-4 27 38 6937 Kochhar dummy 0 2012/4/2/9:26:52(130.34.95.43) Au/Cr; Long time vacuum + Etch + Sputtering (1um) 2012/4/4/8:32:22(130.34.95.43) 2 34 40 4771 Wang dummy 0 2012/4/2/9:58:23(130.34.95.21) Al -6 27 38 6937 Kochhar dummy 0 2012/4/2/11:5:16(130.34.95.43) Au/Cr; Long time vacuum + Etch + Sputtering (1um) 2012/4/5/12:9:32(130.34.95.43) -3 30 36 6937 N.WANG dummy 0 2012/4/2/12:30:56(130.34.95.43) Cr/Au 2012/4/2/19:22:21(130.34.95.43) 3 36 42 6937 N.WANG dummy 0 2012/4/2/19:22:18(130.34.95.43) Cr/Au -5 28 36 6937 Chia-Hao Hung dummy 0 2012/4/3/17:38:19(130.34.95.43) Au/Cr 2012/4/3/18:11:23(130.34.95.43) -5 36 44 6937 WS Wang dummy 0 2012/4/3/17:40:58(130.34.95.43) Au/Cr 2012/4/3/18:11:57(130.34.95.43) 5 26 34 6937 Chia-Hao Hung dummy 0 2012/4/3/18:11:53(130.34.95.43) Au / Cr 5 34 42 6937 Wei-Shan Wang dummy 0 2012/4/3/18:12:26(130.34.95.43) Au / Cr 4 38 44 4771 Phan dummy 0 2012/4/3/19:26:35(130.34.95.21) Au/Cr 4 19 27 6937 fukushi dummy 0 2012/4/4/8:15:5(130.34.95.43) Cr *2set -4 27 29 6937 fukushi dummy 0 2012/4/4/8:49:38(130.34.95.44) Cr 2012/4/4/10:37:31(130.34.95.44) -6 30 41 6937 Kochhar dummy 0 2012/4/5/12:9:45(130.34.95.43) Au/Cr; Long time vacuum + Etch + Sputtering (1um) 2012/4/6/17:57:15(130.34.95.43) 5 42 48 4771 Phan dummy 0 2012/4/5/18:6:5(130.34.95.21) with Minh, Kuwano sensei's permission 6 22 28 5810 chin dummy 0 2012/4/5/23:22:47(130.34.95.49) Cr -6 41 44 6937 Kochhar dummy 0 2012/4/6/14:28:52(130.34.95.43) 0 2012/4/6/17:57:11(130.34.95.43) 6 30 38 6937 Kochhar dummy 0 2012/4/5/12:9:45(130.34.95.43) Au/Cr; Long time vacuum + Etch + Sputtering (1um) 7 18 27 6937 Kochhar dummy 0 2012/4/6/18:14:21(130.34.95.43) with Tanaka(S)-sensei's permission 7 27 30 6937 Kochhar dummy 0 2012/4/7/11:16:6(130.34.94.146) 0 7 41 47 4771 Minh dummy 0 2012/4/7/19:17:30(130.34.95.43) with Phan, Prof. Kuwano's permission 8 24 30 4771 Minh dummy 0 2012/4/8/11:12:29(130.34.95.21) with Phan, Prof. Kuwano's permission 8 37 43 5810 Toan dummy 0 2012/4/8/16:53:16(130.34.95.49) With Minh, Miyashita sensei`s permission 12 19 26 4771 bao dummy 0 2012/4/9/20:17:36(130.34.95.21) Al 10 28 36 6937 Kochhar dummy 0 2012/4/10/11:19:26(130.34.95.43) Au/Cr -11 24 32 6937 Au/Cr dummy 0 2012/4/10/14:27:11(130.34.95.43) 0 2012/4/11/10:29:25(130.34.95.43) 11 32 39 6937 Weichih Lin dummy 0 2012/4/11/8:49:20(130.34.95.43) Cr/Au 11 24 32 6937 T. Matsumura dummy 0 2012/4/11/10:29:45(130.34.95.43) Au/Cr 13 28 36 5810 chin dummy 0 2012/4/11/23:28:53(130.34.95.49) Al->W 12 29 34 6937 Wei-Shan Wang dummy 0 2012/4/12/9:4:53(130.34.95.43) etch -13 20 26 6937 Wei-Shan Wang dummy 0 2012/4/12/9:5:26(130.34.95.43) etch 2012/4/12/9:5:35(130.34.95.43) 13 20 24 6937 Wei-Shan Wang dummy 0 2012/4/12/9:5:56(130.34.95.43) etch 16 20 28 6909 S.Kanno dummy 0 2012/4/13/13:24:20(130.34.95.37) Ti/Au 23 26 34 6909 S.Kanno dummy 0 