3	20	30	4119	S.Watanabe	dummy	0	2011/9/30/14:59:49(130.34.95.44)	Ti/Cu
3	46	48	6909	watanabe&kanno	dummy	0	2011/10/3/18:8:58(130.34.95.37)	べー先生承認、SiO2
4	16	26	6909	watanabe	dummy	0	2011/10/4/0:26:3(130.34.95.37)	SiO2
4	30	38	4771	Phan	dummy	2	2011/10/4/12:21:41(130.34.95.43)	Al target
-4	38	44	4771	Phan	dummy	0	2011/10/4/15:19:50(130.34.95.43)	0	2011/10/4/15:35:1(130.34.95.43)
-5	16	24	4771	Phan	dummy	0	2011/10/4/15:36:37(130.34.95.43)	Al target	2011/10/4/16:13:21(130.34.95.21)
4	38	44	4771	Phan	dummy	0	2011/10/4/15:43:56(130.34.95.43)	0
-5	30	37	4771	Phan	dummy	0	2011/10/4/16:13:46(130.34.95.21)	Al	2011/10/4/20:31:35(130.34.95.43)
5	16	24	4771	Phan	dummy	2	2011/10/4/20:32:1(130.34.95.43)	Al target
6	20	30	4119	S.Watanabe	dummy	0	2011/10/5/11:26:56(130.34.95.37)	Ti/Cu
6	30	40	6956	黄	dummy	0	2011/10/5/13:46:46(130.34.95.43)	Ａｌ
6	40	47	4771	Phan+Minh	dummy	0	2011/10/5/15:40:12(130.34.95.43)	Kuwano sensei`permission
6	47	48	6909	watanabe&sasaki	dummy	2	2011/10/5/22:6:53(130.34.95.37)	Ti>Ta,ベー先生承認
6	2	8	4771	Phan+Minh	dummy	0	2011/10/6/1:4:19(130.34.95.44)	Kuwano sensei`permission
7	20	28	5810	tanahashi	dummy	0	2011/10/6/9:20:19(130.34.95.49)	Al
7	28	39	6908	Ohara Yuki	dummy	0	2011/10/6/10:39:12(130.34.95.44)	Ta/Cu
-7	40	48	6909	kigure	dummy	2	2011/10/6/16:35:24(130.34.95.44)	Al→TiN ベー先生承認済み	2011/10/6/20:23:13(130.34.95.44)
7	40	48	6909	kigure+watanabe	dummy	2	2011/10/6/20:24:29(130.34.95.44)	Al→TiN　ベー先生承認済み
-8	30	40	6937	Moriwaki, Matsuo	dummy	0	2011/10/6/20:58:18(130.34.95.43)	Au/Pt/Cr. 田中先生承認。	2011/10/6/20:58:29(130.34.95.43)
-8	30	40	6937	Moriwaki, Matsuo	dummy	0	2011/10/6/21:1:17(130.34.95.43)	Cu. 田中先生承認。	2011/10/7/22:33:0(130.34.95.43)
8	18	29	6909	watanabe&kugure	dummy	0	2011/10/7/0:52:15(130.34.95.44)	べー先生承認
11	20	30	6956	黄	dummy	0	2011/10/7/11:55:43(130.34.95.38)	Aｌ
-8	38	48	6937	Moriwaki, Matsuo	dummy	0	2011/10/7/22:39:13(130.34.95.43)	田中先生承認。／ Cu	2011/10/8/11:17:55(130.34.95.43)
8	16	18	6909	kigure&watanabe	dummy	2	2011/10/8/0:39:44(130.34.95.44)	TiN→SiO2,　田中先生承認済み
-8	46	48	6909	kigure	dummy	0	2011/10/8/12:15:33(130.34.95.37)	0	2011/10/8/12:16:40(130.34.95.37)
9	16	22	6909	kigure&watanabe 田中先生承認済み	dummy	0	2011/10/8/12:16:35(130.34.95.37)	0
8	46	48	6909	kigure&watanabe　田中先生承認済み	dummy	0	2011/10/8/12:17:10(130.34.95.37)	0
8	29	31	6909	watanabe&kigure	dummy	0	2011/10/8/12:20:5(130.34.95.37)	時間延長
