6	20	23	6909	harashima	dummy	0	2014/1/4/15:55:23(130.34.95.37)	SiO2 1μm
-6	24	48	6908	hashiguchi	dummy	1	2014/1/5/17:6:52(130.34.95.37)	メンテナンス	2014/1/6/9:42:22(130.34.95.37)
7	0	16	6908	hashiguchi	dummy	1	2014/1/5/17:7:23(130.34.95.37)	0
-6	24	48	6908	hashiguchi	dummy	1	2014/1/6/9:43:57(130.34.95.37)	0	2014/1/6/9:44:3(130.34.95.37)
6	24	48	6908	hashiguchi	dummy	1	2014/1/6/9:44:50(130.34.95.37)	チャンバー真空引きの後、オイル交換。
7	18	26	4119	onishi	dummy	0	2014/1/6/15:24:0(130.34.74.220)	0
-8	17	23	4119	konno	dummy	0	2014/1/7/7:42:45(130.34.63.131)	0	2014/1/7/8:44:15(130.34.63.131)
-7	26	34	4119	konno	dummy	0	2014/1/7/8:43:14(130.34.63.131)	0	2014/1/7/12:17:10(130.34.63.131)
-8	22	28	4119	konno	dummy	0	2014/1/7/8:44:28(130.34.63.131)	0	2014/1/7/12:17:41(130.34.63.131)
7	26	27	4119	konno	dummy	0	2014/1/7/8:43:14(130.34.63.131)	0
8	16	20	4119	konno	dummy	0	2014/1/7/12:17:37(130.34.63.131)	0
-8	32	36	4119	konno	dummy	0	2014/1/7/12:18:5(130.34.63.131)	0	2014/1/8/16:12:10(130.34.95.37)
-7	34	42	4119	onishi	dummy	0	2014/1/7/14:3:49(130.34.95.37)	0	2014/1/7/17:55:57(130.34.44.3)
7	34	38	4119	onishi	dummy	0	2014/1/7/14:3:49(130.34.95.37)	0
8	20	32	4119	onishi	dummy	0	2014/1/7/17:56:14(130.34.44.3)	0
9	24	28	4119	onishi	dummy	0	2014/1/7/18:20:30(130.34.44.3)	0
8	32	35	4119	konno	dummy	0	2014/1/7/12:18:5(130.34.63.131)	0
-14	36	42	4119	onishi	dummy	0	2014/1/14/12:22:9(130.34.74.220)	0	2014/1/14/18:21:58(130.34.63.131)
14	36	39	4119	onishi	dummy	0	2014/1/14/12:22:9(130.34.74.220)	0
-17	30	34	4119	nagai	dummy	0	2014/1/15/13:46:45(130.34.63.131)	0	2014/1/17/11:59:54(130.34.63.131)
16	28	32	4119	onishi	dummy	0	2014/1/16/12:29:33(130.34.63.131)	0
20	20	24	6909	harashima	dummy	0	2014/1/16/20:26:55(130.34.95.37)	Si 100
17	20	24	6909	harashima	dummy	0	2014/1/17/8:43:57(130.34.95.37)	0
17	24	26	6909	harashima	dummy	0	2014/1/17/10:39:16(130.34.95.37)	0
17	26	27	6909	harashima	dummy	0	2014/1/17/11:21:30(130.34.95.37)	0
-20	26	32	4119	konno	dummy	0	2014/1/17/13:36:54(130.34.63.131)	0	2014/1/20/14:14:25(130.34.63.131)
-21	17	22	4119	konno	dummy	0	2014/1/17/16:41:6(130.34.63.131)	0	2014/1/20/15:3:37(130.34.63.131)
-21	22	25	4119	nagai	dummy	0	2014/1/20/11:10:56(130.34.74.220)	0	2014/1/20/15:8:44(130.34.74.220)
20	32	38	4119	onishi	dummy	0	2014/1/20/12:6:28(130.34.74.220)	0
20	26	31	4119	konno	dummy	0	2014/1/17/13:36:54(130.34.63.131)	0
-21	25	32	4119	konno	dummy	0	2014/1/20/15:3:52(130.34.63.131)	0	2014/1/21/9:22:12(130.34.63.131)
21	18	22	4119	nagai	dummy	0	2014/1/20/15:8:55(130.34.74.220)	0
22	20	26	4119	柳村	dummy	0	2014/1/20/15:21:17(130.34.74.220)	オペトレ
21	24	30	4119	konno	dummy	0	2014/1/21/9:22:29(130.34.63.131)	0
22	26	30	4119	konno	dummy	0	2014/1/21/13:30:23(130.34.95.37)	0
-28	28	38	4119	nakamura	dummy	0	2014/1/23/9:28:44(130.34.74.220)	0	2014/1/27/9:39:42(130.34.74.220)
29	18	24	4119	柳村	dummy	0	2014/1/23/18:23:59(130.34.74.220)	0
24	20	26	4119	柳村	dummy	0	2014/1/23/18:24:24(130.34.74.220)	0
-27	26	36	4119	onishi	dummy	0	2014/1/24/11:3:28(130.34.63.131)	0	2014/1/27/13:17:16(130.34.44.8)
27	26	29	4119	onishi	dummy	0	2014/1/24/11:3:28(130.34.63.131)	0
-28	30	36	4119	nakamura	dummy	0	2014/1/27/14:11:45(130.34.74.220)	0	2014/1/28/13:48:57(130.34.63.131)
30	19	28	4119	nakamura	dummy	0	2014/1/28/10:52:4(130.34.74.220)	0
28	31	36	4119	nakamura	dummy	0	2014/1/28/13:49:12(130.34.63.131)	0
29	28	32	4119	onishi	dummy	0	2014/1/28/14:42:25(130.34.47.3)	0
31	28	32	4119	nagai	dummy	0	2014/1/28/17:51:6(130.34.74.220)	0
29	39	42	4119	onishi	dummy	0	2014/1/29/19:18:59(130.34.63.131)	0
30	38	42	4119	yanagimura	dummy	0	2014/1/30/18:44:0(130.34.95.37)	0