-1 20 30 6937 kumagae dummy 2 2008/11/26/17:28:7(130.34.95.43) Ta/Pt 2008/11/26/17:29:46(130.34.95.43) -1 18 28 6937 kumagae dummy 2 2008/11/26/17:30:22(130.34.95.43) Ta/Pt 3→Ta 2008/11/26/17:30:37(130.34.95.43) -1 18 28 6937 kumagae dummy 2 2008/11/26/17:31:55(130.34.95.43) Ta/Pt 　No.3 Ta 2008/11/26/17:32:9(130.34.95.43) -1 18 28 6937 kumagae dummy 0 2008/11/26/17:32:50(130.34.95.43) Ta/Pt 3:Ta 2:Pt 2008/11/26/17:32:57(130.34.95.43) 1 18 28 6937 kumagae dummy 2 2008/11/26/17:33:23(130.34.95.43) Ta/Pt 3:Ta 2:Pt 4 16 24 6936 kawaguchi dummy 0 2008/11/28/16:20:6(130.34.95.43) Au -7 14 16 6936 kawaguchi dummy 2 2008/11/28/16:22:22(130.34.95.43) Tiとりはずし 2008/11/28/16:24:31(130.34.95.43) -8 12 14 6936 kawaguchi dummy 0 2008/11/28/16:24:52(130.34.95.43) Tiとりはずし 2008/11/28/16:25:19(130.34.95.43) -9 12 14 6936 kawaguchi dummy 2 2008/11/28/16:25:12(130.34.95.43) Tiとりはずし 2008/12/9/0:18:34(130.34.95.43) 8 12 14 6936 kawaguchi dummy 2 2008/11/28/16:25:52(130.34.95.43) Tiとりはずし -2 28 36 6937 JaeWung Lee dummy 0 2008/11/28/23:7:6(172.16.44.151) 0 2008/11/29/9:48:45(172.16.44.151) 3 28 36 6937 JaeWung Lee dummy 0 2008/11/28/23:7:24(172.16.44.151) 0 -1 28 40 6937 JaeWung Lee dummy 2 2008/11/29/9:49:30(172.16.44.151) Ge target 2008/12/1/9:33:35(172.16.44.151) -1 40 48 6965 chu dummy 0 2008/11/29/10:1:32(130.34.95.31) 0 2008/12/1/2:5:11(172.16.44.146) -2 20 28 6968 inomata dummy 0 2008/11/30/13:36:7(130.34.88.130) Cr/Au 2008/12/1/19:18:31(130.34.88.130) -2 36 45 6965 chu dummy 0 2008/12/1/2:6:4(172.16.44.146) 0 2008/12/2/14:31:10(130.34.95.31) 1 6 14 6936 kawaguchi-hiroko dummy 0 2008/12/1/2:45:11(130.34.95.43) r 1 16 18 6936 kawaguchi dummy 0 2008/12/1/8:32:56(130.34.95.43) 0 -2 28 36 6937 JaeWung Lee dummy 2 2008/12/1/9:34:11(172.16.44.151) Ge target 2008/12/2/15:58:21(172.16.44.151) -1 28 36 6937 kumagae dummy 0 2008/12/1/12:26:13(130.34.95.43) Cr 3⇒Cr 2008/12/1/13:44:12(172.16.44.146) 1 28 30 6937 kumagae dummy 0 2008/12/1/12:26:13(130.34.95.43) Cr 3⇒Cr 1 30 35 6937 kumagae dummy 0 2008/12/1/13:44:59(172.16.44.146) Cr 3 18 28 6937 makihata dummy 0 2008/12/1/15:49:13(130.34.95.43) use Au target in SHIBAURA#2 -2 18 26 6968 inomata dummy 0 2008/12/1/19:18:43(130.34.88.130) 0 2008/12/1/19:18:49(130.34.88.130) -2 18 26 6968 inomata dummy 0 2008/12/1/19:18:59(130.34.88.130) Cr/Au 2008/12/2/10:10:59(172.16.44.146) -3 42 48 6965 chu dummy 0 2008/12/1/21:36:45(130.34.95.43) 0 2008/12/2/14:31:27(130.34.95.31) 4 0 5 6965 chu dummy 0 2008/12/1/21:37:7(130.34.95.43) 