-1	32	42	4771	bao	dummy	0	2012/1/29/11:18:46(130.34.95.43)	SiO2	2012/1/31/12:30:3(130.34.95.21)
-2	32	42	4771	bao	dummy	0	2012/1/31/12:30:49(130.34.95.21)	SiO2	2012/2/2/13:22:50(130.34.95.44)
1	0	4	6909	sasaki&watanabe	dummy	1	2012/1/31/22:58:21(130.34.95.37)	Al>Cu ベー先生承認
2	42	44	5810	tanahashi	dummy	2	2012/2/2/10:15:24(130.34.95.49)	SiO2 > Al
3	19	27	5810	tanahashi	dummy	0	2012/2/2/10:16:57(130.34.95.49)	Al
2	31	42	4771	bao	dummy	0	2012/2/2/13:23:21(130.34.95.44)	Cu/Ti
6	26	40	4771	Minh	dummy	2	2012/2/6/9:16:7(130.34.95.21)	Change Al->Pt; Sputtering materials: Pt/Ti
7	24	34	4119	konno	dummy	2	2012/2/6/9:58:9(130.34.95.37)	Cu/Ti
9	20	28	6937	Takahashi	dummy	0	2012/2/6/15:17:5(130.34.95.43)	Cu
-9	28	38	6908	hashiguchi	dummy	2	2012/2/6/17:49:19(130.34.95.37)	Ta,Cu	2012/2/9/11:56:4(130.34.95.44)
6	40	42	4771	MINH	dummy	0	2012/2/6/18:54:9(130.34.95.21)	0
6	42	46	4771	Minh	dummy	0	2012/2/6/19:36:41(130.34.95.21)	with Phan, Prof. Kuwano's permission
6	46	48	4771	Minh	dummy	0	2012/2/6/23:0:44(130.34.95.21)	0
7	4	20	4771	Minh	dummy	0	2012/2/7/0:41:10(130.34.95.44)	with Phan, Prof. Kuwano's permission
7	22	24	4119	konno	dummy	0	2012/2/7/6:59:55(130.34.95.44)	0
7	36	47	4771	Phan	dummy	0	2012/2/7/17:21:8(130.34.95.21)	Pt/Ti
-10	18	26	6937	Takahashi	dummy	0	2012/2/8/21:45:9(130.34.95.43)	Cu	2012/2/10/5:17:19(130.34.95.43)
-10	33	43	4771	Phan	dummy	2	2012/2/8/22:25:56(130.34.95.43)	Al target	2012/2/10/10:9:40(130.34.95.21)
9	28	36	6908	hashiguchi	dummy	0	2012/2/9/11:56:35(130.34.95.44)	ti,cu
-13	17	27	4119	nagai	dummy	0	2012/2/9/15:18:19(130.34.74.84)	0	2012/2/9/15:18:27(130.34.74.84)
13	17	27	4119	nagai	dummy	0	2012/2/9/15:18:52(130.34.74.84)	Ti/Cu
-13	28	38	4830	suzuki	dummy	0	2012/2/9/17:38:53(130.34.95.30)	Ti	2012/2/13/9:30:36(130.34.95.30)
10	20	28	6937	Takahashi	dummy	0	2012/2/10/5:18:20(130.34.95.43)	Cu
10	28	36	4771	Phan	dummy	0	2012/2/10/10:10:9(130.34.95.21)	Pt/Ti
10	36	44	6937	Takahashi	dummy	0	2012/2/10/10:27:45(130.34.95.43)	Cu
13	41	48	6937	Weichih Lin	dummy	0	2012/2/10/15:33:22(130.34.95.43)	Pt->Si3N4
-14	16	21	6937	Weichih Lin	dummy	0	2012/2/10/15:33:56(130.34.95.43)	Si3N4 dopositon	2012/2/13/20:32:55(130.34.95.44)
10	44	46	6937	Takahashi	dummy	0	2012/2/10/18:9:50(130.34.95.43)	0
11	24	34	4771	Phan	dummy	2	2012/2/10/18:36:47(130.34.95.44)	SiO2, with Minh, Kuwano sensei's permission
