-2	20	28	4119	konno	dummy	0	2012/9/28/13:56:41(130.34.95.44)	Ti/Cu	2012/10/1/14:11:9(130.34.95.44)
-2	28	40	6965	hokari	dummy	2	2012/10/1/9:38:16(130.34.95.31)	Si, SiO2	2012/10/1/16:27:20(130.34.95.31)
-3	18	26	6965	hokari	dummy	0	2012/10/1/9:39:16(130.34.95.31)	Si	2012/10/1/16:28:13(130.34.95.31)
5	28	40	4119	yabata	dummy	0	2012/10/1/13:36:37(130.34.95.44)	0
1	42	48	4119	yabata,konno	dummy	0	2012/10/1/14:11:50(130.34.95.44)	Ti/Cu
-2	0	20	4119	yabata,konno	dummy	0	2012/10/1/14:12:34(130.34.95.44)	Ti/Cu bea先生承認	2012/10/2/8:13:26(130.34.95.44)
-2	20	22	4119	konno	dummy	0	2012/10/1/14:13:5(130.34.95.44)	0	2012/10/2/8:13:10(130.34.95.44)
1	34	40	4119	yabata	dummy	0	2012/10/1/14:16:19(130.34.95.44)	Cu
3	26	38	5810	An	dummy	0	2012/10/1/15:9:2(130.34.95.49)	0
2	22	34	6965	hokari	dummy	2	2012/10/1/16:27:35(130.34.95.31)	Si, SiO2
2	40	48	6965	hokari	dummy	0	2012/10/1/16:28:9(130.34.95.31)	Si
2	0	19	4119	yabata,konno	dummy	0	2012/10/1/14:12:34(130.34.95.44)	Ti/Cu bea先生承認
-4	22	32	4119	konno	dummy	0	2012/10/2/8:14:34(130.34.95.44)	Ti/Cu	2012/10/3/16:19:13(130.34.63.131)
3	0	26	6937	hanzawa	dummy	2	2012/10/2/16:3:25(130.34.95.43)	ターゲット交換および成膜(Ti/Pt)
-4	16	22	4119	watanabe	dummy	0	2012/10/3/11:27:8(130.34.63.131)	0	2012/10/3/16:19:38(130.34.63.131)
4	24	34	4119	konno	dummy	0	2012/10/3/16:19:32(130.34.63.131)	Ti/Cu
4	18	24	4119	watanabe	dummy	0	2012/10/3/16:19:52(130.34.63.131)	0
3	38	40	5810	An	dummy	0	2012/10/3/19:2:28(130.34.95.43)	Si
-4	36	44	6909	yukaito	dummy	0	2012/10/4/10:51:4(130.34.95.44)	0	2012/10/4/10:51:42(130.34.95.44)
4	36	44	6909	yukaito	dummy	0	2012/10/4/10:51:58(130.34.95.44)	Ti/Cu
-9	26	36	4119	yabata	dummy	0	2012/10/4/11:27:13(130.34.63.131)	0	2012/10/5/12:3:33(130.34.95.37)
5	18	27	6909	kigure&watanabe	dummy	0	2012/10/4/13:11:4(130.34.95.37)	etching
4	46	48	6909	kigure&watanabe	dummy	0	2012/10/4/22:12:13(130.34.95.37)	木野先生承認済み
5	0	18	6909	kigure&watanabe	dummy	0	2012/10/4/22:12:55(130.34.95.37)	etching,　木野先生承認済み
-8	20	30	4830	endo	dummy	0	2012/10/5/16:13:51(130.34.95.30)	Cu/Ti	2012/10/5/16:52:54(130.34.95.30)
9	18	26	6909	kigure&watanabe	dummy	0	2012/10/5/19:38:20(130.34.95.37)	etching
-6	16	20	6909	yukaito, kino	dummy	0	2012/10/5/22:32:21(130.34.95.37)	木野先生承認済み	2012/10/5/22:32:29(130.34.95.37)
6	20	30	6908	tanikawa	dummy	0	2012/10/6/9:35:18(130.34.95.37)	Ti/Cu
7	26	38	6965	hokari	dummy	0	2012/10/6/12:18:31(130.34.95.31)	Si, SiO2 金森先生承認
7	38	48	6908	noriki,ohara	dummy	0	2012/10/6/13:58:59(130.34.95.44)	Al
6	30	34	6908	noriki,tanikawa	dummy	2	2012/10/6/13:59:25(130.34.95.44)	Al取り付け
-8	38	48	6908	noriki,ohara	dummy	2	2012/10/7/19:34:24(130.34.95.44)	Al,ベー先生承認済み	2012/10/8/0:48:23(130.34.95.44)
8	0	2	6908	noriki	dummy	0	2012/10/7/23:26:10(130.34.95.37)	0
-8	27	36	6908	Y. Ohara, A. Noriki	dummy	0	2012/10/8/11:1:49(130.34.95.44)	Cu 田中先生 承認済	2012/10/8/11:18:34(130.34.95.44)
