-1 23 34 6965 hokari dummy 2 2012/10/29/23:31:2(130.34.95.31) Si 2012/10/31/20:53:0(130.34.95.43) 2 18 26 4119 konno dummy 0 2012/10/30/10:50:24(130.34.95.37) Cu/Ti 1 34 44 4119 yabata dummy 0 2012/10/31/11:48:30(130.34.95.37) Ti/Cu 1 44 48 4119 S.Watanabe dummy 0 2012/10/31/11:48:51(130.34.95.37) Ti/Cu 2 0 18 4119 S.Watanabe dummy 0 2012/10/31/11:49:24(130.34.95.37) Ti/Cu 2 26 34 4119 yabata dummy 0 2012/10/31/12:27:23(130.34.63.131) Ti/Cu 1 23 32 6965 hokari dummy 0 2012/10/31/20:53:19(130.34.95.43) Si 1 32 34 4119 yabata dummy 0 2012/11/1/11:51:21(130.34.95.44) 0 -3 18 28 6908 Y. Ohara, A. Noriki dummy 0 2012/11/1/15:51:59(130.34.95.44) Ti/Cu 田中先生 承認済 2012/11/2/15:18:41(130.34.95.37) 3 0 20 6908 Y. Ohara, A. Noriki dummy 0 2012/11/2/23:34:25(130.34.95.44) Ti/Cu たなかせんせい 3 38 48 6908 Y. Ohara, A. Noriki dummy 0 2012/11/3/16:43:31(130.34.95.37) Ti/Cu 田中先生 承認済み 4 0 22 6908 Y. Ohara, A. Noriki dummy 0 2012/11/3/16:43:54(130.34.95.37) Ti/Cu 田中先生 承認済み -6 20 30 6909 watanabe dummy 0 2012/11/5/13:45:36(130.34.95.37) 0 2012/11/6/0:22:9(130.34.95.44) 7 18 28 4830 nozaki dummy 0 2012/11/5/16:8:48(130.34.95.30) Ti 6 30 39 6909 kigure dummy 2 2012/11/5/22:58:52(130.34.95.37) Si → Ta 6 28 30 6909 kigure dummy 0 2012/11/6/13:40:26(130.34.95.37) 0 9 22 32 5810 Inomata dummy 2 2012/11/6/14:46:19(130.34.95.49) VOx 6 39 42 6909 watanabe dummy 0 2012/11/6/15:34:46(130.34.95.44) Ti/Cu -8 44 48 6909 kigure&hashiguchi dummy 0 2012/11/8/16:18:20(130.34.95.44) etching 2012/11/8/16:18:28(130.34.95.44) 8 44 48 6909 kigure&hashiguchi dummy 0 2012/11/8/16:19:12(130.34.95.44) etching, 木野先生承認済み 9 0 21 6909 kigure&hashiguchi dummy 0 2012/11/8/16:20:3(130.34.95.44) etching, 木野先生承認済み -9 32 36 5810 inomata dummy 0 2012/11/8/16:25:33(130.34.95.49) 加熱するので若干長めの真空引き 2012/11/9/12:48:46(130.34.95.44) 12 18 28 4119 yabata dummy 0 2012/11/9/12:49:7(130.34.63.131) Cu/Ti -9 32 40 5810 inomata dummy 0 2012/11/9/12:49:15(130.34.95.44) 加熱のため長めの真空引き 2012/11/9/17:54:52(130.34.95.44) 13 20 30 4771 yoshida dummy 2 2012/11/9/17:13:33(130.34.95.21) V→SiO2 9 32 38 5810 inomata dummy 0 2012/11/9/12:49:15(130.34.95.44) 加熱のため長めの真空引き 9 38 40 5810 inomata dummy 0 2012/11/9/18:29:4(130.34.95.44) 0 13 30 32 4771 yoshida dummy 0 2012/11/13/11:17:39(130.34.95.44) SiO2 13 32 33 4771 yoshida dummy 0 2012/11/13/12:40:30(130.34.95.21) 