11	35	43	6909	sasaki&watanabe	dummy	0	2012/2/11/16:4:5(130.34.95.44)	Ti ベー先生承認
14	22	32	6908	hashiguchi	dummy	2	2012/2/12/10:33:59(130.34.95.37)	SiN3>Ta, Ta,Cu
12	24	37	6909	sasaki&noriki	dummy	2	2012/2/12/11:1:12(130.34.95.37)	Ti>TiN SiO2>Pt TiN/Pt ベー先生承認
12	37	39	6909	sasaki&noriki	dummy	2	2012/2/12/11:1:44(130.34.95.37)	TiN>Ti
12	39	44	6909	sasaki	dummy	0	2012/2/12/13:57:29(130.34.95.44)	延長
13	32	40	4771	hosokawa	dummy	0	2012/2/13/11:24:1(130.34.95.21)	Pt,Ti
15	18	30	4830	Endo	dummy	0	2012/2/13/13:48:54(130.34.95.30)	Ti/Cu
-14	32	34	6909	sasaki	dummy	2	2012/2/13/14:30:20(130.34.95.37)	Ta>Ir	2012/2/13/14:30:27(130.34.95.37)
-14	32	34	6909	6909	dummy	2	2012/2/13/14:31:20(130.34.95.37)	Ta>Ir Ti>Pt	2012/2/13/14:33:21(130.34.95.37)
14	34	46	6909	sasaki&watanabe	dummy	0	2012/2/13/14:32:28(130.34.95.37)	IrOx/Pt ベー先生承認
14	46	48	6909	sasaki&watanabe	dummy	2	2012/2/13/14:33:13(130.34.95.37)	Ir>Ti
-14	32	34	6909	sasaki	dummy	0	2012/2/13/14:33:54(130.34.95.37)	Ti>Ir Ta>Pt	2012/2/13/14:34:0(130.34.95.37)
14	32	34	6909	sasaki	dummy	2	2012/2/13/14:34:32(130.34.95.37)	Ti>Ir Ta>Pt
15	31	40	6909	sasaki	dummy	0	2012/2/13/15:12:45(130.34.95.37)	Pt
16	20	30	4119	S.Watanabe	dummy	0	2012/2/14/7:45:10(130.34.63.131)	Ti/Cu
17	18	28	4119	konno	dummy	0	2012/2/14/9:3:47(130.34.95.37)	SiO2
15	0	3	6909	sasaki&watanabe	dummy	0	2012/2/14/12:5:15(130.34.95.37)	延長
17	28	38	4771	bao	dummy	0	2012/2/14/12:32:34(130.34.95.21)	SiO2
-16	30	40	6937	N.WANG	dummy	0	2012/2/14/13:18:26(130.34.95.43)	Ti/Pt	2012/2/15/13:6:20(130.34.95.43)
16	0	15	4771	Minh	dummy	0	2012/2/15/12:19:53(130.34.95.44)	with Phan, Prof. Kuwano's permission (Pt/Ti)
16	30	41	6937	Weichih Lin	dummy	0	2012/2/15/15:2:1(130.34.95.44)	Ti/Pt
16	15	17	4771	Minh	dummy	0	2012/2/16/3:31:55(130.34.95.21)	0
16	41	48	6909	watanabe	dummy	1	2012/2/16/15:10:37(130.34.95.37)	0
17	0	18	6909	watanabe	dummy	1	2012/2/16/15:11:6(130.34.95.37)	0
21	22	32	6937	王楠	dummy	0	2012/2/17/10:19:42(130.34.95.43)	Ti/Pt
20	26	36	6909	watanabe	dummy	1	2012/2/17/12:27:3(130.34.95.37)	0
17	38	46	6965	kotani	dummy	0	2012/2/17/14:1:8(130.34.95.31)	ti
18	24	32	4771	Phan	dummy	0	2012/2/17/19:6:8(130.34.95.21)	Pt/Ti, with Minh, Kuwano sensei's permission
-18	32	43	4771	Minh	dummy	0	2012/2/18/12:29:33(130.34.95.43)	with Phan, Prof. Kuwano's permission, Pt/Ti	2012/2/18/13:17:58(130.34.95.44)
