-2	18	28	4119	konno	dummy	0	2012/6/29/7:4:54(130.34.95.44)	Cu/Ti	2012/6/29/14:9:45(130.34.95.44)
2	34	44	4119	S.Watanabe	dummy	0	2012/6/29/8:16:52(130.34.63.131)	Ti/Cu
3	18	28	4771	he	dummy	0	2012/7/1/10:20:41(130.34.95.21)	Ti/Pt
3	34	44	4119	S.Watanabe	dummy	0	2012/7/2/11:5:25(130.34.95.44)	SiO2
3	44	48	6908	Y.Ohara	dummy	0	2012/7/2/11:5:59(130.34.95.44)	0
4	18	28	6909	yukaito	dummy	0	2012/7/2/14:34:47(130.34.63.131)	SiN
4	28	36	6909	yukaito	dummy	0	2012/7/2/16:31:55(130.34.95.44)	0
-4	0	18	4119	S.Watanabe	dummy	0	2012/7/3/19:20:47(130.34.63.131)	0	2012/7/3/21:22:51(130.34.95.44)
-4	36	44	6909	yukaito	dummy	0	2012/7/4/8:51:42(130.34.95.44)	0	2012/7/4/20:26:52(130.34.95.44)
-4	44	48	6908	Y. Ohara, A. NOrik	dummy	0	2012/7/4/11:46:13(130.34.95.44)	0	2012/7/4/11:46:18(130.34.95.44)
4	44	48	6908	Y. Ohara, A. Noriki	dummy	0	2012/7/4/11:46:43(130.34.95.44)	Ti/Cu 田中先生 承認済
5	0	8	6908	Y. Ohara, A. Noriki	dummy	0	2012/7/4/11:47:17(130.34.95.44)	Ti/Cu 田中先生 承認済
5	17	23	4119	konno	dummy	0	2012/7/4/12:27:35(130.34.63.131)	SiO2
-5	25	33	4830	kawakami	dummy	0	2012/7/4/18:20:3(130.34.95.30)	0	2012/7/4/18:20:32(130.34.95.30)
-5	25	33	4830	kawakami	dummy	0	2012/7/4/18:20:56(130.34.95.30)	Ti	2012/7/5/14:21:50(130.34.95.30)
5	34	44	6909	kigure	dummy	2	2012/7/4/19:7:54(130.34.95.44)	SiN→Pt
4	36	43	6909	yukaito	dummy	0	2012/7/4/8:51:42(130.34.95.44)	0
-6	23	33	6909	yukaito	dummy	0	2012/7/4/20:30:44(130.34.95.44)	Ta/Cu	2012/7/5/14:21:38(130.34.95.30)
-6	33	43	6937	Yoshida	dummy	0	2012/7/5/8:56:30(130.34.95.43)	Cu	2012/7/5/23:55:54(130.34.95.43)
5	25	31	4830	kawakami	dummy	0	2012/7/4/18:20:56(130.34.95.30)	Ti
-6	22	32	6909	yukaito	dummy	0	2012/7/5/21:52:19(130.34.95.44)	Ta/Cu	2012/7/6/7:57:40(130.34.95.44)
6	32	42	6937	Yoshida	dummy	0	2012/7/6/1:59:21(130.34.95.43)	Cu
-6	18	22	6909	yukaito	dummy	0	2012/7/6/7:2:26(130.34.95.44)	0	2012/7/6/7:58:10(130.34.95.44)
-6	22	28	6909	yukaito	dummy	0	2012/7/6/7:58:2(130.34.95.44)	Ta/Cu	2012/7/6/7:58:18(130.34.95.44)
-6	20	28	6909	yukaito	dummy	0	2012/7/6/7:58:47(130.34.95.44)	Ta/Cu	2012/7/6/11:27:42(130.34.95.44)
6	20	25	6909	yukaito	dummy	0	2012/7/6/7:58:47(130.34.95.44)	Ta/Cu
10	22	30	4119	konno	dummy	0	2012/7/8/7:17:5(130.34.63.131)	Cu/Ti
-11	17	25	4119	konno	dummy	0	2012/7/9/6:55:46(130.34.63.131)	Cu/Ti	2012/7/10/12:8:17(130.34.95.44)
-10	31	41	6909	yukaito	dummy	0	2012/7/9/7:58:38(130.34.95.44)	SiN	2012/7/9/15:19:21(130.34.95.37)
9	21	31	6937	Yoshida	dummy	0	2012/7/9/9:3:42(130.34.95.43)	Ta
-9	34	44	6909	yukaito	dummy	0	2012/7/9/9:22:16(130.34.95.37)	SiN	2012/7/9/15:17:46(130.34.95.37)
-11	27	37	6909	yukaito	dummy	0	2012/7/9/15:19:55(130.34.95.37)	0	2012/7/9/15:37:40(130.34.95.37)