8	26	38	6908	Y. Ohara, C. Kigure	dummy	1	2012/10/8/11:48:29(130.34.95.44)	0
8	38	48	6908	Y. Ohara, C. Kigure	dummy	1	2012/10/8/17:23:24(130.34.95.37)	0
-9	0	18	6908	Y. Ohara, C. Kigure	dummy	0	2012/10/8/17:23:37(130.34.95.37)	0	2012/10/8/17:23:41(130.34.95.37)
9	0	18	6908	Y. Ohara, C. Kigure	dummy	1	2012/10/8/17:24:0(130.34.95.37)	0
10	28	40	4119	yabata	dummy	0	2012/10/9/8:58:8(130.34.95.37)	Cu
9	26	28	6909	kigure	dummy	0	2012/10/9/10:29:10(130.34.95.37)	時間延長
9	28	38	6908	hashiguchi	dummy	0	2012/10/9/10:31:34(130.34.95.37)	Ti, Cu
-9	38	46	6908	tanikawa	dummy	0	2012/10/9/14:16:9(130.34.134.253)	0	2012/10/9/14:16:51(130.34.134.253)
9	38	46	6908	tanikawa	dummy	0	2012/10/9/14:17:9(130.34.134.253)	Ti/Cu
9	46	48	6908	hashiguchi	dummy	0	2012/10/9/16:17:45(130.34.95.44)	0
-10	0	22	6908	hashiguchi	dummy	0	2012/10/9/16:18:10(130.34.95.44)	0	2012/10/9/22:38:36(130.34.95.44)
10	0	17	6908	tanikawa	dummy	0	2012/10/9/22:39:9(130.34.95.44)	0
-15	28	39	4119	yabata	dummy	0	2012/10/11/12:47:3(130.34.95.44)	Cu	2012/10/12/21:7:45(130.34.95.44)
-12	40	48	6908	hashiguchi	dummy	2	2012/10/11/22:13:3(130.34.95.44)	Ir->SiO2	2012/10/12/19:40:39(130.34.95.37)
12	40	42	6908	hashiguchi	dummy	2	2012/10/11/22:13:3(130.34.95.44)	Ir->SiO2
15	18	26	4119	yabata	dummy	0	2012/10/12/21:9:7(130.34.95.44)	Ti/Cu
-15	26	36	6908	hashiguchi	dummy	0	2012/10/14/17:29:39(130.34.95.37)	Ir->SiO2	2012/10/14/17:29:42(130.34.95.37)
15	26	36	6908	hashiguchi	dummy	2	2012/10/14/17:30:9(130.34.95.37)	Ir->SiO2
-16	18	28	4119	yabata	dummy	0	2012/10/15/9:17:26(130.34.95.44)	0	2012/10/15/11:58:50(130.34.95.44)
15	40	48	4119	yabata	dummy	0	2012/10/15/12:0:25(130.34.95.44)	Cu/Ti
16	16	19	4119	yabata	dummy	0	2012/10/15/12:1:15(130.34.95.44)	Cu/Ti
16	20	29	4830	endo	dummy	0	2012/10/15/15:42:16(130.34.95.30)	Ti/Cu
16	36	44	6909	kigure&watanabe	dummy	0	2012/10/15/20:0:15(130.34.95.37)	etching
17	28	40	6965	hokari	dummy	2	2012/10/15/22:27:22(130.34.95.31)	Si, SiO2
-18	20	28	6965	hokari	dummy	0	2012/10/15/22:28:27(130.34.95.31)	Si	2012/10/18/3:42:15(130.34.95.44)
16	29	30	4830	endo	dummy	0	2012/10/16/10:54:23(130.34.95.30)	延長
16	30	36	6909	kigure&watanabe	dummy	0	2012/10/16/14:36:5(130.34.95.37)	etching
17	42	44	6908	Ohara Yuki	dummy	2	2012/10/16/17:12:18(130.34.95.37)	Ti, Cu
17	44	48	6908	Y. Ohara, A. Noriki	dummy	0	2012/10/16/17:13:8(130.34.95.37)	Ti/Cu, 田中先生 承認済
18	0	20	6908	Y. Ohara, A. Noriki	dummy	0	2012/10/16/17:13:34(130.34.95.37)	Ti/Cu 田中先生 承認済
18	40	48	4119	yabata	dummy	0	2012/10/16/17:40:26(130.34.95.37)	Cu
19	16	19	4119	yabata	dummy	0	2012/10/17/13:10:5(130.34.95.37)	Cu
-19	28	37	4119	yabata	dummy	0	2012/10/17/13:18:35(130.34.95.37)	0	2012/10/17/13:19:13(130.34.95.37)
-19	28	37	4119	yabata	dummy	0	2012/10/17/13:21:21(130.34.95.37)	Cu/Ti	2012/10/18/9:46:1(130.34.95.44)
18	28	38	4830	furuya	dummy	0	2012/10/17/15:33:1(130.34.95.30)	Ti/Cu
19	0	16	6937	hanzawa	dummy	2	2012/10/17/18:23:33(130.34.95.43)	Ti/Pt
