14	20	25	4119	takanohashi	dummy	0	2015/4/30/7:3:24(130.34.74.220)	Ti/Cu wet ET
14	28	32	4119	yan	dummy	0	2015/5/13/9:40:38(130.34.74.220)	Ti/Cu wet etching
-18	26	31	4119	takanohashi	dummy	0	2015/5/14/12:58:47(130.34.63.131)	0	2015/5/18/7:0:47(130.34.63.131)
15	18	23	4119	takanohashi	dummy	0	2015/5/15/8:46:5(130.34.63.131)	0
19	18	25	4119	takanohashi	dummy	0	2015/5/15/12:11:2(130.34.63.131)	0
-22	27	32	4119	takanhashi	dummy	0	2015/5/15/12:12:56(130.34.63.131)	0	2015/5/20/7:30:54(130.34.74.220)
-21	18	24	4119	takanohashi	dummy	0	2015/5/15/12:13:17(130.34.63.131)	0	2015/5/20/7:29:59(130.34.74.220)
20	25	31	4119	takanohashi	dummy	0	2015/5/19/15:9:2(130.34.74.220)	0
21	18	28	4119	takanohashi	dummy	0	2015/5/20/7:30:46(130.34.74.220)	８インチ　Cu/Ti wetET 空いている時間はお使いください
22	22	30	4119	takanohashi	dummy	0	2015/5/20/7:31:28(130.34.74.220)	8inch WetET 空いている時間はお使いください
-25	18	24	4119	fushimi	dummy	0	2015/5/21/7:43:8(130.34.95.37)	0	2015/5/22/13:25:13(130.34.74.220)
25	16	19	4119	fushimi	dummy	0	2015/5/22/13:25:52(130.34.74.220)	0
25	19	32	4119	aizawa	dummy	0	2015/5/22/13:27:24(130.34.74.220)	0