-10	34	44	6909	yukaito	dummy	0	2012/7/9/15:37:37(130.34.95.37)	0	2012/7/9/15:40:47(130.34.95.37)
-10	34	44	6909	yukaito	dummy	0	2012/7/9/15:41:2(130.34.95.37)	SiN	2012/7/9/15:42:25(130.34.95.37)
10	32	42	6909	yukaito	dummy	0	2012/7/9/15:42:42(130.34.95.37)	SiN
12	1	17	4771	Minh	dummy	2	2012/7/10/9:5:54(130.34.95.21)	with Phan, Hara sensei's permission (Ta-> Pt; Pt/Ti)
10	30	32	4119	konno	dummy	0	2012/7/10/12:8:28(130.34.95.44)	0
-13	26	36	4830	furuya	dummy	0	2012/7/10/13:21:1(130.34.95.30)	Ta/Cu	2012/7/10/17:30:41(130.34.95.30)
-11	20	28	6909	yukaito	dummy	0	2012/7/10/15:13:0(130.34.95.37)	0	2012/7/10/15:13:6(130.34.95.37)
-11	20	28	6909	yukaito	dummy	0	2012/7/10/15:13:23(130.34.95.37)	0	2012/7/10/15:13:28(130.34.95.37)
11	20	28	6909	yukaito	dummy	0	2012/7/10/15:13:46(130.34.95.37)	SiN
-17	26	36	4830	furuya	dummy	0	2012/7/10/17:32:22(130.34.95.30)	Ta/Cu	2012/7/10/17:32:53(130.34.95.30)
-17	20	30	4830	furuya	dummy	0	2012/7/10/17:34:19(130.34.95.30)	Ta/Cu	2012/7/10/18:52:36(130.34.95.30)
-17	22	32	4830	furuya	dummy	0	2012/7/10/18:52:55(130.34.95.30)	0	2012/7/10/18:53:0(130.34.95.30)
17	22	32	4830	furuya	dummy	2	2012/7/10/18:53:25(130.34.95.30)	Ta/Cu
11	28	39	6908	tanikawa	dummy	0	2012/7/10/22:11:28(130.34.95.37)	Ti/Cu
11	3	7	6908	Y. Ohara, A. Noriki	dummy	0	2012/7/11/0:44:11(130.34.95.44)	Cu, 田中先生 承認済
13	28	36	6937	Wei-Shan Wang	dummy	0	2012/7/11/14:42:8(130.34.95.44)	Cu
13	20	28	6937	Wei-Shan Wang	dummy	0	2012/7/11/15:42:31(130.34.95.44)	Ti
12	34	44	6909	yukaito	dummy	0	2012/7/11/20:11:30(130.34.95.44)	SiN or SiO2
12	17	19	4771	Minh	dummy	0	2012/7/12/4:29:48(130.34.95.21)	0
-13	36	46	6909	yukaito	dummy	0	2012/7/12/11:10:35(130.34.95.44)	0	2012/7/12/11:10:50(130.34.95.44)
13	36	46	6909	yukaito	dummy	0	2012/7/12/11:11:9(130.34.95.44)	SiO2
-16	20	31	4119	hioki	dummy	2	2012/7/12/14:55:41(130.34.74.84)	Ta	2012/7/12/15:17:18(130.34.74.84)
17	32	40	6937	Niikawa	dummy	0	2012/7/13/15:22:6(130.34.95.43)	0
16	31	40	4771	Wang	dummy	0	2012/7/14/13:22:32(130.34.95.21)	Pt/Ti
15	22	30	6909	yukaito, kino	dummy	0	2012/7/15/9:38:54(130.34.95.37)	木野先生承認
-15	30	32	6909	yukaito	dummy	0	2012/7/15/11:53:55(130.34.95.44)	0	2012/7/15/11:55:16(130.34.95.44)
15	30	32	6909	yukaito	dummy	0	2012/7/15/11:55:33(130.34.95.44)	SiO2
20	20	30	5810	iizuka	dummy	0	2012/7/17/21:39:57(130.34.95.49)	Ti/Cu
-19	32	40	6909	yukaito	dummy	0	2012/7/19/7:53:36(130.34.95.37)	Ti/Cu	2012/7/19/11:32:10(130.34.95.37)
19	19	26	6937	Niikawa	dummy	0	2012/7/19/8:0:1(130.34.95.43)	Cu
-19	40	48	6908	hashiguchi,kigure	dummy	0	2012/7/19/8:23:45(130.34.95.37)	0	2012/7/19/8:24:2(130.34.95.37)
