8	28	32	4119	konno	dummy	0	2014/9/5/14:29:41(130.34.95.37)	bump
-11	28	35	4119	nagai	dummy	0	2014/9/8/9:21:36(130.34.74.220)	bottom up	2014/9/8/18:14:31(130.34.74.220)
-12	28	32	4119	nagai	dummy	0	2014/9/8/9:22:27(130.34.74.220)	bump	2014/9/8/18:16:4(130.34.74.220)
-11	20	26	4119	nagai	dummy	0	2014/9/8/18:15:2(130.34.74.220)	bottom up	2014/9/9/19:3:18(130.34.95.37)
-12	20	24	4119	nagai	dummy	0	2014/9/8/18:16:29(130.34.74.220)	bump	2014/9/9/19:3:25(130.34.95.37)
9	30	36	4119	nakamura	dummy	0	2014/9/9/9:52:7(130.34.74.220)	ドラフト、恒温槽使用
-10	28	36	6909	ito	dummy	0	2014/9/9/15:41:10(130.34.95.37)	e-plating bump	2014/9/9/15:42:22(130.34.95.37)
10	30	38	6909	ito	dummy	0	2014/9/9/15:42:57(130.34.95.37)	e-plating bump
10	38	44	6909	ito	dummy	0	2014/9/9/15:43:50(130.34.95.37)	use of water bath
10	19	23	6908	hahsiguchi	dummy	0	2014/9/10/9:12:51(130.34.95.37)	0
11	18	24	4119	konno	dummy	0	2014/9/10/16:18:31(130.34.95.37)	0
16	26	34	4119	nagai	dummy	0	2014/9/12/16:32:4(130.34.74.220)	bottom up
17	26	34	4119	konno	dummy	0	2014/9/16/7:44:14(130.34.95.44)	Cu filling
-18	22	26	4119	konno	dummy	0	2014/9/16/7:58:29(130.34.95.44)	bump	2014/9/17/13:16:13(130.34.95.37)
17	22	25	4119	nagai	dummy	0	2014/9/16/13:46:33(130.34.95.37)	bump
18	24	28	4119	konno	dummy	0	2014/9/17/13:16:32(130.34.95.37)	bump
19	40	46	6908	tanikawa	dummy	0	2014/9/18/21:1:33(130.34.95.37)	0
21	26	29	6908	hahsiguchi, ito	dummy	0	2014/9/21/12:43:2(130.34.95.37)	0
-24	23	26	4119	nagai	dummy	0	2014/9/22/10:0:40(130.34.74.220)	bump	2014/9/22/10:0:47(130.34.74.220)
24	23	31	4119	nagai	dummy	0	2014/9/22/10:1:15(130.34.74.220)	bump
-26	28	40	6909	ito	dummy	0	2014/9/26/13:4:51(130.34.95.37)	0	2014/9/26/13:4:58(130.34.95.37)
26	28	29	6909	ito	dummy	0	2014/9/26/13:4:51(130.34.95.37)	0
26	29	40	6909	ito	dummy	0	2014/9/26/13:5:28(130.34.95.37)	bump, seed etching
26	40	48	6909	ito	dummy	0	2014/9/26/21:2:37(130.34.95.37)	0