0 2 15 18 6968 Inomata dummy 0 2008/12/1/23:36:4(130.34.88.130) Cr/Au 2 18 23 6968 inomata dummy 0 2008/12/1/19:18:59(130.34.88.130) Cr/Au 4 28 37 6937 K.D .PARK dummy 0 2008/12/2/11:41:32(130.34.95.43) Cr -3 42 48 6965 chu dummy 0 2008/12/2/14:31:48(130.34.95.31) 0 2008/12/3/2:59:32(130.34.95.43) 4 38 46 7897 Hagiwara dummy 0 2008/12/2/14:54:9(130.34.95.31) Cr/Au 2 36 44 6937 JaeWung Lee dummy 0 2008/12/2/15:58:10(172.16.44.151) 0 2 28 34 6937 JaeWung Lee dummy 2 2008/12/1/9:34:11(172.16.44.151) Ge target 2 34 36 6937 JaeWung Lee dummy 0 2008/12/2/15:58:42(172.16.44.151) 0 -3 36 42 4404 Ha,Jun-Seok dummy 0 2008/12/2/17:58:57(130.34.248.171) Cr 2008/12/3/17:9:16(130.34.248.171) 3 0 9 6936 honjoya dummy 0 2008/12/2/18:1:23(130.34.95.43) Cr/Pt/Au 2 44 46 6937 JaeWung Lee dummy 2 2008/12/2/20:38:17(172.16.44.151) from　Ge to Pt 5 36 44 4404 sato dummy 0 2008/12/2/22:21:37(130.34.248.134) Cr 5 18 28 6937 makihata dummy 2 2008/12/3/12:5:55(130.34.95.43) Al/Au -3 42 48 6937 makihata dummy 0 2008/12/3/17:4:29(130.34.95.43) Al/Au 2008/12/3/17:5:4(130.34.95.43) 3 36 37 4404 Ha,Jun-Seok dummy 0 2008/12/2/17:58:57(130.34.248.171) Cr 11 26 34 6937 Tsukamoto dummy 0 2008/12/3/20:54:11(130.34.95.43) Au/Cr -7 32 42 6965 chu dummy 0 2008/12/3/22:29:1(130.34.95.31) 0 2008/12/7/7:22:44(172.16.44.146) 4 24 28 6936 kawaguchi dummy 0 2008/12/3/23:30:55(130.34.95.43) Au/Cr 4 37 38 6937 K.D .PARK dummy 0 2008/12/4/12:4:38(130.34.95.43) Cr 4 46 48 6937 Hoeppner dummy 0 2008/12/4/15:24:27(130.34.95.43) Cr 5 0 8 6937 Hoeppner dummy 0 2008/12/4/15:25:1(130.34.95.43) 0 5 8 11 6937 Hoeppner dummy 0 2008/12/5/2:6:43(130.34.95.43) 0 7 20 32 6936 kano dummy 0 2008/12/5/10:21:5(130.34.95.43) Pt/Cr 6 42 48 6965 chu dummy 0 2008/12/6/3:20:56(172.16.44.146) 0 7 0 4 6965 chu dummy 0 2008/12/6/3:21:22(172.16.44.146) 0 -8 17 30 6937 makihata dummy 0 2008/12/6/16:3:38(130.34.95.43) 0 2008/12/6/16:3:44(130.34.95.43) 8 24 34 6937 makihata dummy 0 2008/12/6/16:4:28(130.34.95.43) Cr/Au 7 4 15 6965 chu dummy 0 2008/12/7/2:54:42(130.34.95.31) 0 7 15 20 6965 chu dummy 0 2008/12/7/7:25:19(172.16.44.146) 0 7 32 34 6936 kano dummy 0 2008/12/7/12:22:35(130.34.95.43) Pt/Cr 8 34 42 6936 kawaguchi dummy 0 2008/12/8/14:42:57(130.34.95.43) 0 10 26 34 6968 inomata dummy 0 2008/12/8/17:56:34(130.34.88.130) Cr -11 34 42 6968 inomata dummy 0 2008/12/8/17:57:13(130.34.88.130) Cr/Au 2008/12/11/10:58:43(130.34.88.130) 9 10 20 6936 honjoya dummy 0 2008/12/9/0:19:11(130.34.95.43) Cr/Pt 