-1 32 44 6937 Kochhar dummy 0 2011/10/27/19:5:30(130.34.95.43) Al Target 2011/11/1/17:1:25(130.34.95.43) 1 20 32 6908 hashiguchi dummy 0 2011/10/28/4:12:38(130.34.95.37) Ta,Cu -2 18 26 6937 Takahashi dummy 0 2011/10/28/11:25:17(130.34.95.43) Cu 2011/11/2/7:4:36(130.34.95.43) 4 18 28 6956 黄 dummy 0 2011/10/31/10:5:55(130.34.95.38) 0 -3 18 30 4119 hioki dummy 2 2011/10/31/11:9:0(130.34.95.44) SiO2 2011/10/31/15:10:14(130.34.95.37) -7 18 30 4119 hioki dummy 2 2011/10/31/15:11:31(130.34.95.37) SiO2 2011/11/2/16:12:58(130.34.95.37) 1 0 8 6909 watanabe dummy 0 2011/10/31/17:23:56(130.34.95.37) 時間延長 1 8 10 6909 watanabe&naganuma dummy 0 2011/11/1/1:43:18(130.34.95.37) 時間延長 1 10 12 6909 watanabe dummy 0 2011/11/1/4:21:3(130.34.95.44) 時間延長 4 28 38 4119 seino dummy 0 2011/11/1/13:17:3(130.34.95.44) Ti / Cu -5 27 31 4119 nagai dummy 2 2011/11/1/13:18:4(130.34.95.44) Al / Cu 2011/11/1/13:19:6(130.34.95.44) 1 44 48 6908 Y. Ohara, T. Tani dummy 0 2011/11/1/14:55:28(130.34.95.37) Al, 田中先生 承認済み -2 0 2 6908 Y. Ohara, T. Tani dummy 0 2011/11/1/14:55:43(130.34.95.37) Al, 田中先生 承認済み 2011/11/1/17:9:15(130.34.95.37) -7 30 42 6937 Tsai dummy 0 2011/11/1/15:37:10(130.34.95.43) 0 2011/11/1/15:37:42(130.34.95.43) -7 32 42 6937 Tsai dummy 0 2011/11/1/15:38:37(130.34.95.43) 0 2011/11/4/17:55:18(130.34.95.43) 1 32 37 6937 Kochhar dummy 0 2011/10/27/19:5:30(130.34.95.43) Al Target 1 37 44 6908 Ohara Yuki dummy 0 2011/11/1/17:9:9(130.34.95.37) Al -4 38 48 6908 hashiguchi dummy 0 2011/11/1/17:26:57(130.34.95.37) Ta,Cu 2011/11/4/17:11:46(130.34.95.37) -2 40 48 6909 kino,watanabe dummy 0 2011/11/1/18:32:40(130.34.95.37) Ta,Cu 2011/11/1/18:32:50(130.34.95.37) -2 40 48 6909 kino, dummy 0 2011/11/1/18:32:57(130.34.95.37) 0 2011/11/1/18:32:59(130.34.95.37) -2 40 48 6909 kino,watanabe dummy 0 2011/11/1/18:33:16(130.34.95.37) 田中先生承認済み 2011/11/1/18:36:4(130.34.95.37) -2 44 46 6909 watanabe&naganuma dummy 2 2011/11/2/6:48:7(130.34.95.44) Ti>Ta,べー先生承認 2011/11/2/6:49:17(130.34.95.44) -2 46 48 6909 watanabe&naganuma dummy 2 2011/11/2/6:49:44(130.34.95.44) Ti>Ta,べー先生承認 2011/11/2/22:16:1(130.34.95.37) -2 18 28 6937 Takahashi dummy 0 2011/11/2/7:5:11(130.34.95.43) Cu 2011/11/2/9:0:45(130.34.95.43) 2 18 20 6937 Takahashi dummy 0 2011/11/2/7:5:11(130.34.95.43) Cu 8 18 28 6937 Takahashi dummy 0 2011/11/2/9:45:16(130.34.95.43) Cu 2 24 27 6965 wu dummy 2 2011/11/2/11:34:48(130.34.95.43) Ti→2号機 3 20 28 6908 noriki,ohara dummy 0 2011/11/2/14:8:6(130.34.95.37) Ta, ベー先生承認済み -3 30 40 6909 kino,watanabe dummy 0 2011/11/2/21:51:41(130.34.95.37) 田中先生承認済み　Ta,Cu 2011/11/2/23:3:48(130.34.95.37) 2 46 47 6909 watanabe&naganuma dummy 2 2011/11/2/6:49:44(130.34.95.44) Ti>Ta,べー先生承認 