-19	40	48	6908	hashiguchi, kigure	dummy	2	2012/7/19/8:24:30(130.34.95.37)	Ta>TiO2	2012/7/19/16:15:42(130.34.95.37)
-20	0	6	6908	hashiguchi,kigure	dummy	0	2012/7/19/8:24:53(130.34.95.37)	TiO2	2012/7/19/16:15:35(130.34.95.37)
-19	30	38	6909	yukaito	dummy	0	2012/7/19/11:32:30(130.34.95.37)	Ti/Cu	2012/7/19/11:32:39(130.34.95.37)
-19	28	36	6909	yukaito	dummy	0	2012/7/19/11:32:55(130.34.95.37)	Ti/Cu	2012/7/19/12:18:30(130.34.95.37)
-20	34	42	6909	yukaito	dummy	0	2012/7/19/12:52:53(130.34.95.37)	Ti/Cu	2012/7/19/12:59:0(130.34.95.37)
-20	36	44	6909	yukaito	dummy	0	2012/7/19/12:59:10(130.34.95.37)	0	2012/7/19/12:59:15(130.34.95.37)
20	36	44	6909	yukaito	dummy	0	2012/7/19/12:59:28(130.34.95.37)	Ti/Cu
-23	18	28	4119	konno	dummy	0	2012/7/20/14:8:39(130.34.95.37)	Ti/Cu	2012/7/20/14:9:43(130.34.95.37)
-23	24	32	4119	konno	dummy	0	2012/7/20/14:10:9(130.34.95.37)	Ti/Cu	2012/7/23/7:37:33(130.34.63.131)
20	44	46	6909	yukaito, kino	dummy	0	2012/7/20/21:7:13(130.34.95.44)	木野先生承認
18	34	44	4771	he	dummy	0	2012/7/22/8:58:36(130.34.95.21)	Al
25	34	44	4771	he	dummy	0	2012/7/22/9:1:52(130.34.95.21)	al
-23	22	30	4119	konno	dummy	0	2012/7/23/7:37:56(130.34.63.131)	Ti/Cu	2012/7/23/8:43:29(130.34.95.44)
23	22	32	4119	konno	dummy	0	2012/7/23/8:44:6(130.34.95.44)	Ti/Cu 2times
25	22	32	6937	makihata	dummy	0	2012/7/23/12:18:48(130.34.95.43)	Al
-24	26	36	6908	hashiguchi	dummy	2	2012/7/23/13:44:41(130.34.95.37)	Ti>TiO2, TiO2	2012/7/23/13:44:53(130.34.95.37)
-24	24	36	6908	hashiguchi	dummy	2	2012/7/23/13:45:5(130.34.95.37)	0	2012/7/23/18:42:38(130.34.95.44)
-24	17	23	4119	konno	dummy	0	2012/7/23/15:26:32(130.34.95.44)	0	2012/7/24/5:15:11(130.34.95.44)
23	41	48	5810	Toan	dummy	0	2012/7/23/18:6:36(130.34.95.49)	With Ka san, Miyashita sensei`s permission
-24	36	44	6909	yukaito	dummy	0	2012/7/23/18:41:8(130.34.95.44)	0	2012/7/23/18:41:16(130.34.95.44)
24	36	44	6909	yukaito	dummy	0	2012/7/23/18:41:36(130.34.95.44)	Ti/Cu
-24	24	36	6908	hashiguchi, nakajima	dummy	2	2012/7/23/18:43:6(130.34.95.44)	0	2012/7/24/10:34:31(130.34.95.37)
24	0	4	5810	Toan	dummy	0	2012/7/23/20:48:58(130.34.95.49)	0
24	4	7	6908	Y. Ohara, A. Noriki	dummy	0	2012/7/24/0:40:23(130.34.95.44)	Cu 田中先生 承認済
24	18	24	4119	konno	dummy	0	2012/7/24/5:15:28(130.34.95.44)	0
-25	16	22	6937	Niikawa	dummy	0	2012/7/24/9:31:36(130.34.95.43)	0	2012/7/24/10:44:13(130.34.95.43)
24	44	48	4771	Wang	dummy	0	2012/7/24/10:26:19(130.34.95.21)	Pt/Ti
-24	25	32	6937	Niikawa	dummy	0	2012/7/24/10:44:6(130.34.95.43)	0	2012/7/24/11:5:20(130.34.95.44)
25	16	22	6937	Niikawa	dummy	0	2012/7/24/11:2:22(130.34.95.43)	0
24	24	36	4119	yabata	dummy	0	2012/7/24/11:5:51(130.34.95.44)	0
