-3	26	38	6937	JW Lee	dummy	0	2009/8/28/17:8:43(130.34.95.44)	ZnO Ge	2009/8/31/10:3:25(130.34.95.44)
-1	26	32	3586	itasaka	dummy	1	2009/8/28/17:45:18(130.34.95.17)	メンテナンス	2009/8/31/17:36:54(130.34.95.17)
-2	18	34	6936	kawai	dummy	0	2009/8/28/19:43:35(130.34.95.49)	Ti-Pt@300˚C	2009/8/31/8:56:34(130.34.95.49)
-2	16	26	5810	moriwaki	dummy	0	2009/8/31/9:0:7(130.34.95.49)	Pt/Ti@300℃	2009/8/31/14:42:26(130.34.95.49)
-1	38	48	5810	moriwaki	dummy	2	2009/8/31/9:1:55(130.34.95.49)	Pt/Tiにターゲットを交換。川合先生承認済み。	2009/8/31/18:10:35(130.34.95.49)
-2	26	38	5810	moriwaki	dummy	0	2009/8/31/10:2:42(130.34.95.44)	Pt/ti	2009/8/31/14:42:11(130.34.95.49)
-4	26	38	6937	JW Lee	dummy	0	2009/8/31/10:3:14(130.34.95.44)	Pt/Ti	2009/9/2/12:28:47(130.34.95.44)
-3	26	38	6937	JW Lee	dummy	0	2009/8/31/10:3:46(130.34.95.44)	Ge	2009/9/3/12:40:27(130.34.95.44)
-2	16	29	5810	moriwaki	dummy	0	2009/8/31/14:42:48(130.34.95.49)	Pt/Ti@300℃	2009/8/31/18:9:40(130.34.95.49)
-2	29	44	6937	Hoeppner	dummy	0	2009/8/31/14:53:37(130.34.94.145)	Ti/Pt	2009/8/31/17:38:8(130.34.95.17)
2	31	44	6937	Hoeppner	dummy	0	2009/8/31/17:38:36(130.34.95.17)	Ti/Pt
2	30	31	3586	itasaka	dummy	1	2009/8/31/17:39:2(130.34.95.17)	メンテナンス
-1	32	48	5810	moriwaki	dummy	0	2009/8/31/18:11:5(130.34.95.49)	Pt/Tiにターゲットを交換。川合先生承認済み。	2009/9/1/21:11:13(130.34.95.44)
3	20	21	6937	endo	dummy	2	2009/9/1/13:17:6(130.34.95.43)	Pt→#2へ
-2	0	28	6909	kaiho, takeshita	dummy	2	2009/9/1/16:12:14(130.34.95.37)	Ta,Cu ベー先生承認済み	2009/9/2/6:37:7(130.34.95.37)
1	32	45	5810	moriwaki	dummy	0	2009/8/31/18:11:5(130.34.95.49)	Pt/Tiにターゲットを交換。川合先生承認済み。
1	46	48	6909	kaiho.takeshia	dummy	2	2009/9/1/22:37:2(130.34.95.44)	Ta/Cu ベー先生承認済み
2	0	16	6909	kaiho, takeshita	dummy	2	2009/9/1/16:12:14(130.34.95.37)	Ta,Cu ベー先生承認済み
-3	22	26	6937	jw lee	dummy	0	2009/9/2/12:12:53(130.34.95.44)	0	2009/9/2/12:14:34(130.34.95.44)
3	22	26	6937	jw lee	dummy	0	2009/9/2/12:14:52(130.34.95.44)	Ge
4	22	36	6937	Haubold	dummy	0	2009/9/2/12:29:15(130.34.95.44)	Au/Mo
4	36	42	6937	Haubold	dummy	0	2009/9/2/14:30:12(130.34.95.44)	Au Mo
3	38	48	7281	takano，takeda	dummy	0	2009/9/2/20:0:21(130.34.77.72)	SiO2　伊野先生承認済み
-3	6	20	6909	takeshita,kaiho	dummy	0	2009/9/2/20:28:8(130.34.95.44)	Pt,田中先生	2009/9/3/0:32:31(130.34.95.44)
2	44	46	6937	Hoeppner	dummy	0	2009/9/2/21:45:15(130.34.95.44)	Ta/Pt
3	26	28	6937	JW Lee	dummy	0	2009/8/31/10:3:46(130.34.95.44)	Ge
4	18	22	6936	Haubold	dummy	0	2009/9/3/19:25:22(130.34.95.43)	Mo / Au
-7	30	42	6937	jw lee	dummy	0	2009/9/4/8:55:32(130.34.95.44)	Ge	2009/9/7/14:33:37(130.34.95.44)