-19	19	28	4119	nagai	dummy	0	2012/10/18/10:27:42(130.34.74.84)	Ti/Cu	2012/10/18/10:28:5(130.34.74.84)
19	19	28	4119	nagai	dummy	0	2012/10/18/10:28:24(130.34.74.84)	Cu
19	29	38	6965	hokari	dummy	0	2012/10/18/14:33:30(130.34.95.31)	Si
-22	18	28	4119	yabata	dummy	0	2012/10/18/16:12:42(130.34.95.44)	Cu	2012/10/19/13:24:5(130.34.95.44)
-23	18	28	4119	yabata	dummy	0	2012/10/19/13:24:29(130.34.95.44)	0	2012/10/19/13:24:51(130.34.95.44)
-23	18	28	4119	yabata	dummy	0	2012/10/19/13:25:12(130.34.95.44)	Cu	2012/10/19/17:51:37(130.34.95.44)
-24	21	31	4119	S.Watanabe	dummy	0	2012/10/19/17:0:29(130.34.95.37)	Ti/Cu	2012/10/19/17:2:0(130.34.95.37)
-24	18	28	4119	S.Watanabe	dummy	0	2012/10/19/17:2:16(130.34.95.37)	Ti/Cu	2012/10/23/17:12:56(130.34.95.44)
22	18	28	4119	yabata	dummy	0	2012/10/19/17:52:3(130.34.95.44)	Cu
23	18	28	4119	konno	dummy	0	2012/10/20/14:28:28(130.34.95.37)	Ti/Cu
-22	36	44	4771	he	dummy	0	2012/10/22/9:13:3(130.34.95.21)	Ti/Pt, Si to Pt	2012/10/22/14:39:21(130.34.95.44)
23	28	38	6908	Ohara Yuki	dummy	0	2012/10/22/13:11:42(130.34.95.37)	Ti/Cu
22	31	40	4771	he	dummy	0	2012/10/22/14:40:6(130.34.95.44)	Ti/Pt
-25	18	28	4119	yabata	dummy	0	2012/10/22/16:52:23(130.34.95.44)	Cu	2012/10/24/11:19:54(130.34.74.84)
24	28	38	5810	saito	dummy	0	2012/10/22/21:8:17(130.34.95.49)	Ti/Pt
-23	38	48	6908	S. Tanikawa, Y. Ohara	dummy	0	2012/10/23/14:50:33(130.34.74.84)	Ti/Cu 田中先生 承認済	2012/10/23/21:36:45(130.34.95.44)
23	38	46	6908	S. Tanikawa, Y. Ohara	dummy	0	2012/10/23/14:50:33(130.34.74.84)	Ti/Cu 田中先生 承認済
26	18	28	4119	yabata	dummy	0	2012/10/24/15:41:47(130.34.95.44)	0
27	18	30	6965	hokari	dummy	0	2012/10/24/18:19:44(130.34.95.31)	Si, SiO2 金森先生承認
27	38	46	6965	hokari	dummy	0	2012/10/24/18:20:32(130.34.95.31)	Si, SiO2 金森先生承認
24	38	39	5810	saito	dummy	0	2012/10/24/18:26:35(130.34.95.49)	Ti/Pt
-25	31	41	6908	Ohara Yuki	dummy	0	2012/10/24/19:13:13(130.34.74.84)	Ta/Cu	2012/10/25/14:44:25(130.34.95.44)
25	31	32	6908	Ohara Yuki	dummy	0	2012/10/24/19:13:13(130.34.74.84)	Ta/Cu
25	34	44	6908	Ohara Yuki	dummy	0	2012/10/25/14:44:46(130.34.95.44)	Ti/Cu
27	30	38	6908	Y. Ohara, A. Noriki	dummy	0	2012/10/25/18:45:39(130.34.63.131)	Ti/Cu 田中先生 承認済
-29	28	38	4830	kawakami	dummy	0	2012/10/26/14:26:15(130.34.95.30)	Ti	2012/10/29/9:23:45(130.34.95.30)
-29	28	40	4830	kawakami	dummy	0	2012/10/29/9:24:5(130.34.95.30)	Ti	2012/10/29/9:24:14(130.34.95.30)
29	28	40	4830	kawakami	dummy	2	2012/10/29/9:24:30(130.34.95.30)	Ti
31	18	28	4119	yabata	dummy	0	2012/10/29/13:24:54(130.34.95.44)	Cu/Ti
29	40	48	6937	hanzawa	dummy	2	2012/10/29/13:42:15(130.34.95.43)	Ti/Pt
30	0	22	6937	hanzawa	dummy	0	2012/10/29/13:43:23(130.34.95.43)	Ti/Pt
30	24	34	6965	hokari	dummy	0	2012/10/30/11:4:22(130.34.95.31)	Si
31	28	35	6909	kigure	dummy	0	2012/10/31/13:42:24(130.34.95.37)	etching
-31	40	48	6937	Konno	dummy	0	2012/10/31/16:7:55(130.34.95.43)	Ｔｉ	2012/10/31/16:8:37(130.34.95.43)