-25	44	48	6908	hashiguchi, kigure	dummy	0	2012/7/24/15:5:32(130.34.95.37)	TiO2	2012/7/25/21:15:17(130.34.95.37)
-26	0	8	6908	hashiguchi, kigure	dummy	0	2012/7/24/15:6:16(130.34.95.37)	TiO2,ベー先生承認	2012/7/25/22:40:9(130.34.95.44)
-26	20	28	4771	cao	dummy	0	2012/7/24/20:15:10(130.34.95.21)	Pt/Ti	2012/7/24/20:16:17(130.34.95.21)
-26	18	28	6909	yukaito	dummy	0	2012/7/25/9:59:20(130.34.95.37)	Ti/Cu	2012/7/25/10:13:32(130.34.95.37)
-26	30	40	6909	yukaito	dummy	0	2012/7/25/10:15:9(130.34.95.37)	0	2012/7/25/10:15:15(130.34.95.37)
-26	30	40	6909	yukaito	dummy	0	2012/7/25/10:15:28(130.34.95.37)	Ti/Cu	2012/7/25/10:56:34(130.34.95.37)
-26	32	42	6909	yukaito	dummy	0	2012/7/25/10:56:50(130.34.95.37)	Ti/Cu	2012/7/26/7:59:27(130.34.95.37)
26	20	30	4771	cao	dummy	0	2012/7/25/13:16:41(130.34.95.21)	Pt/Ti
27	17	24	4119	konno	dummy	2	2012/7/25/14:37:17(130.34.95.44)	SiO2
27	24	34	5318	yoshida	dummy	0	2012/7/25/16:3:0(130.34.231.209)	SiO2
25	44	45	6908	hashiguchi, kigure	dummy	0	2012/7/24/15:5:32(130.34.95.37)	TiO2
25	45	48	6908	hashiguchi, kigure	dummy	0	2012/7/25/21:15:57(130.34.95.37)	TiO2,ベー先生承認
25	0	12	6908	hashiguchi,kigure	dummy	0	2012/7/25/22:40:52(130.34.95.44)	ti,ベー先生承認
26	0	12	6908	hashiguchi,kigure	dummy	0	2012/7/25/22:41:48(130.34.95.44)	Ti,ベー先生承認
26	12	15	6908	hashiguchi	dummy	0	2012/7/26/4:46:15(130.34.95.44)	0
26	32	40	6909	yukaito	dummy	0	2012/7/26/7:59:42(130.34.95.37)	Cu/Ti
26	30	32	4771	cao	dummy	0	2012/7/26/8:39:58(130.34.95.21)	Pt/Ti
26	40	47	4771	wang	dummy	0	2012/7/26/12:7:2(130.34.95.21)	Pt
-30	36	48	6909	kigure&sasaki	dummy	2	2012/7/26/16:29:18(130.34.95.37)	shut down	2012/7/26/16:29:24(130.34.95.37)
30	34	48	6909	kigure&sasaki	dummy	1	2012/7/26/16:29:48(130.34.95.37)	shut down
31	16	48	6909	kigure&sasaki	dummy	1	2012/7/26/16:30:6(130.34.95.37)	shut down
26	47	48	4771	wang	dummy	0	2012/7/26/20:19:11(130.34.95.21)	0
-27	34	42	6937	Niikawa	dummy	0	2012/7/27/0:32:0(130.34.95.43)	0	2012/7/27/12:30:12(130.34.95.43)
-28	28	37	6937	Wei-Shan Wang	dummy	0	2012/7/27/16:14:23(130.34.95.43)	Cu	2012/7/27/16:16:14(130.34.95.43)
-30	18	30	4119	yabata	dummy	0	2012/7/27/16:14:30(130.34.63.131)	0	2012/7/27/16:15:7(130.34.63.131)
30	18	29	4119	yabata	dummy	0	2012/7/27/16:15:34(130.34.63.131)	ti cu
28	26	35	6937	Wei-Shan Wang	dummy	0	2012/7/27/16:17:29(130.34.95.43)	Cu
27	45	48	6909	kigure&kino	dummy	0	2012/7/27/21:11:10(130.34.95.44)	etch, 木野先生承認済み
28	0	20	6909	kigure&kino	dummy	0	2012/7/27/21:11:53(130.34.95.44)	etch, 木野先生承認済み
28	35	44	4771	he	dummy	0	2012/7/28/10:23:47(130.34.95.43)	SiO2 to Pt
30	29	34	6908	tanikawa	dummy	0	2012/7/30/13:39:5(130.34.95.44)	0