3 28 32 6908 noriki dummy 0 2011/11/3/0:28:12(130.34.95.37) 0 3 42 44 6909 watanabe&naganuma dummy 2 2011/11/3/13:49:54(130.34.95.37) Ti>Al,べー先生承認 3 32 34 6908 noriki dummy 0 2011/11/3/15:31:18(130.34.95.44) 0 3 44 46 6909 watanabe dummy 2 2011/11/3/22:1:45(130.34.95.44) 時間延長 7 18 28 6956 黄 dummy 0 2011/11/4/14:8:53(130.34.95.38) Al 4 40 48 4119 Beatrix dummy 0 2011/11/4/19:2:25(130.34.95.44) 0 5 16 18 4119 seino dummy 0 2011/11/4/19:3:14(130.34.95.44) 福島先生承認済み -7 28 38 4830 suzuki dummy 0 2011/11/4/22:4:35(130.34.95.30) Ti 2011/11/4/22:18:59(130.34.95.30) -7 34 37 4830 suzuki dummy 2 2011/11/4/22:23:50(130.34.95.30) Ti→2号機 2011/11/4/22:24:40(130.34.95.30) 7 34 37 4830 suzuki dummy 2 2011/11/4/22:29:32(130.34.95.30) Ti→2号機 -5 30 42 6908 noriki,ohara dummy 0 2011/11/4/22:39:3(130.34.95.37) Si,ベー先生承認済み 2011/11/4/22:44:46(130.34.95.37) 9 20 30 4119 S.Watanabe dummy 0 2011/11/7/9:5:28(130.34.95.44) Ta/Cu 7 28 32 6956 huang dummy 0 2011/11/7/9:26:46(130.34.95.44) Al 9 30 42 6908 hashiguchi dummy 0 2011/11/7/12:43:19(130.34.95.37) Ta/Cu 7 46 48 6909 kino,watanabe dummy 0 2011/11/7/22:11:6(130.34.95.44) 田中先生承認済み 8 8 16 6909 kino,watanabe dummy 0 2011/11/7/22:11:45(130.34.95.44) 田中先生承認済み -10 18 28 6937 Takahashi dummy 0 2011/11/8/9:41:4(130.34.95.43) Cu 2011/11/8/17:6:49(130.34.95.43) -10 18 30 4119 seino dummy 2 2011/11/9/10:40:48(130.34.95.37) Ti/Cu 2011/11/9/12:52:27(130.34.74.84) 10 18 30 4119 nagai dummy 2 2011/11/9/12:53:0(130.34.74.84) Ti/Cuオペトレ含む -14 18 30 4119 yukaito dummy 0 2011/11/9/15:29:43(130.34.95.44) 0 2011/11/9/15:30:47(130.34.95.44) -14 18 28 4119 yukaito dummy 0 2011/11/9/15:31:6(130.34.95.44) 0 2011/11/9/16:19:16(130.34.74.84) -10 30 38 4771 Phan dummy 0 2011/11/9/15:35:5(130.34.95.43) 0 2011/11/9/15:36:51(130.34.95.43) -11 0 8 4771 Phan+Minh dummy 0 2011/11/9/15:36:42(130.34.95.43) Al target, Kuwano sensei`permission 2011/11/10/0:36:35(130.34.95.21) -10 30 38 4771 Phan dummy 0 2011/11/9/15:37:14(130.34.95.43) Al target 2011/11/10/9:48:37(130.34.95.43) -10 42 48 6937 Moriwaki, Matsuo dummy 0 2011/11/9/16:15:16(130.34.95.43) 田中先生許可。 2011/11/10/11:53:51(130.34.95.44) -14 18 28 4119 yukaito dummy 0 2011/11/9/16:19:33(130.34.74.84) SiO2 2011/11/10/9:14:14(130.34.74.84) -11 20 30 4771 Phan dummy 0 2011/11/9/17:31:45(130.34.95.43) Al target 2011/11/10/0:29:21(130.34.95.21) -11 38 46 4771 Phan dummy 0 2011/11/9/17:33:16(130.34.95.43) Al target 2011/11/10/0:29:16(130.34.95.21) -10 38 42 6937 Moriwaki dummy 0 2011/11/9/17:50:34(130.34.95.43) Al 2011/11/10/11:53:56(130.34.95.44) 9 42 44 6908 hashiguchi dummy 0 2011/11/9/19:56:57(130.34.95.44) Ta,Cu -11 16 24 4771 Phan dummy 0 