2012/4/13/13:25:35(130.34.95.37) Ti/Au -18 27 37 6909 sasaki dummy 0 2012/4/13/16:43:54(130.34.95.37) Ti/Au/Ti/Au 2012/4/17/23:54:19(130.34.95.37) 19 26 34 6937 Chia-Hao Hung dummy 0 2012/4/13/19:28:33(130.34.95.43) Cr/Au 19 34 42 6937 Chu dummy 0 2012/4/13/19:30:32(130.34.95.43) Cr/Au 16 31 38 4771 Wang dummy 0 2012/4/15/15:33:11(130.34.95.21) Al 16 28 30 6909 S.Kanno dummy 0 2012/4/16/9:11:0(130.34.95.37) 0 -17 20 26 5810 HE liang dummy 0 2012/4/16/9:34:46(130.34.95.43) 0 2012/4/16/9:34:52(130.34.95.43) -17 20 26 5810 HE Liang dummy 0 2012/4/16/9:35:13(130.34.95.43) 0 2012/4/16/9:35:23(130.34.95.43) -17 20 26 5810 HE Liang dummy 0 2012/4/16/9:35:43(130.34.95.43) Al 2012/4/16/19:16:47(130.34.95.43) 17 30 38 6909 kigure dummy 0 2012/4/16/10:20:16(130.34.95.37) Cr/Au -17 38 47 6937 Kojima Makihata dummy 0 2012/4/16/13:13:8(130.34.95.43) 0 2012/4/16/13:13:32(130.34.95.43) 17 38 47 6937 Kojima Makihata dummy 0 2012/4/16/13:15:1(130.34.95.43) Ti,Auスパッタ 18 18 25 6937 Kojima Makihata dummy 0 2012/4/16/13:29:46(130.34.95.43) Au,Tiスパッタ 16 38 40 4771 Wang dummy 0 2012/4/16/14:45:15(130.34.95.21) 0 19 18 26 6937 Kochhar dummy 0 2012/4/16/17:4:21(130.34.95.43) Au,Cr 20 26 34 6937 Kochhar dummy 0 2012/4/16/17:4:54(130.34.95.43) Au.Cr 17 28 30 6909 kigure dummy 0 2012/4/16/22:13:32(130.34.95.37) Cr/Au 18 0 6 6937 makihata dummy 0 2012/4/17/23:31:37(130.34.95.43) 0 -18 28 36 6937 Weichih Lin dummy 0 2012/4/18/8:38:23(130.34.95.43) Cr 2012/4/18/10:57:52(130.34.95.44) 18 31 39 6937 Weichih lin dummy 0 2012/4/18/10:58:33(130.34.95.44) Cr -18 39 46 4771 Wang dummy 0 2012/4/18/11:22:18(130.34.95.21) Al 2012/4/18/18:25:0(130.34.95.21) 20 18 26 6937 Wei-Shan Wang dummy 0 2012/4/18/14:33:47(130.34.95.44) Al 18 39 47 4771 Wang dummy 0 2012/4/18/18:25:17(130.34.95.21) Pt -19 42 44 4771 Minh dummy 2 2012/4/18/18:46:7(130.34.95.21) Take out the Pt target 2012/4/19/8:22:58(130.34.95.21) -25 28 35 5810 tanaka dummy 2 2012/4/18/21:55:20(130.34.95.49) Cr/W 2012/4/22/12:6:34(130.34.95.49) 19 16 18 4771 Wang dummy 0 2012/4/19/8:4:17(130.34.95.44) Target 3, Pt->Al 19 42 48 6908 nakajima dummy 0 2012/4/19/13:53:6(130.34.95.37) Cr/Au -20 0 6 6908 nakajima dummy 0 2012/4/19/13:53:59(130.34.95.37) Cr/Au ベー先生承認 2012/4/19/23:34:36(130.34.95.37) -20 34 42 4771 bao dummy 0 2012/4/19/18:18:55(130.34.95.21) 0 2012/4/19/18:19:13(130.34.95.21) 20 34 42 4771 bao dummy 0 2012/4/19/18:19:31(130.34.95.21) Au/Cr 20 6 12 6908 noriki,ohara dummy 0 2012/4/19/19:37:36(130.34.95.44) ベー先生承認済み 20 42 48 5810 cyou dummy 0 2012/4/19/20:37:56(130.34.95.49) with Toan。 