7	18	28	6936	Haubold	dummy	0	2009/9/4/10:35:50(130.34.95.44)	Mo / Au
-8	18	28	4771	tachihara	dummy	0	2009/9/4/13:6:21(130.34.95.21)	Al	2009/9/4/13:6:47(130.34.95.21)
8	18	28	4771	tachihara	dummy	0	2009/9/4/13:8:26(130.34.95.21)	Al
8	30	40	6965	hokari	dummy	0	2009/9/4/14:27:39(130.34.95.44)	Al
7	28	30	6936	Haubold	dummy	0	2009/9/7/13:27:39(130.34.95.43)	Mo / Au
7	30	32	6937	jw lee	dummy	0	2009/9/4/8:55:32(130.34.95.44)	Ge
-9	28	40	6937	JaeWung Lee	dummy	0	2009/9/7/14:34:26(130.34.95.44)	Ge	2009/9/8/11:49:29(130.34.95.44)
-8	42	46	6908	Y. Ohara, Y. Kaiho	dummy	2	2009/9/7/21:15:9(130.34.95.44)	Mo, Au >> Ta, Cu	2009/9/8/12:24:45(130.34.95.44)
-8	46	48	6908	Y. Ohara, Y.Kaiho	dummy	0	2009/9/7/21:15:59(130.34.95.44)	ベー先生　承認済　真空引き	2009/9/8/12:24:49(130.34.95.44)
-9	0	17	6908	Y. Ohara, Y. Kaiho	dummy	0	2009/9/7/21:16:53(130.34.95.44)	ベー先生　承認済　真空引き	2009/9/8/12:25:29(130.34.95.44)
-9	17	27	6908	Y. Ohara	dummy	0	2009/9/7/21:17:33(130.34.95.44)	Ta/Cu	2009/9/8/12:24:53(130.34.95.44)
-10	28	40	6937	JW Lee	dummy	0	2009/9/8/11:49:59(130.34.95.44)	Ge	2009/9/8/21:3:12(130.34.95.44)
-9	19	30	6908	Y. Ohara	dummy	0	2009/9/8/12:25:23(130.34.95.44)	Ta/Cu	2009/9/9/3:43:23(130.34.95.37)
8	40	42	6909	takeshita	dummy	2	2009/9/8/12:26:14(130.34.95.44)	Ge, Al, Au >>> Pt, Ta, Cu
8	42	48	6909	takeshita, kaiho	dummy	0	2009/9/8/12:26:47(130.34.95.44)	田中先生　承認済
9	0	4	6909	takeshita, kaiho	dummy	0	2009/9/8/12:27:33(130.34.95.44)	田中先生　承認済　Pt
-9	4	19	6908	Y. Ohara, H. Takeshita	dummy	0	2009/9/8/12:28:20(130.34.95.44)	真空引き　ベー先生承認済	2009/9/9/3:43:18(130.34.95.37)
-9	32	40	3586	itasaka	dummy	0	2009/9/8/13:53:46(130.34.95.17)	Ti/Au	2009/9/8/13:54:0(130.34.95.17)
-9	30	40	3586	itasaka	dummy	2	2009/9/8/13:54:39(130.34.95.17)	Ti/Au	2009/9/9/10:42:35(130.34.95.17)
9	4	10	6908	Y. Ohara, H. Takeshita	dummy	0	2009/9/8/12:28:20(130.34.95.44)	真空引き　ベー先生承認済
-9	10	18	6909	takeshita,oohara	dummy	0	2009/9/9/4:11:12(130.34.95.44)	田中先生	2009/9/9/4:25:36(130.34.95.44)
9	44	48	6908	Y. Ohara, Y. Kaiho	dummy	0	2009/9/9/4:12:48(130.34.95.37)	ベー先生 承認済、　Ta/Cu
10	0	17	6908	Y. Ohara, Y. Kaiho	dummy	0	2009/9/9/4:13:46(130.34.95.37)	真空引き ベー先生 承認済
10	17	28	6908	Ohara Yuki	dummy	0	2009/9/9/4:14:16(130.34.95.37)	Ta/Cu
9	10	11	6909	takeshita,oohara	dummy	0	2009/9/9/4:11:12(130.34.95.44)	田中先生
9	11	20	6909	takeshita,oohara	dummy	0	2009/9/9/4:27:13(130.34.95.44)	田中先生
9	22	32	3586	itasaka	dummy	2	2009/9/9/10:43:15(130.34.95.17)	Ti/Au
10	28	40	6936	Haubold	dummy	0	2009/9/9/12:24:12(130.34.95.43)	Au / Ti / Pt
11	20	44	6936	Haubold	dummy	0	2009/9/9/12:24:34(130.34.95.43)	Au / Ti / Pt