-18	34	44	4771	Minh	dummy	0	2012/2/18/13:18:25(130.34.95.44)	with Phan, Prof. Kuwano's permission	2012/2/18/20:21:24(130.34.95.44)
18	34	43	4771	Minh	dummy	0	2012/2/18/13:18:25(130.34.95.44)	with Phan, Prof. Kuwano's permission
20	18	26	4830	kawakami	dummy	0	2012/2/19/17:22:1(130.34.95.30)	Ti
-20	36	48	6909	watanabe	dummy	0	2012/2/20/12:39:48(130.34.95.44)	0	2012/2/20/15:32:0(130.34.95.44)
21	0	22	4119	S.Watanabe	dummy	0	2012/2/20/12:40:8(130.34.95.44)	Cu
20	36	48	6909	watanabe	dummy	1	2012/2/20/15:32:19(130.34.95.44)	0
21	32	38	6937	王　楠	dummy	0	2012/2/21/13:28:32(130.34.95.43)	0
-23	17	27	4119	nagai	dummy	0	2012/2/21/14:51:12(130.34.95.44)	Ti/Cu	2012/2/22/15:56:18(130.34.74.84)
21	38	42	6937	王楠	dummy	0	2012/2/21/15:52:54(130.34.95.43)	Ti/Pt
-22	0	24	6937	王楠	dummy	0	2012/2/21/16:57:47(130.34.95.44)	0	2012/2/21/21:37:30(130.34.95.44)
-21	42	48	6937	王楠	dummy	0	2012/2/21/16:58:12(130.34.95.44)	0	2012/2/21/21:37:40(130.34.95.44)
-23	28	37	4830	kawakami	dummy	0	2012/2/21/17:40:5(130.34.95.30)	Ti	2012/2/22/17:47:53(130.34.95.37)
-24	18	28	4119	suzuki	dummy	0	2012/2/21/19:48:31(130.34.95.44)	0	2012/2/22/15:56:51(130.34.74.84)
21	42	46	6937	王楠	dummy	0	2012/2/21/16:58:12(130.34.95.44)	0
21	46	48	6909	watanabe	dummy	1	2012/2/21/21:37:53(130.34.95.44)	0
-22	0	36	6909	watanabe	dummy	0	2012/2/21/21:38:14(130.34.95.44)	0	2012/2/21/21:38:20(130.34.95.44)
22	0	40	6909	watanabe	dummy	1	2012/2/21/21:38:45(130.34.95.44)	0
22	40	48	6909	watanabe	dummy	1	2012/2/21/23:24:6(130.34.95.37)	0
23	0	17	6909	watanabe	dummy	1	2012/2/21/23:58:12(130.34.95.37)	0
-23	17	27	4119	suzuki	dummy	2	2012/2/22/15:56:45(130.34.74.84)	Pt>Ta, Ta/Cu	2012/2/22/17:45:1(130.34.95.37)
-24	17	27	4119	nagai	dummy	0	2012/2/22/15:57:6(130.34.74.84)	Ti/Cu	2012/2/22/18:22:48(130.34.74.84)
23	17	28	6909	watanabe	dummy	1	2012/2/22/17:45:15(130.34.95.37)	0
-23	28	48	6909	watanabe	dummy	1	2012/2/22/17:48:5(130.34.95.37)	0	2012/2/23/18:15:3(130.34.95.37)
-24	0	17	6909	watanabe	dummy	1	2012/2/22/17:48:17(130.34.95.37)	0	2012/2/23/18:15:11(130.34.95.37)
-24	17	27	4119	suzuki	dummy	2	2012/2/22/18:23:14(130.34.74.84)	Ti>Ta,Ta/Cu	2012/2/24/7:16:21(130.34.74.84)
-24	27	37	4119	nagai	dummy	2	2012/2/23/11:3:40(130.34.95.44)	Ti/Cu	2012/2/24/7:17:34(130.34.74.84)
-24	37	39	6909	S.Kanno	dummy	2	2012/2/23/13:50:18(130.34.95.37)	Ti取り出し	2012/2/23/18:54:29(130.34.95.44)
