-8 20 30 4119 aizawa dummy 0 2012/4/27/13:0:33(130.34.95.44) Ti, オペトレ含む 2012/5/8/8:19:21(130.34.74.84) -1 34 44 5810 ka dummy 0 2012/5/1/14:21:10(130.34.95.49) Ta/Pt 2012/5/1/14:50:18(130.34.95.49) -7 17 25 4119 konno dummy 2 2012/5/1/14:37:25(130.34.95.44) SiO2 2012/5/2/14:41:31(130.34.95.44) 1 34 44 5810 ka dummy 2 2012/5/1/14:50:46(130.34.95.49) Ta/Pt 7 21 29 4119 konno dummy 0 2012/5/2/14:41:56(130.34.95.44) SiO2 -4 32 42 4771 Wang dummy 0 2012/5/3/18:25:5(130.34.95.21) Pt/Ti 2012/5/4/9:28:43(130.34.95.44) 4 22 32 4771 Wang dummy 0 2012/5/4/9:29:36(130.34.95.44) Pt/Ti -4 34 46 6908 hashiguchi dummy 0 2012/5/4/15:3:36(130.34.95.37) Ta 2012/5/4/15:44:39(130.34.95.37) 4 34 46 6908 hashiguchi dummy 0 2012/5/4/15:44:52(130.34.95.37) Ti 4 46 48 6908 hashiguchi dummy 0 2012/5/4/18:9:54(130.34.95.37) Ti 5 0 2 6908 hashiguchi dummy 0 2012/5/4/18:10:11(130.34.95.37) Ti 7 30 40 5810 Ka dummy 0 2012/5/7/5:44:55(130.34.95.49) Ta/Pt -9 18 26 4119 konno dummy 0 2012/5/7/10:16:33(130.34.95.44) 0 2012/5/7/10:16:39(130.34.95.44) -9 18 26 4119 konno dummy 0 2012/5/7/10:16:59(130.34.95.44) Cu 2012/5/9/6:49:25(130.34.95.44) -9 28 35 6937 Wei-Shan Wang dummy 0 2012/5/7/20:16:38(130.34.95.43) Cu 2012/5/9/10:10:10(130.34.95.43) 8 22 32 4119 aizawa dummy 0 2012/5/8/8:19:58(130.34.74.84) Ti, オペトレ含む 8 32 34 4119 aizawa dummy 0 2012/5/8/12:8:21(130.34.95.44) Ti 10 17 26 6937 hayasaka dummy 0 2012/5/8/19:9:42(130.34.95.43) Ti 9 19 27 4119 konno dummy 0 2012/5/9/6:49:56(130.34.95.44) Ta/Cu -9 28 35 6937 Wei-Shan Wang dummy 0 2012/5/9/10:10:32(130.34.95.43) Cu 2012/5/9/11:45:19(130.34.95.44) 9 29 36 6937 Wei-Shan Wang dummy 0 2012/5/9/11:45:39(130.34.95.44) Cu -9 36 42 6937 Wei-Shan Wang dummy 0 2012/5/9/16:47:9(130.34.95.44) Cu delay--because of poor vacuum condition 2012/5/9/17:1:27(130.34.95.44) 9 36 37 6937 Wei-Shan Wang dummy 0 2012/5/9/16:47:9(130.34.95.44) Cu delay--because of poor vacuum condition 9 37 44 6937 Wei-Shan Wang dummy 0 2012/5/9/17:1:54(130.34.95.44) Cu -10 34 44 6909 ito dummy 0 2012/5/9/18:36:41(130.34.95.37) 0 2012/5/10/19:15:19(130.34.95.44) -11 21 29 4119 konno dummy 0 2012/5/10/8:48:47(130.34.63.131) Cu 2012/5/11/6:51:58(130.34.95.44) 10 34 41 6909 ito dummy 0 2012/5/9/18:36:41(130.34.95.37) 0 11 24 32 4119 konno dummy 0 2012/5/11/6:52:31(130.34.95.44) Cu -15 17 25 4119 SiO2 dummy 0 2012/5/11/15:56:16(130.34.95.44) 0 2012/5/11/15:56:26(130.34.95.44) -15 17 25 4119 konno dummy 0 2012/5/11/15:57:3(130.34.95.44) SiO2 2012/5/15/9:55:44(130.34.95.44) 14 29 31 4119 konno dummy 2 2012/5/14/11:50:24(130.34.95.44) SiO2 -16 23 31 4119 konno dummy 0 