-8	31	41	6937	Takahashi$Moriwaki	dummy	0	2011/10/8/15:0:16(130.34.95.43)	田中先生	2011/10/8/15:0:39(130.34.95.43)
8	31	32	6937	Takahashi$Moriwaki	dummy	0	2011/10/8/15:0:16(130.34.95.43)	田中先生
8	32	41	6937	Takahashi&Moriwaki	dummy	0	2011/10/8/15:2:2(130.34.95.43)	田中先生承認
-9	26	38	6909	watanabe&nganuma	dummy	0	2011/10/8/15:52:51(130.34.95.37)	べー先生承認、IrOx	2011/10/9/12:58:5(130.34.95.37)
9	38	46	6937	Moriwaki, Matsuo	dummy	0	2011/10/8/17:8:58(130.34.95.43)	田中先生承認。Cu
9	22	24	6909	kigure&watanabe	dummy	2	2011/10/9/8:37:41(130.34.95.37)	Ta→TiN, SiO2→Ti　田中先生承認済み
-10	16	24	4771	Phan+Minh	dummy	2	2011/10/9/10:49:23(130.34.95.43)	Kuwano sensei`permission	2011/10/9/10:49:32(130.34.95.43)
-10	16	24	4771	Phan+Minh	dummy	2	2011/10/9/10:50:24(130.34.95.43)	Al target, Kuwano sensei`permission	2011/10/9/23:18:28(130.34.95.43)
9	26	28	6909	watanabe&nganuma	dummy	0	2011/10/8/15:52:51(130.34.95.37)	べー先生承認、IrOx
9	28	37	6909	watanabe&naganuma	dummy	0	2011/10/9/12:59:22(130.34.95.37)	IrOx,べー先生承認
10	26	37	6909	watanabe&kino	dummy	0	2011/10/9/14:50:51(130.34.95.44)	IrOx,べー先生承認
10	38	48	6909	watanabe&kino	dummy	0	2011/10/9/18:53:25(130.34.95.44)	IrOx,べー先生承認
9	46	48	6937	Moriwaki, Matsuo	dummy	0	2011/10/9/19:42:32(130.34.95.43)	田中先生承認。
-11	30	37	4771	Phan	dummy	0	2011/10/9/23:19:6(130.34.95.43)	0	2011/10/9/23:19:12(130.34.95.43)
-11	30	37	4771	Phan	dummy	0	2011/10/9/23:19:32(130.34.95.43)	Al target	2011/10/11/4:7:10(130.34.95.43)
11	38	48	6909	watanabe&kuriyana	dummy	0	2011/10/10/22:3:58(130.34.95.44)	IrOx,べー先生承認
12	20	28	6909	watanabe	dummy	0	2011/10/10/22:4:47(130.34.95.44)	IrOx
-12	28	35	4771	Phan	dummy	0	2011/10/11/1:33:13(130.34.95.21)	Al	2011/10/12/4:48:44(130.34.95.21)
-12	28	36	4771	Phan	dummy	2	2011/10/12/4:49:6(130.34.95.21)	Al	2011/10/12/4:52:49(130.34.95.21)
-13	16	23	4771	Phan	dummy	0	2011/10/12/4:51:34(130.34.95.21)	Al	2011/10/12/4:52:52(130.34.95.21)
12	28	36	4771	Phan	dummy	0	2011/10/12/9:51:5(130.34.95.44)	Al
12	37	47	6909	watanabe&kuriyama	dummy	0	2011/10/12/13:55:47(130.34.95.44)	IrOx,べー先生承認
13	16	24	4771	Phan	dummy	0	2011/10/12/15:3:40(130.34.95.21)	Al
13	26	37	4119	yukaito	dummy	2	2011/10/12/17:5:25(130.34.74.84)	Ta/Cu
12	47	48	6909	watanabe	dummy	0	2011/10/12/19:33:9(130.34.95.37)	時間延長
14	34	44	6909	kigure&watanabe	dummy	0	2011/10/12/20:41:35(130.34.95.37)	Al　ベー先生承認済み
18	20	30	4119	S.Watanabe	dummy	0	2011/10/13/10:20:23(130.34.95.37)	Ti/Cu
