14	18	48	6965	K.Takahashi	dummy	1	2006/11/17/17:6:16(130.34.95.31)	for SEI image
15	18	48	6965	K.Takahashi	dummy	1	2006/11/17/17:6:30(130.34.95.31)	0
1	28	40	6965	Bulgan	dummy	0	2006/11/30/22:51:59(130.34.95.31)	0
-5	20	42	6965	Miura	dummy	0	2006/12/1/22:16:59(130.34.95.31)	0	2006/12/5/15:21:58(130.34.95.31)
2	42	48	6965	Bulgan	dummy	0	2006/12/2/20:19:16(130.34.95.31)	0
3	0	22	6965	Bulgan	dummy	0	2006/12/2/20:19:33(130.34.95.31)	0
5	42	48	6965	Bulgan	dummy	0	2006/12/5/12:26:17(130.34.95.31)	0
6	0	24	6965	Bulgan	dummy	0	2006/12/5/12:26:48(130.34.95.31)	0
5	20	33	6965	Miura	dummy	0	2006/12/1/22:16:59(130.34.95.31)	0
6	42	48	6965	Choi	dummy	0	2006/12/6/1:0:53(130.34.95.31)	0
7	0	24	6965	Choi	dummy	0	2006/12/6/1:1:1(130.34.95.31)	0
7	24	42	6965	Choi	dummy	0	2006/12/6/16:41:43(130.34.95.31)	0
6	34	42	6965	Bulgan	dummy	0	2006/12/6/16:58:36(130.34.95.31)	0
8	22	36	6937	闥九€€豌ク蜑�	dummy	0	2006/12/6/22:4:47(130.34.95.43)	0
7	42	48	6965	Choi	dummy	0	2006/12/7/23:9:17(130.34.95.31)	0
8	0	20	6965	Choi	dummy	0	2006/12/7/23:9:32(130.34.95.31)	0
9	0	24	6965	Choi	dummy	0	2006/12/9/0:21:49(130.34.95.31)	0
12	24	44	6937	Song	dummy	0	2006/12/11/13:34:39(130.34.95.43)	0
13	24	44	6937	闥九€€豌ク蜑�	dummy	0	2006/12/11/14:15:9(130.34.95.43)	0
19	20	42	6937	Song	dummy	0	2006/12/14/16:35:37(130.34.95.43)	e-beam litho with chip alignment
21	26	44	6937	Y.G JIANG	dummy	0	2006/12/18/11:46:38(130.34.95.43)	0
20	22	42	6965	Miura	dummy	0	2006/12/18/13:27:17(130.34.95.31)	0
18	36	46	6936	Ho	dummy	0	2006/12/18/16:14:13(130.34.95.43)	0
-22	20	38	6937	Song	dummy	0	2006/12/19/18:13:57(130.34.95.43)	0	2006/12/20/19:53:41(130.34.95.43)
20	42	48	6937	Song	dummy	0	2006/12/20/19:52:31(130.34.95.43)	0
21	0	26	6937	Song	dummy	0	2006/12/20/19:52:54(130.34.95.43)	0
21	44	48	6937	Song	dummy	0	2006/12/21/21:44:58(130.34.95.43)	0
22	18	28	6965	choi	dummy	0	2006/12/22/2:5:3(130.34.95.31)	0
22	28	40	6965	Choi	dummy	0	2006/12/22/12:30:34(130.34.95.31)	0
25	18	30	6936	Ho	dummy	0	2006/12/22/12:43:37(130.34.95.43)	0
22	40	48	6937	Song	dummy	0	2006/12/22/15:9:18(130.34.95.43)	0
23	0	22	6937	Song	dummy	0	2006/12/22/23:39:45(130.34.95.43)	0
23	36	48	6965	choi	dummy	0	2006/12/23/2:19:32(130.34.95.31)	0
27	20	36	6965	Choi	dummy	0	2006/12/26/9:46:1(130.34.95.31)	0
28	24	36	6965	Choi	dummy	0	2006/12/27/19:37:27(130.34.95.31)	0
-30	22	34	6937	Song	dummy	0	2006/12/28/14:40:39(130.34.95.43)	0	2006/12/29/19:42:47(130.34.95.43)
-29	38	48	6937	Song	dummy	0	2006/12/29/18:4:48(130.34.95.43)	0	2006/12/29/19:42:27(130.34.95.43)
29	38	42	6937	Song	dummy	0	2006/12/29/18:4:48(130.34.95.43)	0