2012/5/14/14:7:9(130.34.95.44) Cu 2012/5/14/14:42:54(130.34.95.44) -16 17 25 4119 konno dummy 0 2012/5/14/14:43:10(130.34.95.44) Cu 2012/5/15/11:40:23(130.34.63.131) 14 42 48 6908 Y. Ohara, A. Noriki dummy 0 2012/5/14/15:59:27(130.34.95.44) Ti/Cu, 田中先生 shouninnzumi 15 0 5 6908 Y. Ohara, A. Noriki dummy 0 2012/5/14/16:0:8(130.34.95.44) Ti/Cu, 田中先生 承認済 15 17 22 4119 konno dummy 0 2012/5/11/15:57:3(130.34.95.44) SiO2 -16 20 26 4119 konno dummy 0 2012/5/15/11:40:47(130.34.63.131) Cu 2012/5/15/11:41:11(130.34.63.131) -16 21 29 4119 konno dummy 0 2012/5/15/11:41:28(130.34.63.131) Cu 2012/5/16/12:26:2(130.34.95.44) 16 30 38 6937 Wei-Shan Wang dummy 0 2012/5/15/18:24:34(130.34.95.43) Cu 16 21 27 4119 konno dummy 0 2012/5/15/11:41:28(130.34.63.131) Cu 18 18 27 4771 He dummy 0 2012/5/17/15:10:47(130.34.95.21) Pt/Ti 18 27 29 4771 he dummy 0 2012/5/18/9:1:28(130.34.95.21) 0 21 18 28 4119 S.Watanabe dummy 0 2012/5/18/11:29:58(130.34.95.37) Ti/Cu -23 18 28 4119 konno dummy 0 2012/5/21/7:31:35(130.34.95.37) Cu/Ti 2012/5/21/11:51:21(130.34.63.131) 21 34 44 6937 Konno dummy 0 2012/5/21/7:48:26(130.34.95.43) Cu 22 36 48 5810 Ka dummy 0 2012/5/21/17:51:47(130.34.95.49) Ta/Pt 21 44 46 6937 Konno dummy 0 2012/5/21/20:41:52(130.34.95.44) Cu -24 22 32 4119 konno dummy 0 2012/5/22/6:26:59(130.34.63.131) 0 2012/5/22/6:27:5(130.34.63.131) -23 22 32 4119 konno dummy 0 2012/5/22/6:27:46(130.34.63.131) Cu/Ti 2012/5/22/9:34:30(130.34.63.131) 22 28 36 4119 S.Watanabe dummy 0 2012/5/22/8:58:59(130.34.95.37) Cu -23 24 34 4119 konno dummy 0 2012/5/22/9:34:52(130.34.63.131) Cu/Ti 2012/5/23/6:47:34(130.34.95.44) -24 22 32 4119 konno dummy 0 2012/5/23/6:48:24(130.34.95.44) Cu/Ti 2012/5/23/8:27:38(130.34.95.44) -24 34 44 4771 he dummy 0 2012/5/24/16:4:41(130.34.95.21) 0 2012/5/24/16:5:22(130.34.95.21) 24 34 35 4771 he dummy 0 2012/5/24/16:4:41(130.34.95.21) 0 24 35 44 4771 he dummy 0 2012/5/24/16:6:6(130.34.95.21) Ti/Pt 25 12 22 5810 Toan dummy 0 2012/5/25/3:6:33(130.34.95.49) Pt/Ti 25 23 31 4119 nagai dummy 0 2012/5/25/8:32:9(130.34.74.84) Ti/Cu 25 33 42 4771 he dummy 0 2012/5/25/8:39:38(130.34.95.21) Ti/Pt 25 31 33 4119 nagai dummy 0 2012/5/25/14:13:26(130.34.95.37) 延長 -29 22 31 4119 konno dummy 0 2012/5/28/7:27:25(130.34.63.131) Ti/Cu 2012/5/28/13:8:29(130.34.63.131) -29 24 32 4119 konno dummy 0 2012/5/28/13:8:58(130.34.63.131) Ti/Cu 2012/5/28/14:6:13(130.34.95.44) 29 40 48 6908 Y. Ohara, A. Noriki dummy 0 2012/5/29/18:12:31(130.34.95.44) 田中先生 承認済 30 0 4 6908 Y. Ohara, A. Noriki dummy 0 2012/5/29/18:12:53(130.34.95.44) Ti/Cu 田中先生 承認済 31 26 34 6937 Wei-Shan Wang dummy 0 2012/5/31/9:13:42(130.34.95.43) etch