1	16	28	4119	hioki	dummy	0	2011/11/28/8:16:50(130.34.74.84)	SiO2
-1	28	38	4119	yukaito	dummy	0	2011/11/28/18:10:32(130.34.95.44)	SiO2	2011/11/30/15:47:40(130.34.95.44)
-2	20	30	4119	S.Watanabe	dummy	0	2011/11/29/12:15:29(130.34.95.37)	Ti/Cu	2011/11/30/10:39:36(130.34.63.131)
-1	28	40	4119	yukaito	dummy	0	2011/11/30/15:49:29(130.34.95.44)	Ta/Cu	2011/12/1/18:17:39(130.34.95.44)
-2	20	30	4119	S.Watanabe	dummy	0	2011/11/30/16:10:4(130.34.63.131)	Ti/Cu	2011/12/1/8:28:34(130.34.95.37)
1	0	3	6908	hashiguchi	dummy	0	2011/11/30/23:51:17(130.34.95.37)	延長
2	18	29	4830	suzuki	dummy	0	2011/12/1/12:39:33(130.34.95.30)	Ti
2	30	39	6937	Takahashi	dummy	0	2011/12/1/12:53:49(130.34.95.43)	Cu
7	20	30	4119	S.Watanabe	dummy	0	2011/12/1/13:37:1(130.34.95.37)	Ti/Cu
1	28	39	4119	yukaito	dummy	0	2011/11/30/15:49:29(130.34.95.44)	Ta/Cu
-5	19	27	4119	konno	dummy	0	2011/12/2/9:0:44(130.34.95.44)	Ta/Cu	2011/12/2/9:47:13(130.34.95.44)
5	20	32	6909	sasaki	dummy	2	2011/12/2/14:50:33(130.34.95.37)	Ta>Ir Ti/IrOx/Ti
6	20	34	6908	hashiguchi	dummy	0	2011/12/2/14:52:48(130.34.95.37)	Ti,Cu
2	39	41	6937	Takiahashi	dummy	0	2011/12/2/15:23:15(130.34.95.43)	時間延長
-8	20	30	4119	nagai	dummy	0	2011/12/5/10:47:30(130.34.74.84)	0	2011/12/6/12:47:58(130.34.74.84)
5	32	33	6909	sasaki	dummy	0	2011/12/5/14:48:43(130.34.95.44)	時間延長
-8	20	32	4119	nagai	dummy	0	2011/12/6/12:48:19(130.34.74.84)	Ti/Cu	2011/12/8/8:11:52(130.34.95.44)
6	34	44	4830	suzuki	dummy	0	2011/12/6/14:1:33(130.34.95.30)	Ti
-7	0	12	6908	Y. Ohara, A.Noriki	dummy	0	2011/12/6/14:26:1(130.34.95.37)	Ti/Cu Bea先生 承認済み	2011/12/6/22:58:52(130.34.95.44)
8	18	28	4119	nagai	dummy	0	2011/12/8/8:12:31(130.34.95.44)	Ti/Cu
9	20	22	6909	sasaki	dummy	2	2011/12/8/10:55:16(130.34.95.44)	Ir>Pt
9	22	33	6909	sasaki	dummy	0	2011/12/8/10:55:58(130.34.95.44)	Ti/Pt/Ti
9	39	48	6937	Moriwaki	dummy	0	2011/12/8/16:58:21(130.34.95.43)	Pt
8	28	44	6937	Weichih Lin	dummy	0	2011/12/12/8:30:17(130.34.95.43)	0
13	28	44	6937	Weichih Lin	dummy	0	2011/12/12/8:31:6(130.34.95.43)	0
12	28	40	6937	weichih lin	dummy	0	2011/12/12/9:55:38(130.34.95.43)	0
12	40	48	6908	Y. Ohara, A.Noriki	dummy	0	2011/12/12/14:45:20(130.34.95.37)	Cu 田中先生承認済み
-15	18	27	6937	Takahashi	dummy	0	2011/12/12/18:2:17(130.34.95.43)	Cu	2011/12/14/20:29:17(130.34.95.43)
13	5	26	6908	hashiguchi	dummy	0	2011/12/12/19:19:22(130.34.95.37)	田中先生了承
13	44	48	4771	Minh	dummy	0	2011/12/13/13:10:31(130.34.95.21)	with Phan, Prof. Kuwano's permission (Pt)
14	0	4	4771	Minh	dummy	0	2011/12/13/13:10:57(130.34.95.21)	0
-14	5	7	6909	sasaki&watanabe	dummy	0	2011/12/13/14:50:33(130.34.95.37)	Pt>Ir ベー先生承認	2011/12/13/14:53:4(130.34.95.37)
14	7	20	6909	sasaki&watanabe	dummy	0	2011/12/13/14:51:14(130.34.95.37)	Ti/IrOx ベー先生承認
14	5	7	6909	sasaki&watanabe	dummy	2	2011/12/13/14:53:31(130.34.95.37)	Pt>Ir ベー先生承認
14	21	40	6937	Weichih Lin	dummy	2	2011/12/13/15:0:3(130.34.95.43)	0
-15	27	37	4119	seino	dummy	0	2011/12/13/16:18:57(130.34.74.84)	Ta/Cu	2011/12/13/16:24:1(130.34.74.84)