9 23 33 6936 honjoya dummy 0 2008/12/9/0:20:33(130.34.95.43) Cr/Pt/Au -9 38 48 6909 Lee dummy 0 2008/12/9/18:17:19(130.34.95.37) 0 2008/12/9/18:17:42(130.34.95.37) 9 38 39 6909 Lee dummy 0 2008/12/9/18:17:19(130.34.95.37) 0 -10 39 48 6909 Lee dummy 0 2008/12/9/18:20:18(130.34.95.37) Cr/Au 2008/12/10/15:57:2(172.16.44.145) 10 34 39 6937 Hoeppner dummy 0 2008/12/10/14:31:17(130.34.95.43) 0 11 16 24 6965 Hokari dummy 0 2008/12/10/19:5:2(130.34.95.31) Cr 11 42 48 6937 k.hirano dummy 0 2008/12/10/20:44:15(130.34.95.43) Au/Cr 12 0 2 6937 k.hirano dummy 0 2008/12/10/20:44:35(130.34.95.43) 0 -12 26 34 6965 Hokari dummy 0 2008/12/10/22:1:39(130.34.95.31) Au/Cr 2008/12/11/8:19:50(130.34.95.43) 11 24 26 6965 Hokari dummy 0 2008/12/11/8:19:44(130.34.95.43) Cr 12 24 32 6965 Hokari dummy 0 2008/12/11/8:20:9(130.34.95.43) Au/Cr 13 26 34 6968 inomata dummy 0 2008/12/11/10:59:25(130.34.88.130) Cr 14 26 34 6968 inomata dummy 0 2008/12/11/11:0:9(130.34.88.130) Cr/Au 11 34 42 6937 tsukamoto dummy 1 2008/12/11/15:22:43(130.34.95.43) 窓洗浄 -12 16 24 6968 kotani dummy 0 2008/12/11/16:21:4(130.34.88.130) 0 2008/12/11/17:3:0(130.34.88.130) 12 32 40 6937 JaeWung Lee dummy 0 2008/12/11/19:27:46(172.16.44.151) Pt 13 34 42 6965 T.Sasaki dummy 0 2008/12/12/12:21:43(130.34.95.43) Cr Au 12 40 44 6937 jwlee dummy 0 2008/12/12/16:40:24(172.16.44.146) pt -14 8 18 6936 honjoya dummy 0 2008/12/12/16:46:32(130.34.95.43) Cr/Pt 2008/12/13/0:48:49(130.34.95.43) 14 18 26 6968 kotani dummy 0 2008/12/12/17:36:36(130.34.88.130) 0 13 42 48 6965 chu dummy 0 2008/12/12/23:24:4(130.34.95.43) 0 14 0 4 6965 chu dummy 0 2008/12/12/23:24:46(130.34.95.43) 0 -13 12 22 6936 honjoya dummy 0 2008/12/13/0:49:29(130.34.95.43) Cr/Pt 2008/12/13/3:7:34(130.34.95.43) 14 40 48 6936 honjoya dummy 0 2008/12/13/0:52:34(130.34.95.43) Cr/Pt/Au 15 0 2 6936 honjoya dummy 0 2008/12/13/0:53:57(130.34.95.43) Cr/Pt -13 15 25 6936 honjoya dummy 0 2008/12/13/3:8:9(130.34.95.43) Cr/Pt 2008/12/13/8:57:18(130.34.95.43) 14 4 12 6945 mori dummy 0 2008/12/13/3:58:1(130.34.95.43) Au/Cr -13 25 26 6936 honjoya dummy 0 2008/12/13/6:59:26(130.34.95.43) 0 2008/12/13/8:57:28(130.34.95.43) 13 15 20 6936 honjoya dummy 0 2008/12/13/3:8:9(130.34.95.43) Cr/Pt 15 24 32 3586 itasaka dummy 0 2008/12/13/14:38:51(130.34.95.17) Cr/Au -18 24 34 3586 itasaka dummy 2 2008/12/13/14:47:14(130.34.95.17) Crを外し#1のTiを取り付け 2008/12/15/11:14:43(130.34.95.17) 15 37 45 6909 Lee dummy 0 2008/12/13/17:15:16(130.34.95.37) Au/Cr 15 16 24 6968 