2011/11/10/0:32:27(130.34.95.21) Al target 2011/11/10/0:36:1(130.34.95.21) -11 0 16 4771 Phan+Minh dummy 0 2011/11/10/0:37:15(130.34.95.21) Al target, Kuwano sensei's permission 2011/11/10/9:49:11(130.34.95.43) -11 16 22 4771 Phan dummy 0 2011/11/10/0:37:40(130.34.95.21) Al target 2011/11/10/9:49:3(130.34.95.43) -14 18 30 4119 yukaito dummy 0 2011/11/10/9:14:35(130.34.74.84) Ta/Cu 2011/11/10/13:19:28(130.34.95.44) -10 30 40 6937 Moriwaki dummy 0 2011/11/10/11:54:21(130.34.95.44) Al 2011/11/10/12:36:13(130.34.95.43) -14 20 30 4119 yukaito dummy 0 2011/11/10/13:19:49(130.34.95.44) 0 2011/11/14/7:37:22(130.34.74.84) -10 42 48 6909 kino,kigure dummy 0 2011/11/10/14:16:59(130.34.95.37) Ti 2011/11/10/17:35:46(130.34.95.37) -10 30 40 4119 seino dummy 0 2011/11/10/14:30:57(130.34.95.44) Ti / Cu 2011/11/10/14:39:18(130.34.95.44) 10 30 32 4119 seino dummy 0 2011/11/10/14:30:57(130.34.95.44) Ti / Cu -14 32 44 6937 Tsai dummy 0 2011/11/10/18:12:59(130.34.95.43) SiO2 2011/11/10/18:15:28(130.34.95.43) 11 16 24 6909 kino dummy 0 2011/11/11/1:22:25(130.34.95.37) Ti -14 32 44 6937 Tsai dummy 0 2011/11/11/19:49:42(130.34.95.43) SiO2 2011/11/11/19:51:35(130.34.95.43) 12 42 44 6909 watanabe&naganuma dummy 2 2011/11/12/1:59:18(130.34.95.37) Ti>Al,べー先生承認 16 18 28 6937 Takahashi dummy 0 2011/11/12/14:47:7(130.34.95.43) Cu 14 19 29 4119 yukaito dummy 0 2011/11/14/7:37:49(130.34.74.84) SiO2 14 29 32 4119 yukaito dummy 0 2011/11/14/12:39:31(130.34.74.84) 0 14 32 33 4119 yukaito dummy 0 2011/11/14/15:10:0(130.34.95.44) 0 15 28 38 6909 sasaki dummy 0 2011/11/14/22:11:58(130.34.95.37) SiO2 -15 38 46 6909 kigure&sasaki dummy 0 2011/11/14/22:33:9(130.34.95.37) ベー先生承認済み 2011/11/14/22:33:15(130.34.95.37) 15 38 46 6909 kigure&sasaki dummy 2 2011/11/14/22:35:9(130.34.95.37) ターゲット交換Ta>Al ベー先生承認済み -17 18 28 4119 nagai dummy 2 2011/11/15/13:5:55(130.34.95.44) Ta→Ti 2011/11/15/14:40:23(130.34.74.84) 18 20 30 4119 S.Watanabe dummy 0 2011/11/15/13:18:39(130.34.95.44) Ti/Cu 16 30 40 6937 Tsai dummy 0 2011/11/15/14:57:36(130.34.95.43) SiO2 15 46 48 6909 sasaki&watanabe dummy 0 2011/11/15/18:43:35(130.34.95.37) Al ベー先生承認済み 16 0 4 6909 sasaki&watanabe dummy 0 2011/11/15/18:44:2(130.34.95.37) Al ベー先生承認済み -17 28 38 6937 Moriwaki dummy 0 2011/11/16/6:2:58(130.34.95.43) Cu 2011/11/17/13:46:43(130.34.95.43) 16 17 18 6937 Takahashi dummy 0 2011/11/16/8:19:31(130.34.95.43) 0 16 29 30 6937 Tsai dummy 0 2011/11/16/13:30:4(130.34.95.43) SiO2 16 40 42 6937 Tsai dummy 0 2011/11/16/14:54:48(130.34.95.43) SiO2 17 38 44 4771 Phan dummy 0 2011/11/16/17:30:8(130.34.95.21) Al -17 44 48 4771 Minh+Phan dummy 0 2011/11/16/17:30:40(130.34.95.21) Kuwano sensei's permission 