0 -14 28 39 4830 furuya dummy 2 2012/11/13/16:15:37(130.34.95.30) Ta/Cu 2012/11/14/9:40:16(130.34.95.30) 14 28 39 4830 furuya dummy 2 2012/11/14/9:40:30(130.34.95.30) SiO2→Ta, Ta/Cu 19 18 28 4119 yabata dummy 0 2012/11/14/10:27:7(130.34.63.131) Cu/Ti 15 20 30 4830 nozaki dummy 0 2012/11/14/16:55:13(130.34.95.30) Ti/Cu 15 35 44 4771 bao dummy 0 2012/11/15/11:49:55(130.34.95.21) Cu/Ti -16 22 32 6909 watanabe dummy 0 2012/11/15/23:10:44(130.34.95.37) 0 2012/11/16/11:24:9(130.34.95.44) 16 22 25 6909 watanabe dummy 0 2012/11/15/23:10:44(130.34.95.37) 0 16 25 32 6909 watanabe dummy 0 2012/11/16/11:24:33(130.34.95.44) Ti/Cu -21 18 26 4119 konno dummy 0 2012/11/16/16:8:44(130.34.63.131) Ti/Cu 2012/11/19/15:25:46(130.34.63.131) -17 28 38 6909 kigure&kino dummy 2 2012/11/16/18:23:50(130.34.95.37) Ta→Pt 木野先生承認済み 2012/11/17/13:40:34(130.34.63.131) -17 38 46 6908 tanikawa, kigure dummy 0 2012/11/17/0:5:37(130.34.95.44) 0 2012/11/17/11:26:44(130.34.63.131) 17 28 30 6909 kigure&kino dummy 2 2012/11/16/18:23:50(130.34.95.37) Ta→Pt 木野先生承認済み 18 26 36 6909 kigure&kino dummy 0 2012/11/17/13:45:11(130.34.63.131) Pt 木野先生承認済み -19 28 36 6908 tanikawa dummy 0 2012/11/17/20:47:26(130.34.95.37) 0 2012/11/17/20:47:41(130.34.95.37) -19 28 36 6908 tanikawa dummy 0 2012/11/17/20:48:8(130.34.95.37) Ti/Cu 2012/11/19/14:54:55(130.34.95.37) 18 36 38 6909 kigure&kino dummy 0 2012/11/18/14:48:33(130.34.95.44) 時間延長 -21 26 32 4119 yabata dummy 0 2012/11/19/9:32:6(130.34.63.131) 0 2012/11/19/12:47:58(130.34.63.131) -20 18 26 4119 nagai dummy 0 2012/11/19/10:18:57(130.34.74.84) Ti/Cu 2012/11/19/14:35:10(130.34.74.84) -21 26 32 4119 yabata dummy 0 2012/11/19/12:48:28(130.34.63.131) 0 2012/11/19/15:25:54(130.34.63.131) -22 18 30 4119 konno dummy 0 2012/11/19/13:59:37(130.34.63.131) 2times 2012/11/20/8:7:48(130.34.63.131) 19 28 32 6908 tanikawa dummy 0 2012/11/17/20:48:8(130.34.95.37) Ti/Cu 19 42 48 6908 tanikawa dummy 0 2012/11/19/15:0:47(130.34.95.37) 0 -20 18 26 6908 tanikawa dummy 0 2012/11/19/15:7:5(130.34.95.37) Ti/Cu 2012/11/19/16:27:19(130.34.95.37) 20 0 18 6908 tanikawa dummy 0 2012/11/19/16:27:55(130.34.95.37) Ti/Cu 夜通し真空引きします -20 18 22 6908 tanikawa dummy 0 2012/11/20/3:4:0(130.34.95.44) Ti/Cu 2012/11/20/3:5:20(130.34.95.44) 20 18 24 6908 tanikawa dummy 0 2012/11/20/3:5:36(130.34.95.44) Ti/Cu 