9	32	44	6937	makihata	dummy	0	2009/9/9/13:21:24(130.34.95.43)	0
-10	40	48	6937	makihata,hatakeyama	dummy	0	2009/9/9/13:30:20(130.34.95.43)	0	2009/9/9/13:30:26(130.34.95.43)
10	40	48	6937	makihata,hataleyama	dummy	0	2009/9/9/13:30:44(130.34.95.43)	Ti/Au
11	0	20	6937	makihata,hatakeyama	dummy	0	2009/9/9/13:31:20(130.34.95.43)	Ti/Au
-14	18	32	4830	kishi	dummy	2	2009/9/10/12:28:31(130.34.95.30)	W	2009/9/10/12:29:16(130.34.95.30)
-15	18	32	4830	kishi	dummy	2	2009/9/10/12:29:43(130.34.95.30)	W	2009/9/10/18:18:35(130.34.95.30)
14	18	36	6909	meshida	dummy	0	2009/9/10/16:25:22(130.34.95.44)	Ta/Cu
15	18	35	4830	kishi	dummy	2	2009/9/10/18:19:2(130.34.95.30)	W
-12	0	22	6908	noriki,ohara	dummy	2	2009/9/10/23:28:58(130.34.95.44)	cu/ta ベー先生承認	2009/9/10/23:29:42(130.34.95.44)
12	0	24	6908	noriki,ohara	dummy	2	2009/9/10/23:30:12(130.34.95.44)	cu/ta ベー先生承認
-16	18	36	6936	Haubold	dummy	0	2009/9/11/15:58:46(130.34.95.43)	Ti / Pt / Au	2009/9/15/9:0:13(130.34.95.43)
-15	35	45	6968	kuze	dummy	0	2009/9/11/18:5:36(130.34.88.130)	Cr/Au	2009/9/15/17:20:25(130.34.88.130)
-16	36	44	6937	matsuzaki	dummy	0	2009/9/11/20:22:15(130.34.95.43)	0	2009/9/16/12:23:24(130.34.95.43)
14	36	48	5810	moriwaki,kawai	dummy	0	2009/9/12/0:46:20(130.34.95.43)	Pt/Ti@300℃，川合先生承認済み
12	34	48	6937	makihata,nakano	dummy	0	2009/9/12/7:40:10(130.34.95.43)	Ti/Au
12	24	26	6908	noriki	dummy	0	2009/9/12/10:25:29(130.34.95.37)	0
12	26	28	6908	noriki	dummy	0	2009/9/12/10:55:0(130.34.95.37)	0
13	0	36	6908	Y. Ohara, Y. Kaiho	dummy	0	2009/9/12/23:59:11(130.34.95.37)	Ta/Cu 田中徹先生　承認済
-15	45	48	6909	kaiho.ohara	dummy	2	2009/9/13/20:53:37(130.34.95.44)	Ta/Cu, 田中先生承認済み	2009/9/15/20:7:35(130.34.95.44)
-16	0	18	6909	kaiho,ohara	dummy	2	2009/9/13/20:54:19(130.34.95.44)	Ta/Cu,田中先生承認済み	2009/9/15/20:7:42(130.34.95.44)
-17	18	32	4830	kishi	dummy	2	2009/9/14/12:37:7(130.34.95.30)	W	2009/9/17/8:47:6(130.34.95.44)
-24	24	34	7046	tatsuya kato	dummy	0	2009/9/14/16:42:56(130.34.192.103)	Ti	2009/9/15/14:12:10(130.34.192.103)
15	0	16	5810	moriwaki,kawai	dummy	0	2009/9/14/22:42:42(130.34.95.49)	Pt/Ti@300℃，川合先生承認済．
15	16	18	5810	moriwaki,kawai	dummy	0	2009/9/15/5:28:12(130.34.95.49)	Pt/Ti@300℃，川合先生承認済．
17	32	44	5810	moriwaki	dummy	0	2009/9/15/8:41:3(130.34.95.49)	Pt@300℃
16	20	22	6936	Haubold	dummy	0	2009/9/15/9:3:38(130.34.95.43)	remove Pt target
-18	18	32	4830	kishi	dummy	0	2009/9/15/11:18:35(130.34.95.30)	W	2009/9/17/17:12:32(130.34.95.30)
15	35	37	6968	kuze	dummy	0	2009/9/11/18:5:36(130.34.88.130)	Cr/Au
