-6 16 48 6909 kigure dummy 1 2012/3/28/15:48:56(130.34.95.37) 業者による修理 2012/4/3/12:52:56(130.34.95.37) 4 16 48 6909 kigure dummy 1 2012/4/3/12:52:52(130.34.95.37) 業者による修理(6日からの変更) 5 16 48 6909 kigure dummy 1 2012/4/4/17:22:21(130.34.95.37) 到達真空度確認 6 18 27 4771 Minh dummy 0 2012/4/5/20:19:43(130.34.95.21) Pt,Ti sputtering 6 29 40 5810 chin dummy 0 2012/4/5/23:23:44(130.34.95.49) Pt/Ti 10 17 27 4119 nagai dummy 0 2012/4/6/17:8:56(130.34.74.84) Ti/Cu 8 8 16 4771 Phan dummy 1 2012/4/7/23:46:49(130.34.95.21) SiO2, with Minh, Kuwano sensei's permission 8 20 28 4771 Phan dummy 0 2012/4/8/7:4:11(130.34.95.44) with Minh, Kuwano sensei`s permission 10 30 40 4830 endo dummy 0 2012/4/9/9:39:34(130.34.95.30) Ti/Cu 9 38 46 6909 kigure,sasaki dummy 0 2012/4/9/17:36:6(130.34.95.37) SiO2, ベー先生許可 12 28 38 6937 Tsai dummy 0 2012/4/10/12:27:24(130.34.95.44) SiO2 13 19 28 4771 bao dummy 0 2012/4/10/17:0:5(130.34.95.44) SiO2 13 30 40 6909 kigure dummy 2 2012/4/11/12:34:43(130.34.95.37) Ti→Pt -13 28 30 4771 bao dummy 0 2012/4/12/12:47:4(130.34.95.21) 0 2012/4/13/12:38:41(130.34.95.44) 13 28 29 4771 bao dummy 0 2012/4/13/12:39:22(130.34.95.44) 0 -16 36 44 6908 hashiguchi dummy 0 2012/4/14/13:7:20(130.34.95.37) Ti 2012/4/16/14:12:7(130.34.95.44) -17 4 14 4771 Minh dummy 0 2012/4/16/12:59:28(130.34.95.21) with Phan, Prof. Kuwano's permission, SiO2 2012/4/16/14:35:47(130.34.95.21) 16 36 44 4771 Minh dummy 0 2012/4/16/14:36:21(130.34.95.21) SiO2 16 46 48 6908 Y. Ohara, A. Noriki dummy 0 2012/4/16/20:59:7(130.34.95.44) Cu/Ti, Permitted by Prof. Tanaka 17 0 20 6908 Y. Ohara, A. Noriki dummy 0 2012/4/16/20:59:30(130.34.95.44) Cu/Ti, Permitted by Prof. Tanaka 16 44 46 4771 Minh dummy 0 2012/4/16/21:37:54(130.34.95.21) 0 17 20 22 6908 Ohara Yuki dummy 0 2012/4/17/8:52:31(130.34.95.44) 0 -17 30 40 4830 endo dummy 0 2012/4/17/12:57:50(130.34.95.30) 0 2012/4/17/12:58:17(130.34.95.30) 17 30 40 4830 endo dummy 0 2012/4/17/12:58:42(130.34.95.30) Ti/Cu -19 42 48 4771 Minh dummy 0 2012/4/18/18:47:41(130.34.95.21) Pt/Ti, change SiO2>> Pt 2012/4/19/16:35:53(130.34.95.21) 26 19 29 4771 bao dummy 0 2012/4/20/15:24:6(130.34.95.21) SiO2 -24 22 30 4119 konno dummy 0 2012/4/23/8:57:57(130.34.95.44) Cu 2012/4/24/6:42:2(130.34.95.44) -24 24 32 4119 konno dummy 0 2012/4/24/6:42:58(130.34.95.44) 0 2012/4/24/6:43:3(130.34.95.44) -24 24 32 4119 konno dummy 0 2012/4/24/6:43:20(130.34.95.44) Cu 2012/4/24/13:33:51(130.34.95.44) 24 24 30 4119 konno dummy 0 2012/4/24/6:43:20(130.34.95.44) Cu -24 34 44 4119 yukaito dummy 0 2012/4/24/15:39:56(130.34.95.37) 0 2012/4/24/15:42:57(130.34.95.37) 24 34 44 6909 ito dummy 0 2012/4/24/15:43:30(130.34.95.37) 0 -26 30 40 6937 Konno dummy 0 2012/4/24/20:50:38(130.34.95.43) Cu 2012/4/25/10:39:6(130.34.95.43) -25 20 30 6937 matsuzaki dummy 0 2012/4/25/7:44:31(130.34.95.43) 0 2012/4/25/7:54:14(130.34.95.44) 25 20 22 6937 Weichih Lin dummy 2 2012/4/25/8:37:14(130.34.95.43) SiO2 -> Pt 25 22 30 6937 Weichih Lin dummy 0 2012/4/25/8:37:35(130.34.95.43) Ti/Pt 26 33 43 6937 Konno & Hikichi dummy 0 2012/4/25/12:0:0(130.34.95.43) Cu 25 32 41 4771 Wang dummy 0 2012/4/25/14:9:20(130.34.95.21) Pt 25 42 48 4771 Minh dummy 0 2012/4/25/18:55:57(130.34.95.43) with Phan, Prof. Kuwano's permission 25 0 4 4771 Minh dummy 0 2012/4/25/23:29:18(130.34.95.44) with Phan, Prof. Kuwano's permission 26 0 4 4771 Minh dummy 0 2012/4/25/23:29:58(130.34.95.44) with Phan, Prof. Kuwano's permission 26 8 18 4771 Minh dummy 0 2012/4/26/1:18:11(130.34.95.44) with Phan, Prof. Kuwano's permission 26 29 31 4771 bao dummy 0 2012/4/26/10:25:4(130.34.95.44) 0 26 31 33 4771 bao dummy 0 2012/4/26/14:2:18(130.34.95.44) 0 27 37 47 4771 Wang dummy 0 2012/4/27/16:37:53(130.34.95.21) Pt/Ti 30 10 18 4771 Minh dummy 0 2012/4/29/23:3:31(130.34.95.21) with Toan, Prof. Kuwano's permission 30 33 43 4771 Minh dummy 0 2012/4/30/14:50:13(130.34.95.44) with Phan, Prof. Kuwano's permission 30 43 45 4771 Minh dummy 0 2012/4/30/20:15:30(130.34.95.21) 0