4 18 26 6937 Frömel dummy 0 2013/1/28/12:10:12(130.34.95.43) Ta/Cu 5 20 28 6937 Frömel dummy 0 2013/1/28/12:45:19(130.34.95.43) Ta/Cu 4 26 32 6937 niikawa dummy 0 2013/1/29/13:48:23(130.34.95.43) cu 1 10 24 4119 Nagai dummy 0 2013/1/30/9:28:6(130.34.63.131) Ta/Cu -1 26 37 6908 tanikawa dummy 2 2013/1/30/15:6:2(130.34.95.37) Ta>Ti, Ti/Cu 2013/1/31/8:3:35(130.34.95.44) 1 26 35 6908 tanikawa dummy 0 2013/1/31/8:3:57(130.34.95.44) Cu 1 35 46 5318 rahman dummy 0 2013/1/31/13:46:53(130.34.231.209) SiO2 1 24 26 6909 sasaki dummy 1 2013/1/31/17:4:46(130.34.95.37) 0 -3 24 31 6965 ota dummy 0 2013/1/31/18:29:59(130.34.95.31) SiO2 2013/2/2/17:45:16(130.34.95.31) -2 19 29 6909 sasaki&kigure dummy 0 2013/1/31/20:9:53(130.34.95.37) エッチング　木野先生承認 2013/1/31/20:11:51(130.34.95.37) 2 19 29 6909 sasaki&kigure dummy 0 2013/1/31/20:12:29(130.34.95.37) Pt 田中先生承認 5 28 40 4830 nozaki dummy 2 2013/2/1/10:1:54(130.34.95.30) Ti 4 32 40 4119 nagai dummy 0 2013/2/1/11:23:40(130.34.95.37) Ta/Cu 2 30 42 5318 rahman dummy 0 2013/2/1/14:28:9(130.34.231.209) Al/SiO2 1 46 48 5318 rahman dummy 0 2013/2/1/18:31:17(130.34.95.44) 0 2 42 44 5318 rahman dummy 0 2013/2/2/14:30:47(130.34.95.43) 0 4 40 48 6909 tanikawa　hashiguchi dummy 0 2013/2/2/18:46:28(130.34.95.44) SiO2 木野先生 5 0 4 6909 tanikawa hashiguchi dummy 0 2013/2/2/18:47:13(130.34.95.44) SiO2 木野先生承認 -3 40 48 6909 sasaki&watabe dummy 0 2013/2/3/8:22:36(130.34.95.37) Pt ベー先生承認 2013/2/3/8:22:46(130.34.95.37) -3 40 48 6909 sasaki&watanabe dummy 0 2013/2/3/8:23:17(130.34.95.37) Pt ベー先生承認 2013/2/3/14:34:5(130.34.95.37) 3 30 38 6909 sasaki&kigure dummy 0 2013/2/3/14:34:44(130.34.95.37) Pt 木野先生承認 5 40 48 6909 yukaito&sasaki dummy 0 2013/2/4/8:37:35(130.34.95.37) 木野先生承認 Ti/Cu 6 20 28 6937 F. Kurth dummy 0 2013/2/4/12:58:49(130.34.95.43) 0 -6 28 36 6937 Frömel dummy 0 2013/2/4/13:9:7(130.34.95.43) Ti/Cu 2013/2/5/20:26:38(130.34.95.44) 5 4 10 6908 tanikawa, hashiguchi dummy 0 2013/2/5/0:52:52(130.34.95.44) 木野先生承認 7 18 28 4119 nagai dummy 0 2013/2/5/13:30:2(130.34.95.44) Ta/Cu 8 20 30 6965 ota, hokari dummy 2 2013/2/5/17:38:45(130.34.95.31) SiO2 -6 42 48 6908 tanikawa, hashiguchi dummy 0 2013/2/5/18:52:35(130.34.95.44) 0 2013/2/5/18:52:56(130.34.95.44) -6 44 48 6908 tanikawa, hashiguchi dummy 0 2013/2/5/18:53:57(130.34.95.44) Ti/Cu 木野先生承認 2013/2/5/23:27:47(130.34.95.37) -7 0 4 6908 tanikawa, hashiguchi dummy 0 2013/2/5/18:54:25(130.34.95.44) Ti/Cu 木野先生承認 2013/2/5/23:28:14(130.34.95.37) -7 4 14 6908 tanikawa,hashiguchi dummy 0 2013/2/5/18:55:42(130.34.95.44) Cu 木野先生承認 2013/2/5/23:28:20(130.34.95.37) 6 28 38 6937 Froemel dummy 0 2013/2/5/20:27:14(130.34.95.44) Ta/Cu 7 28 38 5810 Ka dummy 2 2013/2/5/22:3:21(130.34.95.49) Ta/Pt -8 30 42 6908 tanikawa dummy 2 2013/2/5/23:46:13(130.34.95.37) Ti/Cu 2013/2/8/14:6:43(130.34.95.37) -8 42 48 6908 tanikawa, hashiguchi dummy 0 2013/2/5/23:46:34(130.34.95.37) 0 