-1 20 30 6909 kigure dummy 2 2012/5/30/16:8:10(130.34.95.37) Ti/Al 2012/5/30/16:52:10(130.34.95.37) 1 20 30 6909 kigure&saito dummy 2 2012/5/30/16:54:50(130.34.95.37) 「Pt→Ta」 使用:Ta/Cu 1 30 33 6909 kigure dummy 0 2012/6/1/11:1:4(130.34.95.44) 0 1 33 36 6909 kigure dummy 0 2012/6/1/14:17:49(130.34.95.37) 時間延長 -5 24 32 4119 konno dummy 0 2012/6/4/15:39:47(130.34.63.131) Ti/Cu 2012/6/5/9:13:58(130.34.63.131) -6 17 23 4119 konno dummy 0 2012/6/5/9:14:23(130.34.63.131) Ti/Cu 2012/6/5/13:4:36(130.34.95.44) 6 18 26 4119 konno dummy 0 2012/6/5/13:4:55(130.34.95.44) Cu/Ti 6 28 37 4830 endo dummy 0 2012/6/5/14:20:41(130.34.95.30) Ti/Cu 6 26 28 4119 konno dummy 0 2012/6/5/15:7:17(130.34.95.44) 0 -7 20 28 4119 konno dummy 0 2012/6/6/7:31:44(130.34.95.44) Cu/Ti 2012/6/6/7:31:54(130.34.95.44) 7 22 32 4119 konno dummy 0 2012/6/6/7:32:10(130.34.95.44) Cu/Ti -12 17 25 4119 konno dummy 0 2012/6/7/9:10:34(130.34.95.44) Cu/Ti 2012/6/8/6:44:53(130.34.95.44) 8 18 26 4119 nagai dummy 0 2012/6/7/12:37:30(130.34.74.84) Ti/Cu 7 36 44 6908 hashiguchi dummy 2 2012/6/7/15:15:10(130.34.95.37) Ta->Al 7 44 48 6908 hashiguchi dummy 0 2012/6/7/21:41:59(130.34.95.44) 0 -8 28 38 5810 chin dummy 0 2012/6/7/23:3:1(130.34.95.49) 3->W 2012/6/7/23:7:0(130.34.95.49) -12 18 28 4119 yabata dummy 0 2012/6/8/6:45:22(130.34.95.44) Cu/Ti 2012/6/8/14:41:11(130.34.74.84) 8 28 36 4771 he dummy 0 2012/6/8/9:34:45(130.34.95.21) Al 10 30 38 5810 chin dummy 0 2012/6/10/14:1:37(130.34.95.44) Ti -11 28 38 5810 chin dummy 2 2012/6/10/14:25:53(130.34.95.44) TiN 2012/6/11/11:45:33(130.34.95.49) -11 18 26 6909 kino dummy 2 2012/6/11/5:6:28(130.34.95.37) Al→Ta 2012/6/11/9:51:9(130.34.95.37) -12 26 35 4119 yabata dummy 0 2012/6/11/7:56:41(130.34.95.44) 0 2012/6/11/9:26:50(130.34.74.84) 12 26 36 4119 yabata dummy 2 2012/6/11/9:28:9(130.34.74.84) Al -> SiO2 11 18 22 6909 kino dummy 2 2012/6/11/5:6:28(130.34.95.37) Al→Ta 11 39 48 6909 kino dummy 2 2012/6/11/9:51:46(130.34.95.37) Al→Ta -13 32 42 6937 Tsai dummy 0 2012/6/11/10:1:39(130.34.95.43) SiO2 2012/6/11/10:10:48(130.34.95.43) -13 18 28 4119 nagai dummy 0 2012/6/11/10:46:56(130.34.74.84) SiO2 2012/6/13/11:14:57(130.34.95.37) 13 32 42 6937 Tsai dummy 0 2012/6/11/12:27:22(130.34.95.44) SiO2 -12 36 46 4771 he dummy 0 2012/6/11/12:36:55(130.34.95.21) Ti→Al 2012/6/11/12:38:53(130.34.95.21) 11 29 39 4771 he dummy 0 2012/6/11/12:40:23(130.34.95.21) Ti→Al 12 23 26 4119 S.Watanabe dummy 2 