16	21	29	4119	Saie(小柳研)	dummy	0	2017/12/21/10:50:55(130.34.74.220)	EVG使用
-8	18	25	4119	endo	dummy	0	2017/12/25/9:55:48(130.34.63.131)	0	2017/12/25/9:55:51(130.34.63.131)
-8	18	25	4119	endo	dummy	0	2017/12/25/9:56:7(130.34.63.131)	EVGボンダー使用	2017/12/27/10:15:38(130.34.63.131)
-9	18	26	4119	endo	dummy	0	2017/12/27/10:15:52(130.34.63.131)	EVG使用	2018/1/9/9:12:14(130.34.63.131)
-10	18	28	4119	endo	dummy	0	2018/1/4/11:5:53(130.34.63.131)	EVG	2018/1/9/9:12:24(130.34.63.131)
9	18	21	4119	endo	dummy	0	2017/12/27/10:15:52(130.34.63.131)	EVG使用
-10	20	30	4119	endo	dummy	0	2018/1/9/9:12:47(130.34.63.131)	0	2018/1/9/9:12:51(130.34.63.131)
-10	20	30	4119	endo	dummy	0	2018/1/9/9:13:11(130.34.63.131)	EVG	2018/1/10/7:0:43(130.34.63.131)
9	22	28	4119	endo	dummy	0	2018/1/9/10:11:40(130.34.63.131)	0
11	15	20	4119	endo	dummy	0	2018/1/10/7:1:16(130.34.63.131)	EVG
17	22	30	4119	endo	dummy	0	2018/1/11/13:58:0(130.34.95.37)	EVG
17	30	34	4119	endo	dummy	0	2018/1/15/6:57:50(130.34.63.131)	EVG
18	21	29	4119	Saie(小柳研)	dummy	0	2018/1/15/10:25:25(130.34.74.220)	evg使用
15	30	36	4119	yonekura	dummy	0	2018/1/15/14:7:8(130.34.63.131)	蒸着装置
19	24	34	4119	yonekura	dummy	0	2018/1/16/9:25:25(130.34.63.131)	蒸着
23	20	30	4119	Saie(小柳研)	dummy	0	2018/1/18/11:59:50(130.34.63.131)	EVG使用
25	20	30	4119	Saie(小柳研)	dummy	0	2018/1/23/11:35:22(130.34.63.131)	EVG540使用
30	20	30	4119	Saie(小柳研)	dummy	0	2018/1/26/8:56:35(130.34.74.220)	EVG540使用