2013/2/5/23:51:2(130.34.95.37) -9 0 4 6908 tanikawa, hashiguchi dummy 0 2013/2/5/23:47:3(130.34.95.37) 木野先生承認 2013/2/8/18:35:16(130.34.134.253) -8 42 48 6908 tanikawa, hashiguchi dummy 0 2013/2/5/23:51:34(130.34.95.37) Cu 木野先生承認 2013/2/8/16:49:29(130.34.95.37) 6 38 46 4119 yabata dummy 0 2013/2/6/4:51:26(130.34.95.44) Ta/Cu -7 38 46 5810 zhao dummy 0 2013/2/6/9:43:52(130.34.95.49) Ta/Cu 2013/2/7/10:54:47(130.34.95.49) 9 20 28 6937 F. Kurth dummy 0 2013/2/6/10:35:40(130.34.95.43) Ta, Cu 9 32 40 6937 F. Kurth dummy 0 2013/2/6/10:36:33(130.34.95.43) SiO2 11 30 38 6937 F. Kurth dummy 0 2013/2/6/10:39:5(130.34.95.43) Ta, Cu 7 0 18 4119 yabata dummy 0 2013/2/6/11:40:29(130.34.63.131) Ta/Cu -8 10 20 4119 nagai dummy 0 2013/2/7/7:27:55(130.34.95.44) Ta/Cu 2013/2/7/7:53:37(130.34.95.44) 7 46 48 4119 nagai dummy 0 2013/2/7/7:55:59(130.34.95.44) Ta/Cu -8 0 20 4119 nagai dummy 0 2013/2/7/7:56:22(130.34.95.44) Ta/Cu 2013/2/8/8:19:24(130.34.95.44) 7 38 46 4119 nagai dummy 0 2013/2/7/10:55:35(130.34.74.84) Ta/Cu -11 38 47 6965 hokari dummy 2 2013/2/7/18:49:51(130.34.95.31) Si 金森先生承認 2013/2/8/10:30:51(130.34.95.31) 8 0 19 4119 nagai dummy 0 2013/2/7/7:56:22(130.34.95.44) Ta/Cu -9 40 48 6965 hokari dummy 2 2013/2/8/10:30:49(130.34.95.31) Si 金森先生承認 2013/2/9/16:11:0(130.34.95.44) 8 30 31 6908 tanikawa dummy 2 2013/2/5/23:46:13(130.34.95.37) Ti/Cu 8 31 42 6908 noriki dummy 2 2013/2/8/14:6:57(130.34.95.37) Zn 8 42 48 6908 noriki dummy 0 2013/2/8/16:49:51(130.34.95.37) Zn,ベー先生承認済み -10 4 14 6908 tanikawa dummy 2 2013/2/8/18:44:23(130.34.134.253) Cu/Ti 2013/2/8/23:37:43(130.34.95.37) -10 14 23 6908 tanikawa dummy 0 2013/2/8/18:46:14(130.34.134.253) Cu 2013/2/8/23:37:39(130.34.95.37) 9 0 6 6908 noriki dummy 0 2013/2/9/0:36:6(130.34.95.37) Zn,ベー先生承認 9 6 14 6908 noriki dummy 0 2013/2/9/2:27:1(130.34.95.44) Zn,ベー先生承認済み 9 14 16 6908 noriki dummy 0 2013/2/9/5:56:46(130.34.95.37) 0 9 28 32 6937 F. Kurth dummy 0 2013/2/9/10:33:1(130.34.95.43) 0 12 23 33 6965 hokari dummy 2 2013/2/9/16:11:48(130.34.95.44) Si 10 16 30 4830 nozaki dummy 2 2013/2/9/17:28:55(130.34.95.30) Ti 三浦先生承認 9 40 48 4119 yabata dummy 0 2013/2/9/19:48:2(130.34.95.44) Ta -10 0 16 4119 yabata dummy 0 2013/2/9/19:48:44(130.34.95.44) Ta 2013/2/10/2:4:30(130.34.95.44) 10 0 7 4119 yabata dummy 0 2013/2/9/19:48:44(130.34.95.44) Ta 10 37 44 4119 yabata dummy 0 2013/2/10/17:59:19(130.34.95.44) Ta 11 28 30 6937 F. Kurth dummy 0 2013/2/11/12:27:26(130.34.95.43) Ta, Cu 12 34 44 6908 noriki dummy 2 2013/2/11/18:55:40(130.34.95.37) Zn -13 32 42 6909 yukaito dummy 2 2013/2/12/12:35:30(130.34.95.44) SiO2 2013/2/13/15:8:57(130.34.95.37) 12 44 48 6908 noriki,beatrix dummy 0 2013/2/12/21:17:6(130.34.95.37) ベー先生承認済 -14 18 28 6909 yukaito dummy 0 2013/2/13/14:31:59(130.34.95.37) 0 2013/2/13/14:32:12(130.34.95.37) -14 18 28 6909 yukaito dummy 0 2013/2/13/14:32:28(130.34.95.37) SiO2 2013/2/13/15:9:1(130.34.95.37) 13 