2012/6/11/15:15:36(130.34.95.44) Target交換オペトレ 12 36 48 6908 noriki,ohara dummy 2 2012/6/12/0:16:27(130.34.95.44) Ti=>Al, ベー先生承認済み 14 32 42 4771 sugimoto dummy 0 2012/6/12/11:56:47(130.34.95.21) Al 13 0 4 6908 noriki dummy 0 2012/6/12/22:35:53(130.34.95.44) 0 -13 42 48 5810 ka dummy 2 2012/6/13/3:48:5(130.34.95.44) Ta/Pt　戸田先生承認 2012/6/13/3:48:26(130.34.95.44) -13 42 48 5810 ka dummy 2 2012/6/13/3:49:6(130.34.95.44) Ta/Pt 戸田先生承認 2012/6/13/19:20:29(130.34.95.43) -14 0 4 5810 ka dummy 2 2012/6/13/3:49:53(130.34.95.44) Ta/Pt 戸田先生承認 2012/6/13/19:20:38(130.34.95.43) -14 18 27 4771 he dummy 0 2012/6/13/8:54:32(130.34.95.21) 0 2012/6/13/8:55:53(130.34.95.21) -14 18 28 4771 he dummy 0 2012/6/13/8:56:25(130.34.95.21) Al 2012/6/13/10:50:58(130.34.95.21) 13 18 25 4119 nagai dummy 0 2012/6/11/10:46:56(130.34.74.84) SiO2 -14 18 26 4119 nagai dummy 2 2012/6/13/11:15:42(130.34.95.37) Ti/Cu 2012/6/13/11:15:48(130.34.95.37) -14 18 28 4119 nagai dummy 2 2012/6/13/11:16:4(130.34.95.37) Ti/Cu 2012/6/13/14:45:27(130.34.95.44) -15 18 26 4119 nagai dummy 0 2012/6/13/16:43:42(130.34.74.84) SiO2 2012/6/13/17:39:26(130.34.95.37) -14 21 31 4119 nagai dummy 2 2012/6/13/17:40:6(130.34.95.37) Ti/Cu 2012/6/14/13:17:44(130.34.95.44) 13 42 48 6909 kigure&sasaki dummy 1 2012/6/13/19:21:4(130.34.95.37) 木野先生承認 14 0 6 6909 kigure&sasaki dummy 1 2012/6/13/19:21:42(130.34.95.37) 木野先生承認 -15 28 38 6909 yukaito dummy 0 2012/6/13/20:55:19(130.34.95.37) 0 2012/6/13/20:55:25(130.34.95.37) -15 27 37 6909 6909 dummy 0 2012/6/13/20:56:5(130.34.95.37) yukaito 2012/6/13/20:56:8(130.34.95.37) -15 27 37 6909 yukaito dummy 0 2012/6/13/20:56:28(130.34.95.37) Ta/Cu 2012/6/13/21:46:28(130.34.95.37) 15 27 37 6909 yukaito dummy 2 2012/6/13/21:46:45(130.34.95.37) Ta/Cu 15 17 26 4119 konno dummy 0 2012/6/14/6:43:28(130.34.95.44) Cu/Ti -15 37 46 5810 Ka dummy 2 2012/6/14/8:27:31(130.34.95.49) Ta/Pt 2012/6/15/15:30:45(130.34.95.43) -18 18 28 4119 nagai dummy 2 2012/6/14/10:53:58(130.34.95.44) SiO2 2012/6/18/12:11:56(130.34.95.44) 14 21 29 4119 nagai dummy 2 2012/6/13/17:40:6(130.34.95.37) Ti/Cu -19 26 36 4119 nagai dummy 2 2012/6/14/13:56:50(130.34.74.84) Ti/Cu 2012/6/18/13:1:53(130.34.95.44) -15 37 48 5810 ka dummy 2 2012/6/15/15:30:58(130.34.95.43) 0 2012/6/15/15:31:5(130.34.95.43) -15 37 48 5810 ka dummy 2 2012/6/15/15:31:25(130.34.95.43) Ta/Pt 2012/6/15/19:44:39(130.34.95.49) 20 23 31 6937 Wei-Shan Wang dummy 0 2012/6/15/17:27:7(130.34.95.43) Cu 15 37 42 5810 ka