4	28	34	4119	konno	dummy	0	2013/6/4/12:42:52(130.34.63.131)	0
5	20	24	4119	konno	dummy	0	2013/6/5/8:32:27(130.34.63.131)	0
10	29	34	6908	tanikawa	dummy	0	2013/6/8/7:43:36(130.34.95.37)	0
-13	30	36	6908	tanikawa	dummy	0	2013/6/13/3:57:4(130.34.95.37)	0	2013/6/13/3:58:5(130.34.95.37)
13	20	30	4119	nagai	dummy	0	2013/6/13/9:34:16(130.34.74.84)	無電解込、オペトレ込
14	28	31	4119	nagai	dummy	0	2013/6/14/9:44:41(130.34.74.84)	0
15	34	40	6908	tanikawa, hashiguchi	dummy	0	2013/6/14/14:4:19(130.34.63.131)	0
17	20	30	4119	nakamura	dummy	0	2013/6/17/10:7:21(130.34.95.37)	0
17	30	32	4119	nakamura	dummy	0	2013/6/17/14:39:2(130.34.95.37)	0
24	22	26	4119	nakamura	dummy	0	2013/6/24/10:39:41(130.34.74.84)	0
27	19	36	4119	onishi	dummy	0	2013/6/26/20:3:42(130.34.95.44)	Cu bottom up 2 wafers