32 33 6909 yukaito dummy 2 2013/2/12/12:35:30(130.34.95.44) SiO2 -14 20 30 6909 yukaito dummy 2 2013/2/13/15:9:25(130.34.95.37) SiO2 2013/2/13/15:14:8(130.34.95.37) 14 26 36 6909 yukaito dummy 2 2013/2/13/16:15:29(130.34.95.37) SiO2 14 22 26 6909 yukaito dummy 2 2013/2/14/10:19:25(130.34.95.44) SiO2 18 20 28 6909 sasaki dummy 0 2013/2/16/17:58:35(130.34.95.44) 逆スパッタ -18 32 42 6909 yukaito dummy 0 2013/2/18/9:12:39(130.34.95.37) Ti/Cu 2013/2/18/15:12:20(130.34.95.37) 18 32 33 6909 yukaito dummy 0 2013/2/18/9:12:39(130.34.95.37) Ti/Cu -18 36 48 6909 yukaito, hashiguchi dummy 2 2013/2/18/15:12:59(130.34.95.37) Cu/Ti 2013/2/18/15:13:5(130.34.95.37) 18 36 48 6909 yukaito, hashiguchi dummy 2 2013/2/18/15:13:46(130.34.95.37) TI/Cu 木野先生承認　Cu取り付け 18 33 36 6909 yukaito dummy 0 2013/2/18/17:7:28(130.34.95.44) 0 20 30 40 5810 zhao dummy 0 2013/2/19/15:58:13(130.34.95.49) Ti、Cu -20 18 26 4119 onishi/sasaki dummy 0 2013/2/19/16:14:48(130.34.95.44) Ti 2013/2/19/17:19:18(130.34.95.44) 20 20 30 4119 onishi/sasaki dummy 0 2013/2/19/17:19:46(130.34.95.44) Ti -22 18 28 4119 yabata dummy 0 2013/2/20/9:15:28(130.34.95.44) Cu 2013/2/20/9:50:15(130.34.95.44) -22 28 38 4119 yabata dummy 0 2013/2/20/9:50:43(130.34.95.44) Cu 2013/2/21/13:30:51(130.34.63.131) 20 40 42 5810 zhao dummy 0 2013/2/20/18:56:53(130.34.95.49) Au 20 42 43 5810 zhao dummy 0 2013/2/20/20:21:17(130.34.95.44) 0 -25 18 28 4119 yabata dummy 0 2013/2/21/15:13:27(130.34.63.131) Cu 2013/2/25/10:55:57(130.34.95.44) -22 22 32 4119 onishi dummy 0 2013/2/22/10:4:43(130.34.74.84) Ti 2013/2/22/13:56:9(130.34.95.44) 22 22 30 4119 onishi dummy 0 2013/2/22/10:4:43(130.34.74.84) Ti 26 18 28 6965 hokari dummy 2 2013/2/25/9:6:55(130.34.95.31) Si, SiO2 26 32 40 6965 hokari dummy 0 2013/2/25/9:7:15(130.34.95.31) Si, SiO2 -25 28 36 4119 onishi dummy 0 2013/2/25/10:19:23(130.34.95.44) 0 2013/2/25/10:19:38(130.34.95.44) -25 28 36 4119 onishi dummy 0 2013/2/25/10:19:57(130.34.95.44) Ti 2013/2/25/10:56:4(130.34.95.44) 25 18 24 4119 yabata dummy 0 2013/2/21/15:13:27(130.34.63.131) Cu 25 24 32 4119 onishi dummy 0 2013/2/25/10:56:31(130.34.95.44) Ti 25 32 42 5810 Ka dummy 2 2013/2/25/13:21:20(130.34.95.49) Pt/Ta 25 42 44 5810 Ka dummy 2 2013/2/25/20:25:43(130.34.95.44) 0 -26 40 48 6908 tanikawa dummy 0 2013/2/26/0:12:57(130.34.95.37) Cu 2013/2/26/18:56:43(130.34.95.37) 27 32 41 4771 he dummy 0 2013/2/26/15:32:50(130.34.95.21) Pt 27 18 28 4119 yabata dummy 0 2013/2/26/17:19:35(130.34.95.37) Cu -27 41 48 6908 tanikawa dummy 0 2013/2/27/8:8:23(130.34.95.44) Cu 2013/2/27/20:9:19(130.34.95.37) -28 0 12 6908 tanikawa dummy 0 2013/2/27/8:9:24(130.34.95.44) Cu 高真空が必要なため夜通し真空引きを行います 2013/2/27/21:54:32(130.34.95.44) 27 41 43 6908 tanikawa dummy 0 2013/2/27/8:8:23(130.34.95.44) Cu 27 44 48 6908 tanikawa dummy 0 2013/2/27/20:9:37(130.34.95.37) Cu 28 0 7 6908 tanikawa dummy 0 2013/2/27/21:54:54(130.34.95.44) Cu