21 18 30 4119 konno dummy 0 2012/11/20/8:8:16(130.34.63.131) Ti/Cu 2times -20 28 36 4119 nagai dummy 0 2012/11/20/9:37:31(130.34.74.84) Ti/Cu 2012/11/20/16:11:18(130.34.95.44) -22 18 28 4119 nagai dummy 2 2012/11/20/10:2:18(130.34.74.84) Pt>SiO2 2012/11/22/10:53:31(130.34.95.44) 20 24 28 6908 tanikawa dummy 0 2012/11/20/11:27:42(130.34.95.37) 0 -28 26 34 4119 nagai dummy 0 2012/11/20/12:47:30(130.34.95.44) Ti/Cu 2012/11/20/16:51:2(130.34.74.84) 20 28 35 4119 nagai dummy 0 2012/11/20/9:37:31(130.34.74.84) Ti/Cu 27 26 34 4119 nagai dummy 0 2012/11/20/16:50:57(130.34.74.84) Ti/Cu -22 28 36 4119 yabata dummy 0 2012/11/21/8:42:57(130.34.95.44) Ti/Cu 2012/11/21/8:45:16(130.34.95.44) 21 30 38 4119 yabata dummy 0 2012/11/21/8:46:12(130.34.95.44) Ti/Cu 22 28 36 4119 yabata dummy 0 2012/11/21/16:49:52(130.34.95.44) Ti 22 18 24 4119 nagai dummy 2 2012/11/20/10:2:18(130.34.74.84) Pt>SiO2 23 16 28 6908 tanikawa, noriki dummy 0 2012/11/23/4:28:43(130.34.95.44) 0 23 28 30 6908 tanikawa, ohara dummy 0 2012/11/23/13:27:29(130.34.95.37) 0 23 30 42 6908 tanikawa, ohara dummy 0 2012/11/23/14:27:37(130.34.95.44) Ti/Cu -24 19 32 6908 tanikawa, noriki dummy 0 2012/11/23/22:49:4(130.34.95.37) Ti/Cu 2012/11/23/22:50:4(130.34.95.37) 24 19 30 6908 tanikawa, noriki dummy 0 2012/11/23/22:50:29(130.34.95.37) 木野先生承認 24 30 36 6908 tanikawa,noriki dummy 0 2012/11/24/15:33:38(130.34.95.37) 0 26 38 48 4771 Minh dummy 0 2012/11/26/12:48:22(130.34.95.21) Prof. Kuwano's permission, Pt/Ti 26 30 38 4771 he dummy 0 2012/11/26/12:54:8(130.34.95.21) SiO2 27 18 26 4119 yabata dummy 0 2012/11/26/13:25:57(130.34.63.131) Cu -27 0 4 4771 Minh dummy 0 2012/11/26/18:15:23(130.34.95.21) Prof. Kuwano's permission, Pt/Ti 2012/11/26/22:34:15(130.34.95.21) 27 7 18 4771 Minh+Wang san dummy 0 2012/11/27/2:41:2(130.34.95.21) Prof. Kuwano's permission, Pt/Ti 27 34 36 6937 hayasaka dummy 2 2012/11/27/16:44:33(130.34.95.44) Pt -> SiO2 -30 18 28 4119 yabata dummy 0 2012/11/29/9:23:10(130.34.63.131) Cu 2012/11/30/9:14:24(130.34.63.131) 30 18 21 4119 yabata dummy 0 2012/11/29/9:23:10(130.34.63.131) Cu -30 21 28 4119 yabata dummy 0 2012/11/30/9:14:53(130.34.63.131) Cu 2012/11/30/9:47:34(130.34.95.44) 30 21 22 4119 yabata dummy 0 2012/11/30/9:14:53(130.34.63.131) Cu 30 22 32 4119 yabata dummy 0 2012/11/30/9:48:6(130.34.95.44) cu