/7/19/17:37:55(130.34.63.131)
-25	0	48	4119	nakamura	dummy	0	2017/6/22/11:43:21(130.34.74.220)	0	2017/7/20/17:17:15(130.34.74.220)
-26	0	48	4119	nakamura	dummy	0	2017/6/22/11:43:42(130.34.74.220)	0	2017/7/20/17:17:20(130.34.74.220)
27	0	48	4119	nakamura	dummy	0	2017/6/22/11:44:0(130.34.74.220)	0
28	0	48	4119	nakamura	dummy	0	2017/6/22/11:44:16(130.34.74.220)	0
29	0	48	4119	nakamura	dummy	1	2017/6/22/11:46:7(130.34.74.220)	コンスタントステージのためchip to chip接合不可
30	0	48	4119	nakamura	dummy	1	2017/6/22/11:46:22(130.34.74.220)	0
31	0	48	4119	nakamura	dummy	0	2017/6/22/11:46:36(130.34.74.220)	0
3	25	34	4119	nakamura	dummy	0	2017/6/23/10:3:54(130.34.74.220)	オペトレ
5	19	29	4119	nakamura	dummy	0	2017/7/3/11:14:34(130.34.63.131)	0
4	28	32	4119	nakamura	dummy	0	2017/7/4/8:47:38(130.34.74.220)	0
11	23	32	4119	nakamura	dummy	0	2017/7/10/16:24:48(130.34.74.220)	0
12	16	26	4119	fushimi	dummy	0	2017/7/11/10:0:27(130.34.95.37)	0
12	26	30	4119	fushimi	dummy	0	2017/7/12/8:56:21(130.34.63.131)	0
12	30	34	4119	fushimi	dummy	0	2017/7/12/11:49:22(130.34.63.131)	0
-13	14	20	4119	fushimi	dummy	0	2017/7/12/14:7:43(130.34.63.131)	0	2017/7/12/15:18:25(130.34.63.131)
-14	25	30	4119	nakamura	dummy	0	2017/7/13/14:16:4(130.34.74.220)	0	2017/7/13/15:6:28(130.34.74.220)
-14	16	24	4119	endo	dummy	0	2017/7/14/6:52:48(130.34.63.131)	0	2017/7/14/8:28:9(130.34.63.131)
14	16	19	4119	endo	dummy	0	2017/7/14/6:52:48(130.34.63.131)	0
19	19	28	4119	nakamura	dummy	0	2017/7/18/12:3:26(130.34.74.220)	0
-26	26	48	4119	nakamura	dummy	0	2017/7/20/17:17:56(130.34.74.220)	コンスタントステージへ交換	2017/7/24/13:23:52(130.34.95.37)
26	0	26	4119	nakamura	dummy	1	2017/7/24/13:21:9(130.34.95.37)	コンスタントステージのためchip to chip接合不可
25	19	48	4119	nakamura	dummy	0	2017/7/24/13:23:42(130.34.95.37)	ステージ交換
26	26	48	4119	nakamura	dummy	0	2017/7/24/13:24:7(130.34.95.37)	0