17	18	20	4830	kishi	dummy	2	2009/9/14/12:37:7(130.34.95.30)	W
-21	26	38	7281	takeda,takano	dummy	0	2009/9/17/13:10:3(130.34.77.72)	SiO2,伊野先生承認済	2009/9/20/21:20:18(130.34.77.72)
18	24	37	4830	kishi	dummy	2	2009/9/18/11:45:42(130.34.95.44)	w
29	18	20	6937	林(NIKKO)	dummy	2	2009/9/18/14:56:49(130.34.95.43)	Pt->２号機へ
-19	24	37	4830	kishi	dummy	0	2009/9/18/18:50:22(130.34.95.30)	W	2009/9/18/19:30:17(130.34.95.30)
-19	24	36	4830	kishi,murata	dummy	0	2009/9/18/19:30:55(130.34.95.30)	W,鈴木先生承認	2009/9/19/11:32:57(130.34.95.30)
24	18	30	6936	yasue	dummy	0	2009/9/18/20:33:17(130.34.95.43)	Al
19	24	26	4830	kishi,murata	dummy	0	2009/9/18/19:30:55(130.34.95.30)	W,鈴木先生承認
-22	26	38	4830	kishi,murata	dummy	0	2009/9/20/13:18:1(130.34.95.30)	W,鈴木先生承認	2009/9/22/11:27:56(130.34.95.30)
21	28	40	7281	takeda,takano	dummy	0	2009/9/20/21:20:56(130.34.77.72)	SiO2,伊野先生承認済
-24	30	48	6937	Hoeppner	dummy	2	2009/9/23/19:8:18(130.34.95.43)	Ta/Pt	2009/9/24/10:20:1(130.34.95.43)
25	18	32	5810	tomono	dummy	0	2009/9/24/10:30:45(130.34.95.49)	Al
-24	30	42	4830	kishi	dummy	0	2009/9/24/12:31:5(130.34.95.30)	W	2009/9/24/19:15:46(130.34.95.44)
24	30	41	4830	kishi	dummy	0	2009/9/24/12:31:5(130.34.95.30)	W
24	41	43	4830	kishi	dummy	2	2009/9/24/19:16:33(130.34.95.44)	W→Ta
25	32	34	5810	tomono	dummy	0	2009/9/25/10:11:46(130.34.95.43)	Al
-28	20	32	7281	takeda	dummy	0	2009/9/25/10:48:35(130.34.77.72)	SiO2	2009/9/25/18:0:36(130.34.77.72)
25	34	37	5810	tomono	dummy	0	2009/9/25/14:35:6(130.34.95.44)	Al
-29	22	34	7281	takeda	dummy	0	2009/9/25/18:1:12(130.34.77.72)	0	2009/9/25/18:1:52(130.34.77.72)
-29	22	34	7281	takeda	dummy	0	2009/9/25/18:2:20(130.34.77.72)	SiO2	2009/9/28/19:24:9(130.34.77.72)
28	18	28	6909	takeshita	dummy	0	2009/9/26/18:21:39(130.34.95.37)	Al
28	28	30	4830	kishi	dummy	2	2009/9/27/14:2:0(130.34.95.30)	Ta→W
28	30	40	4830	kishi	dummy	0	2009/9/27/14:2:46(130.34.95.30)	W@100℃
-29	32	44	7281	takeda	dummy	0	2009/9/28/19:24:55(130.34.77.72)	SiO2	2009/9/28/21:35:30(130.34.77.72)
-28	40	48	6937	makihata	dummy	2	2009/9/28/21:14:5(130.34.95.43)	0	2009/9/28/21:14:58(130.34.95.43)
-29	0	18	6937	makihata	dummy	1	2009/9/28/21:14:30(130.34.95.43)	0	2009/9/28/21:15:14(130.34.95.43)
28	40	45	6937	makihata	dummy	2	2009/9/28/21:14:5(130.34.95.43)	0
29	20	32	6937	makihata	dummy	1	2009/9/28/21:16:14(130.34.95.43)	真空引きテスト
-30	24	36	7281	takeda	dummy	0	2009/9/28/21:37:23(130.34.77.72)	SiO2	2009/9/30/0:57:3(130.34.77.72)
29	32	38	6937	makihata	dummy	0	2009/9/28/22:7:28(130.34.95.43)	0
30	32	44	7281	takeda	dummy	0	2009/9/30/0:57:35(130.34.77.72)	SiO2