2 21 31 4119 S.Watanabe dummy 0 2011/7/29/14:49:17(130.34.63.131) Ti/Cu -1 27 35 5810 chin dummy 0 2011/7/30/15:40:43(130.34.95.44) ZnO 2011/8/1/11:59:39(130.34.95.43) 3 38 44 6909 S.Kanno dummy 2 2011/8/2/21:35:19(130.34.95.37) Ti取り外し 4 20 30 4119 seino dummy 2 2011/8/3/12:4:44(130.34.95.44) Ti→Ta -4 30 38 4771 hosokawa dummy 0 2011/8/4/11:27:24(130.34.95.21) ZnO 2011/8/4/15:19:57(130.34.95.21) 4 30 33 4771 hosokawa dummy 0 2011/8/4/11:27:24(130.34.95.21) ZnO 8 21 29 4771 hosokawa dummy 0 2011/8/4/16:17:20(130.34.95.21) ZnO 5 26 36 5810 Chin dummy 0 2011/8/4/21:13:17(130.34.95.49) 0 10 20 30 6909 watanabe dummy 1 2011/8/5/13:51:8(130.34.95.37) 0 -9 26 36 5810 chin dummy 0 2011/8/5/17:14:11(130.34.95.44) ZnO 2011/8/9/11:31:59(130.34.95.49) 8 29 37 6909 watanabe dummy 0 2011/8/8/12:21:49(130.34.95.44) Ta/Cu 9 36 44 6937 王楠 dummy 0 2011/8/8/13:28:5(130.34.95.43) 0 8 40 47 6909 watanabe&kuriyama dummy 0 2011/8/8/19:10:9(130.34.95.44) Ta/Cu,べー先生承認 -10 30 40 4119 hioki dummy 0 2011/8/9/11:30:21(130.34.95.44) 0 2011/8/10/8:28:16(130.34.74.84) -10 40 46 5810 chin dummy 0 2011/8/9/11:35:23(130.34.95.49) ZnO 2011/8/10/19:0:8(130.34.95.49) -11 18 22 5810 chin dummy 0 2011/8/9/11:36:38(130.34.95.49) ZnO 2011/8/10/19:0:13(130.34.95.49) 11 22 32 4119 S.Watanabe dummy 0 2011/8/9/15:37:15(130.34.63.131) Ti/Cu 9 44 46 6937 王楠 dummy 0 2011/8/9/19:38:44(130.34.95.43) Target Change: Cu→Pt 10 30 40 4119 hioki dummy 0 2011/8/10/8:29:37(130.34.74.84) Pt→SiO2 -12 28 38 5810 chin dummy 0 2011/8/10/10:41:26(130.34.95.44) ZnO 2011/8/11/11:12:22(130.34.95.49) 11 32 38 4119 yukaito dummy 0 2011/8/10/18:12:1(130.34.95.44) 0 -18 18 30 4119 yukaito dummy 0 2011/8/10/18:14:5(130.34.95.44) オペトレ、ターゲット交換SiO2 2011/8/10/18:14:51(130.34.95.44) -18 30 40 4119 yukaito dummy 0 2011/8/10/18:14:32(130.34.95.44) 0 2011/8/17/13:52:26(130.34.95.44) -18 18 30 4119 hioki dummy 0 2011/8/10/18:15:31(130.34.95.44) オペトレ、ターゲット交換 2011/8/17/13:53:39(130.34.95.44) 12 28 38 5810 chin dummy 0 2011/8/11/18:54:20(130.34.95.49) ZnO 12 38 40 5810 chin dummy 0 2011/8/12/16:56:18(130.34.95.49) ZnO 14 28 38 5810 chin dummy 0 2011/8/12/18:39:36(130.34.95.44) ZnO,宮下先生承認、 -15 26 38 5810 chin dummy 2 2011/8/12/18:41:54(130.34.95.44) 2#:ZnO->SiO2,1#:Cu->Pt 2011/8/12/18:45:42(130.34.95.44) 19 21 29 6937 Wei-Shan Wang dummy 0 2011/8/12/19:2:0(130.34.95.44) SiO2 (change target) 13 46 48 6937 makihata dummy 2 2011/8/13/21:48:24(130.34.95.44) Ti -> Al 14 38 41 5810 chin dummy 0 2011/8/14/19:18:38(130.34.95.43) ZnO, 宮下先生承認 15 38 47 6937 makihata dummy 0 2011/8/15/11:31:54(130.34.95.43) 