-1	18	25	4119	takanohashi	dummy	0	2015/5/29/13:24:52(130.34.74.220)	0	2015/5/29/13:31:20(130.34.74.220)
2	26	31	4119	takanohashi	dummy	0	2015/5/29/13:25:41(130.34.74.220)	0
-3	25	31	4119	takanohashi	dummy	0	2015/5/29/13:27:7(130.34.74.220)	0	2015/6/3/9:13:26(130.34.63.131)
-5	18	26	4119	takanohashi	dummy	0	2015/5/29/13:27:59(130.34.74.220)	0	2015/6/4/6:48:36(130.34.95.37)
1	18	26	4119	takanohashi	dummy	0	2015/5/29/13:31:54(130.34.74.220)	0
2	18	22	4119	takanohashi	dummy	0	2015/6/2/8:57:46(130.34.63.131)	0
3	19	25	4119	takanohashi	dummy	0	2015/6/3/9:13:24(130.34.63.131)	0
-4	26	31	4119	takanohashi	dummy	0	2015/6/3/9:14:5(130.34.63.131)	0	2015/6/3/12:15:14(130.34.63.131)
4	32	37	4119	yan	dummy	0	2015/6/3/9:31:39(130.34.74.220)	Ti/Cu wet etching
-4	18	24	4119	takanohashi	dummy	0	2015/6/3/12:15:10(130.34.63.131)	0	2015/6/3/14:7:48(130.34.63.131)
3	26	32	6908	hashiguchi	dummy	0	2015/6/3/12:45:4(130.34.32.80)	0
9	18	26	4119	fushimi	dummy	0	2015/6/9/8:57:8(130.34.63.131)	0
10	19	25	4119	takanohashi	dummy	0	2015/6/9/10:26:0(130.34.74.220)	0
11	17	24	4119	takanohashi	dummy	0	2015/6/10/11:29:18(130.34.63.131)	0
12	17	24	4119	takanohashi	dummy	0	2015/6/11/11:12:7(130.34.63.131)	0
15	18	25	4119	takanohashi	dummy	0	2015/6/12/10:53:10(130.34.63.131)	0
12	31	34	4119	yonekura	dummy	0	2015/6/12/15:14:51(130.34.63.131)	0
-17	24	32	4119	fushimi	dummy	0	2015/6/17/10:31:31(130.34.63.131)	0	2015/6/17/10:35:14(130.34.63.131)
-17	25	31	4119	fushimi	dummy	0	2015/6/17/10:53:4(130.34.63.131)	0	2015/6/17/12:40:33(130.34.63.131)
17	25	28	4119	fushimi	dummy	0	2015/6/17/10:53:4(130.34.63.131)	0
19	17	20	4119	fushimi	dummy	0	2015/6/19/8:17:55(130.34.63.131)	0
25	16	22	4119	fushimi	dummy	0	2015/6/25/7:17:12(130.34.63.131)	0
25	30	32	4119	fushimi	dummy	0	2015/6/25/14:52:55(130.34.63.131)	0
26	20	26	4119	fushimi	dummy	0	2015/6/25/15:22:55(130.34.63.131)	0