Dr.Kawai‘s permission -24 26 33 6937 Chia-Hao Hung dummy 0 2012/4/20/9:48:40(130.34.95.43) Cr/Au 2012/4/20/9:50:1(130.34.95.43) -24 33 40 6937 Chu dummy 0 2012/4/20/9:49:12(130.34.95.43) Cr/Au 2012/4/20/9:49:58(130.34.95.43) 24 20 27 6937 Chia-Hao Hung dummy 0 2012/4/20/9:52:6(130.34.95.43) Au / Cr 24 27 34 6937 Chu dummy 0 2012/4/20/9:54:21(130.34.95.43) Au / Cr 22 17 24 5251 kubo dummy 0 2012/4/20/14:49:10(130.34.72.195) Cr/Au 21 0 2 5810 cyou dummy 0 2012/4/20/18:23:54(130.34.95.49) 0 -27 21 29 6937 Kochhar dummy 0 2012/4/20/18:27:52(130.34.95.43) 0 2012/4/20/18:28:13(130.34.95.43) -27 21 28 6937 Kochhar dummy 2 2012/4/20/18:28:35(130.34.95.43) Al 2012/4/26/14:37:8(130.34.95.43) -27 28 30 6937 Kochhar dummy 0 2012/4/20/18:28:57(130.34.95.43) 0 2012/4/20/18:29:7(130.34.95.43) -27 28 30 6937 Kochhar dummy 0 2012/4/20/18:29:38(130.34.95.43) if the target before my reservation is already Al, this reservation will be cancelled. 2012/4/26/14:37:2(130.34.95.43) 23 34 42 6937 Weichih Lin dummy 0 2012/4/20/19:41:23(130.34.95.43) Cr/Au 24 34 41 5810 tanaka dummy 2 2012/4/22/12:7:10(130.34.95.49) cr-w 25 17 24 5251 ito dummy 0 2012/4/23/6:57:0(130.34.72.195) Cr 25 34 42 6937 Kojima dummy 0 2012/4/23/10:29:58(130.34.95.43) Au/Cr -25 42 47 5251 kubo dummy 0 2012/4/23/17:38:47(130.34.72.195) Cr/Au 2012/4/23/17:48:18(130.34.72.195) 26 18 27 6937 jia dummy 0 2012/4/23/19:46:27(130.34.95.21) Au/Cr 24 13 20 5810 Toan dummy 0 2012/4/23/21:10:8(130.34.95.49) Cr/Au 26 29 35 5251 kubo dummy 0 2012/4/24/12:48:56(130.34.72.195) Cr/Au 25 28 34 6937 Kochhar dummy 0 2012/4/24/19:23:39(130.34.95.43) Au/Cr 25 42 48 6956 huang dummy 0 2012/4/25/9:23:57(130.34.95.38) Al -26 35 42 5810 tanaka dummy 2 2012/4/25/20:2:5(130.34.95.49) cr-w 2012/4/25/20:4:1(130.34.95.49) -26 37 44 5810 tanaka dummy 2 2012/4/25/20:4:29(130.34.95.49) cr-w 2012/4/26/16:23:12(130.34.95.44) 26 16 18 6956 huang dummy 0 2012/4/25/23:34:40(130.34.95.44) Al 26 44 48 5810 chin dummy 0 2012/4/26/11:4:23(130.34.95.49) Cr/W 27 0 2 5810 chin dummy 0 2012/4/26/11:4:50(130.34.95.49) Cr/W -28 17 30 6937 Jia dummy 0 2012/4/26/13:27:50(130.34.95.43) 0 2012/4/26/13:33:34(130.34.95.43) -27 30 44 6937 Jia dummy 0 2012/4/26/13:28:40(130.34.95.43) 0 2012/4/26/14:37:40(130.34.95.43) 27 18 30 6937 Jia dummy 0 2012/4/26/14:37:28(130.34.95.43) 0 27 30 45 6937 Kochhar dummy 2 2012/4/26/14:37:58(130.34.95.43) Al 26 35 42 5810 tanaka dummy 2 2012/4/26/16:23:33(130.34.95.44) cr-w -27 2 10 4771 Minh dummy 0 2012/4/26/21:5:6(130.34.95.21) with Phan, Prof. Kuwano's permission 2012/4/27/2:31:59(130.34.95.21) 27 2 8 4771 Minh dummy 0 2012/4/26/21:5:6(130.34.95.21) with Phan, Prof. Kuwano's permission 27 10 17 4771 Minh dummy 0 2012/4/27/2:32:43(130.34.95.21) 0 28 23 31 6937 Kochhar dummy 0 2012/4/27/16:2:21(130.34.95.43) 0 27 46 48 6908 noriki,ohara dummy 0 2012/4/27/18:38:30(130.34.95.37) Au/Cr ベー先生承認済み 28 0 4 6908 noriki dummy 0 2012/4/27/18:38:41(130.34.95.37) 0 28 4 6 6908 noriki dummy 0 2012/4/27/22:24:53(130.34.95.37) 0 28 6 8 6908 noriki dummy 0 2012/4/28/1:59:8(130.34.95.37) 0 28 31 34 6937 Kochhar dummy 0 2012/4/28/11:29:38(130.34.95.43) 0