0 16 0 8 6937 makihata dummy 0 2011/8/15/19:4:16(130.34.95.43) 0 16 32 42 6937 makihata dummy 0 2011/8/16/9:34:55(130.34.94.143) 0 -17 0 8 6937 makihata dummy 0 2011/8/16/20:7:54(130.34.95.43) 0 2011/8/16/22:53:53(130.34.95.44) -17 28 40 6937 maki8hata dummy 0 2011/8/16/22:54:23(130.34.95.44) 0 2011/8/17/1:2:30(130.34.95.43) -17 32 42 6937 makihata dummy 0 2011/8/17/1:2:40(130.34.95.43) 0 2011/8/17/16:16:48(130.34.95.43) -19 30 40 4119 seino dummy 2 2011/8/17/12:24:47(130.34.74.84) Ta/Cu 2011/8/17/12:33:48(130.34.74.84) 19 30 40 6956 黄海 dummy 0 2011/8/17/13:19:19(130.34.95.38) Al -18 30 40 4119 yukaito dummy 0 2011/8/17/13:53:4(130.34.95.44) SiO2 Ta/Cu 2011/8/17/13:58:22(130.34.95.44) 18 18 30 4119 hioki dummy 0 2011/8/17/13:54:5(130.34.95.44) オペトレ ターゲット交換 SiO2 -18 30 40 4119 yukaito dummy 0 2011/8/17/13:58:37(130.34.95.44) Ta/Cu 2011/8/17/19:49:58(130.34.74.84) 17 32 35 6937 makihata dummy 0 2011/8/17/1:2:40(130.34.95.43) 0 17 36 46 6937 makihata dummy 0 2011/8/17/16:17:4(130.34.95.43) 0 -18 30 40 4119 yukaito dummy 0 2011/8/17/19:50:12(130.34.74.84) Ta/Cu 2011/8/18/14:47:16(130.34.95.44) 18 0 6 6937 makihata dummy 0 2011/8/17/22:30:44(130.34.95.43) Al -22 21 29 6937 Wei-Shan Wang dummy 2 2011/8/18/11:31:10(130.34.95.44) SiO2 2011/8/18/11:31:46(130.34.95.44) 22 21 29 6937 Wei-Shan Wang dummy 0 2011/8/18/11:32:2(130.34.95.44) SiO2 18 30 32 4119 yukaito dummy 0 2011/8/17/19:50:12(130.34.74.84) Ta/Cu -18 32 36 4119 yukaito dummy 0 2011/8/18/14:47:32(130.34.95.44) 0 2011/8/18/14:48:9(130.34.95.44) 18 32 38 4119 yukaito dummy 0 2011/8/18/14:48:19(130.34.95.44) 0 21 30 38 6909 kino,naganuma dummy 2 2011/8/21/13:53:44(130.34.95.44) 田中先生承認済み -22 30 38 4119 hioki dummy 0 2011/8/21/16:18:45(130.34.43.2) SiO2 2011/8/22/15:15:9(130.34.95.44) 22 29 30 6936 Wei-Shan Wang dummy 0 2011/8/22/10:3:0(130.34.95.44) SiO2 23 20 30 4119 yukaito dummy 0 2011/8/22/12:59:58(130.34.95.44) ターゲット交換 1: Ta 2:Cu 22 30 33 4119 hioki dummy 0 2011/8/21/16:18:45(130.34.43.2) SiO2 -23 36 48 6909 watanabe dummy 1 2011/8/22/17:20:14(130.34.95.44) 0 2011/8/22/17:20:22(130.34.95.44) 22 36 48 6909 watanabe dummy 1 2011/8/22/17:20:36(130.34.95.44) 0 23 30 38 6908 Ohara Yuki dummy 0 2011/8/22/20:44:28(130.34.95.37) Ta/Cu 23 38 44 6908 Ohara Yuki dummy 0 2011/8/23/14:6:14(130.34.95.37) 0 -25 20 30 6937 makihata dummy 0 2011/8/24/10:54:26(130.34.95.43) 0 2011/8/24/15:22:48(130.34.95.44) -24 36 46 6937 makihata dummy 0 2011/8/24/13:16:43(130.34.95.43) 0 2011/8/24/15:22:44(130.34.95.44) 24 36 42 6909 watanabe dummy 1 2011/8/24/15:23:24(130.34.95.44) 立ち下げ