-3	22	34	6909	takeshita	dummy	0	2010/7/30/12:37:12(130.34.95.44)	Ta/Cu	2010/8/2/14:27:36(130.34.95.44)
-4	18	28	4119	S.Watanabe	dummy	0	2010/8/2/8:42:58(130.34.95.44)	Ta/Cu	2010/8/2/8:45:47(130.34.95.44)
-5	18	30	4119	S.Watanabe	dummy	0	2010/8/2/8:45:41(130.34.95.44)	Ta/Cu	2010/8/4/8:53:36(130.34.95.44)
-2	37	48	6909	takeshita,hiraki	dummy	0	2010/8/2/14:27:33(130.34.95.44)	Cu,田中先生承認	2010/8/2/21:28:57(130.34.95.44)
2	37	45	6909	takeshita,hiraki	dummy	0	2010/8/2/14:27:33(130.34.95.44)	Cu,田中先生承認
2	35	37	6909	takeshita	dummy	0	2010/8/2/21:29:21(130.34.95.44)	Cu
4	16	20	4119	konno	dummy	2	2010/8/3/8:8:8(130.34.95.44)	Cu移動
-6	28	42	6937	Kim, Lee	dummy	0	2010/8/3/16:39:13(130.34.95.44)	Pt	2010/8/6/12:46:55(130.34.95.44)
4	22	34	6909	S.Kanno	dummy	0	2010/8/3/21:25:23(130.34.95.44)	Ir
-6	18	28	6909	S.Kanno	dummy	0	2010/8/5/14:53:3(130.34.95.44)	0	2010/8/5/14:53:12(130.34.95.44)
6	18	28	6909	S.Kanno	dummy	0	2010/8/5/14:53:27(130.34.95.44)	Ir
5	36	44	6909	S.Kanno	dummy	0	2010/8/5/16:50:16(130.34.95.44)	Ir
6	30	44	6937	Kim, Lee	dummy	0	2010/8/6/12:47:23(130.34.95.44)	Pt
-10	24	33	6937	JW Lee	dummy	0	2010/8/6/16:12:30(130.34.95.44)	Ge	2010/8/10/14:12:9(130.34.95.44)
8	39	48	6937	JW Lee	dummy	0	2010/8/9/19:6:47(130.34.95.44)	Ge
-10	34	42	6909	S.Kanno	dummy	0	2010/8/9/21:6:12(130.34.95.44)	Ir	2010/8/9/23:6:15(130.34.95.44)
-10	16	24	6909	S.Kanno	dummy	0	2010/8/9/23:6:8(130.34.95.44)	0	2010/8/9/23:6:18(130.34.95.44)
10	16	24	6909	S.Kanno	dummy	0	2010/8/9/23:6:33(130.34.95.44)	Ir
10	0	16	6909	S.Kanno,Y.Ohara	dummy	0	2010/8/9/23:15:46(130.34.95.44)	ベー先生承認
10	24	31	6937	JW Lee	dummy	0	2010/8/6/16:12:30(130.34.95.44)	Ge
11	34	44	6937	makihata	dummy	0	2010/8/11/16:0:9(130.34.95.43)	SiO2
15	34	48	6937	k.d.park, Kim	dummy	0	2010/8/15/16:19:19(130.34.95.43)	Ge、田中(秀）先生承認済み
16	0	4	6937	k.d.park	dummy	0	2010/8/16/0:27:24(130.34.95.43)	0
19	18	34	4119	S.Watanabe	dummy	0	2010/8/17/9:8:12(130.34.95.44)	Ta/Cu
19	34	48	6908	Y. Ohara, A. Noriki	dummy	0	2010/8/18/17:38:16(130.34.95.37)	Ta/Cu 田中徹先生　承認済
-20	0	18	6908	Y. Ohara, A. Noriki	dummy	0	2010/8/19/23:47:28(130.34.95.44)	真空引き 田中徹先生承認済み	2010/8/19/23:47:43(130.34.95.44)
-23	32	44	6909	takeshita	dummy	2	2010/8/21/12:29:44(130.34.95.37)	Ge→Al	2010/8/23/16:20:5(130.34.95.44)
23	32	35	6909	takeshita	dummy	2	2010/8/21/12:29:44(130.34.95.37)	Ge→Al
-24	0	22	6909	takeshita,noriki	dummy	2	2010/8/24/0:3:39(130.34.95.44)	田中先生承認	2010/8/24/0:3:47(130.34.95.44)
24	0	3	6909	takeshita,noriki	dummy	2	2010/8/24/0:3:39(130.34.95.44)	田中先生承認
-24	3	22	6909	taqkes	dummy	0	2010/8/24/0:4:4(130.34.95.44)	0	2010/8/24/0:4:10(130.34.95.44)
24	3	22	6909	takeshita,noriki	dummy	2	2010/8/24/0:4:37(130.34.95.44)	Ｇｅ→Al
-24	22	34	6909	takeshita	dummy	0	2010/8/24/11:9:12(130.34.95.44)	Al	2010/8/24/11:10:4(130.34.95.44)
24	22	25	6909	takeshita	dummy	0	2010/8/24/11:9:12(130.34.95.44)	Al
-24	25	34	6909	takeshita	dummy	0	2010/8/24/11:22:44(130.34.95.44)	Al	2010/8/24/13:4:16(130.34.95.44)
24	25	29	6909	takeshita	dummy	0	2010/8/24/11:22:44(130.34.95.44)	Al
24	29	30	6909	takeshita	dummy	2	2010/8/24/13:4:38(130.34.95.44)	Al→Pt
-25	26	36	6908	Ohara Yuki	dummy	0	2010/8/24/23:23:17(130.34.95.44)	Ti/Cu	2010/8/24/23:37:43(130.34.95.44)
25	36	48	6908	Y. Ohara, A. Noriki	dummy	0	2010/8/24/23:38:41(130.34.95.44)	Ti/Cu 田中先生 承認済
-27	40	48	5810	inomata	dummy	1	2010/8/25/12:1:17(130.34.95.49)	0	2010/8/26/16:15:34(130.34.95.44)
26	0	4	6909	takeshita,hiraki	dummy	0	2010/8/25/14:24:25(130.34.95.37)	Ta/Cu
26	4	7	6909	takeshita,noriki	dummy	0	2010/8/26/2:4:8(130.34.95.44)	田中先生承認
-26	40	48	5810	inomata	dummy	0	2010/8/26/16:16:14(130.34.95.44)	立ち下げ	2010/8/26/16:16:19(130.34.95.44)
26	40	48	5810	inomata	dummy	1	2010/8/26/16:16:34(130.34.95.44)	0
-31	26	42	5318	Tomura	dummy	0	2010/8/30/11:12:39(130.34.231.209)	Al	2010/8/30/12:12:20(130.34.95.49)
31	32	42	4771	cao	dummy	0	2010/8/31/15:43:36(130.34.95.21)	0
31	42	44	4771	cao	dummy	0	2010/8/31/19:54:35(130.34.95.44)	0
31	46	48	6908	Y, Ohara, A. Noriki	dummy	0	2010/8/31/22:58:13(130.34.95.44)	Bea先生 承認済 Ta