dummy 2 2012/6/15/15:31:25(130.34.95.43) Ta/Pt -16 26 35 6908 Y. Ohara, A.Noriki dummy 0 2012/6/15/21:59:18(130.34.95.37) Ti/Cu Bea先生 承認済み 2012/6/16/9:47:25(130.34.95.44) -16 38 48 6908 Y. Ohara, A.Noriki dummy 0 2012/6/15/21:59:47(130.34.95.37) Ti/Cu Bea先生 承認済み 2012/6/16/11:41:42(130.34.95.44) 16 30 40 6908 Y.Ohara, A. Noriki dummy 0 2012/6/16/11:41:55(130.34.95.44) Ti/Cu 田中先生 承認済 -18 28 38 4771 he dummy 0 2012/6/16/13:8:22(130.34.95.21) 0 2012/6/16/13:8:41(130.34.95.21) 18 28 38 4771 he dummy 0 2012/6/16/13:9:3(130.34.95.21) Al 16 40 48 6908 Y. Ohara, A. Noriki dummy 0 2012/6/16/18:39:37(130.34.95.44) Ti/Cu 田中先生 承認済 -18 38 46 4771 Wang dummy 0 2012/6/17/21:5:33(130.34.95.43) Al 2012/6/18/17:21:24(130.34.95.21) 20 31 42 5810 chin dummy 0 2012/6/18/0:18:51(130.34.95.49) TiN/W 19 18 26 5810 chin dummy 0 2012/6/18/0:20:27(130.34.95.49) TiN 18 16 18 6908 Ohara Yuki dummy 0 2012/6/18/6:56:35(130.34.95.44) 0 -19 36 46 6937 Kojima dummy 0 2012/6/18/9:57:27(130.34.95.43) SiO2 2012/6/18/9:58:7(130.34.95.43) -19 46 48 6937 Kojima dummy 0 2012/6/18/9:57:56(130.34.95.43) 0 2012/6/18/9:58:3(130.34.95.43) 19 36 46 6937 Kojima dummy 0 2012/6/18/9:58:35(130.34.95.43) SiO2 18 18 27 4119 nagai dummy 2 2012/6/14/10:53:58(130.34.95.44) SiO2 -19 26 36 4119 nagai dummy 2 2012/6/18/13:2:13(130.34.95.44) Al>Ti 2012/6/19/7:40:5(130.34.74.84) 18 40 48 5810 Ka dummy 2 2012/6/18/18:42:37(130.34.95.49) Ta/Pt Toda sensei's permission -19 26 36 4119 nagai dummy 2 2012/6/19/7:40:25(130.34.74.84) Pt>Ti, Ti/Cu 2012/6/19/16:7:7(130.34.95.44) 19 26 35 4119 nagai dummy 2 2012/6/19/7:40:25(130.34.74.84) Pt>Ti, Ti/Cu 21 22 32 5810 chin dummy 0 2012/6/19/21:19:26(130.34.95.49) TiN/W -21 32 40 6937 Wei-Shan Wang dummy 0 2012/6/19/21:50:25(130.34.94.143) Cu 2012/6/20/8:34:36(130.34.95.43) 18 1 3 6908 Y. Ohara, A. Noriki dummy 0 2012/6/19/23:24:34(130.34.95.44) Cu 田中先生 承認済 -21 32 40 6937 Wei-Shan Wang dummy 0 2012/6/20/8:50:48(130.34.95.43) Cu 2012/6/21/13:9:52(130.34.95.43) -22 20 30 4119 konno dummy 0 2012/6/20/9:22:13(130.34.95.37) Cu/ti 2012/6/20/14:31:41(130.34.95.44) -21 40 48 4119 nagai dummy 2 2012/6/21/9:11:9(130.34.74.84) SiO2 2012/6/21/13:12:41(130.34.74.84) -22 16 22 4119 nagai dummy 0 2012/6/21/10:0:14(130.34.95.44) Cu 2012/6/21/20:36:16(130.34.63.131) -22 22 32 4119 konno dummy 0 2012/6/21/11:11:25(130.34.95.37) Ti/Cu 2012/6/22/6:24:52(130.34.95.44) -21 32 40 4119 nagai dummy 2 2012/6/21/13:12:36(130.34.74.84) SiO2 