-15	20	31	6909	kigure&watanabe	dummy	2	2011/10/13/11:24:35(130.34.95.37)	SiO2　ベー先生承認済み	2011/10/14/19:37:53(130.34.95.37)
13	37	41	4119	yukaito	dummy	0	2011/10/13/15:0:20(130.34.95.44)	0
14	20	22	6908	Ohara Yuki	dummy	2	2011/10/13/23:1:48(130.34.95.37)	Ir --> Al
14	22	31	6908	Ohara Yuki	dummy	0	2011/10/13/23:2:6(130.34.95.37)	Al
17	18	30	4119	konno	dummy	0	2011/10/14/8:52:57(130.34.95.37)	Al
-19	20	30	6937	Kochhar	dummy	0	2011/10/14/16:51:21(130.34.95.43)	Al Target	2011/10/18/20:5:12(130.34.95.43)
17	30	40	6937	Kochhar	dummy	0	2011/10/14/17:47:18(130.34.95.43)	Al Target
15	20	30	6909	kigure&watanabe	dummy	2	2011/10/14/19:38:50(130.34.95.37)	Ta→SiO2　ベー先生承認済み
-15	30	38	4771	Phan +Minh	dummy	0	2011/10/15/2:33:14(130.34.95.21)	Al target, Kuwano sensei's permission	2011/10/15/13:1:1(130.34.95.21)
-16	26	34	6937	Moriwaki, Matsuo	dummy	0	2011/10/15/21:53:47(130.34.95.43)	田中先生許可。Cu.	2011/10/16/14:12:3(130.34.95.43)
-16	34	42	4771	Phan+Minh	dummy	0	2011/10/16/11:18:14(130.34.95.43)	Kuwano sensei`permission	2011/10/16/11:18:43(130.34.95.43)
-16	34	42	4771	Phan+Minh	dummy	0	2011/10/16/11:19:17(130.34.95.43)	Al target, Kuwano sensei`permission	2011/10/16/11:54:28(130.34.95.43)
16	34	48	4771	Phan+Minh	dummy	0	2011/10/16/11:54:52(130.34.95.43)	Al target, Kuwano sensei`permission
-17	40	48	4771	Phan+Minh	dummy	0	2011/10/16/11:56:29(130.34.95.43)	Al target, Kuwano sensei`permission	2011/10/17/8:59:5(130.34.95.21)
16	26	31	6937	Moriwaki, Matsuo	dummy	0	2011/10/15/21:53:47(130.34.95.43)	田中先生許可。Cu.
17	10	18	6937	Moriwaki, Matsuo	dummy	0	2011/10/16/16:21:30(130.34.95.43)	田中先生許可。
-19	30	40	5810	tanahashi	dummy	0	2011/10/17/16:45:17(130.34.95.49)	0	2011/10/19/17:22:42(130.34.95.49)
18	30	40	4830	endo	dummy	0	2011/10/17/19:49:40(130.34.95.30)	Ti/Cu
18	40	48	4771	Phan+Minh	dummy	0	2011/10/18/0:28:48(130.34.95.43)	Al target, Kuwano sensei`permission
-19	1	7	6909	kino,watanabe	dummy	2	2011/10/18/7:54:46(130.34.95.37)	SiO2,田中先生承認	2011/10/18/7:54:51(130.34.95.37)
20	30	40	6937	Kochhar	dummy	0	2011/10/18/9:53:29(130.34.95.43)	Al target
-21	30	38	6937	Moriwaki	dummy	0	2011/10/18/13:50:47(130.34.95.43)	Al	2011/10/18/13:51:31(130.34.95.43)
-21	36	44	6937	Moriwaki	dummy	0	2011/10/18/13:51:55(130.34.95.43)	Al	2011/10/21/11:57:43(130.34.95.43)
-24	20	26	6937	Froemel	dummy	0	2011/10/18/15:4:15(130.34.95.43)	0	2011/10/18/21:16:56(130.34.95.43)