-15	27	37	4119	seino	dummy	0	2011/12/13/16:24:19(130.34.74.84)	Ti/Cu	2011/12/13/16:47:50(130.34.74.84)
-15	27	34	4771	Phan	dummy	0	2011/12/13/20:0:26(130.34.95.43)	Al target	2011/12/14/18:57:35(130.34.95.21)
-15	17	27	6937	Takahashi	dummy	0	2011/12/14/20:29:50(130.34.95.43)	Cu	2011/12/15/3:28:57(130.34.95.43)
-15	34	44	4830	suzuki	dummy	0	2011/12/14/21:32:59(130.34.95.30)	Ti	2011/12/15/8:32:43(130.34.95.30)
-14	45	47	4771	Minh	dummy	0	2011/12/14/21:40:28(130.34.95.44)	change Pt->CrNi	2011/12/14/21:49:46(130.34.95.44)
14	45	46	4771	Minh	dummy	0	2011/12/14/21:40:28(130.34.95.44)	change Pt->CrNi
15	14	24	6937	Takahashi,Kubota	dummy	0	2011/12/15/3:29:59(130.34.95.43)	Cu
-15	32	42	4830	suzuki	dummy	0	2011/12/15/8:33:7(130.34.95.30)	Ti	2011/12/15/8:33:13(130.34.95.30)
16	19	40	6937	Weichih Lin	dummy	2	2011/12/15/8:33:33(130.34.95.43)	0
15	34	44	4830	suzuki	dummy	0	2011/12/15/8:34:21(130.34.95.30)	Ti
-15	44	48	6908	hashiguchi	dummy	0	2011/12/15/12:40:49(130.34.95.37)	Cu,田中教授了承	2011/12/15/13:25:47(130.34.95.37)
16	0	12	6908	hashiguchi	dummy	0	2011/12/15/12:41:14(130.34.95.37)	Cu
15	46	48	6908	hashiguchi	dummy	0	2011/12/15/13:26:17(130.34.95.37)	Cu,田中教授了承
16	40	44	6937	matsuzaki	dummy	0	2011/12/16/9:4:22(130.34.95.43)	0
20	19	29	6937	Weichih Lin	dummy	0	2011/12/16/13:10:36(130.34.95.43)	The NiCr target will be changed for testing the sputtering conditions of Zn material.
21	26	28	6909	sasaki&kigure	dummy	2	2011/12/16/19:9:26(130.34.95.37)	TiN 見学者あり
21	28	40	6909	sasaki&kigure	dummy	0	2011/12/16/19:10:2(130.34.95.37)	Ti/TiN/Ti 見学者あり
20	30	32	6909	sasaki	dummy	2	2011/12/16/19:42:50(130.34.95.37)	Zn>Ir
20	32	42	6909	sasaki&kigure	dummy	0	2011/12/16/19:45:2(130.34.95.37)	Ti/IrOx ベー先生承認
21	17	26	4119	konno	dummy	0	2011/12/19/8:48:54(130.34.95.44)	Ta/Cu
19	26	36	4119	nagai	dummy	0	2011/12/19/9:40:46(130.34.95.37)	Ti/Cu
-22	19	29	4119	yukaito	dummy	0	2011/12/19/10:27:9(130.34.95.44)	SiO2	2011/12/21/18:34:45(130.34.74.84)
-22	29	38	4119	hioki	dummy	0	2011/12/19/10:59:38(130.34.74.84)	SiO2	2011/12/21/13:48:36(130.34.95.44)
-19	40	48	6908	Y. Ohara, A. Noriki	dummy	0	2011/12/19/17:16:21(130.34.95.44)	Ti/Cu 田中先生　承認済	2011/12/19/18:40:49(130.34.95.44)
20	6	16	6908	Y. Ohara, H. Naganuma	dummy	0	2011/12/20/2:23:34(130.34.95.44)	Ti/Cu 田中先生 承認済み
-21	40	44	6937	Weichih Lin	dummy	0	2011/12/20/16:4:56(130.34.95.43)	Change target from TiN to Zn	2011/12/20/18:9:55(130.34.95.43)
26	26	36	4771	suita	dummy	0	2011/12/20/16:30:22(130.34.95.21)	Ti/Pt
21	40	48	6937	Takahashi	dummy	0	2011/12/21/1:42:23(130.34.95.43)	Cu
-26	18	26	6937	Weichih Lin	dummy	0	2011/12/21/10:16:21(130.34.95.43)	Ti/Pt	2011/12/21/16:24:46(130.34.95.43)
-27	16	26	4119	nagai	dummy	0	2011/12/21/12:42:16(130.34.74.84)	Ti/Cu	2011/12/22/8:28:8(130.34.74.84)
26	36	44	6937	Weichih Lin	dummy	0	2011/12/21/16:25:24(130.34.95.43)	Ti/Pt
22	19	29	4119	yukaito	dummy	0	2011/12/21/18:35:47(130.34.74.84)	SiO2: I'll change TiN target to SiO2.