narumi dummy 0 2008/12/14/14:29:19(130.34.88.130) Cr/Au -14 34 40 6965 chu dummy 0 2008/12/14/14:30:10(130.34.95.31) 0 2008/12/14/16:58:3(130.34.95.43) 14 34 36 6965 chu dummy 0 2008/12/14/14:30:10(130.34.95.31) 0 16 30 38 6965 chu dummy 0 2008/12/14/16:59:9(130.34.95.43) 0 -15 5 14 6936 honjoya dummy 0 2008/12/14/19:7:19(130.34.95.43) Cr/Pt/Au 2008/12/14/19:7:54(130.34.95.43) 15 4 14 6936 honjoya dummy 0 2008/12/14/19:55:38(130.34.95.43) Cr/Pt 15 14 16 6936 honjoya dummy 0 2008/12/15/3:1:11(130.34.95.43) Cr/Pt 16 38 47 6936 honjoya dummy 0 2008/12/15/8:45:13(130.34.95.43) Cr/Pt -17 3 12 6936 honjoya dummy 0 2008/12/15/8:46:4(130.34.95.43) Cr/Pt 2008/12/16/23:59:18(130.34.95.43) -18 24 34 3586 itasaka dummy 2 2008/12/15/11:15:54(130.34.95.17) Crを#1のTiと交換。使用後戻します 2008/12/15/13:46:20(130.34.95.17) 16 16 24 6937 Hoeppner dummy 0 2008/12/15/12:4:28(172.16.44.149) Cr -19 24 34 3586 itasaka dummy 2 2008/12/15/13:46:16(130.34.95.17) Crを#1のTiと交換。使用後戻します 2008/12/17/21:48:42(130.34.95.17) -17 24 32 3586 itasaka dummy 0 2008/12/15/14:10:19(130.34.95.17) Cr/Au 2008/12/16/16:28:4(130.34.95.17) -16 24 30 6937 tsukamoto dummy 0 2008/12/15/15:55:0(130.34.94.170) Au/Cr 2008/12/16/9:23:3(130.34.95.43) 16 6 16 6936 honjoya dummy 0 2008/12/15/16:26:10(130.34.95.43) Cr/Pt -17 12 22 6937 K.D .PARK dummy 0 2008/12/15/21:50:15(130.34.95.43) Au/Cr 2008/12/15/21:50:37(130.34.95.43) 17 13 23 6937 K.D .PARK dummy 0 2008/12/15/21:51:8(130.34.95.43) Au/Cr 16 0 6 6936 honjoya dummy 0 2008/12/15/23:49:33(130.34.95.43) 0 16 24 30 6937 Hoeppner dummy 0 2008/12/16/10:35:0(130.34.95.43) 0 -17 23 24 3586 higuchi dummy 1 2008/12/16/15:53:43(130.34.95.17) Au取り外し 2008/12/16/16:28:41(130.34.95.17) 17 23 28 3586 higuchi dummy 1 2008/12/16/16:29:12(130.34.95.17) Au取り外し 17 38 48 3586 itasaka dummy 0 2008/12/16/16:33:28(130.34.95.17) 0 -17 30 38 6937 JaeWung Lee dummy 0 2008/12/16/17:46:31(172.16.44.151) pt 2008/12/17/14:53:38(172.16.44.146) -18 26 38 6909 kaiho dummy 2 2008/12/16/18:3:13(130.34.95.37) Ti/Cu 2008/12/16/21:5:13(130.34.95.37) -18 28 40 6909 kaiho dummy 2 2008/12/16/21:5:35(130.34.95.37) Ti/Cu 2008/12/18/13:39:48(172.16.44.146) 17 4 13 6937 makihata dummy 0 2008/12/17/1:42:29(130.34.95.43) 0 -18 40 48 6937 makihata dummy 0 2008/12/17/9:4:55(130.34.94.142) 0 2008/12/17/11:59:33(130.34.95.43) -19 0 2 6937 makihata dummy 0 2008/12/17/9:5:15(130.34.94.142) 0 2008/12/17/11:59:44(130.34.95.43) 18 2 14 6937 makihata dummy 0 2008/12/17/11:58:54(130.34.95.43) Al 17 