27	20	30	4119	hioki	dummy	2	2012/2/23/15:48:17(130.34.95.44)	SiO2
23	28	39	6909	watanabe	dummy	1	2012/2/22/17:48:5(130.34.95.37)	0
24	37	46	4830	kawakami	dummy	0	2012/2/24/1:17:52(130.34.95.30)	Ti
24	17	27	4119	suzuki	dummy	2	2012/2/24/7:16:47(130.34.74.84)	Pt>Ta,Ta/Cu
-24	27	37	4119	nagai	dummy	0	2012/2/24/7:17:50(130.34.74.84)	Ti/Cu	2012/2/24/13:36:21(130.34.95.44)
24	27	30	4119	nagai	dummy	0	2012/2/24/7:17:50(130.34.74.84)	Ti/Cu
24	30	32	4119	suzuki	dummy	0	2012/2/24/13:36:49(130.34.95.44)	延長
-28	17	27	4119	nagai	dummy	0	2012/2/24/13:38:3(130.34.95.44)	0	2012/2/24/13:38:9(130.34.95.44)
-28	17	27	4119	nagai	dummy	0	2012/2/24/13:38:24(130.34.95.44)	Ti/Cu	2012/2/27/17:0:6(130.34.74.84)
-27	30	40	4119	suzuki	dummy	0	2012/2/24/15:0:0(130.34.95.44)	0	2012/2/24/15:23:25(130.34.95.44)
-27	30	40	4119	suzuki	dummy	0	2012/2/24/15:23:55(130.34.95.44)	Ta/Cu	2012/2/27/13:0:37(130.34.74.84)
24	46	48	6909	watanabe	dummy	1	2012/2/24/21:30:15(130.34.95.37)	Cu
25	0	6	6909	watanabe	dummy	1	2012/2/24/23:34:32(130.34.95.44)	0
27	40	48	4771	Phan	dummy	2	2012/2/26/14:37:23(130.34.95.21)	Pt/Ti, with Minh, Kuwano sensei's permission
-28	0	4	4771	Phan	dummy	0	2012/2/26/14:37:53(130.34.95.21)	Pt/Ti, with Minh, Kuwano sensei's permission	2012/2/27/15:2:41(130.34.95.21)
27	30	34	4119	hioki	dummy	0	2012/2/27/13:12:20(130.34.95.44)	0
28	4	16	4771	Minh	dummy	0	2012/2/27/14:3:0(130.34.95.21)	with Phan, Prof. Kuwano's permission (SiO2)
27	34	40	4771	Phan	dummy	0	2012/2/27/14:44:7(130.34.95.21)	0
28	16	24	4771	Phan	dummy	0	2012/2/27/22:26:49(130.34.95.44)	Pt/Ti
-29	19	28	6937	Weichih Lin	dummy	0	2012/2/28/8:27:7(130.34.95.43)	Ti/Pt	2012/2/28/8:27:23(130.34.95.43)
-29	19	29	6937	Weichih Lin	dummy	0	2012/2/28/8:27:42(130.34.95.43)	Ti/Pt	2012/2/28/13:53:55(130.34.95.43)
28	24	30	4771	Phan	dummy	0	2012/2/28/10:4:25(130.34.95.21)	0
-28	38	44	6909	watanabe	dummy	1	2012/2/28/17:6:36(130.34.95.37)	SiO2,べー先生承認	2012/2/28/17:13:16(130.34.95.37)
-28	36	44	6909	watanabe	dummy	1	2012/2/28/17:13:34(130.34.95.37)	SiO2,べー先生承認	2012/2/28/19:48:59(130.34.95.37)
28	36	42	6909	watanabe	dummy	1	2012/2/28/17:13:34(130.34.95.37)	SiO2,べー先生承認
29	30	40	6937	Weichih Lin	dummy	0	2012/2/28/20:54:39(130.34.95.43)	Ti/Pt
29	40	43	6937	weichih lin	dummy	0	2012/2/29/18:51:42(130.34.95.44)	more pumping time