-24	26	30	6937	Froemel	dummy	0	2011/10/18/15:4:48(130.34.95.43)	0	2011/10/18/21:17:0(130.34.95.43)
-24	30	44	6937	Lee, Tsai	dummy	2	2011/10/18/15:5:44(130.34.95.43)	SiO2	2011/10/19/16:54:0(130.34.95.44)
21	18	30	5810	Yokoyama	dummy	2	2011/10/18/16:45:54(130.34.95.49)	Ti→Si  with Toda
19	20	30	6937	Froemel	dummy	0	2011/10/18/21:16:42(130.34.95.43)	Ti/Cu
19	40	48	4771	Phan+Minh	dummy	0	2011/10/18/23:6:48(130.34.95.44)	Al target, Kuwano sensei's permission
-20	22	30	4771	Phan	dummy	0	2011/10/19/2:56:12(130.34.95.44)	Al target	2011/10/20/0:58:34(130.34.95.43)
20	40	48	6956	黄	dummy	0	2011/10/19/16:48:21(130.34.95.38)	Al
-22	20	34	6937	Lee, Tsai	dummy	0	2011/10/19/16:53:54(130.34.95.44)	SiO2	2011/10/21/14:20:1(130.34.95.44)
19	30	37	5810	tanahashi	dummy	0	2011/10/17/16:45:17(130.34.95.49)	0
19	37	40	5810	tanahashi	dummy	0	2011/10/19/17:22:57(130.34.95.49)	Al
20	12	22	6908	Y. Ohara, H. Kino	dummy	0	2011/10/19/20:43:44(130.34.95.37)	Al, 田中先生 承認済み
24	17	26	6937	Takahashi	dummy	0	2011/10/19/22:42:22(130.34.95.43)	Cu
20	1	8	4771	Phan+Minh	dummy	0	2011/10/20/0:18:9(130.34.95.44)	Al target, Kuwano sensei`permission
-20	22	26	4771	Phan	dummy	0	2011/10/20/0:59:17(130.34.95.43)	0	2011/10/20/7:29:18(130.34.95.44)
20	8	12	4771	Phan+Minh	dummy	0	2011/10/20/2:58:30(130.34.95.44)	Kuwano sensei`permission
20	22	26	6908	Ohara Yuki	dummy	0	2011/10/20/7:29:50(130.34.95.44)	Al
20	26	28	6909	watanabe	dummy	2	2011/10/20/10:35:32(130.34.95.37)	Ti>Ta,ベー先生承認
24	26	36	6937	Kochhar	dummy	0	2011/10/20/15:12:59(130.34.95.43)	Al Target
-25	19	29	4119	hioki	dummy	0	2011/10/21/8:48:36(130.34.74.84)	SiO2	2011/10/21/8:48:47(130.34.74.84)
25	18	28	4119	hioki	dummy	2	2011/10/21/8:49:30(130.34.74.84)	SiO2
21	30	33	5810	Yokoyama	dummy	0	2011/10/21/12:46:35(130.34.95.49)	0
21	33	46	6937	Lee, Tsai	dummy	0	2011/10/21/14:18:2(130.34.95.44)	SIO2
25	28	30	4119	hioki	dummy	0	2011/10/21/15:20:25(130.34.74.84)	SiO2
-22	26	34	4771	Phan+Minh	dummy	0	2011/10/21/16:37:51(130.34.95.43)	Al target, Kuwano sensei`permission	2011/10/22/15:11:33(130.34.95.21)
-22	35	44	6908	hasiguchi	dummy	2	2011/10/21/16:39:21(130.34.95.37)	Si>Ta	2011/10/21/16:47:43(130.34.95.37)
22	35	44	6908	hashiguchi	dummy	2	2011/10/21/16:48:28(130.34.95.37)	Si>Ta, Cu/Ta
25	30	39	5810	Yokoyama	dummy	0	2011/10/21/18:50:9(130.34.95.49)	SiO2
22	26	33	4771	Phan+Minh	dummy	0	2011/10/21/16:37:51(130.34.95.43)	Al target, Kuwano sensei`permission