30 32 6937 JaeWung Lee dummy 0 2008/12/16/17:46:31(172.16.44.151) pt -21 28 36 6936 honjoya dummy 0 2008/12/17/19:42:6(130.34.95.43) Cr/Pt 2008/12/21/13:52:29(130.34.95.43) -21 40 48 6936 honjoya dummy 0 2008/12/17/19:42:41(130.34.95.43) Cr/Pt 2008/12/21/13:54:35(130.34.95.43) 19 34 48 4771 PHAN dummy 2 2008/12/17/20:49:15(130.34.95.21) Fe78Si10B12 target -19 25 34 3586 itasaka dummy 2 2008/12/17/21:49:58(130.34.95.17) Crを＃１のTiに取替え。Ti/Pt 2008/12/19/14:24:52(130.34.95.17) -20 26 34 3586 higuchi dummy 0 2008/12/18/0:20:50(130.34.95.17) Ti/Au 2008/12/19/14:27:12(130.34.95.17) 18 40 48 6909 Lee dummy 0 2008/12/18/1:13:20(130.34.95.37) Cr/Au 18 14 16 6937 makihata dummy 0 2008/12/18/3:53:13(130.34.95.43) 0 18 17 27 6936 honjoya dummy 2 2008/12/18/7:57:28(130.34.95.43) Pt→Al 18 28 30 6909 kaiho dummy 2 2008/12/16/21:5:35(130.34.95.37) Ti/Cu 18 30 40 6909 kaiho dummy 2 2008/12/18/13:40:3(172.16.44.146) Ta/Cu 19 0 14 6936 kawaguchi dummy 0 2008/12/18/14:19:46(130.34.95.43) Ti/Cu -20 36 48 6909 kaiho dummy 2 2008/12/18/17:40:31(172.16.44.145) Ti/Cu 2008/12/19/20:34:1(130.34.95.37) -19 14 21 6945 mori dummy 0 2008/12/19/3:48:54(130.34.95.43) 0 2008/12/19/3:49:3(130.34.95.43) -19 14 21 6945 mori dummy 0 2008/12/19/3:49:25(130.34.95.43) Cr 2008/12/19/3:50:0(130.34.95.43) 19 14 16 6945 mori dummy 2 2008/12/19/3:53:9(130.34.95.43) Cu→Cr 19 16 23 6945 mori dummy 0 2008/12/19/3:53:58(130.34.95.43) 0 20 16 24 6936 kawaguchi dummy 2 2008/12/19/4:8:58(130.34.95.43) Ti/Cu 19 23 25 6945 mori dummy 0 2008/12/19/10:22:16(130.34.95.48) Cr -20 8 16 6936 kawaguchi dummy 0 2008/12/19/14:16:25(130.34.95.43) Au 2008/12/19/22:29:32(130.34.95.43) 19 25 31 3586 itasaka dummy 2 2008/12/17/21:49:58(130.34.95.17) Crを＃１のTiに取替え。Ti/Pt 19 31 34 3586 itasaka dummy 0 2008/12/19/14:25:58(130.34.95.17) Ti/Ptではなくターゲット交換のいらないCr/Auに変更 20 24 34 3586 higuchi dummy 2 2008/12/19/14:28:0(130.34.95.17) Ti/Pt -21 36 37 6936 honjoya dummy 0 2008/12/19/17:24:47(130.34.95.43) 0 2008/12/21/13:52:36(130.34.95.43) -22 0 2 6936 honjoya dummy 0 2008/12/19/17:26:10(130.34.95.43) 0 2008/12/21/13:52:54(130.34.95.43) 22 28 44 6909 kaiho dummy 2 2008/12/19/20:35:15(130.34.95.37) Ti/Au/Cu , 2回 -20 34 42 6936 kawaguchi dummy 0 2008/12/19/22:29:50(130.34.95.43) 0 2008/12/19/22:30:0(130.34.95.43) -20 34 42 6936 kawaguchi dummy 0 2008/12/19/22:30:13(130.34.95.43) Au 2008/12/20/14:44:43(130.34.95.43) 21 7 17 6937 Tomokazu Takahashi dummy 2 2008/12/21/3:5:47(130.34.95.43) Ta/Pt -21 17 25 6945 mori