-15	22	32	6909	morikawa	dummy	0	2016/4/30/17:54:37(130.34.32.80)	0	2016/4/30/17:55:7(130.34.32.80)
1	22	34	6909	morikawa	dummy	0	2016/4/30/17:55:24(130.34.32.80)	0
2	31	36	6909	morikawa	dummy	0	2016/5/2/15:10:10(130.34.95.37)	0
-13	26	48	6909	kin	dummy	0	2016/5/10/12:17:12(130.34.32.80)	0	2016/5/10/12:17:16(130.34.32.80)
13	26	44	6909	kino	dummy	0	2016/5/10/12:17:25(130.34.32.80)	0
11	36	40	6909	harashima	dummy	1	2016/5/11/10:38:6(130.34.32.80)	PM2チャンバの対応です
-11	40	44	6909	harashima	dummy	1	2016/5/11/18:17:3(130.34.95.37)	0	2016/5/11/18:56:37(130.34.95.37)
12	24	36	6908	sugawara	dummy	0	2016/5/11/18:52:40(130.34.32.80)	0
12	36	44	6908	sugawara	dummy	0	2016/5/12/17:37:4(130.34.95.37)	0
13	18	26	6909	sugawara	dummy	0	2016/5/12/20:29:45(130.34.95.37)	0
13	44	48	6909	sugawara	dummy	0	2016/5/13/22:15:57(130.34.95.37)	0
16	23	28	6909	morikawa	dummy	0	2016/5/16/11:9:5(130.34.32.80)	0
-17	35	38	6909	harashima	dummy	0	2016/5/17/17:29:31(130.34.32.80)	エアリーク対応	2016/5/17/17:29:35(130.34.32.80)
17	35	37	6909	harashima	dummy	0	2016/5/17/17:29:31(130.34.32.80)	エアリーク対応
20	36	44	6909	kino	dummy	0	2016/5/19/18:50:35(130.34.32.80)	Al→Crの予定
23	38	42	6909	装置担当	dummy	1	2016/5/23/18:43:51(130.34.32.80)	エアリーク対応　PM1に異常は有りません
25	36	44	6909	kino	dummy	0	2016/5/25/10:21:58(130.34.32.80)	Al→Crの予定
-26	16	48	6909	harashima	dummy	1	2016/5/25/22:58:46(130.34.95.37)	使用不可　対応協議中	2016/5/26/16:29:13(130.34.32.80)
26	16	35	6909	harashima	dummy	1	2016/5/25/22:58:46(130.34.95.37)	使用不可　対応協議中