24	37	48	6908	hashiguchi	dummy	0	2011/10/22/17:44:28(130.34.95.44)	Ta,Cu
22	44	48	6908	hashiguchi	dummy	0	2011/10/22/19:30:46(130.34.95.44)	0
25	39	48	6937	Moriwaki, Matsuo	dummy	0	2011/10/23/0:30:36(130.34.95.43)	田中先生許可。Al
-23	31	38	6908	hashiguchi,kino	dummy	0	2011/10/23/14:50:55(130.34.95.44)	Ta,Cu	2011/10/23/14:51:32(130.34.95.44)
23	31	32	6908	hashiguchi,kino	dummy	0	2011/10/23/14:50:55(130.34.95.44)	Ta,Cu
23	32	38	6909	hashiguchi,kino	dummy	0	2011/10/23/14:52:1(130.34.95.44)	田中先生承認
-25	8	16	4771	Phan+Minh	dummy	0	2011/10/24/12:11:38(130.34.95.43)	Al target, Kuwano sensei`permission	2011/10/24/12:33:26(130.34.95.43)
-25	2	9	4771	Phan+Minh	dummy	0	2011/10/24/12:33:53(130.34.95.43)	Al target, Kuwano sensei`permission	2011/10/24/22:47:59(130.34.95.44)
-26	20	30	6909	watanabe	dummy	0	2011/10/24/13:53:23(130.34.95.37)	0	2011/10/25/6:30:59(130.34.95.37)
26	30	44	6937	Kochhar	dummy	0	2011/10/24/14:4:32(130.34.95.43)	Al target
-27	20	30	4119	S.Watanabe	dummy	0	2011/10/24/14:33:24(130.34.95.44)	Ta/Cu	2011/10/26/15:51:37(130.34.95.44)
26	44	48	6909	watanabe	dummy	0	2011/10/24/15:5:34(130.34.95.44)	0
-25	10	18	6909	watanabe&kuriyama	dummy	0	2011/10/24/18:24:34(130.34.95.37)	SiO2,べー先生承認	2011/10/24/21:25:15(130.34.95.37)
25	9	10	6909	watanabe	dummy	0	2011/10/24/19:11:3(130.34.95.44)	0
26	0	8	6909	watanabe&kuriyama	dummy	0	2011/10/24/19:13:25(130.34.95.44)	SiO2,べー先生承認
25	10	18	6956	黄	dummy	0	2011/10/24/22:25:38(130.34.95.38)	0
-27	30	40	6909	watanabe	dummy	0	2011/10/25/6:26:30(130.34.95.37)	0	2011/10/27/3:16:28(130.34.95.44)
26	20	30	6909	watanabe	dummy	0	2011/10/25/6:31:51(130.34.95.37)	IrOx
-26	8	16	4771	Phan+Minh	dummy	0	2011/10/25/15:29:23(130.34.95.43)	Al target, Kuwano sensei`permission	2011/10/25/22:3:50(130.34.95.43)
-27	0	8	4771	Phan+Minh	dummy	0	2011/10/25/15:30:41(130.34.95.43)	0	2011/10/25/15:30:50(130.34.95.43)
-27	0	8	4771	Phan+Minh	dummy	0	2011/10/25/15:31:11(130.34.95.43)	Al target, Kuwano sensei`permission	2011/10/25/22:4:54(130.34.95.43)
-27	10	20	4771	Phan+Minh	dummy	0	2011/10/25/22:5:57(130.34.95.43)	Al target, Kuwano sensei`permission	2011/10/26/16:25:1(130.34.95.21)
27	0	7	6909	watanabe&kuriyama	dummy	0	2011/10/25/23:42:15(130.34.95.37)	べー先生承認
28	20	28	6937	Moriwaki	dummy	0	2011/10/26/0:7:43(130.34.95.43)	Al
26	14	20	6909	watanabe	dummy	0	2011/10/26/2:48:4(130.34.95.44)	0
31	20	30	4119	S.Watanabe	dummy	0	2011/10/26/10:59:41(130.34.95.44)	Ta/Cu