2011/11/17/14:11:14(130.34.95.21) 18 30 40 6908 Ohara Yuki dummy 0 2011/11/16/17:59:51(130.34.95.37) Al -16 42 48 6908 hashiguchi dummy 0 2011/11/16/18:23:22(130.34.95.44) Ta,Cu,田中先生了承 2011/11/16/18:57:10(130.34.95.44) -17 0 6 6908 hashiguchi dummy 0 2011/11/16/18:23:54(130.34.95.44) Ta,Cu,田中先生了承 2011/11/16/18:57:47(130.34.95.44) 16 42 48 6908 hashiguchi,sasaki dummy 0 2011/11/16/18:57:31(130.34.95.44) Ta,Cu,田中先生了承 17 0 6 6908 hashiguchi,sasaki dummy 0 2011/11/16/18:58:7(130.34.95.44) Ta,Cu,田中先生了承 17 6 8 6908 hashigucchi dummy 0 2011/11/17/2:47:7(130.34.95.37) 0 17 8 20 6908 hashiguchi dummy 0 2011/11/17/2:59:47(130.34.95.44) ※真空度向上のため、延長しております。 -18 2 14 6909 sasaki&watanabe dummy 2 2011/11/17/10:29:15(130.34.95.37) ターゲット交換　TaSio2 田中先生承認 2011/11/17/20:18:10(130.34.95.44) 21 31 42 5810 ka dummy 0 2011/11/17/13:37:33(130.34.95.49) Ta/Pt 17 28 30 6937 Moriwaki dummy 0 2011/11/16/6:2:58(130.34.95.43) Cu -18 40 48 6937 Moriwaki, Matsuo dummy 0 2011/11/17/14:9:46(130.34.95.43) 田中先生許可。Cu. 2011/11/18/19:46:40(130.34.95.44) -19 0 2 6937 Moriwaki, Matsuo dummy 0 2011/11/17/14:10:5(130.34.95.43) 延長。 2011/11/18/19:46:52(130.34.95.44) 17 33 38 4771 Phan dummy 0 2011/11/17/14:13:8(130.34.95.21) Al target -21 20 31 6909 watanabe dummy 0 2011/11/17/14:39:45(130.34.95.37) Ti/Cu 2011/11/20/2:53:37(130.34.95.37) -21 42 48 6909 sasaki&watanabe dummy 0 2011/11/17/15:57:21(130.34.95.44) TiN/Ti 2011/11/17/15:59:34(130.34.95.44) -22 0 5 6909 sasaki&watanabe dummy 0 2011/11/17/15:58:13(130.34.95.44) 延長 2011/11/18/0:52:1(130.34.95.37) -22 38 48 6909 sasaki&watanabe dummy 0 2011/11/17/15:59:24(130.34.95.44) IrOx/Ti ベー先生承認 2011/11/22/7:52:19(130.34.95.37) -21 42 48 6909 sasaki&watanabe dummy 0 2011/11/17/16:0:14(130.34.95.44) TiN/Ti ベー先生承認 2011/11/18/0:51:43(130.34.95.37) -23 0 3 6909 sasaki&watanabe dummy 0 2011/11/17/16:1:4(130.34.95.44) 延長。 2011/11/22/22:16:15(130.34.95.44) 19 2 18 6909 sasaki&watanabe dummy 0 2011/11/17/20:20:6(130.34.95.44) SiO2 田中先生承認　スパッタ時間が長いので長めに取ってあります。 18 4 18 6909 kigure&sasaki dummy 0 2011/11/17/22:12:36(130.34.95.44) SiO2 田中先生承認済み ※スパッタ時間が長いため長めに時間をとっております。 -22 18 28 4119 nagai dummy 2 2011/11/18/14:10:47(130.34.95.44) Ti / Cu 2011/11/18/14:11:14(130.34.95.44) 22 20 30 4119 nagai dummy 2 2011/11/18/14:11:45(130.34.95.44) Ti/Cu 19 28 38 4771 yabe dummy 0 2011/11/18/18:21:43(130.34.95.21) Al, 原先生承認　with wada 18 40 42 6937 Moriwaki, Matsuo dummy 0 2011/11/17/14:9:46(130.34.95.43) 田中先生許可。Cu. 19 0 2 6909 sasaki dummy 0 2011/11/18/23:22:53(130.34.95.44) 時間前倒し 23 28 40 6909 sasaki&watanabe dummy 0 2011/11/19/6:31:9(130.34.95.44) Ti/TiN/Ti ベー先生承認 -23 18 28 6937 Takahashi dummy 0 2011/11/19/13:4:25(130.34.95.43) Cu 2011/11/19/13:5:53(130.34.95.43) 22 30 38 6937 Takahashi dummy 0 2011/11/19/13:7:40(130.34.95.43) Cu 19 38 48 6937 Moriwaki, Matsuo dummy 0 2011/11/19/13:18:52(130.34.95.43) 田中先生許可。 -22 0 14 6909 watanabe&kuriyama dummy 0 2011/11/20/2:55:40(130.34.95.37) Ti/Cu,ベー先生承認済み 2011/11/20/23:30:50(130.34.95.37) -23 4 18 6909 watanabe&kuriyama dummy 0 2011/11/20/23:33:5(130.34.95.37) Ti/Cu,べー先生承認 2011/11/22/22:16:20(130.34.95.44) 21 42 46 5810 ka dummy 0 2011/11/21/20:19:7(130.34.95.49) Ta/Pt 戸田先生許可 22 38 39 6937 Takahashi dummy 0 2011/11/22/15:37:22(130.34.95.43) 時間延長 23 40 42 6909 sasaki dummy 0 2011/11/23/15:0:17(130.34.95.44) 時間延長 -25 22 34 6909 sasaki dummy 0 2011/11/23/23:20:54(130.34.95.37) T 2011/11/23/23:21:1(130.34.95.37) 25 22 34 6909 sasaki dummy 0 2011/11/23/23:21:46(130.34.95.37) Ti/TiN/Ti 30 18 28 6937 Takahashi dummy 0 2011/11/24/9:12:31(130.34.95.43) Cu -28 16 28 6908 hashiguchi dummy 2 2011/11/25/15:26:11(130.34.95.37) Ti>W,W 2011/11/25/18:45:30(130.34.95.37) -25 34 44 6909 sasaki dummy 2 2011/11/25/15:53:10(130.34.95.37) TiN>Pt 2011/11/25/15:53:24(130.34.95.37) -25 34 44 6909 sasaki dummy 0 2011/11/25/15:53:52(130.34.95.37) TiN>Pt Ti/Pt/Ti 2011/11/25/15:53:57(130.34.95.37) 25 34 44 6909 sasaki dummy 2 2011/11/25/15:54:15(130.34.95.37) TiN>Pt Ti/Pt/Ti 28 28 40 6909 sasaki dummy 2 2011/11/25/15:57:4(130.34.95.37) Ir Ti/IrOx/Ti 28 16 28 6908 hashiguchi dummy 2 2011/11/25/18:45:50(130.34.95.37) Pt>W -30 31 43 6908 hashiguchi dummy 2 2011/11/25/18:47:47(130.34.95.37) W>Ta 2011/11/30/14:47:15(130.34.95.44) 25 44 46 6909 sasaki&watanabe dummy 0 2011/11/25/20:6:27(130.34.95.37) 時間延長　べー先生承認 -29 28 38 4830 suzuki dummy 0 2011/11/27/15:42:31(130.34.95.30) 0 2011/11/28/23:24:20(130.34.95.30) 28 40 48 6909 sasaki&watanabe dummy 0 2011/11/28/18:5:17(130.34.95.44) Ti/IrOx/Ti ベー先生承認 -29 18 28 4119 yukaito dummy 0 2011/11/28/18:7:59(130.34.95.44) 0 2011/11/28/18:8:3(130.34.95.44) -29 18 28 4119 yukaito dummy 0 2011/11/28/18:8:20(130.34.95.44) SiO2 2011/11/28/19:47:16(130.34.95.44) 29 24 34 4830 suzuki dummy 0 2011/11/28/23:24:54(130.34.95.30) Ti -29 36 47 6937 makihata dummy 2 2011/11/29/11:23:23(130.34.95.43) Al 2011/11/29/11:23:39(130.34.95.43) 29 34 36 4830 suzuki dummy 0 2011/11/29/11:28:4(130.34.95.43) 時間延長 30 31 32 6908 hashiguchi dummy 2 2011/11/25/18:47:47(130.34.95.37) W>Ta -30 32 44 6908 hashiguchi dummy 2 2011/11/30/14:47:44(130.34.95.44) Ti>W 2011/11/30/16:24:37(130.34.95.44) 30 32 35 6908 hashiguchi dummy 2 2011/11/30/14:47:44(130.34.95.44) Ti>W 30 35 44 6908 hashiguchi dummy 2 2011/11/30/16:25:24(130.34.95.44) Ti>Ta, 30 44 48 6908 hashiguchi dummy 0 2011/11/30/18:16:42(130.34.95.37) 延長