2012/6/21/13:14:7(130.34.74.84) -21 32 42 4119 nagai dummy 2 2012/6/21/13:14:22(130.34.74.84) SiO2 2012/6/21/18:38:13(130.34.95.44) 25 21 29 6937 Wei-Shan Wang dummy 0 2012/6/21/13:32:38(130.34.95.43) Cu -22 32 42 6937 Kojima dummy 2 2012/6/21/16:54:14(130.34.95.43) 0 2012/6/21/16:54:22(130.34.95.43) 22 32 42 6937 Kojima dummy 2 2012/6/21/16:54:50(130.34.95.43) SiO2 21 32 40 4119 nagai dummy 2 2012/6/21/13:14:22(130.34.74.84) SiO2 21 44 48 6908 Y. Ohara, A.Noriki dummy 0 2012/6/21/19:17:46(130.34.95.37) Ti/Cu Bea先生 承認済み 22 0 6 6908 Y. Ohara, A.Noriki dummy 0 2012/6/21/19:18:2(130.34.95.37) Ti/Cu Bea先生 承認済み -22 8 16 4119 nagai dummy 0 2012/6/21/20:36:13(130.34.63.131) Cu 2012/6/21/20:36:26(130.34.63.131) -22 8 18 4119 nagai dummy 0 2012/6/21/20:36:43(130.34.63.131) Cu 2012/6/22/6:21:47(130.34.95.44) 22 8 15 4119 nagai dummy 0 2012/6/21/20:36:43(130.34.63.131) Cu 22 17 27 4119 konno dummy 0 2012/6/22/6:25:20(130.34.95.44) Cu/Ti 23 22 32 5810 Ka dummy 2 2012/6/22/13:11:40(130.34.95.43) Ta/Pt 22 42 48 4119 S.Watanabe dummy 0 2012/6/22/13:46:57(130.34.95.44) Ti/Cu -23 0 20 4119 S.Watanabe dummy 0 2012/6/22/13:47:21(130.34.95.44) Ti/Cu 2012/6/22/13:47:30(130.34.95.44) 23 0 8 4119 S.Watanabe dummy 0 2012/6/22/13:47:59(130.34.95.44) 0 -23 8 22 6908 Y.Ohara dummy 0 2012/6/22/13:48:21(130.34.95.44) 0 2012/6/22/13:48:38(130.34.95.44) 23 8 22 4119 Y.Ohara dummy 0 2012/6/22/13:48:57(130.34.95.44) Ti/Cu -25 30 40 6909 yukaito dummy 0 2012/6/22/19:4:22(130.34.95.44) Ta/Cu 2012/6/25/7:34:58(130.34.95.37) 24 20 28 6908 Y. Ohara, A. Noriki dummy 0 2012/6/22/23:11:20(130.34.95.44) Ta 田中先生 承認済み 24 30 36 6908 Y. Ohara, A. Noriki dummy 0 2012/6/24/13:33:38(130.34.95.44) Cu　田中先生 承認済 -25 30 38 6909 yukaito dummy 0 2012/6/25/7:35:26(130.34.95.37) 0 2012/6/25/7:35:42(130.34.95.37) 25 30 38 6909 yukaito dummy 0 2012/6/25/7:35:58(130.34.95.37) Ta/Cu 26 24 33 6909 watanabe&kigure dummy 0 2012/6/25/14:56:19(130.34.95.37) Cu/Ta -27 30 40 6909 sasaki&tanikawa dummy 0 2012/6/25/16:43:34(130.34.95.37) Ti>SiO2 SiO2 2012/6/25/18:30:25(130.34.95.37) 27 22 32 5810 Ka dummy 2 2012/6/26/18:21:0(130.34.95.49) Ta/Pt 29 30 34 5810 inomata dummy 1 2012/6/27/17:6:28(130.34.95.49) 0 27 38 46 5810 ka dummy 0 2012/6/27/17:53:28(130.34.95.44) Ta/Pt 29 18 30 4119 yabata dummy 0 2012/6/27/18:0:13(130.34.95.44) 0 28 18 28 4119 konno dummy 0 2012/6/28/6:23:56(130.34.95.44) SiO2 29 34 43 5810 Ka dummy 0 2012/6/28/22:25:11(130.34.95.49) Ta/Pt