-28	4	16	6908	hashiguchi	dummy	0	2011/10/26/14:41:31(130.34.95.37)	Ta,Cu,ベー先生承認	2011/10/28/1:43:41(130.34.95.37)
-27	22	30	4771	Phan	dummy	0	2011/10/26/16:26:3(130.34.95.21)	Al target	2011/10/26/16:26:22(130.34.95.21)
-27	40	48	4771	Phan+Minh	dummy	0	2011/10/26/16:26:51(130.34.95.21)	Al target, Kuwano sensei's permission	2011/10/27/15:39:35(130.34.95.44)
-27	8	18	4771	Phan+Minh	dummy	0	2011/10/26/16:28:16(130.34.95.21)	Al target, Kuwano sensei's permission	2011/10/27/0:53:33(130.34.95.43)
28	28	38	6937	Kochhar	dummy	0	2011/10/26/18:50:8(130.34.95.43)	Al Target
27	7	8	6909	watanabe	dummy	0	2011/10/26/23:16:47(130.34.95.37)	0
27	16	24	4771	Phan	dummy	0	2011/10/27/0:54:5(130.34.95.43)	Al target
27	26	38	6909	watanabe	dummy	0	2011/10/27/3:17:11(130.34.95.44)	0
28	40	48	6909	watanabe&kuriyama	dummy	0	2011/10/27/3:21:34(130.34.95.44)	べー先生承認
27	8	10	6909	watanabe	dummy	2	2011/10/27/3:31:32(130.34.95.44)	Cu>Ti
27	38	40	6909	watanabe	dummy	0	2011/10/27/4:35:7(130.34.95.37)	0
27	24	26	4771	Phan	dummy	0	2011/10/27/8:23:52(130.34.95.21)	0
-31	30	38	6956	黄	dummy	0	2011/10/27/15:15:4(130.34.95.38)	Al	2011/10/31/10:4:16(130.34.95.38)
28	0	4	4771	Phan+Minh	dummy	0	2011/10/27/22:9:30(130.34.95.43)	Al target, Kuwano sensei`permission
-28	16	20	6908	hashiguchi	dummy	0	2011/10/28/1:43:26(130.34.95.37)	0	2011/10/28/4:11:5(130.34.95.37)
28	4	6	6908	hashiguchi	dummy	0	2011/10/26/14:41:31(130.34.95.37)	Ta,Cu,ベー先生承認
-28	8	16	6908	hasiguchi	dummy	2	2011/10/28/1:44:28(130.34.95.37)	Ta,Cu,ベー先生承認 Ir>Ta	2011/10/28/4:11:1(130.34.95.37)
28	8	11	6908	hasiguchi	dummy	2	2011/10/28/1:44:28(130.34.95.37)	Ta,Cu,ベー先生承認 Ir>Ta
28	38	40	6937	Kochhar	dummy	0	2011/10/28/11:20:37(130.34.95.43)	Al Target
-29	0	6	6909	watanabe	dummy	0	2011/10/28/19:33:24(130.34.95.44)	0	2011/10/28/22:47:10(130.34.95.37)
29	18	24	6909	watanabe&naganuma	dummy	0	2011/10/28/22:47:36(130.34.95.37)	べー先生承認
29	1	9	6937	Moriwaki, Matsuo	dummy	0	2011/10/28/23:58:54(130.34.95.43)	田中先生許可。
29	24	30	6909	watanabe	dummy	0	2011/10/29/7:29:33(130.34.95.44)	延長
29	30	32	6909	watanabe	dummy	0	2011/10/29/13:19:45(130.34.95.44)	0
29	32	34	6909	watanabe	dummy	0	2011/10/29/14:10:30(130.34.95.44)	延長
-31	40	48	6909	watanabe&naganuma	dummy	0	2011/10/31/14:12:58(130.34.95.37)	IrOx,べー先生承認	2011/10/31/17:22:36(130.34.95.37)
31	46	48	6909	watanabe&naganuma	dummy	0	2011/10/31/17:23:28(130.34.95.37)	IrOx,べー先生承認