-22	0	10	6937	Takahashi	dummy	0	2011/12/22/0:19:28(130.34.95.43)	Cu　時間延長	2011/12/22/0:19:44(130.34.95.43)
22	0	3	6937	Takahashi	dummy	0	2011/12/22/0:19:28(130.34.95.43)	Cu　時間延長
22	3	10	6937	Takahashi	dummy	0	2011/12/22/0:20:33(130.34.95.43)	Cu　時間延長
-26	16	26	4119	nagai	dummy	0	2011/12/22/8:25:28(130.34.74.84)	Ti/Cu	2011/12/22/16:51:12(130.34.74.84)
-22	29	31	4119	yukaito	dummy	0	2011/12/22/10:54:24(130.34.95.44)	0	2011/12/22/10:54:43(130.34.95.44)
-22	29	31	4119	yukaito	dummy	0	2011/12/22/10:55:40(130.34.95.44)	時間延長	2011/12/22/10:56:6(130.34.95.44)
-22	29	31	4119	yukaito	dummy	0	2011/12/22/10:56:20(130.34.95.44)	0	2011/12/22/12:39:59(130.34.95.44)
-22	29	30	4119	yukaito	dummy	0	2011/12/22/12:40:10(130.34.95.44)	0	2011/12/22/13:9:54(130.34.95.44)
22	34	46	4771	Minh	dummy	2	2011/12/22/16:0:20(130.34.95.44)	change SiO2 to Si
22	46	48	4771	Minh	dummy	0	2011/12/22/21:35:46(130.34.95.44)	with Phan, Prof. Kuwano's permission
24	32	46	6909	sasaki&watanabe	dummy	2	2011/12/24/15:3:41(130.34.95.37)	Si>TiN Ti/TiN/Ti ベー先生承認
26	0	22	6909	sasaki&naganuma	dummy	0	2011/12/24/21:41:16(130.34.95.37)	Ti/TiN/Ti ベー先生承認
-27	22	30	5810	inomata	dummy	0	2011/12/25/19:3:39(130.34.95.49)	Ti/Pt	2011/12/26/14:41:58(130.34.95.43)
26	22	23	6909	sasaki	dummy	0	2011/12/26/9:59:35(130.34.95.44)	延長
-27	36	38	5810	inomata	dummy	2	2011/12/26/11:45:31(130.34.95.49)	Pt->#2	2011/12/26/17:22:53(130.34.95.49)
26	44	47	6909	watanabe	dummy	1	2011/12/26/16:16:2(130.34.95.37)	0
27	25	27	5810	inomata	dummy	2	2011/12/26/17:22:51(130.34.95.49)	Pt->#2
-27	39	41	6937	Weichih Lin	dummy	2	2011/12/27/17:32:41(130.34.95.43)	Al target to Si3N4	2011/12/27/17:32:58(130.34.95.43)
-28	40	42	6937	Weichih Lin	dummy	2	2011/12/27/17:33:23(130.34.95.43)	Al target to Si3N4	2011/12/27/17:34:9(130.34.95.43)
-28	42	48	6937	Weichih Lin	dummy	0	2011/12/27/17:33:57(130.34.95.43)	Condition test 	2011/12/27/17:34:12(130.34.95.43)
27	40	42	6937	Weichih Lin	dummy	2	2011/12/27/17:34:33(130.34.95.43)	Al target to Si3N4
27	42	48	6937	Weichih Lin	dummy	0	2011/12/27/17:35:4(130.34.95.43)	Condition test 
28	16	20	6937	Weichih Lin	dummy	0	2011/12/27/17:35:37(130.34.95.43)	Condition test 
-29	0	2	6909	sasaki&watanabe	dummy	2	2011/12/28/22:53:11(130.34.95.37)	Si3N4->SiO2 べー先生承認	2011/12/28/22:58:30(130.34.95.37)
-29	2	21	6909	sasaki&watanabe	dummy	0	2011/12/28/22:54:22(130.34.95.37)	べー先生承認	2011/12/28/22:56:17(130.34.95.37)
29	20	32	6909	sasaki	dummy	2	2011/12/28/22:59:35(130.34.95.37)	Si3N4->SiO2 べー先生承認 SiO2