dummy 2 2008/12/21/4:29:42(130.34.95.48) Cr 2008/12/21/4:30:2(130.34.95.48) 21 17 25 6945 mori dummy 2 2008/12/21/4:30:33(130.34.95.48) Ti→Cr 21 25 27 6945 mori dummy 0 2008/12/21/9:5:10(130.34.95.43) Cr 22 20 28 6968 inomata dummy 0 2008/12/21/12:43:2(130.34.88.130) Cr/Au 21 28 30 6936 honjoya dummy 0 2008/12/17/19:42:6(130.34.95.43) Cr/Pt 22 9 18 6937 honjoya dummy 0 2008/12/21/13:53:35(130.34.95.43) Cr/Pt 22 0 6 6937 honjoya dummy 0 2008/12/21/13:54:18(130.34.95.43) Cr/Pt 21 44 48 6937 honjoya dummy 0 2008/12/21/13:54:55(130.34.95.43) Cr/Pt -22 44 48 6937 makihata dummy 0 2008/12/21/14:14:16(130.34.95.43) 0 2008/12/21/14:15:21(130.34.95.43) -23 0 6 6937 makihata dummy 0 2008/12/21/14:14:36(130.34.95.43) Al 2008/12/21/14:15:29(130.34.95.43) 21 36 44 6936 kawaguchi dummy 0 2008/12/21/15:5:38(130.34.95.43) Au 23 16 24 6936 kawaguchi dummy 0 2008/12/21/15:6:6(130.34.95.43) Au -23 28 37 6936 honjoya dummy 0 2008/12/22/8:2:31(130.34.95.43) Cr/Pt/Au 2008/12/22/20:44:6(130.34.95.43) 22 44 46 6936 honjoya dummy 2 2008/12/22/8:4:47(130.34.95.43) Ti取り外しPt取り付け 24 24 35 6936 JaeWung Lee dummy 0 2008/12/22/19:0:30(172.16.44.143) Pt 22 46 48 6936 honjoya dummy 0 2008/12/22/20:39:29(130.34.95.43) Cr/Pt/Au 23 0 6 6936 honjoya dummy 0 2008/12/22/20:40:2(130.34.95.43) Cr/Pt/Au 23 24 34 6937 Tomokazu Takahashi dummy 2 2008/12/23/0:50:27(130.34.95.43) Pt/Ta, Cr->Ta -23 34 42 6936 kawaguchi dummy 0 2008/12/23/12:35:14(130.34.95.43) Au 2008/12/23/15:28:43(130.34.95.43) -24 10 18 6936 kawaguchi dummy 0 2008/12/23/15:29:19(130.34.95.43) Au 2008/12/23/16:1:52(130.34.95.43) -23 34 42 6936 kawaguchi dummy 0 2008/12/23/15:33:28(130.34.95.43) 0 2008/12/23/16:1:43(130.34.95.43) 23 34 35 6936 kawaguchi dummy 0 2008/12/23/15:33:28(130.34.95.43) 0 24 16 24 6936 kawaguchi dummy 0 2008/12/23/16:2:8(130.34.95.43) AU 24 35 40 6936 jw lee dummy 0 2008/12/24/16:29:3(130.34.95.43) pt 25 28 34 6937 k.hirano dummy 0 2008/12/25/12:24:25(130.34.95.43) Au/Cr 25 47 48 6936 honjoya dummy 0 2008/12/25/22:39:35(130.34.95.43) Cr/Au 26 0 9 6936 honjoya dummy 0 2008/12/25/22:39:51(130.34.95.43) Cr/Au 29 25 33 6968 inomata dummy 0 2008/12/29/11:52:25(172.16.44.146) Cr/Au 29 42 48 6945 mori dummy 0 2008/12/29/16:43:51(130.34.95.48) Cr 30 0 1 6945 mori dummy 0 2008/12/29/17:47:17(130.34.95.43) Cr 30 1 2 6945 mori dummy 0 2008/12/29/22:16:5(130.34.95.48) 0 30 8 13 6945 mori dummy 0 2008/12/30/3:33:1(130.34.95.48) Cr 30 31 39 6936 kawaguchi dummy 0 2008/12/30/15:26:29(130.34.95.43) Au